CN209469054U - Platform architecture module and auxiliary layer module for process facility - Google Patents

Abstract

The utility model provides a kind of platform architecture module and the auxiliary layer module for process facility.Platform architecture module can in multilayer process facility construction auxiliary layer module, which includes: structural matrix is configured to have width in auxiliary layer, and the size of the width can occupy the space between support column；Support construction connects the structural matrix, which is suitable for bracket, hard tube pipeline, duct conduits and relevant connection and control；The supply of an at least gas or discharge tube；And at least a hard tube pipeline can supply, discharge or supply and discharge liquid, bulk material or liquid and bulk material, wherein the structural matrix, the support construction, an at least conduit, the hard tube pipeline and the relevant connection can be pre-fabricated integral unit with control, the integral unit is located at the position on the outside of the facility, and is transported in the facility and is assembled.

Description

Platform architecture module and auxiliary layer module for process facility

Technical field

The utility model illustrates a kind of platform architecture module and the auxiliary layer module for process facility.

Background technique

In general, most toilet's manufacturing building, such as semiconductor workshop, LCD (liquid crystal display) workshop or system Pharmaceutical factory room etc. needs to maintain clean or ultra-clean (dustless) state, it is ensured that manufacture the quality of product.These workshops generally also need Temperature, pressure and humidity are accurately controlled, or even sometimes needs accurately to inhibit to vibrate.

For aforementioned toilet's manufacturing building semiconductor workshop 100 described in Figure 11,12 and 13.Semiconductor workshop 100 Generally comprise main engine bed layer 110, lower than main engine bed layer 100 auxiliary layer 120 and main engine bed layer 110 and auxiliary layer 120 it Between concrete grill beam slab 130.Multi-disc original screen panel 112 supports manufacture tool 111 and can be defined in multi-disc original screen panel The space 113 of 112 lower sections, the various different engineerings as connection manufacture tool 111.In general, auxiliary layer 120 is according to function distinguishing Clean auxiliary layer 140 and equipment auxiliary layer 150.In cleaning auxiliary layer 140, various public utilities, hard tube pipeline, hose are assembled Pipeline, electrical wiring system, cable pipeline and/or duct frame 170 and relevant connector and valve.

In the usual course, construction period of construction semiconductor workshop 100 at the scene, labour and intensive assembly work is planned It is related to various industries in same space while constructs.The assembly work includes: for each in main engine bed layer 110 Main communal facility is arrived from multiple tie points (points of connection, POCs) in functional areas, executes main communal facility After the engineering of (construction of basic hard tube), communal facility and duct frame 170 are with can upborne 141 He of steel support platform For connecting the delivery pipe 142 of gas with various and liquid feeding hard tube 143, it is horizontally mounted to multiple positions together and is cleaning On support column 160 in auxiliary layer 140, and ensure whether assembly project can normally operate after the completion and beginning is pacified Most floors mounted in construction site, wherein a little floor on construction ground manually must be installed and be connected with each other.? In semiconductor workshop, most examples of common functional areas include chemical mechanical grinding (chemical mechanical Planarization:chemical and mechanical polishing, CMP) region, thermal oxide (oxidation: Oxidizing, OX) block, the region photolithography (photolithography:photolithography, LITHO), dry type Etch the region (dry etching:dry-etching, eTCH), wet etching (wet etching:wet etching, wET) Region, the film shaped area (thin film:a thin film, TF), metal deposit (metal deposition: Deposition of metal, MP) area, the area Plasma inpouring (ion implantation:ion-implanted, IMP) Domain, the area diffusion (diffusion:Balanced, DIFF).In addition, different types of auxiliary is set generally while traditional construction Standby position is in basic type tie point (base utilityPOC) and equipment auxiliary layer 150, such as pump (pumps), clack box (valve Manifoldboxes, VMB) or valve cabinet (valve manifold cabinets, VMC) and connection valve cabinet construction site Connection, and the ancillary equipment also must be contained within it is secondary piping (hook-up) assembly project in.In semiconductor Workshop, Thin Film Transistor-LCD (Thin film transistor liquid crystal display, TFT- LCD) workshop or Plasmia indicating panel (plasma displaypanel, PDP) workshop, basic pipeline engineering and mooring engineering (mooring operations), electric field conducting wire and cooling water hard tube engineering (electrical electronic field Lines and process cooling waterpipe), ultrapure waterpipe, argon, nitrogen, oxygen, helium, liquefied natural gas, waste water line (waste lines), vacuum tube and a variety of different dry-etching processes are applied in a variety of different workspaces, such as fluorine gas, Different wet corrosion agent pipelines and air-conditioning duct are all required.

In addition, in the construction of conventional semiconductors workshop, it is various even if there is extensive and high planning and construction management in detail Industry also faces the challenge of the time and available construction space that need to coordinate different technologies field mutually, and such as related consuming is various Labour, large-scale production power problem and the technology of industry are concentrated.It usually there is also some problems, the mutual association such as postponed Adjust, wiring and the interference of pipeline wiring, extra management of labour, work circumstances safe, the harm of welding fume, because efficient Construction leads to not the consistency for maintaining management quality.Accordingly, it is difficult to realize efficient construction and avoid of a high price prolong Late.

Utility model content

In the embodiment that the utility model illustrates, a kind of platform architecture module can the construction in multilayer process facility Auxiliary layer module, platform architecture module includes: structural matrix, is configured to have width, the ruler of the width in auxiliary layer The very little space occupied between support column；Support construction connects the structural matrix, which is suitable for bracket, hard tube Pipeline, duct conduits and relevant connection and control；The supply of an at least gas or discharge tube；And an at least hard tube pipeline, It can be supplied to, discharge or supply and discharge liquid, bulk material or liquid and bulk material.Structural matrix, the support construction, An at least conduit, the hard tube pipeline and the relevant connection can be pre-fabricated integral unit with control, this is whole Body unit is located at the position on the outside of the facility, and is transported in the facility and is assembled.

In another embodiment that the utility model illustrates, a kind of side of the construction auxiliary layer module in multilayer process facility Method includes: assembling multiple platform architecture modules in erecting yard, which is located at the outer of the process facility rigging position Side transports the platform architecture module to the process facility rigging position, moves those platform architecture modules in order to the process In predetermined rigging position in the auxiliary layer of facility, each platform architecture module is improved in order to the platform architecture module In rigging position, and other platform architecture modules of neighbouring at least one are connected, in the installation of each platform architecture module The process facility supporting structure, and the multiple hard tubes of connection, multiple conduits and multiple neighbouring platform architecture modules are fixed in part Pipeline.In this embodiment, each platform architecture module includes an at least structural matrix, is configured to have in auxiliary layer There is width, the size of the width can occupy the space between support column, and support construction connects the structural matrix, the structure Matrix be suitable for bracket, hard tube pipeline, duct conduits and it is relevant connection and control, an at least gas supply or discharge tube and Hard tube pipeline can be supplied to, discharge or supply and discharge liquid, bulk material or liquid and bulk material.

Detailed description of the invention

Fig. 1 is an embodiment according to the present utility model, and a kind of platform architecture module being mounted on auxiliary layer is being elevated Perspective view before to final position.

Fig. 2 is perspective view of Fig. 1 platform architecture module after being thus lifted to final position.

Fig. 3 is the sectional view of Fig. 2 platform architecture module.

Fig. 4 is the other embodiments illustrated according to the utility model, a kind of perspective view of platform architecture module.

Fig. 5 is a kind of perspective view of an embodiment of practical frame submodule, which is used to form Platform architecture module shown in Fig. 4.

Fig. 6 is the other embodiments illustrated according to the utility model, a kind of detailed perspective view of platform architecture module, explanation U-shaped expansion pipe is integrated into platform architecture module.

Fig. 7 is another embodiment illustrated according to the utility model, a kind of detailed perspective view of platform architecture module, explanation Multiple modular gas tool devices are set in advance in platform architecture module.

Fig. 8 is the embodiment illustrated according to the utility model, and a kind of other detailed perspective views of platform architecture module are said Bright multiple modularization bulk materials and liquid device are set in advance in platform architecture module.

Fig. 9 be a kind of multiple platform architecture modules that the utility model illustrates be configured in facility multiple main line Project Areas with The schematic diagram in multiple engineering sections.

Figure 10 is a kind of perspective diagram, and the embodiment illustrated according to the utility model illustrates multiple hard tube duct frames Submodule and structural matrix be assembled into the sequence of a platform architecture module and transport in process facility and subsequent assembly.

Figure 11,12 and 13 describe construction of the conventional semiconductors process factory at each visual angle of the prior art.

Specific embodiment

The utility model describes multiple embodiments, multiple auxiliary layer platforms of the support comprising complete structure itself and institute It is necessary to hard tube, conduit, cable and other multiple assembly projects, plurality of auxiliary layer platform and all necessary assemblers Journey can construction in advance and far from erecting yard, i.e. erecting yard can be multiple platform architecture modules, and multiple platform architectures Module, which can be combined into auxiliary layer engineering section and/or multiple platform architecture modules, can be combined into main line engineering section.This is auxiliary A layer engineering section is helped to connect the main line engineering section.The multiple platform architecture module is suitble to be assembled in corresponding to auxiliary layer work The width (such as 24 feet wide) in journey section, and the multiple platform architecture module can be connected, and make the structure in the engineering section Become complete (such as only three to seven connected platform architecture modules, the structure in engineering section being made to become complete).Platform structure Modeling block is configured in toilet's facility and meets the size of toilet's facility.The institute especially illustrated in the utility model It states and is understood that in multiple embodiments in relation to cleanroom structures, more specifically, the utility model is the multiple related silicon of description Wafer fabrication equipment, TFT-LCD manufacturing equipment, PDP process workshop, such as production facility, pharmaceutical factory or precision optics product.Cause This, the multiple platform architecture module that the utility model illustrates is suitble to produce in advance in toilet's facility itself, to remain high The cleanliness of grade, then transport assembly/construction scene other modules, process tool, construction equipment one are acted as it is last Secondary piping.In this embodiment, auxiliary layer construction can be simplified with the construction of secondary piping compared to the prior art, and be caused Comprising eliminating the overhead work of most of danger, saving the rule that are safe, simplifying complexity for spending cost, improving labour productive forces It draws, live hard tube construction and the effect of increase quality control.

The process workshop or workshop that the utility model illustrates are not limited to appoint using semiconductor process facility there are also general What is used for high performance intelligent building or high-performance heavy construction, comprising toilet's manufacturing facility using multilayer main engine bed layer/auxiliary Help the construction of channel type, the production of such as semiconductor wafer, multiple TFT-LCD or PDP devices, it is certain it is relevant to drug into Journey or the manufacture of high-precision optics, only enumerate numerical example.

As shown in Figure 1, the platform architecture module 10 of the embodiment illustrated according to the utility model, is raised to appropriate position It sets and is assembled into before being fixed on multiple support columns 160, be placed on the engineering section of auxiliary layer 120, and be suspended in lattice Sub- beam slab 130 or combinations thereof (being described more fully hereinafter in).Fig. 2 display platform constructing module 10 be raised to appropriate location it Afterwards.As shown in Fig. 1,2 and 3 (and Fig. 4 to Fig. 8 be more fully described other embodiments), platform architecture module 10 has The hard tube support construction 12 that is supported on structural matrix 14 and may include all hard tube pipelines 15, multiple air and gas Body supplying duct 18,19, multiple discharge tubes 16,17 and multiple accessories and multiple tie points 21, can be considered as in main engine bed 110 top of layer provides required related tool with the ancillary equipment below the mechanical floor of auxiliary region.

Multiple embodiments that the example of multiple typical off-site communal facilitys can be described according to the utility model, are incorporated into Into multiple modules.The example of the off-site communal facility includes:

Crucial waste water treatment system-concentration or the diluted waste water treatment system of industry, for example, hydrofluoric acid (HF), sulphur Sour (Sulfuric), sour (Acid), caustic alkali (caustic) manufacture product that tool manufactures etc. according to multiple processes.

The closed circuit system of crucial and general cooling water process.

The duct conduits system of general and corrosive multiple discharge management.

The ultra-high purity and high-purity system of special gas, such as: hydrogen, argon gas, nitrogen, helium, oxygen, gaseous mixture Body, extraordinary compressed air etc..

Cold coal.

Ultra-high purity water closed circuit system (UPW-ultra-high purity water closed loop Systems)/crucial and ultra-high purity water closed circuit system (Critical UPW critical and ultra-high purity water closed loop systems)。

For safeguarding workshop and handling the vacuum process and workshop wet type or dry vacuum suction system of chip.

Electronic system and monitoring-illumination, Building equipment control data management (BCD-building equipment Control data management), risk mangement wiring, (HAZ-Hazards management wiring), instrument and Control wiring system (instrument and control wiring systems), low and high electrical distribution cable (low and high power distribution cabling)。

Into the channel of valve and panel.

The small pump of small device component-, breaking panel, control panel, filter, valve, adjuster, local heat exchanger etc..

Selectable sprinkler system.

The platform architecture module 10a for another replacement that Fig. 4 is shown.In different multiple embodiments, multiple platform architectures Module, such as multiple modules 10 or 10a, can be via the multiple hard tube support constructions 12,12a being incorporated on structural matrix 14,12b It is formed with 12c.Alternatively, structural framing of the position above structural matrix 14 can be by more conventional other than hard tube support construction The assembling of respective structure component, to form one or more platform architecture modules without supplementary module out of the ordinary.It is used to support hard The basic configuration of one supplementary module of pipeline is shown in the example of Fig. 5 in more detail.This general configuration can be suitble to it is specific Application platform architecture module everywhere in repeat and can be changed by the demand of those skilled in the art, to accommodate required conduit Pipeline, cable and different supplies and discharge engineering.

In another alternative embodiment, substantially, platform architecture module can be configured to inverted construction and flat at this Setting structure matrix on the top of platform constructing module, in order to which the platform architecture module to be fixed on to the bottom surface of grid beam slab 130, Grid beam slab 130 is to support from the suspension member of top, rather than support from below, such as on the support columns.In another substitution Embodiment in, after structural matrix is thus lifted in the position in the engineering section of auxiliary layer 120, be configured to can and this The manufacture of platform architecture module separation and transport structure.In this alternative embodiment, it is fixed in the platform architecture module suitable When position after, structural matrix provisionally can be used or be removed, and structural matrix can both rest on the structural column of facility Accessory on or be suspended in grid beam slab 130.

As shown in figure 5, preferred hard tube support construction 12 has structural support posts comprising being provided by intermediate structure component Main frame 30 and lower frame 32, such as supporting member 33,34.Main frame 30 is specifically applied, for example, it is also possible to respectively by the One, it second constitutes, and can be connected together as the steel body structure with structural elements with third auxiliary frame 40,50,60, as It is intermediate member 41 and horizontal member 61.Therefore, the frame and supporting member can define main hard tube reception area 36 and auxiliary Help hard tube reception area 37.Multiple larger hard tube 70-73 can press from both sides 81 via hard tube appropriate, be assembled and be fixed on hard tube reception area 36,37.Furthermore, it is understood that side frame 53 is fixed on the top of lower frame 32 and by intermediate side frame and supporting member 51,52 It constitutes, it is possible to provide lesser a plurality of hard tube or a plurality of hose 74,75,76 assemble.In addition, hard tube support construction 12 also may include to A few deck 35 facilitates for constituting related personnel into the channel for operating or safeguarding, and can provide extremely in period of assembly A few pallet, is used to support cable and other elastic components.Hard tube support construction 12 is also configured to support multiple and different gas The conduit 16-19 of body supply and discharge, as shown in figs. 3 and 4.

In the example, above-mentioned the second auxiliary frame 50 positioned at upper part has multiple brackets, for receiving Electric wire or cable, or the hose along the structure setting support rod 62.In general, the type and purposes of hard tube pipeline are There is the application of different modes according to the assembly demand of the embodiment, but not is used to limit manufactured specific type or use On the way.In the example that one illustrates, hard tube 70 can be processing hydraulic pipe, and hard tube 71 can be ultrapure water hard tube, and hard tube 72 can To be that waste water hard tube or water discharging hard pipe and hard tube 73 can be hard tube (or processing air), deionized water supply hard tube or drink With water supply hard tube, a plurality of hard tube 74,75 can be for high-purity argon gas, nitrogen, oxygen, helium supply hard tube, freezing hard tube, Pressure hard tube or dry etching gases hard tube.

Other advantages and feature for multiple embodiments that the utility model illustrates can allow the description of Fig. 6,7 and 8.Implement one It may include the expansion of hard tube pipeline by the additional space that the framework of platform architecture module (such as appended drawing reference 10/10a) is protected in example Connector, such as ultrapure water (UPW) expansion pipe 20, as shown in Figure 6.Ultrapure water expansion pipe 20 meets positioned at ultrapure water hard tube pipe Flange 22 on road.It include directly institute from platform architecture module 10 via the expansion pipe for excluding to need to assemble individually at the scene A large amount of cost and time are saved in the expansion pipe needed.Protected space in platform architecture module 10 also may include more A gas control panel 24a, b, as shown in Figure 7.Gas control panel 24a, b connection gas line 25.Such device may include closing It is connected in multiple tie points, control and the closing valve and other volume control devices of the modular panels of each air tool.Together Sample, platform architecture module 10 includes MODULAR FLOW control device 26, for controlling and closing bulk material and liquid, is such as schemed Shown in 8, and connect the pipeline 27 of bulk material and liquid.Control panel 24a, b and MODULAR FLOW control device 26 can be from narrow Small channel or deck conveniently enter, and such deck 35 may also be configured to some of platform architecture module.It is additional multiple Tie point 28 can also be configured.

Another alternative embodiment include with one or more platform architecture modules connection multiple auxiliary layer engineerings section with Main line Project Areas, describes below.Fig. 9 describes the example of this embodiment.Facility 80 includes the platform structure in multiple engineering sections Each auxiliary layer engineering section 82a, the construction demand of 82b, 82c are completed in the 10c connection of modeling block.Platform architecture module can be matched It is set to size fully extended on the rigging position between multiple facility supporting structures.As described above, in support construction (support Column) between multiple platform architecture module 10c may conform to the size in each auxiliary layer engineering section.In addition to multiple auxiliary layer Project Areas Between except；Multiple platform architecture module 10d are used to supply multiple auxiliary layer engineerings section 82a, 82b, 82c to give the gas of discharge Main line 84 is supplied to liquid.The structure of the Project Areas platform architecture module 10d of multiple main lines, assembly with connect it is generally as above It is described.The specific facilities design figure of the introduction that those skilled in the art can illustrate according to the utility model, obtains required hard tube Pipeline, the connector of those modules and other assemblies.

10 construction of platform architecture module and assembly can refer to Figure 10 following description.

(A) the platform architecture module being assembled in erecting yard can be far from final rigging position.Especially, platform structure Platform architecture module can be assembled by the design drawing of modeling block in the environment of workshop type, and even required toilet is set It applies, therefore, the construction of workshop can be greatly simplified.In one embodiment, multiple frame 12,12a, 12b appropriate, with 12c be by Structural steel or stainless steel component manufacture.Multiple hard tubes folder appropriate can assemble and fix with multiple brackets hard tube pipeline 15 with it is multiple Conduit 16,17,18 and 19.Each hard tube and conduit have flange appropriate or other suitable adjacent modules in erecting yard Accessory.Control panel, valve, multiple tie points and other connectors can also be assembled in this erecting yard.Deck 35 and cable Pallet 42 can also be assembled in this erecting yard.All assembly projects can be realized on structure steel substrate 14, cause platform Constructing module can fully support all components.The inspection of multiple platform architecture modules in the pre-assembly described in the utility model Testing is to survey in different amounts, and such as pressure testing or the water pressure test, analysis test, instrument is checked and accepted or multiple point-to-point control dresses Set, compared to the prior art in non-modular system it is more easy.Before also being assembled in facility, multiple removable coverings Object is configured to cover the hard tube and catheter opening of all hard tubes and conduit, covering whole, to prevent pollutant；That is, leave into Before journey scene, all capped hard tubes, conduit and similar multiple holes can prevent pollutant during transportation.

As described above, on structural matrix 14 the platform architecture module of construction be positioned at hard tube duct frame 12 lower section or Positioned at the top of hard tube duct frame 12, or on structural matrix 14, the platform architecture module of construction can be used for transport and mounting clip Tool, after the assembly of facility is completed, platform architecture module can be removed.

The size of platform architecture module 10 for specific assembly can be the size corresponding to auxiliary layer engineering section.? In one embodiment, platform architecture module 10 can be constructed as 24 ' x, the 24 ' rectangular mold with three to seven modules of connection appropriate Block, in order to complete the engineering section of auxiliary plant functional layer.

(B) one or more platform architecture modules being assembled can be transported to erecting yard by transportation means appropriate.Example Such as, transport can be realized via the combination of platform trailer or railway carriage or platform trailer and railway carriage.

(C) once being transported to erecting yard, platform architecture module 10 is prepared for assembling.It transports and will be covered on more After the homologues such as a hard tube and multiple conduits are removed, the integrality of all connectors and support construction is checked.

(D) platform architecture module is moved to equipment position in advance, equips position position in advance in the auxiliary layer of process facility In engineering section in 120.In the pre-assembly, hand heap vehicle can be used to mobile platform constructing module or structural matrix 14 Can have universal wheel or wheel, in order to be used to mobile platform constructing module to preparatory equipment position.

(E) once being located in 120 engineering section of auxiliary layer, platform architecture module 10 can be in 120 engineering section of auxiliary layer Assembly, platform architecture module 10 can be raised to the rigging position of platform architecture module 10, for example, via hydraulic jack, rising Heavy-duty machine, fork truck etc..Once being increased to rigging position (as shown in Figure 1) in last assembly, structural matrix 14 can be via appropriate Connection structure be fixed on support column 160.It is more after multiple neighbouring platform architecture modules are fixed on respective rigging position A neighbouring platform architecture module can be functionally connected to via connectors such as multiple hard tubes, conduit and homologues.

Described in the utility model to utilize platform architecture module, auxiliary layer construction can be greatly simplified and more efficiently Management.Multiple effects include creation be pre-designed multiple platform architecture modules set ability, in order to the module can into The initial configuration construction stage of journey erecting yard completes before starting.Another effect is work of the simplified hard tube pipeline in erecting yard Journey, can reduce assembly demand, and via operation seem in toilet's construction support raise operation in hard tube pipeline and its Therefore detailed coordination between his technical field via the management for reducing duplication of labour power, reduces construction cost.In general, originally Multiple embodiments that utility model illustrates can increase the efficiency and safety of auxiliary layer toilet.

Then, the embodiment used according to multiple constructions that the utility model illustrates, includes the collection from platform architecture module It selects multiple built in advance platform architecture modules to use in conjunction, promotes management, the coordination between different technologies field of engineering construction, with And the cooperation needed for reducing between the multiple industries in workspace.In addition, needing to assemble respectively since the assembly of the module is omitted With fixed Suspension and bracket, so the assembly of the module can eliminate delay because of cooperation or electric wire or hard tube pipeline path Interference and there is the problem of supernumerary in the management that generates, and can effectively to prevent assembly unexpected.In addition, improved control quality Easily to be realized via the preparatory construction of off-site, potentially module can be built in less intensive program and it is less busy and Crowded workspace.

The utility model hereinbefore illustrated with preferred embodiment, so it will be appreciated by people skilled in the art that The multiple embodiment is only used for describing the utility model, and is not construed as limitation the scope of the utility model.It should be noted that It is, such as the variation and displacement equivalent with the multiple embodiment, should all be set as being covered by the scope of the utility model.Cause This, the protection scope of the utility model is when being subject to the range that claim defined.

Claims (14)

1. a kind of platform architecture module, can in multilayer process facility construction auxiliary layer module, which includes:

Structural matrix is configured to have width in auxiliary layer, and the size of the width can occupy between support column Space；

Support construction connects the structural matrix, which is suitable for bracket, hard tube pipeline, duct conduits and relevant company It connects and controls；

The supply of an at least gas or discharge tube；And

An at least hard tube pipeline, can supply, discharges or supply and discharge liquid, bulk material or liquid and bulk material, The wherein structural matrix, the support construction, an at least conduit, the hard tube pipeline and the relevant connection and control System can be pre-fabricated integral unit, which is located at the position on the outside of the facility, and is transported in the facility It is assembled.

2. platform architecture module according to claim 1, which is characterized in that multiple platform architecture modules can be combined into auxiliary Help a layer engineering section.

3. platform architecture module according to claim 1, which is characterized in that multiple platform architecture modules can be combined into master Line engineering section.

4. platform architecture module according to claim 2, which is characterized in that multiple platform architecture modules can be combined into master Line engineering section, and the auxiliary layer engineering section connects the main line engineering section.

5. platform architecture module according to claim 1, which is characterized in that the platform architecture module is configured in cleaning In the facility of room and meet the size of toilet's facility.

6. platform architecture module according to claim 1 also includes multiple removable coverings before assembling in facility It is configured to cover the hard tube and catheter opening of all hard tubes and conduit, covering whole, to prevent pollutant.

7. platform architecture module according to claim 1, which is characterized in that the platform architecture module is configured to multiple Fully extended size on the rigging position between facility supporting structure.

8. platform architecture module according to claim 1, also includes:

Multiple hard tubes and relevant multiple conduits and multiple catheter holders, are configured to support multiple hard tubes and multiple conduits；

Multiple hard tubes and catheter flange and multiple accessories are configured on each hard tube and each conduit, allow the hard tube with The conduit cooperates multiple neighbouring modules on rigging position；And

Multiple control panels, multiple valves and multiple tie points are configured to transmit in the hard tube and the conduit and control flow.

9. platform architecture module according to claim 1 also includes an at least deck assembly and an at least cable tray In the platform architecture module.

10. platform architecture module according to claim 1, which is characterized in that the platform architecture module is set in the process The size that can be configured to transport on local track in the adjacent domain applied, and the platform architecture module can be in the locality It is equipped on track.

11. platform architecture module according to claim 1, which is characterized in that the structural matrix is connected to the support construction Bottom.

12. platform architecture module according to claim 1, which is characterized in that the structural matrix is on the top of the support construction Portion.

13. platform architecture module according to claim 1, which is characterized in that the structural matrix is configured in the process After being assembled in facility, it can be removed from the support construction.

14. a kind of auxiliary layer module for process facility includes multiple platform architecture modules, can be combined into multiple auxiliary Help a layer engineering section, in which:

The platform architecture module includes:

Structural matrix is configured to have width in auxiliary layer, and the size of the width can occupy between support column Space；

Support construction connects the structural matrix, which is suitable for bracket, hard tube pipeline, duct conduits and relevant company It connects and controls；

The supply of an at least gas or discharge tube；And

An at least hard tube pipeline, can supply, discharges or supply and discharge liquid, bulk material or liquid and bulk material, The wherein structural matrix, the support construction, an at least conduit, the hard tube pipeline and the relevant connection and control System can be pre-fabricated integral unit, which is located at the position on the outside of the facility, and is transported in the facility It is assembled；And

Main line engineering section as claimed in claim 3, connects auxiliary layer engineering section.