CN209431855U - A kind of sintering purification furnace - Google Patents
A kind of sintering purification furnace Download PDFInfo
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- CN209431855U CN209431855U CN201822159884.1U CN201822159884U CN209431855U CN 209431855 U CN209431855 U CN 209431855U CN 201822159884 U CN201822159884 U CN 201822159884U CN 209431855 U CN209431855 U CN 209431855U
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- furnace body
- crucible
- furnace
- sintering
- cooling system
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Abstract
The utility model discloses a kind of sintering purification furnaces of sintered type, including furnace body, upper cover, lower cover and cooling system, the cooling system respectively with furnace body, upper cover and lower cover connection, reaction cavity is equipped in the furnace body, thermal-field device is equipped in reaction cavity, the thermal-field device includes for holding crucible and heating device with heated material, the crucible is externally provided with soakage device, insulating layer is equipped between the heating device and furnace body wall, the crucible activity is arranged and is connected with a transmission system, the reaction cavity is connected with a vacuum system, the cooling system is connected with transmission system；Material soaking time can be extended, keep furnace high-temperature；Make crucible that rotation may be implemented and move up and down, guarantees that material is heated evenly；Tearing furnace handling material and plant maintenance process open simultaneously, it can more rapid and convenient；The degree of purity of product is set to obtain bigger guarantee；Guarantee that thermal field and furnace heat are uniform, promote product qualities stability, increases service life of equipment.
Description
Technical field
The utility model relates to equipment for purifying technical field more particularly to a kind of sintering purification furnaces.
Background technique
Nineteen fifty-two high purity Quality Research enters an important turning point in development process, i.e., modern high purity material is true
Just generating and be able to the starting point of high speed development.Not only have that there is an urgent need to while also have research and raw to high purity material
Produce the objective condition of high purity material.High purity Quality Research and production is set to shoot ahead development, purity is continuously improved, research contents
The semiconductor materials such as germanium, silicon have been not limited solely to, but has gradually expanded to and joins high pure metal, nonmetallic, refractory metal, dilute perhaps
Soil, heat-resisting alloy have canopy compound, organo-metallic compound, high molecular material, various high purity reagents various in style etc..With
Purity be continuously improved, the Potential performance of substance is further disclosed, to hew out new application field.As optical-fibre communications,
High technology ceramics etc. are all that the raw material of acquisition ultra-high purity first is just able to start to walk and deeply develop.Meanwhile the hair of high purity material
Exhibition has also pushed the development of analysis and testing technology.Need few sample, highly sensitive, high-resolution, the test of quick large-scale precision
Instrument is more and more instead of classical chemical analysis.
Conventional sintering purification furnace design heating method is relatively simple, to controlling also mostly with the sealing of furnace body and choosing for temperature
It selects based on ideal thermal insulation material.It is domestic at present optimal to be not yet capable of providing that thermal field is uniform, temperature uniformly purifies high temperature
Vacuum drying oven design scheme.
Utility model content
In view of presently, there are above-mentioned deficiency, the utility model provides a kind of sintering purification furnace, can provide controllable equal
One thermal field keeps temperature uniform, obtains the stable high purity product of purity, while reducing consumption.
In order to achieve the above objectives, the embodiments of the present invention adopt the following technical scheme that
A kind of sintering purification furnace, the sintering purification furnace include furnace body, upper cover, lower cover and cooling system, the cooling system
System is connect with furnace body, upper cover and lower cover respectively, and reaction cavity is equipped in the furnace body, is equipped with thermal-field device, institute in reaction cavity
Stating thermal-field device includes for holding crucible and heating device with heated material, and the crucible is externally provided with soakage device, described
Insulating layer is equipped between heating device and furnace body wall, the crucible activity is arranged and is connected with a transmission system, the reaction cavity
It is connected with a vacuum system, the cooling system is connected with transmission system.
According to the one aspect of the utility model, pallet is equipped with below the crucible, the pallet is by support column and passes
Dynamic system is connected.Hollow design can be used in the support column, and centre is equipped with heat-proof device, and support column lower end uses water-cooling structure.
It is described at a certain distance from the heating device is arranged outside soakage device according to the one aspect of the utility model
The side and/or top and bottom of crucible is arranged in heating device.
According to the one aspect of the utility model, thermal insulation layer is equipped between the heating device and furnace body wall.
According to the one aspect of the utility model, chuck layer, the chuck layer connection cooling are provided in the furnace body wall
System.
According to the one aspect of the utility model, the furnace body is equipped with air inlet and air outlet.
According to the one aspect of the utility model, the vacuum system includes vacuum pump and pipeline, the pipeline and furnace body
Connection.
According to the one aspect of the utility model, the pipeline is equipped with cartridge filter.
According to the one aspect of the utility model, the position that the pipeline is connect with furnace body is equipped with cold-trap.
According to the one aspect of the utility model, the sintering purification furnace includes a control system, the control system point
Thermal-field device, cooling system, transmission system and vacuum system are not connected and controlled.
The utility model implement the advantages of: sintering purification furnace described in the utility model, including furnace body, upper cover, lower cover and
Cooling system, the cooling system are connect with furnace body, upper cover and lower cover respectively, and reaction cavity, reaction chamber are equipped in the furnace body
It is equipped with thermal-field device in vivo, the thermal-field device includes for holding crucible and heating device with heated material, the crucible
Be externally provided with soakage device, be equipped with insulating layer between the heating device and furnace body wall, crucible activity setting and with a power train
System is connected, and the reaction cavity is connected with a vacuum system, and the cooling system is connected with transmission system；It is arranged outside crucible equal
Thermal is distributed even heat；It is externally provided with insulating layer and thermal insulation layer in crucible, material soaking time can be extended, keeps furnace
Interior high temperature；By the way that transmission system is arranged, makes crucible that rotation may be implemented and move up and down, guarantee that material is heated evenly；Exist simultaneously
Tear furnace handling material and plant maintenance process open, it can more rapid and convenient；It is constantly passed through indifferent gas simultaneously by design vacuum system
Body guarantees also to make the degree of purity of product obtain bigger guarantee for positive pressure in furnace；By designing cooling system, guarantee thermal field and furnace
Interior heat is uniform, promotes product qualities stability, increases service life of equipment；Indifferent gas is filled with toward inside cavity in producing initial stage
Body (such as argon gas), and cooperate the multiple alternate run of vacuum system, it is sufficiently displaced from out foreign gas, guarantees that internal system environment is pure
Only；Inert gas or other specific gas such as chlorine are passed through in system again before production, keeps internal system in production process
Positive pressure inert atmosphere.
Detailed description of the invention
In order to illustrate more clearly of the technical scheme in the embodiment of the utility model, will make below to required in embodiment
Attached drawing is briefly described, it should be apparent that, the drawings in the following description are merely some embodiments of the present invention,
For those of ordinary skill in the art, without creative efforts, it can also be obtained according to these attached drawings
Other attached drawings.
Fig. 1 is a kind of sintering purification furnace structural schematic diagram described in the utility model.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
As shown in Figure 1, a kind of sintering purification furnace, the sintering purification furnace includes furnace body 1, upper cover 2, lower cover 3 and cooling system
System 4, the cooling system is connect with furnace body, upper cover and lower cover respectively, and reaction cavity is equipped in the furnace body, is set in reaction cavity
There is thermal-field device, the thermal-field device includes for holding crucible 6 and heating device 7 with heated material 5, the crucible peripheral hardware
Have soakage device 8, be equipped with insulating layer 9 between the heating device 7 and furnace body wall, crucible activity setting and with a transmission system
10 are connected, and the reaction cavity is connected with a vacuum system 11, and the cooling system 4 is connected with transmission system 10.Actually answering
In, the cooling system is cooling water system, contains water pump, air-cooled unit, water tank, pipeline and instrument valve, cold to need
But component provides 30 ± 0.5 DEG C of thermostatical circulating water, guarantees that thermal field and in-furnace temperature are uniform.
In practical applications, pallet 12 is equipped with below the crucible, the pallet passes through support column 13 and transmission system 10
It is connected.Crucible pallet and support column require water cooling, and crucible pallet can follow support column rotation and rise and fall, by support column
Lower setting transmission system is realized.Furnace body is fixed, and upper cover up and down and can rotate when tearing furnace open；Lower cover can up and down, decline
Crucible is driven to translate out material to come when limiting to bottom.The driven Design can make to load and unload material saving time and cost of labor.
In practical applications, at a certain distance from the heating device is arranged outside soakage device, the heating device setting
In the side and/or top and bottom of crucible.The heater of heating device is segment design, is generally located on side, can examine when necessary
Worry designs heating component at the bottom or top.Keep reaction chamber body temperature equal by the heating device that operating system controls each section
It is even.
In practical applications, thermal insulation layer 14 is equipped between the heating device and furnace body wall.
In practical applications, chuck layer is provided in the furnace body wall, the chuck layer connects cooling system.
In practical applications, the furnace body is equipped with air inlet 16 and gas outlet 17.
In practical applications, the vacuum system includes vacuum pump 18 and pipeline 19, and the pipeline is connected to furnace body.
In practical applications, the pipeline is equipped with cartridge filter 20.
In practical applications, the position that the pipeline is connect with furnace body is equipped with cold-trap 21.
In practical applications, the sintering purification furnace includes a control system, and the control system is separately connected and controls
Thermal-field device, cooling system, transmission system and vacuum system.Instrument valve, transmission system, high-precision are connected by operating system
Power cabinet and PLC control cabinet realize and acquire to instrumented data that valve control, transmission controls and the accurate control of electric heating sectional
System.
The utility model implement the advantages of: sintering purification furnace described in the utility model, including furnace body, upper cover, lower cover and
Cooling system, the cooling system are connect with furnace body, upper cover and lower cover respectively, and reaction cavity, reaction chamber are equipped in the furnace body
It is equipped with thermal-field device in vivo, the thermal-field device includes for holding crucible and heating device with heated material, the crucible
Be externally provided with soakage device, be equipped with insulating layer between the heating device and furnace body wall, crucible activity setting and with a power train
System is connected, and the reaction cavity is connected with a vacuum system, and the cooling system is connected with transmission system；It is arranged outside crucible equal
Thermal is distributed even heat；It is externally provided with insulating layer and thermal insulation layer in crucible, material soaking time can be extended, keeps furnace
Interior high temperature；By the way that transmission system is arranged, makes crucible that rotation may be implemented and move up and down, guarantee that material is heated evenly；Exist simultaneously
Tear furnace handling material and plant maintenance process open, it can more rapid and convenient；It is constantly passed through indifferent gas simultaneously by design vacuum system
Body guarantees also to make the degree of purity of product obtain bigger guarantee for positive pressure in furnace；By designing cooling system, guarantee thermal field and furnace
Interior heat is uniform, promotes product qualities stability, increases service life of equipment；Indifferent gas is filled with toward inside cavity in producing initial stage
Body (such as argon gas), and cooperate the multiple alternate run of vacuum system, it is sufficiently displaced from out foreign gas, guarantees that internal system environment is pure
Only；Inert gas or other specific gas such as chlorine are passed through in system again before production, keeps internal system in production process
Positive pressure inert atmosphere.
Above description is only a specific implementation of the present invention, but the protection scope of the utility model is not limited to
In this, any those skilled in the art is in technical scope disclosed by the utility model, the change that can readily occur in
Change or replace, should be covered within the scope of the utility model.Therefore, the protection scope of the utility model should be with described
Subject to scope of protection of the claims.
Claims (10)
1. a kind of sintering purification furnace, the sintering purification furnace includes furnace body, upper cover, lower cover and cooling system, the cooling system
It is connect respectively with furnace body, upper cover and lower cover, which is characterized in that be equipped with reaction cavity in the furnace body, be equipped with heat in reaction cavity
Field device, the thermal-field device include for holding crucible and heating device with heated material, and the crucible is externally provided with soaking
Device is equipped with insulating layer between the heating device and furnace body wall, the crucible activity is arranged and is connected with a transmission system, described
Reaction cavity is connected with a vacuum system, and the cooling system is connected with transmission system.
2. sintering purification furnace according to claim 1, which is characterized in that be equipped with pallet, the pallet below the crucible
It is connected by support column with transmission system.
3. sintering purification furnace according to claim 1, which is characterized in that the heating device is arranged one outside soakage device
At set a distance, the side and/or top and bottom of crucible is arranged in the heating device.
4. sintering purification furnace according to claim 1, which is characterized in that be equipped between the heating device and furnace body wall heat-insulated
Layer.
5. sintering purification furnace according to claim 1, which is characterized in that chuck layer is provided in the furnace body wall, it is described
Chuck layer connects cooling system.
6. sintering purification furnace according to claim 1, which is characterized in that the furnace body is equipped with air inlet and air outlet.
7. sintering purification furnace according to one of claims 1 to 6, which is characterized in that the vacuum system includes vacuum pump
And pipeline, the pipeline are connected to furnace body.
8. sintering purification furnace according to claim 7, which is characterized in that the pipeline is equipped with cartridge filter.
9. sintering purification furnace according to claim 7, which is characterized in that the position that the pipeline is connect with furnace body is equipped with cold
Trap.
10. sintering purification furnace according to claim 7, which is characterized in that the sintering purification furnace includes a control system,
The control system is separately connected and controls thermal-field device, cooling system, transmission system and vacuum system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822159884.1U CN209431855U (en) | 2018-12-21 | 2018-12-21 | A kind of sintering purification furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822159884.1U CN209431855U (en) | 2018-12-21 | 2018-12-21 | A kind of sintering purification furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209431855U true CN209431855U (en) | 2019-09-24 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822159884.1U Active CN209431855U (en) | 2018-12-21 | 2018-12-21 | A kind of sintering purification furnace |
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| CN (1) | CN209431855U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113248114A (en) * | 2021-06-21 | 2021-08-13 | 中国原子能科学研究院 | Crucible, cover body for cavity of crucible and material processing equipment |
-
2018
- 2018-12-21 CN CN201822159884.1U patent/CN209431855U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113248114A (en) * | 2021-06-21 | 2021-08-13 | 中国原子能科学研究院 | Crucible, cover body for cavity of crucible and material processing equipment |
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