CN209411316U - A kind of silicon wafer box rotating device - Google Patents
A kind of silicon wafer box rotating device Download PDFInfo
- Publication number
- CN209411316U CN209411316U CN201822185632.6U CN201822185632U CN209411316U CN 209411316 U CN209411316 U CN 209411316U CN 201822185632 U CN201822185632 U CN 201822185632U CN 209411316 U CN209411316 U CN 209411316U
- Authority
- CN
- China
- Prior art keywords
- silicon wafer
- magazine
- wafer box
- bottom plate
- clamping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 40
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 40
- 239000010703 silicon Substances 0.000 title claims abstract description 40
- 230000008878 coupling Effects 0.000 claims description 4
- 238000010168 coupling process Methods 0.000 claims description 4
- 238000005859 coupling reaction Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 abstract description 8
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 235000008216 herbs Nutrition 0.000 abstract description 2
- 210000002268 wool Anatomy 0.000 abstract description 2
- 235000012431 wafers Nutrition 0.000 description 23
- 238000005516 engineering process Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a kind of silicon wafer box rotating devices, including the fixed bottom plate of magazine, rotary shaft, servo motor and clamping device, the rotary shaft is fixed in the middle part of the fixed bottom plate of magazine, drives rotary shaft rotation by servo motor, so that the fixed bottom plate of magazine is overturn；The clamping device is located at the both ends of the fixed bottom plate of magazine, and when silicon wafer box is sent into below the fixed bottom plate of magazine, silicon wafer box is clamped fixation by clamping device, and is overturn together with the fixed bottom plate of magazine.Silicon wafer box is fixed on the fixed bottom plate of magazine by the device by clamping plate, and is driven by rotary shaft so that silicon wafer box is overturn, and the utilization of the technique requirement of making herbs into wool silicon wafer box rotation is met；The apparatus structure is compact, stable, at low cost, the service life is high, has been verified in actual production.
Description
Technical field
The utility model relates to solar silicon wafers to produce and process device, especially a kind of silicon wafer box rotating device.
Background technique
Silicon wafer box, which is rotated in silicon wafer production technology, very extensive utilization, as process for etching needs to revolve silicon wafer box
Turn, so the design of silicon wafer box rotating mechanism influences manufacturing technique requirent and equipment capacity.
In the prior art, it relies primarily on and manually carries out overturning assembly, inefficiency, waste of manpower, and be easy to cause silicon
The breakage of piece.
Utility model content
Technical problem to be solved in the utility model is in view of the deficiencies of the prior art, to provide a kind of motorisation unit,
Realize the automatic turning to silicon wafer box.
In order to solve the above-mentioned technical problem, the utility model discloses a kind of silicon wafer box rotating device, including magazine are solid
Determine bottom plate, rotary shaft, servo motor and clamping device；The fixed bottom plate top two sides of the magazine are equipped with accessory plate, rotary shaft
After accessory plate, end is bolted on accessory plate, so that the rotary shaft is fixed on the fixed bottom plate of magazine
Middle part drives rotary shaft rotation by servo motor, so that the fixed bottom plate of magazine is overturn；The clamping device is located at
The both ends of the fixed bottom plate of magazine, when silicon wafer box is sent into below the fixed bottom plate of magazine, clamping device presss from both sides silicon wafer box
It fastens, and is overturn together with the fixed bottom plate of magazine.
Wherein, the clamping device includes clamping cylinder and clamping plate, and clamping cylinder is located at the both ends of the fixed bottom plate of magazine,
The top of clamping plate and the driving axis connection of clamping cylinder drive clamping plate to move horizontally by clamping cylinder.
Further, the end of the clamping plate is equipped with baffle ring, and when clamping board clamping silicon wafer box, baffle ring is caught in silicon wafer
In the notch of magazine side wall, guarantee that magazine is clamped completely.
Preferably, the rotation outer shaft sleeve has rotating shaft holder, and rotating shaft holder is installed by the rotation fixed plate at top
On the rack；The rotation fixed plate is equipped with the mounting hole fixed for rotating shaft holder of different height.
Preferably, the rotary shaft is connected by shaft coupling with servo motor output shaft.
The utility model has the advantages that
Silicon wafer box is fixed on the fixed bottom plate of magazine by the utility model magazine rotating device by clamping plate, and is passed through
The utilization that rotary shaft drives the technique for meeting the rotation of making herbs into wool silicon wafer box so that silicon wafer box is overturn to require；The device knot
Structure is compact, stable, at low cost, the service life is high, has been verified in actual production, and equipment fragment rate is reduced to 0.02%,
Motor-driven rate can be used 100% on guide card machine.
Detailed description of the invention
The utility model is done with reference to the accompanying drawings and detailed description and is further illustrated, the utility model
Above-mentioned and/or otherwise advantage will become apparent.
Fig. 1 is the schematic perspective view of the rotating device；
Fig. 2 is the main view of the rotating device；
Fig. 3 is the top view of the rotating device.
Specific embodiment
According to following embodiments, the present invention may be better understood.
Structure depicted in Figure of description, ratio, size etc., only to cooperate the revealed content of specification, with
Understand for those skilled in the art and read, is not intended to limit the utility model enforceable qualifications, therefore does not have skill
Essential meaning in art, the modification of any structure, the change of proportionate relationship or the adjustment of size are not influencing the utility model institute
Under the effect of capable of generating and the purpose that can reach, it should all still fall in what the revealed technology contents of the utility model can be covered
In range.Meanwhile cited such as "upper", "lower", "front", "rear", " centre " term in this specification, it is merely convenient to chat
That states is illustrated, rather than to limit the enforceable range of the utility model, relativeness is altered or modified, without substantive change
Under more technology contents, when being also considered as the enforceable scope of the utility model.
As shown in Figures 1 to 3, the silicon wafer box rotating device include the fixed bottom plate 5 of magazine, rotary shaft 4, servo motor 3 with
And clamping device；The fixed 5 top two sides of bottom plate of magazine are equipped with accessory plate, and after rotary shaft 4 passes through accessory plate, end is solid by bolt
It is fixed to be fixed in the middle part of bottom plate 5 so that the rotary shaft 4 is fixed on magazine on the auxiliary board, pass through servo motor 3 and drives rotary shaft
4 rotations, so that the fixed bottom plate 5 of magazine is overturn；The clamping device includes clamping cylinder 6 and clamping plate 7,8, is clamped
Cylinder 6 is located at the both ends of the fixed bottom plate 5 of magazine, the top of clamping plate 7,8 and the driving axis connection of clamping cylinder 6, passes through clamping
Cylinder 6 drives clamping plate 7,8 to move horizontally, when silicon wafer box 9, which is sent into magazine, fixes 5 lower section of bottom plate, the driving folder of clamping cylinder 6
Tight plate 7,8 is close to be clamped fixation for silicon wafer box 9；The end of the clamping plate 7,8 is equipped with baffle ring 11, when clamping plate 7,8
When clamping silicon wafer box 9, baffle ring 11 is caught in the notch of 9 side wall of silicon wafer box.
Rotating shaft holder 2 is cased with outside rotary shaft 4, rotating shaft holder 2 is mounted on rack by the rotation fixed plate 1 at top
On, rotation fixed plate 1 is equipped with the different mounting hole of several height, and the rotating shaft holder 2 passes through mounting hole and is fixed on rotation
In fixed plate 1；Rotary shaft 4 is connected by shaft coupling 10 with 3 output shaft of servo motor.
The course of work of the rotating device are as follows: when silicon wafer box 9 is admitted to magazine fixation 5 lower section of bottom plate, the folder of left and right two
Tight cylinder 6, which retracts at the same time, drives clamping plate 7, clamping plate 8 to clamp magazine.The rotation of servo motor 3 passes through shaft coupling after magazine clamps
10 drive rotary shaft 4 to rotate, and rotary shaft 4 drives the bottom plate 5 that is fixedly clamped to rotate 90 °, to realize that magazine is overturn.
The utility model provides the thinking and method of a kind of silicon wafer box rotating device, implements the technical solution
There are many method and approach, and the above is only the preferred embodiment of the utility model, it is noted that for the art
For those of ordinary skill, without departing from the principle of this utility model, several improvements and modifications can also be made, these
Improvements and modifications also should be regarded as the protection scope of the utility model.Each component part being not known in the present embodiment can be used existing
Technology is realized.
Claims (5)
1. a kind of silicon wafer box rotating device, which is characterized in that including magazine fixed bottom plate (5), rotary shaft (4), servo motor
(3) and clamping device；Fixed bottom plate (5) the top two sides of the magazine are equipped with accessory plate, after rotary shaft (4) passes through accessory plate,
End is bolted on accessory plate, so that the rotary shaft (4) to be fixed on to the middle part of magazine fixed bottom plate (5), is led to
Servo motor (3) driving rotary shaft (4) rotation is crossed, so that magazine fixed bottom plate (5) is overturn；The clamping device position
In the both ends of magazine fixed bottom plate (5), when silicon wafer box (9) are sent into below magazine fixed bottom plate (5), clamping device is by silicon wafer
Magazine (9) is clamped fixation.
2. silicon wafer box rotating device according to claim 1, which is characterized in that the clamping device includes clamping cylinder
(6) and clamping plate (7,8), clamping cylinder (6) are located at the both ends of magazine fixed bottom plate (5), the top of clamping plate (7,8) and clamping
The driving axis connection of cylinder (6) is moved horizontally by clamping cylinder (6) driving clamping plate (7,8).
3. silicon wafer box rotating device according to claim 2, which is characterized in that the end of the clamping plate (7,8) is set
There are baffle ring (11), when clamping plate (7,8) clamp silicon wafer box (9), baffle ring (11) is caught in the notch of silicon wafer box (9) side wall
It is interior.
4. silicon wafer box rotating device according to claim 2 or 3, which is characterized in that be cased with rotation outside the rotary shaft (4)
Turn bearing block (2), rotating shaft holder (2) is mounted on the rack by the rotation fixed plate (1) at top；The rotation fixed plate
(1) mounting hole fixed for rotating shaft holder (2) equipped with different height.
5. silicon wafer box rotating device according to claim 4, which is characterized in that the rotary shaft (4) passes through shaft coupling
(10) it is connected with servo motor (3) output shaft.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822185632.6U CN209411316U (en) | 2018-12-20 | 2018-12-20 | A kind of silicon wafer box rotating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822185632.6U CN209411316U (en) | 2018-12-20 | 2018-12-20 | A kind of silicon wafer box rotating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209411316U true CN209411316U (en) | 2019-09-20 |
Family
ID=67939233
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822185632.6U Active CN209411316U (en) | 2018-12-20 | 2018-12-20 | A kind of silicon wafer box rotating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209411316U (en) |
-
2018
- 2018-12-20 CN CN201822185632.6U patent/CN209411316U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: A silicon wafer material box rotating device Granted publication date: 20190920 Pledgee: Bank of Hangzhou Limited by Share Ltd. Nanjing branch Pledgor: NANJING TOPSTEK AUTOMATION EQUIPMENT CO.,LTD. Registration number: Y2024980019717 |