CN209408214U - It can transport the twin grinder of lapping liquid - Google Patents
It can transport the twin grinder of lapping liquid Download PDFInfo
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- CN209408214U CN209408214U CN201821824274.2U CN201821824274U CN209408214U CN 209408214 U CN209408214 U CN 209408214U CN 201821824274 U CN201821824274 U CN 201821824274U CN 209408214 U CN209408214 U CN 209408214U
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Abstract
The utility model discloses a kind of twin grinders of transportable lapping liquid, it is related to a kind of grinder, aim to solve the problem that lapping liquid can not be uniformly delivered between upper mill body and lower mill body by lapping liquid transfer passage in the prior art, the problem of easily causing the technology that workpiece is scratched, its drip irrigation device includes rack, cylinder, upper mill body, lower mill body and liquid-storing box, it is equipped with fluid chamber in lower mill body, further includes input module, equal liquid component and output precision in upper mill body is set;Input module pumps the lapping liquid in liquid-storing box to equal liquid component, lapping liquid is evenly supplied between upper mill body and lower mill body by equal liquid component, lapping liquid is fallen into the lower intracorporal fluid chamber of mill, lapping liquid is drawn back in liquid-storing box finally by output precision, utilize the uniformly lapping liquid between lower mill body and upper mill body respectively, it can cool down and lubricate to workpiece rapidly in grinding work-piece, reduce a possibility that workpiece is scratched, and then reduce the case where workpiece quality reduces.
Description
Technical field
The utility model relates to a kind of grinders, more specifically, it relates to a kind of twin grinding of transportable lapping liquid
Machine.
Background technique
Twin grinder (double-lapping machine) is mainly used for the parallel crystal in two sides or other machinery zero
Part carries out twin grinding, the processing of especially thin fragile material.Mechanical seal ring, potsherd, cylinder suitable for various materials
Piston ring, oil pump blade bearing end face and silicon, germanium, quartz crystal, graphite, sapphire, optics crystal, glass, lithium niobate, hard
The plane lapping of the metal materials such as alloy, stainless steel, powder metallurgy and polishing;Its working principle is that: cylinder pushes top lap
It moves downward, upper and lower abrasive disk makees opposite direction rotation, and workpiece had not only revolved in carrier but also the wandering star of rotation moves.Grinding
The small not disfiguring workpiece of resistance, and two sides Even Grinding high production efficiency.There is grating thickness control system, the product after processing is thick
It is controllable to spend tolerance.The device of twin grinder includes two abrasive disks, pleasure boat, four motors, sun gear, refacing machine etc..
Authorization Notice No. is that the Chinese patent of CN205184533U discloses one kind for metal powder metallurgy work pieces process
Twin grinder, including upper mill body and lower mill body are fixed with upper millstone in the upper mill body, are fixed with down in the lower mill body
Mill, the upper surface of the lower millstone are additionally provided with sun gear and multiple planetary gears, and the planetary gear is equipped with part fixation hole,
It further include the first thermometer, second temperature meter, condensate tank(trap), cooling device and controller, the cooling device is arranged described cold
In solidifying slot, the outlet end of the condensate tank(trap) is connected by first pipe with the atrium of the upper mill body, and arrival end passes through
Second pipe is connected with a hydrops case, wherein the middle position of the upper mill body, the hydrops is arranged in the atrium
Housing-case is located at the outside of the lower mill body and first thermometer and second temperature meter are separately positioned on the first pipe
On second pipe, and first thermometer and second temperature are also connected with the controller, wherein the controller is also
It is connected with the cooling device.
The prior art and is injected into lapping liquid transfer passage on sun gear by atrium, is carried out to workpiece cold
But, in actual work, lapping liquid flows outward from the central part of lower mill body, easily causes lapping liquid and is unevenly distributed, by
In in grinding work-piece, lapping liquid can play the role of lubrication and cooling to workpiece, grind if conveyed not in time to workpiece
Liquid, upper mill body and lower mill body are easy to scratch workpiece, influence workpiece surface quality, have much room for improvement.
Utility model content
In view of the deficienciess of the prior art, the purpose of this utility model is to provide a kind of the two-sided of transportable lapping liquid
Grinder has the advantage of uniformly conveying lapping liquid.
To achieve the above object, the utility model provides following technical solution:
A kind of twin grinder of transportable lapping liquid, including rack, the cylinder being arranged on the rack and cylinder piston head
The upper mill body of connection, the lower mill body being arranged on the rack and liquid-storing box, the lower mill body is interior to be equipped with fluid chamber, further includes and deposits
The input module of liquid case connection is arranged in upper mill body for the equal liquid component of uniformly distributed liquid and for by grinding in fluid chamber
The defeated output precision for restoring liquid case of grinding fluid.
By using above-mentioned technical proposal, in grinding work-piece, input module pumps the lapping liquid in liquid-storing box to equal
Lapping liquid is evenly supplied between upper mill body and lower mill body by liquid component, equal liquid component, and lapping liquid falls into the lower intracorporal appearance of mill again
In sap cavity, lapping liquid is drawn back in liquid-storing box finally by output precision, can be moved in circles with this, reuses lapping liquid,
Save the cost can give rapidly workpiece in grinding work-piece using the uniformly lapping liquid between lower mill body and upper mill body respectively
Cooling and lubrication reduce a possibility that workpiece is scratched, and then reduce the case where workpiece quality reduces.
Further, the input module includes the drawing liquid pump that liquid-storing box side is arranged in, the connection of liquid-storing box water outlet
Inlet tube, the perfusion tube connecting with the water outlet of drawing liquid pump, the inlet tube are connect far from one end of liquid-storing box with drawing liquid pump, institute
It states perfusion tube and is connected with tee tube far from one end of drawing liquid pump, two outlets of the tee tube are respectively connected with hose, the hose
It is equipped with valve;
The upper mill body is connected with linkage disk far from the side of lower mill body, and the linkage disk is set close to the side of cylinder pressure head
There is annular groove, two hoses extend in annular groove far from one end of support plate.
By using above-mentioned technical proposal, when needing lapping liquid, using drawing liquid pump by the lapping liquid in liquid-storing box along
Inlet tube and perfusion tube are transported in hose, open valve, and lapping liquid is transported in annular groove by hose, are driven and are joined by upper mill body
When Moving plate rotates, hose, can be with smooth delivery of power lapping liquid with this so as to which lapping liquid to be uniformly delivered in annular groove.
Further, the equal liquid component includes that several are evenly arranged on linkage even liquid pipe of the disk far from cylinder side, described
Even liquid pipe is connected to the slot bottom of annular groove;
The upper mill body, which is equipped with, is evenly equipped with several infusion holes, and the even liquid pipe protrudes into infusion far from one end of linkage disk
In hole.
Pass through even liquid pipe after lapping liquid flows into annular groove by using above-mentioned technical proposal and be delivered to across infusion hole
Between upper mill body and lower mill body, workpiece can be moistened by lapping liquid uniformly respectively between upper mill body and lower mill body with this
Sliding and cooling reduces a possibility that workpiece is scratched by upper mill body and lower mill body, advantageously reduces a possibility that reducing workpiece quality.
Further, the hose is communicated with accommodating case far from one end of tee tube, is equipped with cavity, institute in the accommodating case
It states accommodating case to be located in annular groove, the accommodating case is evenly equipped with several through-holes far from one end of hose, and the accommodating case leans on near-ring
The side of slot slot bottom is evenly equipped with several bristles.
By using above-mentioned technical proposal, lapping liquid is delivered in annular groove when for a long time, easy in annular groove there are residue, shadows
It rings lapping liquid uniformly to convey to even liquid pipe, so lapping liquid is delivered in accommodating case by hose, then be exported by through-hole to annular groove
Interior, when annular groove rotation, the bristle of accommodating case bottom can be cleared up the slot bottom of annular groove, can be reduced in annular groove and be stayed with this
There is residue, reduces influence of the residue to conveying lapping liquid conveying, be conducive to lapping liquid smooth delivery of power.
Further, the piston rod of the cylinder is equipped with support plate, and the two sides of the support plate are equipped with location hole, two institutes
It states hose to extend across the upward mill body side of location hole, the hose is connected with clip, the clip far from one end of linkage disk
Side wall and support plate far from linkage disk side contradict.
By using above-mentioned technical proposal, after bristle is used for a long time, bristle generates abrasion, can not be successfully the slot to annular groove
Bottom is cleared up, and clip is unlocked, and the integral position of hose is mobile to annular groove side, can be moved down accommodating case with this,
The groove bottom wall for reducing bristle and annular groove generates gap, and bristle is conducive to prolong so as to smoothly clear up the slot bottom of annular groove
The long use duration to bristle, reduces a possibility that there are residues in annular groove.
Further, the accommodating case is equipped with the sliding slot of T-type close to the side wall of annular groove cell wall, and sliding connects in the sliding slot
It is connected to sliding block, the sliding block is evenly equipped with several bristles far from the side of accommodating case.
By using above-mentioned technical proposal, when needing to clear up annular groove side wall, sliding block is inserted into sliding slot, using on sliding block
Bristle clear up annular groove side wall, a possibility that there are residues is further reduced in annular groove with this.
Further, depth of the fluid chamber close to efferent duct side is successively decreased to the side far from efferent duct;It is described defeated
Component includes the efferent duct that both ends are connected to fluid chamber, liquid-storing box respectively out, and the efferent duct is equipped with close to one end of fluid chamber
Filter layer.
By using above-mentioned technical proposal, when lapping liquid is fallen into fluid chamber, the difference in height at fluid chamber both ends, grinding are utilized
Liquid so as to lapping liquid be recycled with this, reduce enterprise's production cost smoothly along in the defeated restoring liquid case of efferent duct,
The contaminant filter in lapping liquid is reduced in greasing, influence of the impurity to workpiece by lapping liquid by filter layer simultaneously.
Further, the bottom wall of the fluid chamber is equipped with magnet layer.
By using above-mentioned technical proposal, using magnet layer, be conducive to be further reduced the impurity in lapping liquid.
Further, the outer roof of the liquid-storing box is equipped with motor, and the drive shaft of the motor is connected with rotation axis, described
Rotation axis protrudes into liquid-storing box, several blades are evenly equipped on the peripheral wall of the rotation axis.
By using above-mentioned technical proposal, being rotated using motor driven rotation axis, blade stirs the lapping liquid in liquid-storing box,
Be conducive to cool down lapping liquid, lapping liquid is so as to smoothly cooling down to workpiece.
In conclusion the utility model has the following beneficial effects:
1, lapping liquid is delivered in equal liquid component using input module, is uniformly delivered to lapping liquid using equal liquid component
Between upper mill body and lower mill body, is conducive to be lubricated workpiece and cool down, reduces a possibility that it is scratched;
2, the bristle of accommodating case bottom is utilized, it is possible to reduce the residue of the slot bottom of annular groove, reducing lapping liquid can not uniform flow
A possibility that entering in even liquid pipe is conducive to lapping liquid smooth delivery of power;
3, when bristle shortens, clip is unclamped, hose is integrally moved down, the groove bottom wall for reducing bristle and annular groove generates
A possibility that gap, and then a possibility that the groove bottom wall generation residue of reduction annular groove, it is convenient for hose smooth delivery of power lapping liquid.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of embodiment.
Fig. 2 is the structural schematic diagram for embodying fluid chamber in embodiment.
Fig. 3 is the structural schematic diagram for embodying liquid-storing box in embodiment.
Fig. 4 is the structural schematic diagram for embodying input module in embodiment.
Fig. 5 is the structural schematic diagram for embodying accommodating case in embodiment.
Fig. 6 is the structural schematic diagram for embodying the portion A in Fig. 5.
Fig. 7 is the structural schematic diagram for embodying magnet layer and filter layer.
In figure: 1, rack;2, cylinder;3, upper mill body;4, lower mill body;40, fluid chamber;41, magnet layer;5, liquid-storing box;
50, motor;51, rotation axis;52, blade;6, input module;60, drawing liquid pump;61, inlet tube;62, perfusion tube;63, link disk;
64, annular groove;65, accommodating case;66, cavity;67, through-hole;68, bristle;69, sliding slot;690, sliding block;7, equal liquid component;70, even liquid
Pipe;71, infusion hole;8, output precision;80, efferent duct;81, filter layer;9, tee tube;10, hose;11, valve;12, it supports
Plate;13, location hole;14, clip.
Specific embodiment
The utility model is described in further detail below in conjunction with attached drawing.
Embodiment:
Referring to Fig.1, a kind of twin grinder of transportable lapping liquid comprising rack 1, the cylinder being arranged in rack 1
2, the upper mill body 3 that connect with 2 piston head of cylinder, the lower mill body 4 being arranged in rack 1 and liquid-storing box 5 are equipped in lower mill body 4
Fluid chamber 40(refers to Fig. 2), further include the input module 6 being connect with liquid-storing box 5, is arranged in upper mill body 3 for uniformly distributed liquid
Equal liquid component 7 and for by the lapping liquid in fluid chamber 40 it is defeated restore liquid case 5 output precision 8;When grinding work-piece, benefit
The lapping liquid in liquid-storing box 5 is delivered to equal liquid component 7 with input module 6, after lapping liquid falls into fluid chamber 40, passes through output group
Part 8 can be recycled in the defeated restoring liquid case 5 of lapping liquid lapping liquid with this, save production cost, will using equal liquid component 7
Lapping liquid is uniformly delivered between mill body 3 and lower mill body 4, and workpiece is cooled down and lubricated in time, is reduced workpiece and is scratched
A possibility that, reduce a possibility that workpiece surface quality reduces.
Referring to Fig. 3, the outer roof of liquid-storing box 5 is equipped with motor 50, and the drive shaft of motor 50 is connected with rotation axis 51, rotation axis
51 protrude into liquid-storing box 5, and rotation axis 51 extends to 5 bottom of liquid-storing box, several blades 52 are evenly equipped on the peripheral wall of rotation axis 51;
Rotation axis 51 is driven using motor 50, lapping liquid is stirred so as to band movable vane piece 52, can be cooled down to lapping liquid with this,
Lapping liquid is so as to smoothly cooling down to workpiece.
Referring to Fig. 4, input module 6 includes inlet tube 61, drawing liquid pump 60 and perfusion tube 62, and drawing liquid pump 60 is arranged in liquid storage
The side of case 5, the both ends of inlet tube 61 are connect with the water inlet of the water outlet of liquid-storing box 5, drawing liquid pump 62 respectively, 61 He of inlet tube
Perfusion tube 62 is all made of plastic flexible pipe, and the water outlet of perfusion tube 62 is connect with perfusion tube 62, and perfusion tube 62 is far from drawing liquid pump 60
One end is connected with tee tube 9, and two outlets of tee tube 9 are respectively connected with hose 10, and hose 10 is equipped with valve 11;
Referring to Fig. 4, upper mill body 3 is connected with linkage disk 63 far from the side of lower mill body 4, and the disk 63 that links is close to 2 pressure head of cylinder
Side be equipped with annular groove 64, two hoses 10 extend in annular groove 64 far from one end of support plate 12;
Referring to Fig. 4, equal liquid component 7 includes that several are evenly arranged on linkage even liquid pipe 70 of the disk 63 far from 2 side of cylinder, even liquid
Pipe 70 is connected to the slot bottom of annular groove 64;
Referring to Fig. 4, upper mill body 3, which is equipped with, is evenly equipped with several infusion holes 71, the even one end of liquid pipe 70 far from linkage disk 63
It protrudes into infusion hole 71;Lapping liquid is delivered in hose 10 out of liquid-storing box 5 along perfusion tube 62 using drawing liquid pump 60, is opened
Valve 11, lapping liquid are fallen into annular groove 64, and upper mill body 3 drives linkage disk 63 to rotate, and lapping liquid is so as to being evenly distributed on ring
In slot 64, lapping liquid is transported between upper mill body 3 and lower mill body 4 further along even liquid pipe 70 and by infusion hole 71, can be with this
Lapping liquid is evenly distributed in lower mill body 4, is conducive to be lubricated workpiece and cool down, reduces the possibility that workpiece is scratched
Property.
Referring to figure 5 and figure 6, after due to taking lapping liquid in for a long time in annular groove 64, lapping liquid is easy in annular groove 64 that there are residual
Slag influences lapping liquid and uniformly flows into even liquid pipe 70, so being connected with far from tee tube 9(with reference to one end of Fig. 4) in hose 10
Accommodating case 65, accommodating case 65 is interior to be equipped with cavity 66, and accommodating case 65 is located in annular groove 64, and the one end of accommodating case 65 far from hose 10 is equal
Several through-holes 67 are furnished with, accommodating case 65 is evenly equipped with several bristles 68, bristle 68 and annular groove close to the side of 64 slot bottom of annular groove
64 slot bottoms contradict;
Referring to Fig. 5, cylinder 2(is equipped with support plate 12 with reference to the piston rod of Fig. 4), and the two sides of support plate 12 are equipped with location hole
13, two hoses 10 extend across upward 3 side of mill body of location hole 13, and hose 10 is connected with clip far from one end of linkage disk 63
14, the side wall and support plate 12 of clip 14 are contradicted far from the side of linkage disk 63;
Referring to Fig. 6, accommodating case 65 is equipped with the sliding slot 69 of T-type close to the side wall of 64 cell wall of annular groove, and sliding connects in sliding slot 69
The sliding block 690 being connected to, sliding block 690 are evenly equipped with several bristles 68, bristle 68 and 64 cell wall of annular groove far from the side of accommodating case 65
It contradicts;When the disk 63 that links rotates, is cleared up using slot bottom and cell wall of the bristle 68 to annular groove 64, advantageously reduce residue and stay
In annular groove 64, be conducive in lapping liquid smooth delivery of power to even liquid pipe 70.
Referring to Fig. 7, depth of the fluid chamber 40 close to 80 side of efferent duct is successively decreased to the side far from efferent duct 80;Fluid chamber
40 bottom wall is equipped with magnet layer 41;Output precision 8 includes the efferent duct that both ends are connected to fluid chamber 40, liquid-storing box 5 respectively
80, the height of efferent duct 80 is successively decreased close to one end of fluid chamber 40 to one end of liquid-storing box 5, and efferent duct 80 is close to fluid chamber 40
One end is equipped with filter layer 81;Lapping liquid is fallen into fluid chamber 40, by magnet layer 41 by the impurity absorption in lapping liquid, then is led to
It crosses in the defeated restoring liquid case 5 of efferent duct 80, by the filtering by filter layer 81 to impurity, is further reduced miscellaneous in lapping liquid
Matter, when advantageously reducing lapping liquid and being lubricated to workpiece, abrasion of the impurity to workpiece.
The implementation principle of above-described embodiment are as follows: when grinding work-piece, using input module 6 by the lapping liquid in liquid-storing box 5
It is delivered in equal liquid component 7, lapping liquid is uniformly delivered between upper mill body 3 and lower mill body 4 by equal liquid component 7, is carried out to workpiece
Cooling and lubrication, reduce a possibility that workpiece is scratched, lapping liquid is fallen into fluid chamber 40, will be ground finally by output precision 8
In the defeated restoring liquid case 5 of grinding fluid, be conducive to that lapping liquid is recycled.
This specific embodiment is only the explanation to the utility model, is not limitations of the present invention, ability
Field technique personnel can according to need the modification that not creative contribution is made to the present embodiment after reading this specification, but
As long as all by the protection of Patent Law in the scope of the claims of the utility model.
Claims (9)
1. a kind of twin grinder of transportable lapping liquid, including rack (1), the cylinder (2) and gas that are arranged on rack (1)
The upper mill body (3) of cylinder (2) piston head connection, the lower mill body (4) and liquid-storing box (5) being arranged on rack (1), the lower mill body
(4) fluid chamber (40) are equipped in, it is characterised in that: further include the input module (6) connecting with liquid-storing box (5), be arranged in upper mill
For being evenly distributed with the equal liquid component (7) of liquid and being used for defeated restoring liquid case (5) of the lapping liquid in fluid chamber (40) on body (3)
Output precision (8).
2. the twin grinder of transportable lapping liquid according to claim 1, it is characterised in that: the input module (6)
Including the drawing liquid pump (60) in liquid-storing box (5) side, the inlet tube (61) and drawing liquid pump of the connection of liquid-storing box (5) water outlet is arranged
(60) perfusion tube (62) of water outlet connection, the inlet tube (61) one end and drawing liquid pump (60) far from liquid-storing box (5) are even
It connects, the perfusion tube (62) is connected with tee tube (9) far from the one end of drawing liquid pump (60), and two outlets of the tee tube (9) are equal
It is connected with hose (10), the hose (10) is equipped with valve (11);
The upper mill body (3) is connected with linkage disk (63) far from the side of lower mill body (4), and the linkage disk (63) is close to cylinder
(2) side of pressure head is equipped with annular groove (64), and two hoses (10) extend in annular groove (64) far from the one end of support plate (12).
3. the twin grinder of transportable lapping liquid according to claim 2, it is characterised in that: the equal liquid component (7)
Even liquid pipe (70) of linkage disk (63) far from cylinder (2) side, the even liquid pipe (70) and annular groove are evenly arranged on including several
(64) slot bottom connection;
The upper mill body (3), which is equipped with, is evenly equipped with several infusion holes (71), and the even liquid pipe (70) is far from linkage disk (63)
One end is protruded into infusion hole (71).
4. the twin grinder of transportable lapping liquid according to claim 3, it is characterised in that: the hose (10) is separate
One end of tee tube (9) is communicated with accommodating case (65), is equipped with cavity (66) in the accommodating case (65), accommodating case (65) position
In annular groove (64), the accommodating case (65) is evenly equipped with several through-holes (67), the accommodating case far from the one end of hose (10)
(65) several bristles (68) are evenly equipped with close to the side of annular groove (64) slot bottom.
5. the twin grinder of transportable lapping liquid according to claim 3, it is characterised in that: the work of the cylinder (2)
Stopper rod is equipped with support plate (12), and the two sides of the support plate (12) are equipped with location hole (13), and two hoses (10) pass through fixed
Mill body (3) side extends upwards in position hole (13), and the hose (10) is connected with clip (14), institute far from one end of linkage disk (63)
The side wall and support plate (12) for stating clip (14) are contradicted far from the side of linkage disk (63).
6. the twin grinder of transportable lapping liquid according to claim 4, it is characterised in that: the accommodating case (65) is leaned on
The side wall of near-ring slot (64) cell wall is equipped with the sliding slot (69) of T-type, and sliding is connected with sliding block (690), institute in the sliding slot (69)
It states sliding block (690) and is evenly equipped with several bristles (68) far from the side of accommodating case (65).
7. the twin grinder of transportable lapping liquid according to claim 1, it is characterised in that: the fluid chamber (40) is leaned on
The depth of nearly efferent duct (80) side is successively decreased to the side far from efferent duct (80);The output precision (8) includes both ends difference
The efferent duct (80) being connected to fluid chamber (40), liquid-storing box (5), the efferent duct (80) are equipped with close to the one end of fluid chamber (40)
Filter layer (81).
8. the twin grinder of transportable lapping liquid according to claim 7, it is characterised in that: the fluid chamber (40)
Bottom wall is equipped with magnet layer (41).
9. the twin grinder of transportable lapping liquid according to claim 1, it is characterised in that: the liquid-storing box (5) is outside
Roof is equipped with motor (50), and the drive shaft of the motor (50) is connected with rotation axis (51), and the rotation axis (51), which is protruded into, deposits
In liquid case (5), several blades (52) are evenly equipped on the peripheral wall of the rotation axis (51).
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CN201821824274.2U CN209408214U (en) | 2018-11-06 | 2018-11-06 | It can transport the twin grinder of lapping liquid |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
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CN113814860A (en) * | 2021-08-15 | 2021-12-21 | 江苏本川智能电路科技股份有限公司 | Copper surface treatment equipment before solder resist and processing method thereof |
CN114310672A (en) * | 2021-12-15 | 2022-04-12 | 蚌埠中光电科技有限公司 | Novel automatic backflow grinding fluid scraping and sweeping device of annular |
CN116749054A (en) * | 2023-08-17 | 2023-09-15 | 浙江求是半导体设备有限公司 | Polishing machine and leveling method |
CN116749055A (en) * | 2023-08-17 | 2023-09-15 | 浙江求是半导体设备有限公司 | Polishing machine and leveling method |
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2018
- 2018-11-06 CN CN201821824274.2U patent/CN209408214U/en active Active
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113814860A (en) * | 2021-08-15 | 2021-12-21 | 江苏本川智能电路科技股份有限公司 | Copper surface treatment equipment before solder resist and processing method thereof |
CN114310672A (en) * | 2021-12-15 | 2022-04-12 | 蚌埠中光电科技有限公司 | Novel automatic backflow grinding fluid scraping and sweeping device of annular |
CN116749054A (en) * | 2023-08-17 | 2023-09-15 | 浙江求是半导体设备有限公司 | Polishing machine and leveling method |
CN116749055A (en) * | 2023-08-17 | 2023-09-15 | 浙江求是半导体设备有限公司 | Polishing machine and leveling method |
CN116749054B (en) * | 2023-08-17 | 2023-11-14 | 浙江求是半导体设备有限公司 | Polishing machine and leveling method |
CN116749055B (en) * | 2023-08-17 | 2023-11-14 | 浙江求是半导体设备有限公司 | Polishing machine and leveling method |
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