CN209399923U - A kind of angular displacement sensor based on eddy current effect - Google Patents

A kind of angular displacement sensor based on eddy current effect Download PDF

Info

Publication number
CN209399923U
CN209399923U CN201822197094.2U CN201822197094U CN209399923U CN 209399923 U CN209399923 U CN 209399923U CN 201822197094 U CN201822197094 U CN 201822197094U CN 209399923 U CN209399923 U CN 209399923U
Authority
CN
China
Prior art keywords
magnetic head
reading
magnetic scale
angular displacement
displacement sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201822197094.2U
Other languages
Chinese (zh)
Inventor
李龙
吴高林
龙英凯
张施令
李勇
李小平
彭华东
杨勃
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Electric Power Research Institute of State Grid Chongqing Electric Power Co Ltd
State Grid Corp of China SGCC
State Grid Chongqing Electric Power Co Ltd
Original Assignee
Electric Power Research Institute of State Grid Chongqing Electric Power Co Ltd
State Grid Corp of China SGCC
State Grid Chongqing Electric Power Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Electric Power Research Institute of State Grid Chongqing Electric Power Co Ltd, State Grid Corp of China SGCC, State Grid Chongqing Electric Power Co Ltd filed Critical Electric Power Research Institute of State Grid Chongqing Electric Power Co Ltd
Priority to CN201822197094.2U priority Critical patent/CN209399923U/en
Application granted granted Critical
Publication of CN209399923U publication Critical patent/CN209399923U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

The utility model provides a kind of angular displacement sensor based on eddy current effect, comprising: magnetic scale, detection circuit, the reading magnetic head connecting with the detection circuit;The magnetic scale is integrally in the form of annular discs, is equipped with N number of sub- magnet along the periphery of the magnetic scale, wherein N is the integer greater than 1;N number of sub- magnet size is identical, and homopolar end connects circlewise;The magnetic scale center is equipped with for the attachment device fixed with shaft to be measured;The reading magnetic head is set to the periphery of the magnetic scale, for reading the heat treatment information of the magnetic scale periphery when the magnetic scale rotates.Sensor provided by the utility model, the disk magnetic scale of autonomous Design is read by the way of reading magnetic head, and then it can be changed according to the weak periods in magnetic field, know the angle of rotation, its structure obtains for the processing of angular displacement provides hardware foundation, and its magnetic scale and reading magnetic head use separation design, will not consume because of friction, can be easy for installation, it is durable.

Description

A kind of angular displacement sensor based on eddy current effect
Technical field
The utility model relates to sensor technical field, in particular to a kind of angular displacement sensor based on eddy current effect.
Background technique
Angular displacement sensor is widely used in many fields, such as Machine-Tool Control, angle displacement measurement, tachometric survey, extensively A kind of sensor used, sensors with auxiliary electrode is many kinds of at present, is manufactured and designed based on the way of contact.
For example, conductive plastics angular displacement sensor, conductive plastics angular displacement sensor is a kind of with voltage output and rotation Angle angular displacement sensor in a linear relationship.Conductive plastics angular displacement sensor is mainly by resistor body, shaft and brush assembly of electric With a few part compositions such as shell.Wherein, it is to ensure that sensor is accurate by conductive plastic film and the resistor body that insulating body forms The basis of work, and brush assembly of electric is the key that guarantee sensor accuracy and its mechanical life.Conductive plastics angular displacement sensor Working principle is electric resistance partial pressure principle, connects a constant voltage source at sensor sensing resistance both ends, sensor is existed by brush Mobile on conductive plastic resistance body guide rail is exported, and the movement of brush and tested displacement are consistent, output voltage and displacement It is linear.Obvious disadvantage that there are two this sensor tools, 1), effective angle is no more than 360 °, that is to say, that cannot Carry out multi-turn measurement.2), the friction of hard contact and conductive plastics, if poor contact, will cause output has breakpoint;Make for a long time With rear, due to contact wear, may cause unstable without output or output.
For another example, rotary encoder is had the photoelectric code disk of axis by a center, has annular to lead to thereon, dark groove, there is photoelectricity Transmitting and receiving device are read, and are obtained four groups of sine wave signals and are combined into A, B, C, D, each sine wave differs 90 degree of phase differences (being 360 degree relative to a cycle), C, D signal is reversed, it is superimposed upon in A, B two-phase, stabilization signal can be enhanced;Separately often transfer A Z phase pulse is out to represent zero reference position.Since A, B two-phase differ 90 degree, can exist by comparing A phase in preceding or B phase Before, to differentiate the forward and reverse of encoder, by zero pulse, it can get the zero reference position of encoder.Rotary encoder Resolution ratio depend on grating density, density is higher, and resolution ratio is higher.Photoelectric encoder service life and stability are better than conduction Plastics angular displacement sensor, can continuous multi-turn measurement.Its shortcoming is that rotation photoelectric code disk and photoemission receiving unit pass through Bearing is combined, and axle center alignment is required when installation.
And rotary transformer, the working principle and common transformer of rotary transformer are substantially similar, the original of rotary transformer The change of relative position then occurs with the angular displacement of rotor for side, vice-side winding, thus the size of its output voltage is with rotor angle position It moves and changes, the voltage magnitude and angle of rotor for exporting winding are at sinusoidal, cosine function relationship, or a certain ratio is kept to close System, or in certain angle range it is linear with corner.The shortcomings that rotary transformer, is that volume is larger, equally exists The problem of inconvenience installation.
In addition to above several angular displacement sensors, there are also the angle displacement transducers such as obliquity sensor, hall angular displacement transducer All there is installation inconvenience although each advantageous in device.
Therefore, how a kind of angular displacement sensor based on eddy current effect is provided, can be easy for installation, it is durable, be Those skilled in the art's technical problem urgently to be resolved.
Utility model content
In view of this, the purpose of this utility model is to provide a kind of angular displacement sensor based on eddy current effect, it can It is easy for installation, it is durable.Its concrete scheme is as follows:
A kind of angular displacement sensor based on eddy current effect, comprising: magnetic scale, detection circuit are connect with the detection circuit Reading magnetic head;
The magnetic scale is integrally in the form of annular discs, is equipped with N number of sub- magnet along the periphery of the magnetic scale, wherein N is whole greater than 1 Number;
N number of sub- magnet size is identical, and homopolar end connects circlewise;The magnetic scale center be equipped with for to be measured turn The fixed attachment device of axis;
The reading magnetic head is set to the periphery of the magnetic scale, for reading the magnetic scale periphery when the magnetic scale rotates Heat treatment information.
Preferably,
The reading magnetic head is large reluctance magnetic head.
Preferably,
The reading magnetic head is induction reading magnetic head;
The induction reading magnetic head, comprising: soft magnetism main body, induction coil;
The soft magnetism main body is integrally in annular jaggy, and the notch is towards the periphery of the magnetic scale;
The induction coil is surrounded on the soft magnetism main body.
Preferably,
The induction coil is averagely wound in the notch two sides of the soft magnetism main body.
Preferably,
The soft magnetism main body is in " day " font;
The upside of " day " font is equipped with excitation winding;The excitation winding is connected with AC excitation driver;
The downside of " day " font is equipped with induction coil, and position is equipped with notch among the downside of " day " font;
The notch is towards the periphery of the magnetic scale, for reading the magnetism of the magnetic scale periphery when the magnetic scale rotates Change information.
Preferably,
The detection circuit, comprising: sequentially connected first signal amplifying apparatus, detector arrangement, the second amplifying device, wave Shape processor.
Preferably,
Analog-digital commutator is additionally provided between second amplifying device, the waveform processor.
Preferably,
It further include sensor outer housing;
The magnetic scale, the reading magnetic head are fixed on the sensor outer housing.
Preferably,
The reading magnetic head, comprising: the first reading magnetic head, the second reading magnetic head.
Preferably,
First reading magnetic head and second reading magnetic head are apart
Wherein, m is natural number, and λ is sub- magnet length in the circumferential direction.
The utility model provides a kind of angular displacement sensor based on eddy current effect, comprising: magnetic scale, detection circuit, with institute State the reading magnetic head of detection circuit connection;The magnetic scale is integrally in the form of annular discs, is equipped with N number of sub- magnet along the periphery of the magnetic scale, Wherein, N is the integer greater than 1;N number of sub- magnet size is identical, and homopolar end connects circlewise;The magnetic scale center is equipped with For the attachment device fixed with shaft to be measured;The reading magnetic head is set to the periphery of the magnetic scale, works as the magnetic for reading The heat treatment information of ruler magnetic scale periphery when rotating.Sensor provided by the utility model, by the way of reading magnetic head The disk magnetic scale of autonomous Design is read, and then can be changed according to the weak periods in magnetic field, it is known that the angle of rotation, structure are The processing of angular displacement, which obtains, provides hardware foundation, and its magnetic scale and reading magnetic head use separation design, will not be because of rubbing It wipes and consumes, can be easy for installation, it is durable.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only It is the embodiments of the present invention, for those of ordinary skill in the art, without creative efforts, also Other attached drawings can be obtained according to the attached drawing of offer.
Fig. 1 is a kind of angle displacement transducer based on eddy current effect provided in a kind of specific embodiment of the utility model The composed structure schematic diagram of device;
Fig. 2 is a kind of angle displacement transducer based on eddy current effect provided in a kind of specific embodiment of the utility model The expansion composed structure schematic diagram of device;
Fig. 3 is the number of the first reading magnetic head in a kind of specific embodiment of the utility model, the reading of the second reading magnetic head Waveform diagram.
Attached drawing mark is as follows:
Magnetic scale 100, detection circuit 200, reading magnetic head 300, sub- magnet 101, attachment device 102, soft magnetism main body 313, sense Answer coil 311, excitation winding 410, AC excitation driver 420, notch 312, the first signal amplifying apparatus 201, detector arrangement 202, the second amplifying device 203, waveform processor 204, analog-digital commutator 205.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work Every other embodiment obtained, fall within the protection scope of the utility model.
Fig. 1, Fig. 2 are please referred to, Fig. 1 is that one kind provided in a kind of specific embodiment of the utility model is based on vortex effect The composed structure schematic diagram for the angular displacement sensor answered;Fig. 2 is that a kind of specific constantly send out high of the utility model is provided one The expansion composed structure schematic diagram of angular displacement sensor of the kind based on eddy current effect.
In a kind of specific embodiment of the utility model, the utility model embodiment provides a kind of based on eddy current effect Angular displacement sensor, comprising: magnetic scale 100, detection circuit 200, the reading magnetic head 300 being connect with the detection circuit 200;Institute It is whole in the form of annular discs to state magnetic scale 100, is equipped with N number of sub- magnet 101 along the periphery of the magnetic scale 100, wherein N is whole greater than 1 Number;N number of sub- 101 size of magnet is identical, and homopolar end connects circlewise;100 center of magnetic scale be equipped with for it is to be measured The fixed attachment device 102 of shaft;The reading magnetic head 300 is set to the periphery of the magnetic scale 100, works as the magnetic scale for reading The heat treatment information of 100 periphery of magnetic scale when 100 rotation.
Specifically, when reading magnetic head 300 is arranged, large reluctance magnetic head can be set by the reading magnetic head 300.GMR (Giant Magneto Resistive) large reluctance magnetic head is a kind of reading magnetic head that more commonly used hard disk uses, and is applied to In the utility model embodiment, the angular displacement sensor more in the prior art that the size of entire angular displacement sensor can be done It is much smaller.Reading magnetic head refers to the component that data on magnetic medium are read by magnetic principles.Common reading magnetic head packet Include hard disc magnetic head, tape recorder head etc..Such as hard disc magnetic head, it is the critical component that hard disk reads data, its main work It is transmitted outward with exactly electric signal is converted by the magnetic information being stored on hard disc, and its working principle is then to utilize spy The resistance value of different material can carry out the data of read-write discs on piece with the principle of changes of magnetic field, and the quality of magnetic head is largely determined Determine the storage density of hard disc.
It is of course also possible to use in the utility model embodiment, special reading magnetic head 300, such as can use electromagnetism Reading magnetic head 300 is set induction reading magnetic head 300 by the principle of induction;The induction reading magnetic head 300, comprising: soft magnetism main body 313, induction coil 311;The soft magnetism main body 313 is whole in the annular with jagged 312, described Notch 312 is towards the periphery of the magnetic scale 100;The induction coil 311 is surrounded on the soft magnetism main body 313.It specifically, can be with By induction coil 311, it is averagely wound in 312 two sides of notch of the soft magnetism main body 313.
However, if directlying adopt the mode of above-mentioned induction coil 311, it in practice, may be due to reading magnetic head 300 The flux change read is smaller, and the voltage for causing induction coil 311 to generate is smaller, is unfavorable for measuring.Therefore, it can use The mode of carrier wave transmits the carrying of small signal on a high frequent signal, can be in " day " by the soft magnetism main body 313 specifically Font;The upside of " day " font is equipped with excitation winding 410;The excitation winding 410 is connected with AC excitation driver 420;The downside of " day " font is equipped with induction coil 311, and position is equipped with notch 312 among the downside of " day " font; The notch 312 is towards the periphery of the magnetic scale 100, for reading 100 periphery of magnetic scale when the magnetic scale 100 rotates Heat treatment information.
That is, in practical applications, can use magnet exciting coil and generate high-frequency signal, carried out to induction coil 311 Induction generation voltage, and the small signal for generating when the rotation of magnetic scale 100 to induction coil 311, can carry in high-frequency signal In, to be conducive to the transmission of signal.
It in the above-mentioned magnet exciting coil of use, needs further to be configured in detection circuit 200, such as can incite somebody to action The detection circuit 200 is set as including: sequentially connected first signal amplifying apparatus 201, detector arrangement 202, second signal Amplifying device 203, waveform processor 204.That is it is amplified firstly the need of by the signal in induction coil 311, then Detection processing is carried out, high-frequency signal is filtered out, remaining is exactly the small letter generated when magnetic scale 100 rotates to induction coil 311 Number, then further amplify, and waveform is handled, the turnning circle of available magnetic scale 100 from waveform.Certainly, In order to carry out digitized processing, it can be additionally provided with modulus between second amplifying device, the waveform processor 204 and turn Changing device 205.It is handled that is, converting analog signals into digital signal.
Generally, in order to fix the positional relationship of magnetic scale 100 Yu reading magnetic head 300, which further includes sensing certainly Device shell;The magnetic scale 100, the reading magnetic head 300 are fixed on the sensor outer housing.Specific magnetic scale 100 and reading magnetic First the distance between 300, it can be configured according to the actual needs.
Referring to FIG. 3, Fig. 3 is that the first reading magnetic head 300, second reads magnetic in a kind of specific embodiment of the utility model The first 300 digital waveform schematic diagrames read.
On the basis of above-mentioned specific embodiment, in the present embodiment further, for the rotation side to magnetic scale 100 To being identified, the reading magnetic head 300 can be set as including: the first reading magnetic head 310, the second reading magnetic head 320. In specific application, including two magnetic heads, then two magnetic heads are when reading the waveform that magnetic scale 100 rotates, there are a phases Difference, from this phase difference.The direction of rotation is different, 310 leading second reading magnetic head 320 1 of specifically the first reading magnetic head Thus phase difference or leading first phase difference of first magnetic of the second magnetic head, can determine the actual rotation direction of magnetic scale 100.
For example, in a specific embodiment, it can be by the first reading magnetic head 310 and second reading magnetic head 320 ApartWherein, m is natural number, and λ is the sub- magnet 101 length in the circumferential direction.
It is passed in excitation winding 410(wherein, ImFor exciting current amplitude, ω is exciting current frequency) Exciting current when, two excitation windings 410 generate the opposite magnetic flux of both direction, and the magnetic flux Φ of magnetic head is acted on magnetic scale 1000 It is superimposed upon the modulated signal output for just inducing that frequency is twice of exciting current frequency on induction coil 311, exports electromotive force Are as follows:Wherein: UmFor electromotive force amplitude;X is the angle that annular magnetic scale 100 rotates, and λ is magnetic 100 two magnetic of ruler away from differential seat angle.
Dual-magnetic head is arranged to identify the moving direction of magnetic scale 100, and two magnetic heads are apart(m is Positive integer).The output potential of two magnetic heads is respectively as follows:
The two signals become the pulse signal of 2 90 ° of differences, please refer to Fig. 3 institute after amplification, detection, digitlization Show, in Fig. 3, A indicates that the digitized wave forms that the first reading magnetic head 300 for being located at left side is read, B indicate that the second of right side reads magnetic First 300 digitized wave forms read.When rotating forward (being clockwise rotating forward), B waveform is more than 1/4 phase of A waveform, and reversion is (counterclockwise For reversion) when, A waveform is more than 1/4 phase of B waveform.Thus, it is possible to which according to the phase relation of waveform, the anti-magnetic scale 100 that pushes away is on earth It rotates forward or inverts.
The utility model provides a kind of angular displacement sensor based on eddy current effect, is read from by the way of reading magnetic head The disk magnetic scale of main design, and then can be changed according to the weak periods in magnetic field, it is known that the angle of rotation, magnetic scale and reading magnetic Head uses separation design, will not consume because of friction, can be easy for installation, durable.
Finally, it is to be noted that, herein, relational terms such as first and second and the like be used merely to by One entity or operation are distinguished with another entity or operation, without necessarily requiring or implying these entities or operation Between there are any actual relationship or orders.Moreover, the terms "include", "comprise" or its any other variant meaning Covering non-exclusive inclusion, so that the process, method, article or equipment for including a series of elements not only includes that A little elements, but also including other elements that are not explicitly listed, or further include for this process, method, article or The intrinsic element of equipment.In the absence of more restrictions, the element limited by sentence "including a ...", is not arranged Except there is also other identical elements in the process, method, article or apparatus that includes the element.
A kind of angular displacement sensor based on eddy current effect provided by the utility model is described in detail above, Specific case used herein is expounded the principles of the present invention and embodiment, and the explanation of above embodiments is only It is the method and its core concept for being used to help understand the utility model;At the same time, for those skilled in the art, foundation The thought of the utility model, there will be changes in the specific implementation manner and application range, in conclusion in this specification Appearance should not be construed as a limitation of the present invention.
The foregoing description of the disclosed embodiments makes those skilled in the art can be realized or use the utility model. Various modifications to these embodiments will be apparent for a person skilled in the art, general original as defined herein Reason can be realized in other embodiments without departing from the spirit or scope of the present utility model.Therefore, this is practical new Type is not intended to be limited to the embodiments shown herein, and is to fit to and the principles and novel features disclosed herein phase Consistent widest scope.

Claims (10)

1. a kind of angular displacement sensor based on eddy current effect characterized by comprising magnetic scale, detection circuit, with the detection The reading magnetic head of circuit connection;
The magnetic scale is integrally in the form of annular discs, is equipped with N number of sub- magnet along the periphery of the magnetic scale, wherein N is the integer greater than 1;
N number of sub- magnet size is identical, and homopolar end connects circlewise;The magnetic scale center is equipped with for solid with shaft to be measured Fixed attachment device;
The reading magnetic head is set to the periphery of the magnetic scale, for reading the magnetism of the magnetic scale periphery when the magnetic scale rotates Change information.
2. angular displacement sensor according to claim 1, which is characterized in that
The reading magnetic head is large reluctance magnetic head.
3. angular displacement sensor according to claim 1, which is characterized in that
The reading magnetic head is induction reading magnetic head;
The induction reading magnetic head, comprising: soft magnetism main body, induction coil;
The soft magnetism main body is integrally in annular jaggy, and the notch is towards the periphery of the magnetic scale;
The induction coil is surrounded on the soft magnetism main body.
4. angular displacement sensor according to claim 3, which is characterized in that
The induction coil is averagely wound in the notch two sides of the soft magnetism main body.
5. angular displacement sensor according to claim 3, which is characterized in that
The soft magnetism main body is in " day " font;
The upside of " day " font is equipped with excitation winding;The excitation winding is connected with AC excitation driver;
The downside of " day " font is equipped with induction coil, and position is equipped with notch among the downside of " day " font;
The notch is towards the periphery of the magnetic scale, for reading the heat treatment of the magnetic scale periphery when the magnetic scale rotates Information.
6. angular displacement sensor according to claim 5, which is characterized in that
The detection circuit, comprising: sequentially connected first signal amplifying apparatus, detector arrangement, the second amplifying device, at waveform Manage device.
7. angular displacement sensor according to claim 6, which is characterized in that
Analog-digital commutator is additionally provided between second amplifying device, the waveform processor.
8. angular displacement sensor according to any one of claims 1 to 7, which is characterized in that
It further include sensor outer housing;
The magnetic scale, the reading magnetic head are fixed on the sensor outer housing.
9. angular displacement sensor according to any one of claims 1 to 7, which is characterized in that
The reading magnetic head, comprising: the first reading magnetic head, the second reading magnetic head.
10. angular displacement sensor according to claim 9, which is characterized in that
First reading magnetic head and second reading magnetic head are apart
Wherein, m is natural number, and λ is sub- magnet length in the circumferential direction.
CN201822197094.2U 2018-12-25 2018-12-25 A kind of angular displacement sensor based on eddy current effect Active CN209399923U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201822197094.2U CN209399923U (en) 2018-12-25 2018-12-25 A kind of angular displacement sensor based on eddy current effect

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201822197094.2U CN209399923U (en) 2018-12-25 2018-12-25 A kind of angular displacement sensor based on eddy current effect

Publications (1)

Publication Number Publication Date
CN209399923U true CN209399923U (en) 2019-09-17

Family

ID=67896238

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201822197094.2U Active CN209399923U (en) 2018-12-25 2018-12-25 A kind of angular displacement sensor based on eddy current effect

Country Status (1)

Country Link
CN (1) CN209399923U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111649661A (en) * 2020-06-08 2020-09-11 中国葛洲坝集团第一工程有限公司 Stay wire sensor for dangerous rock monitoring and monitoring system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111649661A (en) * 2020-06-08 2020-09-11 中国葛洲坝集团第一工程有限公司 Stay wire sensor for dangerous rock monitoring and monitoring system

Similar Documents

Publication Publication Date Title
JP5079816B2 (en) Preferably a magnetic position sensor having a magnet shape that varies pseudo-sinusoidally.
JP5480967B2 (en) Multi-period absolute position detector
US9207100B2 (en) Magnetic position sensor with field direction measurement and flux collector
US9222804B2 (en) System and method for position sensing
US6433536B1 (en) Apparatus for measuring the position of a movable member
JPH0514205B2 (en)
CN209399923U (en) A kind of angular displacement sensor based on eddy current effect
CN109256905A (en) Toroidal magnet for rotor position estimate
US20080218159A1 (en) Sensor System For Determining a Position or a Rotational Speed of an Object
JP2000065596A5 (en) Magnetic encoder and motor with magnetic encoder
RU2436037C1 (en) Absolute angle transducer
JP3047099B2 (en) Position detection device
JP7242352B2 (en) A system for determining at least one rotational parameter of a rotating member
EP1016852B1 (en) Apparatus for measuring the position of a movable member
JP2020153980A (en) System for determining at least one rotation parameter of rotating member
JP2009300143A (en) Magnetic position detecting apparatus
JPH0552583A (en) Magnetic encoder
JP2550085B2 (en) Absolute position detector
JPH0347690B2 (en)
CN116499501B (en) Magnetic sensor
JP2669631B2 (en) Magnetic detector
JP4001849B2 (en) Magnetic rotary position sensor
JPH061200B2 (en) Linear encoder
JP3170806B2 (en) Magnetoelectric converter
JPH0418777B2 (en)

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant