CN209335466U - A kind of silicon wafer fixture - Google Patents
A kind of silicon wafer fixture Download PDFInfo
- Publication number
- CN209335466U CN209335466U CN201822211662.XU CN201822211662U CN209335466U CN 209335466 U CN209335466 U CN 209335466U CN 201822211662 U CN201822211662 U CN 201822211662U CN 209335466 U CN209335466 U CN 209335466U
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- CN
- China
- Prior art keywords
- card slot
- slot
- silicon wafer
- cell wall
- clamping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model relates to a kind of silicon wafer fixtures, including the clamping box body with holding chamber, it is characterised in that: including the reciprocal correspondence in the two sides cavity wall of holding chamber and one end is through the groove for clamping cavity wall, the self-clamping module being respectively arranged in each respective slot and for so that the positioning component that self-clamping module and clamping box body are fixed；Each self-clamping module includes sliding slot between the cell wall of each groove two sides, the limiting slot being respectively arranged on the cell wall of each sliding slot two sides, the limit film being active between each limiting slot and is fixedly connected between each limit film and the movable rotational pin in sliding slot, overturning fixture block is fixedly connected on each rotational pin, each two sides for overturning fixture block are equipped at intervals with several and the first card slot, the second card slot, mutual corresponding third card slot, mutual corresponding 4th card slot and mutual corresponding 5th card slot at the top and bottom of overturning fixture block；The utility model has the beneficial effects that good clamping effect, uses diversification.
Description
Technical field
The utility model relates to chuck apparatus technical field, in particular to a kind of silicon wafer fixture.
Background technique
Currently, the die size of mainstream has been substituted into 8 cun, 12 cun in the market；Still there are many factories still for 5 cun, 6 cun
It is so running, still, is thering is considerable production line to close for the silicon wafer of 3 cun, 4 cun, but still there are many discrete devices
Producer, which retains, uses 3 cun, 4 cun of production lines.
Due to the continuous pursuit to properties of product, 3 cun, requirement continuous improvement of 4 cun of production lines to silicon wafer are many to need to adopt
With 5 cun, 6 cun of technology, some even needs the technology using 8-12 cuns, and is used to clean 5 cun, 6 cun and 8-12 cun clear
Fixture in washing machine can not clamp the silicon wafer of 3 cun, 4 cun, cause 3 cun, 4 cun of silicon wafer can not be successfully produce；Secondly, mesh
The effect of the fixed silicon wafer of preceding fixture is poor, and in the process of cleaning, silicon wafer easily falls off；Thus, it is desirable to provide a kind of diversification
Different size silicon wafers can be clamped and there is the fixture of stronger gripping performance to meet the needs of production.
Utility model content
In view of the deficienciess of the prior art, the purpose of this utility model is to provide a kind of silicon wafer fixtures, it is intended to solve
The problem in certainly above-mentioned background technique.
The technical solution of the utility model is achieved in that a kind of silicon wafer fixture, including the clamping with holding chamber
Box body, it is characterised in that: including be set to holding chamber two sides cavity wall on correspond to each other and one end through clamping cavity wall groove,
The self-clamping module that is respectively arranged in each respective slot and for so that self-clamping module and the fixed positioning component of clamping box body；Respectively
Self-clamping module include sliding slot between the cell wall of each groove two sides, the limiting slot being respectively arranged on the cell wall of each sliding slot two sides,
It the limit film that is active between each limiting slot and is fixedly connected between each limit film and the movable rotational pin in sliding slot, respectively
Overturning fixture block is fixedly connected on rotational pin, each two sides for overturning fixture block are equipped at intervals with several and through overturning fixture block top
First card slot of portion and bottom, the second card slot, mutual corresponding third card slot, mutual corresponding 4th card slot and reciprocal correspondence
The 5th card slot；The positioning component includes that several are respectively separated and are fixedly connected at the top of the overturning fixture block and are located at
Locating piece between each card slot, the groove is on the cell wall of bottom and each groove is spaced on the slot bottom at top and sets
Have several for and locating piece be clamped limit assembly.
It is preferred that are as follows: the limit assembly includes locating slot and the top cell wall and bottom cell wall for being respectively arranged on the locating slot
Limited block, the both ends of each limited block pass through torsional spring and the two sides cell wall of locating slot is hinged, and are formed between two limited blocks
Have for limiting the movable holding tank of locating piece.
It is preferred that are as follows: the cross sectional shape of the limited block is ellipse, and the cross sectional shape of the locating piece is circle.
By using above-mentioned technical proposal: by converting self-clamping module, it may be assumed that overturning self-clamping module, so that on its surface
First card slot, the second card slot and third card slot cooperate with meet the silicon wafer of 6 cun, 8 cun and 12 cun of clamping or make its
The mutual cooperation of four card slots and the 4th card slot clamps 3 cun, 4 cun and 5 cun of silicon wafer to meet, and then the diversification for reaching fixture makes
With；In more detail: third card slot and the 4th card slot can be set on the same face of self-clamping module, the first card slots and the therein 5th
Card slot is located therein the another side of a self-clamping module, and the second card slot and another the 5th card slot can be set to another self-clamping module
Another side pressed from both sides since the groove depth of the first card slot, the second card slot, third card slot, the 4th card slot and the 5th card slot is different in overturning
It holds module while cooperation between each card slot can be made to change to realize that the distance between each card slot generates, to meet folder
Hold various sizes of silicon wafer；Secondly, when overturning self-clamping module (that is: overturning fixture block), it can be by being set on overturning fixture block
Cooperate with the limit assembly being arranged on the cell wall of groove on locating piece and wall realizing the fixation to overturning fixture block, prevent
Only in cleaning silicon chip, overturning fixture block is shaken, and then guarantees the stability of clamping silicon wafer, positioning principle are as follows: overturning
When fixture block is overturn, the locating piece for being fixed on top is caught in the limit completed in the holding tank formed between limited block to locating piece
Position, and then complete the fixation to overturning fixture block；It should be understood that (one), be caught in holding tank in locating piece, due to limit
Block is hinged by the cell wall of torsional spring and locating slot, to improve the chucking power to locating piece, and then can be guaranteed by the torsion of torsional spring
Different size silicon wafers are normally carried out；(secondly), section be ellipse limited block and section be that circular locating piece is matched
It closes, can further improve limited block to the chucking power of locating piece, and then guarantee the fixation to overturning fixture block, then guarantee clamping silicon
Piece it is smooth, with guarantee production be normally carried out.
The utility model is further arranged to: first card slot, the second card slot, third card slot, the 4th card slot and
Elastic die body is equipped on the cell wall of 5th card slot, the elastic die body is equipped with several protrusions.
It is preferred that are as follows: blind hole is equipped on each protrusion.
By using above-mentioned technical proposal: being arranged on the elastic die body and elastic die body being arranged inside each card slot recessed
It is convex, when silicon wafer is inserted into each card slot, the chucking power to silicon wafer can be improved, it may be assumed that in silicon wafer insertion, pass through the bullet of elastic die body
Property improve the frictional force between silicon wafer and card slot, and then improve the fixed effect to silicon wafer, prevent silicon wafer appearance in cleaning
It falls off, and then guarantees going on smoothly for production；Secondly, the blind hole being arranged on each protrusion, can further improve elastic die body with
Frictional force between silicon wafer, prevents it from falling off, and then is further ensured that going on smoothly for production.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only
It is some embodiments of the utility model, for those of ordinary skill in the art, before not making the creative labor property
It puts, is also possible to obtain other drawings based on these drawings.
Fig. 1 is specific embodiment of the present invention structural schematic diagram；
Fig. 2 is the top view of Fig. 1；
Fig. 3 is the portion the A enlarged drawing in Fig. 2；
Fig. 4 is the structural schematic diagram of positioning component in specific embodiment of the present invention；
Fig. 5 is the schematic internal view of card slot in specific embodiment of the present invention；
Fig. 6 is the B-B cross-sectional view in Fig. 5.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without creative efforts
Every other embodiment obtained, fall within the protection scope of the utility model.
As shown in Fig. 1~Fig. 6, the utility model discloses a kind of silicon wafer fixtures, including the clamping with holding chamber 10
Box body 1 corresponds to each other in the two sides cavity wall including being set to holding chamber 10 in the utility model specific embodiment and one end is run through
The groove 100 of 10 inner wall of holding chamber, the self-clamping module 2 being respectively arranged in each respective slot 100 and for so that self-clamping module 2
The fixed positioning component 3 with clamping box body 1；Each self-clamping module 2 includes the sliding slot between each 100 two sides cell wall of groove
20, the limiting slot 21 that is respectively arranged on each 20 two sides cell wall of sliding slot, the limit film 22 being active between each limiting slot 21 and solid
Surely it is connected between each limit film 22 and the movable rotational pin 23 in sliding slot 20, is fixedly connected to overturning on each rotational pin 23
Fixture block 24, each two sides for overturning fixture block 24 are equipped at intervals with several and the first card slot through 24 top and bottom of overturning fixture block
2a, the second card slot 2b, mutual corresponding third card slot 2c, mutual corresponding 4th card slot 2d and mutual corresponding 5th card slot
2e；The positioning component 3 is respectively separated including several to be fixedly connected on 24 top of overturning fixture block and is located at each card
Locating piece 30 between slot, the groove 100 is on the cell wall of bottom and each groove is spaced on the slot bottom at top
The limit assembly 31 for being used to be clamped with locating piece 30 equipped with several.
In the utility model specific embodiment, the limit assembly 31 includes locating slot 310 and to be respectively arranged on this fixed
The position top cell wall of slot 310 and the limited block 311 of bottom cell wall, the both ends of each limited block 311 pass through torsional spring 312 and locating slot
310 two sides cell wall is hinged, and is formed between two limited blocks 311 for limiting the movable holding tank 313 of locating piece 30, institute
Stating locating piece 30 can be fixedly connected by connecting rod 32 with overturning fixture block 24.
In the utility model specific embodiment, the cross sectional shape of the limited block 311 is ellipse, the locating piece 30
Cross sectional shape be circle.
In the utility model specific embodiment, the distance between described third card slot 2c L1 can be 6 cun, third card slot
The groove depth L2 of 2c can be 1 cun, and the groove depth L3 of the first card slot 2a can be 3 cun, and the groove depth L4 of the second card slot 2b can be 5 cun.
In the utility model specific embodiment, the distance between described 4th card slot 2d L5 can be 3 cun, and the 4th card
The groove depth L6 of slot 2d can be 1 cun, and the groove depth L7 of the 5th card slot 2e can be 2 cun.
By using above-mentioned technical proposal: by converting self-clamping module, it may be assumed that overturning self-clamping module, so that on its surface
First card slot, the second card slot and third card slot cooperate with meet the silicon wafer of 6 cun, 8 cun and 12 cun of clamping or make its
The mutual cooperation of four card slots and the 4th card slot clamps 3 cun, 4 cun and 5 cun of silicon wafer to meet, and then the diversification for reaching fixture makes
With；In more detail: third card slot and the 4th card slot can be set on the same face of self-clamping module, the first card slots and the therein 5th
Card slot is located therein the another side of a self-clamping module, and the second card slot and another the 5th card slot can be set to another self-clamping module
Another side pressed from both sides since the groove depth of the first card slot, the second card slot, third card slot, the 4th card slot and the 5th card slot is different in overturning
It holds module while cooperation between each card slot can be made to change to realize that the distance between each card slot generates, to meet folder
Hold various sizes of silicon wafer；Secondly, when overturning self-clamping module (that is: overturning fixture block), it can be by being set on overturning fixture block
Cooperate with the limit assembly being arranged on the cell wall of groove on locating piece and wall realizing the fixation to overturning fixture block, prevent
Only in cleaning silicon chip, overturning fixture block is shaken, and then guarantees the stability of clamping silicon wafer, positioning principle are as follows: overturning
When fixture block is overturn, the locating piece for being fixed on top is caught in the limit completed in the holding tank formed between limited block to locating piece
Position, and then complete the fixation to overturning fixture block；It should be understood that (one), be caught in holding tank in locating piece, due to limit
Block is hinged by the cell wall of torsional spring and locating slot, to improve the chucking power to locating piece, and then can be guaranteed by the torsion of torsional spring
Different size silicon wafers are normally carried out；(secondly), section be ellipse limited block and section be that circular locating piece is matched
It closes, can further improve limited block to the chucking power of locating piece, and then guarantee the fixation to overturning fixture block, then guarantee clamping silicon
Piece it is smooth, with guarantee production be normally carried out.
In the utility model specific embodiment, the first card slot 2a, the second card slot 2b, third card slot 2c, the 4th
Elastic die body 5 is equipped on the cell wall of card slot 2d and the 5th card slot 2e, the elastic die body 5 is equipped with several protrusions 50.
In the utility model specific embodiment, blind hole 51 is equipped on each protrusion 50.
In the utility model specific embodiment, the material of the elastic die body 5 can be rubber.
By using above-mentioned technical proposal: being arranged on the elastic die body and elastic die body being arranged inside each card slot recessed
It is convex, when silicon wafer is inserted into each card slot, the chucking power to silicon wafer can be improved, it may be assumed that in silicon wafer insertion, pass through the bullet of elastic die body
Property improve the frictional force between silicon wafer and card slot, and then improve the fixed effect to silicon wafer, prevent silicon wafer appearance in cleaning
It falls off, and then guarantees going on smoothly for production；Secondly, the blind hole being arranged on each protrusion, can further improve elastic die body with
Frictional force between silicon wafer, prevents it from falling off, and then is further ensured that going on smoothly for production
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Within the spirit and principle of utility model, any modification, equivalent replacement, improvement and so on should be included in the utility model
Protection scope within.
Claims (5)
1. a kind of silicon wafer fixture, including the clamping box body with holding chamber, it is characterised in that: the two sides including being set to holding chamber
It is corresponded to each other in cavity wall and one end is through the groove for clamping cavity wall, the self-clamping module and use being respectively arranged in each respective slot
In the positioning component for fixing self-clamping module and clamping box body；Each self-clamping module includes being set between the cell wall of each groove two sides
Sliding slot, the limiting slot being respectively arranged on the cell wall of each sliding slot two sides, the limit film that is active between each limiting slot and fixed connect
It is connected between each limit film and the movable rotational pin in sliding slot, is fixedly connected to overturning fixture block on each rotational pin, it is each to overturn
The two sides of fixture block be equipped at intervals with several and through overturning fixture block at the top and bottom of the first card slot, the second card slot, mutually it is right
Third card slot, mutual corresponding 4th card slot and mutual corresponding 5th card slot answered；The positioning component includes several
It is respectively separated the locating piece for being fixedly connected on and at the top of the overturning fixture block and being located between each card slot, the groove is the bottom of close to
On the cell wall in portion and each groove be equipped at intervals on the slot bottom at top several for and locating piece be clamped limit group
Part.
2. a kind of silicon wafer fixture according to claim 1, it is characterised in that: the limit assembly include locating slot and
It is respectively arranged on the top cell wall of the locating slot and the limited block of bottom cell wall, the both ends of each limited block pass through torsional spring and locating slot
Two sides cell wall it is hinged, and be formed between two limited blocks for limiting the movable holding tank of locating piece.
3. a kind of silicon wafer fixture according to claim 2, it is characterised in that: the cross sectional shape of the limited block is ellipse
Shape, the cross sectional shape of the locating piece are circle.
4. any one silicon wafer fixture described according to claim 1-3, it is characterised in that: first card slot, second
Card slot, third card slot, the 4th card slot and the 5th card slot cell wall on be equipped with elastic die body, if the elastic die body is equipped with
Dry protrusion.
5. a kind of silicon wafer fixture according to claim 4, it is characterised in that: be equipped with blind hole on each protrusion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822211662.XU CN209335466U (en) | 2018-12-27 | 2018-12-27 | A kind of silicon wafer fixture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822211662.XU CN209335466U (en) | 2018-12-27 | 2018-12-27 | A kind of silicon wafer fixture |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209335466U true CN209335466U (en) | 2019-09-03 |
Family
ID=67759409
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822211662.XU Expired - Fee Related CN209335466U (en) | 2018-12-27 | 2018-12-27 | A kind of silicon wafer fixture |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209335466U (en) |
-
2018
- 2018-12-27 CN CN201822211662.XU patent/CN209335466U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190903 Termination date: 20211227 |