CN209321758U - A kind of silicon wafer non-contact transport apparatus - Google Patents
A kind of silicon wafer non-contact transport apparatus Download PDFInfo
- Publication number
- CN209321758U CN209321758U CN201822141686.2U CN201822141686U CN209321758U CN 209321758 U CN209321758 U CN 209321758U CN 201822141686 U CN201822141686 U CN 201822141686U CN 209321758 U CN209321758 U CN 209321758U
- Authority
- CN
- China
- Prior art keywords
- roller bearing
- fixing seat
- bearing fixing
- silicon wafer
- roller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a kind of silicon wafer non-contact transport apparatus, including the first roller bearing fixing seat, the second roller bearing fixing seat, servo motor, bracket, and more than two first roller bearings in the first roller bearing fixing seat, interior more than two second roller bearings in the second roller bearing fixing seat；First roller bearing fixing seat and the second roller bearing fixing seat are end to end, and the head end outer wall of the first roller bearing fixing seat is in contact with the second roller bearing fixing seat tail end inner wall, are attached by perforative driving shaft, and driving shaft is driven by servo motor to be rotated；The head end of first roller bearing fixing seat is equipped with first roller bearing, and driving shaft runs through first roller bearing；Belt connection is passed sequentially through between two adjacent roller bearings, drives all roller bearings to be rotated by spindle rotation, so that the silicon wafer above roller bearing be conveyed.
Description
Technical field
The utility model relates to silicon wafer conveying equipment, especially a kind of silicon wafer non-contact transport apparatus.
Background technique
In existing etching technology for blanking, the frictional force of generation is directly contacted using belt and silicon wafer to transmit silicon wafer, silicon wafer
Belt is easy to pollute silicon chip surface in transmission process, and needs frequent clean belt, increases operation intensity, reduces and produces
Energy.
Utility model content
Technical problem to be solved in the utility model is in view of the deficiencies of the prior art, to provide a kind of silicon wafer and belt is non-
The conveying device of contact reduces silicon wafer friction.
In order to solve the above-mentioned technical problem, the utility model discloses a kind of silicon wafer non-contact transport apparatus, including first
Roller bearing fixing seat, the second roller bearing fixing seat, servo motor, bracket, and it is more than two in the first roller bearing fixing seat
First roller bearing, interior more than two second roller bearings in the second roller bearing fixing seat；
The first roller bearing fixing seat and the second roller bearing fixing seat are end to end, the head end outer wall of the first roller bearing fixing seat with
Second roller bearing fixing seat tail end inner wall is in contact, and is attached by perforative driving shaft, and driving shaft is driven by servo motor
Rotation；The head end of first roller bearing fixing seat is equipped with first roller bearing, and driving shaft runs through first roller bearing；Two adjacent roller bearings
Between pass sequentially through belt connection, drive all roller bearings to be rotated by spindle rotation, thus by the silicon above roller bearing
Piece is conveyed；
First roller bearing fixing seat is supported with the second end to end place of roller bearing fixing seat by the bracket of bottom.
Further, the both ends of the first roller bearing and the second roller bearing are equipped with groove, and two adjacent roller bearings are recessed by being embedded in
Slot inner belt is sequentially connected.
Preferably, the first roller bearing and the second roller bearing material are polypropylene, and surface treatment is smooth, will not cause scratch to silicon wafer
Or pollution.
Preferably, the driving shaft is connected by shaft coupling with the output shaft of servo motor.
Preferably, the servo motor is by being mounted in the motor fixing seat parallel with bracket.
The utility model has the advantages that
The roller bearing that the utility model is sequentially connected by belt realizes the transport to silicon wafer, and silicon wafer is not indirectly with belt
Touching, solves belt to the friction problem of silicon wafer, wafer contamination rate is reduced under the premise of not influencing efficiency, is alleviated simultaneously
The labor intensity of operating personnel；The conveying device is compact-sized, stable, at low cost, the service life is high, has obtained in actual production
To verifying, equipment fragment rate is reduced to 0.02%, and motor-driven rate can be used 100% in the equipment such as etching charging & discharging machine.
Detailed description of the invention
The utility model is done with reference to the accompanying drawings and detailed description and is further illustrated, the utility model
Above-mentioned and/or otherwise advantage will become apparent.
Fig. 1 is the overall structure stereogram of the conveying device；
Fig. 2 is the top view of the conveying device；
Fig. 3 is the side view of the conveying device.
Specific embodiment
According to following embodiments, the present invention may be better understood.
Structure depicted in Figure of description, ratio, size etc., only to cooperate the revealed content of specification, with
Understand for those skilled in the art and read, is not intended to limit the utility model enforceable qualifications, therefore does not have skill
Essential meaning in art, the modification of any structure, the change of proportionate relationship or the adjustment of size are not influencing the utility model institute
Under the effect of capable of generating and the purpose that can reach, it should all still fall in what the revealed technology contents of the utility model can be covered
In range.Meanwhile cited such as "upper", "lower", "front", "rear", " centre " term in this specification, it is merely convenient to chat
That states is illustrated, rather than to limit the enforceable range of the utility model, relativeness is altered or modified, without substantive change
Under more technology contents, when being also considered as the enforceable scope of the utility model.
As shown in Figures 1 to 3, which includes the first roller bearing fixing seat 21, the second roller bearing fixing seat 22, servo motor
6, bracket 7, and more than two first roller bearings 11 in the first roller bearing fixing seat 21 are located at the second roller bearing fixing seat 22
Interior interior more than two second roller bearings 12；
The first roller bearing fixing seat 21 and the second roller bearing fixing seat 22 are end to end, the head end of the first roller bearing fixing seat 21
Outer wall is in contact with 22 tail end inner wall of the second roller bearing fixing seat, is attached by perforative driving shaft 4, driving shaft 4 passes through connection
Axis device 5 is connected with the output shaft of servo motor 6, is driven and is rotated by servo motor 6；The head end of first roller bearing fixing seat 21 is set
There is first roller bearing 11, driving shaft 4 runs through first roller bearing 11；The both ends of first roller bearing 11 and the second roller bearing 12 are equipped with recessed
Slot, two adjacent roller bearings are sequentially connected by being embedded in groove inner belt 3, drive all roller bearings by the rotation of driving shaft 4
It is rotated, so that the silicon wafer 9 above roller bearing be conveyed；First roller bearing 11 and 12 material of the second roller bearing are polypropylene, table
Surface treatment is smooth.
First roller bearing fixing seat 21 is supported with the end to end place of the second roller bearing fixing seat 22 by the bracket 7 of bottom；
Servo motor 6 is by being mounted in the motor fixing seat 8 parallel with bracket 7.
The course of work of the conveying device is as follows: when silicon wafer 9 is reached on roller bearing, servo motor 6 starts to act, and passes through shaft coupling
Device 5 drives driving shaft 4 to rotate, and drives roller bearing rotation by groove inner belt 3, the mobile conveying on roller bearing of silicon wafer 9, belt 3 is not
It is directly contacted with silicon wafer 9, silicon wafer will not be polluted.
The utility model provides the thinking and method of a kind of silicon wafer non-contact transport apparatus, implements the technical solution
Method and approach it is very much, the above is only the preferred embodiment of the utility model, it is noted that for the art
Those of ordinary skill for, without departing from the principle of this utility model, several improvements and modifications can also be made, this
A little improvements and modifications also should be regarded as the protection scope of the utility model.Each component part being not known in the present embodiment is available existing
There is technology to be realized.
Claims (5)
1. a kind of silicon wafer non-contact transport apparatus, which is characterized in that including the first roller bearing fixing seat (21), the second roller bearing fixing seat
(22), servo motor (6), bracket (7), and more than two first roller bearings being located in the first roller bearing fixing seat (21)
(11), interior more than two second roller bearings (12) being located in the second roller bearing fixing seat (22)；
The first roller bearing fixing seat (21) and the second roller bearing fixing seat (22) are end to end, the head of the first roller bearing fixing seat (21)
End outer wall is in contact with second roller bearing fixing seat (22) tail end inner wall, is attached by perforative driving shaft (4), driving shaft
(4) pass through servo motor (6) driving rotation；The head end of first roller bearing fixing seat (21) is equipped with first roller bearing (11), actively
Axis (4) runs through first roller bearing (11)；Belt (3) connection is passed sequentially through between two adjacent roller bearings, is revolved by driving shaft (4)
Turn all roller bearings of driving to be rotated, so that the silicon wafer (9) above roller bearing be conveyed；
First roller bearing fixing seat (21) is propped up with the second roller bearing fixing seat (22) end to end place by the bracket (7) of bottom
Support.
2. silicon wafer non-contact transport apparatus according to claim 1, which is characterized in that the first roller bearing (11) and the second roller bearing
(12) both ends are equipped with groove, and two adjacent roller bearings are sequentially connected by being embedded in groove inner belt (3).
3. silicon wafer non-contact transport apparatus according to claim 2, which is characterized in that the first roller bearing (11) and the second roller bearing
(12) material is polypropylene, is surface-treated smooth.
4. silicon wafer non-contact transport apparatus according to claim 1, which is characterized in that the driving shaft (4) passes through shaft coupling
Device (5) is connected with the output shaft of servo motor (6).
5. silicon wafer non-contact transport apparatus according to claim 4, which is characterized in that the servo motor (6) passes through peace
In the motor fixing seat (8) parallel with bracket (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822141686.2U CN209321758U (en) | 2018-12-20 | 2018-12-20 | A kind of silicon wafer non-contact transport apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822141686.2U CN209321758U (en) | 2018-12-20 | 2018-12-20 | A kind of silicon wafer non-contact transport apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209321758U true CN209321758U (en) | 2019-08-30 |
Family
ID=67727576
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822141686.2U Active CN209321758U (en) | 2018-12-20 | 2018-12-20 | A kind of silicon wafer non-contact transport apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209321758U (en) |
-
2018
- 2018-12-20 CN CN201822141686.2U patent/CN209321758U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108014739B (en) | Equipment for processing polyethylene | |
| CN207226442U (en) | A kind of chip material transfering device | |
| CN209321758U (en) | A kind of silicon wafer non-contact transport apparatus | |
| CN205855945U (en) | The biggest lid machine | |
| CN205312499U (en) | Semi -automatic product grass -hopper | |
| CN202201522U (en) | Air suction type automatic paper feeding device | |
| CN208135280U (en) | A kind of polycrystal silicon cell transmitting device | |
| CN204772018U (en) | Burnishing machine of round bar, pipe convenient to business turn over material | |
| CN105800256B (en) | A kind of battery core feeding device | |
| CN209321848U (en) | Mobile conveying pipeline | |
| CN217995837U (en) | 45-degree oblique roller and power belt guide device | |
| CN208377733U (en) | A kind of quick detachable delivery track | |
| CN210474342U (en) | Bolt production oiling station | |
| CN206502314U (en) | A kind of unregulated power drive-type production line conveyer | |
| CN109335561A (en) | Mobile conveying pipeline | |
| CN205590032U (en) | Automatic adsorption paper feeding device of carton printing | |
| CN110683297B (en) | Automatic carpet transfer device | |
| CN210735727U (en) | Pipeline conveying device | |
| CN221164474U (en) | Electronic device transferring and guiding connection structure | |
| CN220921815U (en) | Transmission device of glass edging machine | |
| CN209142978U (en) | A kind of automatic charging device | |
| CN210260364U (en) | Automatic stirring and feeding device | |
| CN108673257A (en) | One kind being based on five metalworking rust removing device for steel tube | |
| CN205708474U (en) | A kind of device for carrying hinge torsion spring | |
| CN218426340U (en) | Lifting lathe bed for laser cutting machine |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |