CN209296210U - Pressure sensor - Google Patents

Pressure sensor Download PDF

Info

Publication number
CN209296210U
CN209296210U CN201822129309.7U CN201822129309U CN209296210U CN 209296210 U CN209296210 U CN 209296210U CN 201822129309 U CN201822129309 U CN 201822129309U CN 209296210 U CN209296210 U CN 209296210U
Authority
CN
China
Prior art keywords
support member
shell
sensor
protruding portion
pressure sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201822129309.7U
Other languages
Chinese (zh)
Inventor
大泽朝华
中村俊晃
白井宽
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidec Tosok Corp
Original Assignee
Nidec Tosok Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nidec Tosok Corp filed Critical Nidec Tosok Corp
Application granted granted Critical
Publication of CN209296210U publication Critical patent/CN209296210U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Measuring Fluid Pressure (AREA)

Abstract

The utility model provides a kind of pressure sensor.Pressure sensor includes sensor element (5);Equipped with sensor element (5) and the sensor support member (4) that is made of metal material;Penetrate through the terminal (6) of sensor support member (4);And the shell (9) for being installed on sensor support member (4) and being made of nonmetallic materials, sensor support member (4) and shell (9) have the blocking portion (20) for preventing sensor support member (4) and shell (9) from being located remotely from each other.

Description

Pressure sensor
Technical field
The utility model relates to pressure sensors.
Background technique
Conventionally, there is known the pressure sensor of the pressure of fluids such as detection liquid, gas.For example, in Japanese Unexamined Patent Publication 2016- Documented pressure sensor has semiconductor pressure detecting element, pedestal, holds with what pedestal was oppositely disposed in No. 45172 bulletins Relay part and the partition being clamped between pedestal and undertake part, these are accommodated in cover.Here, in pedestal and partition Between be formed with enclose oil pressurized space.Semiconductor pressure detecting element is set to base with the state being configured in pressurized space Seat.Pedestal, undertake part and partition are made of metal respectively.Cover be made of metals such as stainless steels, by laser welding with The peripheral part of undertake part engages.Epoxy or polyurethane series resin are filled in the inside of cover.
In the pressure sensor documented by Japanese Unexamined Patent Publication 2016-45172 bulletin, since cover is by metals such as stainless steels It is made, therefore lightweight difficult to realize.Therefore, it may be considered that cover is made by resin etc. is nonmetallic, but recorded in the document Pressure sensor in, by it is nonmetallic cover is made in the case where, cover only passes through the bonding generated by the resin that is filled in cover Power and be fixed on pedestal.In this case, when the bonding force declines, then cover in cover resin and element etc. together It falls off from pedestal, it is possible to break down.
Utility model content
It can be fixed to each other the purpose of this utility model is to provide one kind with higher reliability biography made of metal The pressure sensor of sensor bearing part and the cover made of nonmetallic.
The pressure sensor of the illustrative utility model of the application includes
Sensor element, the sensor element export signal corresponding with the pressure of fluid;
Sensor support member, the sensor support member have the 1st interarea of side and opposite with the 1st interarea 2nd interarea of the other side, in the 1st interarea equipped with the sensor element, the sensor support member is by metal material It constitutes;
Terminal, the terminal are electrically connected with the sensor element, and have penetrated through institute from a side to the other side State sensor support member;And
Shell, the shell cover the 2nd interarea of the sensor support member, and are installed on the sensor Bearing part, the shell are made of nonmetallic materials,
The sensor support member and the shell, which have, prevents the sensor support member and the shell phase Mutually separate blocking portion.
In the above-described embodiment, periphery of the shell in the side contacted with the sensor support member has Oriented radial outside the 1st protruding portion of at least one outstanding, the sensor support member are included equipped with the sensor member The main part of part;And to radial outside protrusion and at least the 1 of the 1st protruding portion is secured from the peripheral part of the main part A 2nd protruding portion, the blocking portion have the 1st protruding portion and the 2nd protruding portion.
In the above-described embodiment, periphery of the shell in the side contacted with the sensor support member has Oriented radial outside flange part outstanding, the sensor support member include the main part equipped with the sensor element; And at least one protruding portion that is prominent and securing the flange part from the peripheral part of the main part to radial outside, it is described Blocking portion has the flange part and the protruding portion.
In the above-described embodiment, the protruding portion clamps the flange part in a thickness direction and calking fixation is described convex Edge.
In the above-described embodiment, at least one protruding portion includes multiple institutes of the circumferential array along the flange part State protruding portion.
In the above-described embodiment, at least one protruding portion includes multiple institutes of the circumferential array along the flange part State protruding portion.
In the above-described embodiment, the flange part has at least part of notch section for accommodating the protruding portion.
In the above-described embodiment, the flange part is set to the end of the side of the shell.
In the above-described embodiment, the thickness of the protruding portion is thinner than the thickness of the main part.
In the above-described embodiment, the protruding portion is configured at the position of the deviation other side of the main part.
In the above-described embodiment, the blocking portion have claw, the claw be set to the shell and with the biography The 1st interarea of sensor bearing part contacts.
In the above-described embodiment, the blocking portion have claw, the claw be set to the shell and with the biography The 1st interarea of sensor bearing part contacts.
In the above-described embodiment, the nonmetallic materials are resin materials.
In the above-described embodiment, the sensor support member is engaged with the shell by bonding agent.
In the above-described embodiment, the pressure sensor has installing component, and the installing component is relative to the biography Sensor bearing part is configured in the side, which has the flow path that the fluid is guided to the sensor element, And detachably it is installed on attached body.
In the above-described embodiment, partition, the partition configuration is in the installing component and the sensor support member Between;And pressure transmission medium, the pressure transmission medium are housed inside in the partition and the sensor support member Between in the space that is formed, and the pressure for being applied to the fluid of the partition is transmitted to the sensor element.
In the above-described embodiment, the attached body is vehicle-mounted control valve.
In the above-described embodiment, the attached body is vehicle-mounted control valve.
According to the illustrative utility model of the application, since sensor support member and shell have prevention sensor The blocking portion that bearing part and shell are located remotely from each other, therefore the sensing made of metal that can be fixed to each other with higher reliability Device bearing part and the cover made of nonmetallic.
By the detailed description of the preferred embodiments of the present invention below, referring to attached drawing, it can be more clearly understood that this Above-mentioned and other feature, element, step, the features and advantages of utility model.
Detailed description of the invention
Fig. 1 is the vertical profile view for the outline structure for showing pressure sensor involved in the 1st embodiment of the utility model Scheme (along the figure of axis ax cutting).
Fig. 2 is the longitudinal section view (figure of partial enlargement Fig. 1) for showing sensor support member and shell.
Fig. 3 is the longitudinal section view for schematically showing the stationary state of sensor support member and shell.
Fig. 4 is the top view for schematically showing the stationary state of sensor support member and shell.
Fig. 5 is the longitudinal section view for schematically showing the sensor support member before being fixed on shell.
Fig. 6 is other the longitudinal section view for schematically showing the sensor support member before being fixed on shell.
Fig. 7 is the biography for schematically showing pressure sensor involved in the 2nd embodiment of the utility model and having The top view (figure from the direction along axis ax) of the stationary state of sensor bearing part and shell.
Fig. 8 is the biography for schematically showing pressure sensor involved in the 3rd embodiment of the utility model and having The longitudinal section view of the stationary state of sensor bearing part and shell (along the figure of axis ax cutting).
Specific embodiment
Hereinafter, embodiment shown in reference to the accompanying drawings and the pressure sensor of the utility model is described in detail.
The 1st embodiment > of <
Fig. 1 is the vertical profile view for the outline structure for showing pressure sensor involved in the 1st embodiment of the utility model Scheme (along the figure of axis ax cutting).Fig. 2 is longitudinal section view (the partial enlargement Fig. 1 for showing sensor support member and shell Figure).Firstly, being illustrated according to outline of the Fig. 1 and Fig. 2 to pressure sensor 1 shown in these figures.
Hereinafter, for convenience of explanation, being illustrated suitably with axis ax shown in FIG. 1.Here, will be put down with axis ax Capable direction (up and down direction in Fig. 1) is referred to as " axial direction ", and the direction vertical with axis ax is referred to as " radial direction ", will be around with axis The direction of axis centered on ax is referred to as " circumferential direction ".Also, it in the axial direction, will be close to the side (mounting portion of aftermentioned attached body 2 side of part) it is referred to as " side " or " downside ", the side (side opposite with installing component 2) that will be far from attached body is referred to as " another Side " or " upside ".
In addition, axis ax is the central axis of pressure sensor 1, it is the center by aftermentioned sensor support member 4 And the line segment extended along the thickness direction of sensor support member 4.Also, " upside " and " downside " is not offered as pressure biography Positional relationship and direction of the sensor 1 when actual installation is in attached body.
Pressure sensor 1 shown in FIG. 1, which is installed on attached body (not shown), to be come using detecting from attached body The sensor of the pressure of fluid.Here, attached body is not particularly limited, but it is, for example, the automatic transmission for being used in automobile (AT) or the vehicle-mounted control valve of stepless transmission (CVT).Also, fluid (measured fluid) is not particularly limited, can also be with It is any of gas and liquid.Moreover, the conditions such as the type of fluid, temperature, pressure also and are not limited, but for example exist In the case that attached body is vehicle-mounted control valve above-mentioned, fluid is ATF (Automatic Transmission Fluid) Equal oil.
As shown in Figure 1, pressure sensor 1 includes the installing component 2 for being detachably installed on attached body;By every The sensor support member 4 that plate 3 is engaged with installing component 2;It is equipped on the sensor element 5 of sensor support member 4;And peace Shell 9 loaded on sensor support member 4.
Installing component 2 relative to sensor support member 4 configure in side (downside), and have along axially through perforation Hole 21.Fluid from attached body is imported into through hole 21 from downside.Draw that is, through hole 21 is constituted to sensor element 5 Lead the flow path of the fluid from attached body.Also, installing component 2 includes the external thread part 22 along axial arrangement;And setting In the head 23 of the end of the upside of external thread part 22.External thread part 22 and the internal screw-thread screw for being set to attached body.From axis To when observation, head 23 is for example hexagonal, can be clamped using tools such as spanners.
There is such installing component 2 by pressure sensor 1, pressure sensor 1 can be simply installed on Attached body.Also, pressure sensor 1 can also be dismantled from attached body and safeguarded etc..Also, in external thread part 22 The end of 23 side of head is for example configured with O-ring 14 made of rubber.It, can be by pressure sensor 1 by the O-ring 14 The leakproofness ensured between pressure sensor 1 and attached body is installed in the state of attached body.In addition, installing component 2 It wants that attached body can be installed on, is not limited to the mode with external thread part 22 above-mentioned.
Installing component 2 is made of metal material.It as the metal material, is not particularly limited, but can for example fit Preferably using stainless steels such as SUS304.By constituting installing component 2 by such metal material, installing component 2 can be improved Heat resistance, relative to patience of fluid etc..Installing component 2 is for example manufactured and casting and cutting.
Sensor support member 4 is installed by partition 3 in the end of the upside of such installing component 2.Here, partition 3 and sensor support member 4 be made of respectively stainless steel and other metal materials, engaged by welding with installing component 2.
In this way, if any of installing component 2, partition 3 and sensor support member 4 are made of metal material, It is then for example inferior the case where attached body is vehicle-mounted control valve, even if the measured fluid of pressure sensor 1 is high temperature Oil, pressure sensor 1 can also play excellent durability.
Partition 3 is plate-like or sheet, is configured between installing component 2 and sensor support member 4, closes installation above-mentioned The opening of the other side of the through hole 21 of component 2.Accordingly, with respect to partition 3, it is formed in downside by installing component 2 above-mentioned Through hole 21 constitute the 1st Room S1.Moreover, partition 3 due to the fluid in the 1st Room S1 pressure and deflection deformation.Another party Face, in upside, is formed with the 2nd Room S2 relative to partition 3 between partition 3 and sensor support member 4.In the 2nd Room S2 content It receives sensor element 5, and fills (receiving) pressure transmission medium, the pressure transmission medium is by partition 3 out of the 1st Room S1 The pressure that liquid is subject to is transmitted to sensor element 5.
In this way, the pressure of fluid is transmitted to sensor element 5 and using partition 3 and pressure transmission medium, i.e., So that sensor element 5 is not had the patience relative to fluid, also can prevent sensor element 5 from damaging because of the fluid, and It is able to detect the pressure of fluid.As the pressure transmission medium, liquid can be properly used.It is especially first to sensor from reducing The adverse effect of part 5 and from the viewpoint of reducing pressure transmission medium because of the characteristic variations of the generations such as temperature change, is preferably pressed Power transfer medium is for example using the liquid of such as silicone oil.This is because silicone oil has good insulating properties, excellent chemical stability And higher boiling point.In addition, also can be omitted partition 3 in the case where sensor element 5 has the patience relative to fluid And pressure transmission medium.
Also, sensor support member 4 is by the plate of thickness direction of axial direction by being constituted, such as through punch process in Centre portion becomes dome-type mode to the other side (upside) and is formed.Sensor support member 4 have side the 1st interarea 43 and with 2nd interarea 44 of the opposite other side of the 1st interarea 43.The 2nd Room S2 is formd between the 1st interarea 43 and partition 3.Such The central portion of 1st interarea 43 is equipped with sensor element 5.Here, sensor element 5 is such as utilizing bonding agent fluorine system bonding agent And it is engaged with the 1st interarea 43.
Sensor element 5 is the element for exporting signal corresponding with compression.Although not shown, sensor element 5 for example includes Silicon substrate with the partition configured with piezoresistance element;And the glass substrate engaged with the silicon substrate.In these substrates Between be formed with closed space, partition deflection deformation due to compression on the basis of the pressure in the space.Then, the pressure Electric resistive element exports signal corresponding with the deflection deformation.In addition, the mode for detecting the deflection deformation of the partition does not limit In in the way of piezoresistance element, such as be also possible to electrostatic capacity etc..
Also, sensor support member 4 has the multiple through holes 45 being open in the 1st interarea 43 and the 2nd interarea 44.? It is through with terminal 6 respectively in multiple through holes 45, filled with close in the gap between the wall surface and terminal 6 of regulation through hole 45 Sealing 7.Terminal 6 is guide pins, such as is made of metal materials such as iron-nickel alloys.At least two terminal 6 in multiple terminals 6 The end of downside is connect by closing line with sensor element 5.Also, sealing element 7 is such as the glass material as pyrex Material is constituted, and seals gap above-mentioned.
Shell 9 is installed in the 2nd interarea 44 of sensor support member 4.Here, shell 9 is for example bonded using epoxy The bonding agents such as agent 15 and it is Nian Jie with the 2nd interarea 44.In this way, sensor support member 4 is engaged with shell 9 by bonding agent 15.By This, can be fixed on sensor support member 4 for shell 9.Also, by utilizing 15 filling sensor bearing part 4 of bonding agent With the gap between shell 9, the leakproofness in shell 9 can be improved.
Also, there is prevention sensor support member 4 and shell 9 to be located remotely from each other for sensor support member 4 and shell 9 Blocking portion 20.Even if deterioration of bonding agent 15 etc. as a result, also can reduce sensor support member 4 and the separate possibility of shell 9 Property.In addition, blocking portion 20 and item related to this are described in detail later.
As shown in Fig. 2, shell 9 has the housing body 91 to the bottomed tube of lower opening.Housing body 91 have to The recess portion 93 of 4 side opening of sensor support member.Also, it is inserted as shown in Figure 1, shell 9 is included for male type connector (not shown) The recess portion 131 entered;And the terminal 12 outstanding into recess portion 131.Terminal 12 is electrically connected with terminal 6 above-mentioned.In addition, terminal 12 It can directly connect, can also be connect with terminal 6 by electronic components such as circuit boards with terminal 6.
More than, pressure sensor 1 is outlined.It has been observed that the pressure sensor 1 includes output and fluid The corresponding signal of pressure sensor element 5;Sensor support member 4 equipped with sensor element 5;From a side to another The terminal 6 of side perforation sensor support member 4;And it is installed on the shell 9 of sensor support member 4.
Sensor support member 4 has the 1st interarea 43 of side and the 2nd master of the other side opposite with the 1st interarea 43 Face 44, and be made of metal material.Moreover, sensor element 5 is equipped on the central portion of the 1st interarea 43.Also, terminal 6 from one The lateral other side penetrates through sensor support member 4.On the other hand, shell 9 covers the 2nd interarea 44 of sensor support member 4, and It is made of nonmetallic materials.
It has been observed that such sensor support member 4 and shell 9, which have, prevents sensor support member 4 and 9 phase of shell Mutually separate blocking portion 20.By the part (aftermentioned each protruding portion 42) for constituting 4 side of sensor support member of blocking portion 20 Clamping constitutes the part (aftermentioned flange part 92) of 9 side of shell of blocking portion 20 in a thickness direction and calking is fixed, and shell 9 exists It is supported on axial by sensor support member 4.Also, inclined surface (the sensing of the 2nd interarea 44 by sensor support member 4 The outer diameter of device bearing part 4 is with the outer peripheral surface of part that becomes smaller towards axial upside) with the inner peripheral surface of housing body 91 The contact of inclined surface (inner peripheral surface for the part that the internal diameter of housing body 91 becomes smaller with the axial upside of direction), housing body 91 (shell 9) is placed in the middle on the direction central axis ax and becomes axis aligned state.The shell 9 made of nonmetallic is stablized as a result, Ground, which is fixed on, sensor support member 4 made of metal.Hereinafter, according to fig. 2 to Fig. 6 to blocking portion 20 and related to this Item is described in detail.
Fig. 3 is the longitudinal section view for schematically showing the stationary state of sensor support member and shell.Fig. 4 is schematic Ground shows the top view of the stationary state of sensor support member and shell.Fig. 5 is to schematically show before being fixed on shell Sensor support member longitudinal section view.Fig. 6 is the sensor support member schematically shown before being fixed on shell Other longitudinal section view.
As shown in figure 3, shell 9 includes the housing body 91 to the bottomed tube of lower opening;And it is set to shell master The end of the downside of body 91 and radially flange part 92 outstanding.Housing body 91, which has to 4 side of sensor support member, to be opened The recess portion 93 of mouth.Flange part 92 is set to the end of 4 side of sensor support member of shell 9, and is set to housing body 91 In circumferential whole region.In this way, shell 9 is in the periphery contacted with sensor support member 4 with outstanding to radial outside Flange part 92 as the 1st protruding portion.
Here, flange part 92 is affixed to the part of the protruding portion 42 of aftermentioned sensor support member 4.It has been observed that convex Edge 92 is set to the end of 4 side of sensor support member (side) of shell 9.Thereby, it is possible to shorten flange part 92 and protrude The distance between portion 42, therefore flange part 92 can be simply fixed on protruding portion 42.
In addition, in the present embodiment, flange part 92 is equivalent to " the 1st protruding portion ", the quantity of " the 1st protruding portion " is 1, But the quantity of " the 1st protruding portion " be also possible to it is multiple.In this case, as long as by multiple 1st protruding portions in housing body 91 Circumferential direction on be arranged.Also, circumferential a part in housing body 91 also can be set in " the 1st protruding portion ".
From the viewpoint of the lightweight of shell 9, as long as the constituent material nonmetallic materials of such shell 9, It is also possible to ceramic material etc., it is preferred that being resin material.By being made of shell 9 resin material, shell can not only be realized The lightweight of body 9, and even if shell 9 it is complex-shaped, also simple and high-precision landform for example can be formed by injection At shell 9.Also, shell 9 can also be improved using the cementability of bonding agent 15.As related resin material, spy is had no It does not limit, but for example, PPS (Polyphenylene sulfide) resin etc. of excellent heat resistance.Also, it can also To add in related resin material, fibers, alumina particle, the zirconia particles such as glass fibre, carbon fiber etc. are inorganic to be filled out Material etc..
On the other hand, sensor support member 4 is in as upside becomes dome-type shape to center portion in the axial direction, comprising: Main part 41 equipped with sensor element 5;And it is outstanding prominent as the 2nd from the peripheral part of main part 41 to radial outside The multiple protruding portion 42 in portion.
Moreover, each protruding portion 42 secures flange part 92, multiple protruding portion 42 and flange part 92 constitute blocking portion 20. That is, blocking portion 20 has multiple protruding portion 42 and flange part 92.In this way, securing flange part 92, energy by each protruding portion 42 The peripheral part for shell 9 and the sensor support member 4 of being enough fixed to each other is each other.Thus, it is possible to reduce shell 9 and sensor branch Complex-shapedization of part other than the peripheral part of bearing portion part 4.Therefore, it can substantially ensure in shell 9 and sensor branch The space of other elements is set on the 2nd interarea 44 of bearing portion part 4, as a result, being easy design.Also, since flange part 92 is along shell The circumferential of body 9 exists, there is no need to carry out sensor support member 4 and shell 9 in the circumferential be aligned or this is aligned becomes Simply.
In the present embodiment, each protruding portion 42 is contacted with the upper surface of flange part 92, in each protruding portion 42 and main part Clamped flanges portion 92 between 41 upper surface and calking is fixed.Calking in this way is fixed, can be with fairly simple structure Mutually firmly fix flange part 92 and each protruding portion 42.Such protruding portion 42 is in the state of before by calking, Ke Yiru It radially extends as shown in Figure 5, it can also upside extension in the axial direction as shown in Figure 6.In mode as shown in Figure 5, Have the advantages that be easy by punch process formed sensor support member 4 this.Also, in mode as shown in FIG. 6, tool There is the advantages of easy calking processing.
Also, as shown in figure 4, multiple protruding portion 42 is configured along the circumferential array of flange part 92.In the present embodiment, it dashes forward The quantity in portion 42 is 3 out, and 3 protruding portions 42 are equiangularly alternatively arranged in the circumferential.Configuration in this way, can reduce Shell 9 and the positional shift in the radial direction of sensor support member 4.
In addition, the quantity of protruding portion 42 is not limited to 3, it is also possible to 2 or less or 4 or more, but is being 3 In the case where above, the effect for reducing shell 9 and the positional shift in the radial direction of sensor support member 4 can be suitably improved Fruit.Also, the position of protruding portion 42 in the circumferential may not be equiangularly spaced.Also, in the example shown, multiple protruding portion 42 Width (length in circumferential direction) be equal to each other, but can also be different from each other.
The thickness t2 of each protruding portion 42 is thinner than the thickness t1 of main part 41.By the way that thickness t1, t2 are set as such size Relationship can be improved the rigidity of main part 41, and each protruding portion 42 can be set to obtain relatively thin and easy calking.
Here, each protruding portion 42 is configured at the position of 9 side of deviation shell (other side) of main part 41.Match in this way Each protruding portion 42 is set, space corresponding with the difference of thickness t1, t2 can be formed in downside relative to each protruding portion 42.The space It can be used as installing component 2 by welding working space when engaging with the 1st interarea 43 of sensor support member 4.Cause This, can easily be done the welding.
Also, the ratio between thickness t2 and thickness t1 (t2/t1) are not particularly limited, it is preferred that for 0.1 or more and 0.7 with Under, more preferably 0.2 or more and 0.5 or less.By being set as such ratio, without necessary with Shangdi thickeies main part 41 and can Take into account the necessary rigidity of main part 41 and the calking easness of each protruding portion 42.Further, it is possible to be readily formed as the aforementioned Welding space.
As the constituent material of such sensor support member 4, as long as metal material, is not particularly limited, But from less expensive and ease of processing it is excellent from the viewpoint of, preferred ferrous material, from the sight of excellent corrosion resistance From the point of view of point, the stainless steels such as preferably SUS304.
The 2nd embodiment > of <
Fig. 7 is the biography for schematically showing pressure sensor involved in the 2nd embodiment of the utility model and having The top view (figure from the direction along axis ax) of the stationary state of sensor bearing part and shell.Hereinafter, to shown in Fig. 7 The 2nd embodiment be illustrated, but the description thereof will be omitted about item identical with the 1st embodiment above-mentioned.In addition, In Fig. 7, identical symbol is marked to the structure being the same as the foregoing embodiment.
Pressure sensor 1A shown in Fig. 7 replaces the shell 9 of the 1st embodiment above-mentioned and has shell 9A.The shell 9A has housing body 91 and is set to the flange part 92A of the end of the downside of housing body 91.Moreover, multiple protruding portion 42 with And flange part 92A constitutes blocking portion 20A.Here, being provided with multiple notch sections 94, multiple notch sections 94 and biography in flange part 92A The multiple protruding portion 42 of sensor bearing part 4 is accordingly formed in Rectangle Resection.The notch section 94 has the week with protruding portion 42 To the opposite face in side.
In this way, flange part 92A has at least part of notch section 94 for accommodating protruding portion 42.By in notch section 94 Protruding portion 42 is accommodated, shell 9A can be prevented relative to the postural change in the circumferential direction of sensor support member 4.Also, solid Fixed shell 9A and when sensor support member 4, additionally it is possible to carry out shell 9A with sensor support member 4 being aligned in the circumferential.
In addition, the quantity of protruding portion 42 is equal with the quantity of notch section 94 in Fig. 7, but their quantity can also be with It is different.Also, there may also be the protruding portions 42 not being contained in notch section 94, or there is the notch for not accommodating protruding portion 42 Portion 94.Also, the quantity of protruding portion 42 and notch section 94 is also possible to 2 or less or 4 or more.Also, notch section 94 is simultaneously It is not limited to shape, the size etc. of diagram.In the example shown, shape, the size etc. of multiple notch sections 94 are equal to each other, but can also With different from each other.
It, also can be in the same manner as the 1st embodiment above-mentioned with higher reliability by the 2nd such as above embodiment Be fixed to each other the sensor support member 4 and shell 9A made of nonmetallic made of metal.
The 3rd embodiment > of <
Fig. 8 is the biography for schematically showing pressure sensor involved in the 3rd embodiment of the utility model and having The longitudinal section view of the stationary state of sensor bearing part and shell (along the figure of axis ax cutting).Hereinafter, to the shown in Fig. 8 3rd Embodiment is illustrated, but the description thereof will be omitted about item identical with the 1st embodiment above-mentioned.In addition, in Fig. 8 In, the same symbol is marked to the structure being the same as the foregoing embodiment.
Pressure sensor 1B shown in Fig. 8 replaces the sensor support member 4 and shell 9 of the 1st embodiment above-mentioned And there is sensor support member 4B and shell 9B.Shell 9B includes housing body 91;It is set under housing body 91 The flange part 92 of the end of side;And from the downward side of flange part 92 multiple claws 95 outstanding.Moreover, multiple claws 95 and biography The main part 41 of sensor bearing part 4B constitutes blocking portion 20B.Here, the terminal part of claw 95 is prominent to radially inner side, and with The face contact of the downside of main part 41.It is provided in the main part 41 of sensor support member 4B to downside and radial outside and opens The terminal part of the recess portion 47 put, claw 95 enters in the recess portion 47.In addition, as long as the terminal part and main part of claw 95 can be made The face contact of 41 downside then also can be omitted recess portion 47.
In this way, blocking portion 20B has the pawl for being set to shell 9B and contacting with the 1st interarea 43 of sensor support member 4B Portion 95.Shell 9B with such claw 95 can make 95 flexible deformation of claw be installed on sensor support member 4B.Cause This, can simplify installation of the shell 9B relative to sensor support member 4B.
It, also can be in the same manner as the 1st embodiment above-mentioned with higher reliability by the 3rd such as above embodiment Be fixed to each other the sensor support member 4B made of metal and shell 9B made of nonmetallic.In addition, the 3rd embodiment It can be combined with the 1st embodiment above-mentioned or the 2nd embodiment.
More than, it is illustrated according to pressure sensor of the embodiment illustrated to the utility model, but this is practical Novel it's not limited to that, and the structure of each section can be replaced into the arbitrary structure of function having the same.Also, it can also be with Any other works is added in the present invention.

Claims (18)

1. a kind of pressure sensor comprising:
Sensor element, the sensor element export signal corresponding with the pressure of fluid;
Sensor support member, the sensor support member have the 1st interarea of side and opposite with the 1st interarea another 2nd interarea of side, in the 1st interarea equipped with the sensor element, and the sensor support member is by metal material It constitutes;
Terminal, the terminal are electrically connected with the sensor element, and have penetrated through the biography from a side to the other side Sensor bearing part;And
Shell, the shell cover the 2nd interarea of the sensor support member, and are installed on the sensor bearing Component, the shell are made of nonmetallic materials,
The sensor support member and the shell, which have, prevents the sensor support member and the shell mutually remote From blocking portion.
2. pressure sensor according to claim 1, which is characterized in that
Periphery of the shell in the side contacted with the sensor support member has outstanding extremely to radial outside Few 1 the 1st protruding portion,
The sensor support member includes the main part equipped with the sensor element;And outside the main part Circumference is prominent to radial outside and secures the 2nd protruding portion of at least one of the 1st protruding portion,
The blocking portion has the 1st protruding portion and the 2nd protruding portion.
3. pressure sensor according to claim 1, which is characterized in that
Periphery of the shell in the side contacted with the sensor support member has outstanding convex to radial outside Edge,
The sensor support member includes the main part equipped with the sensor element;And outside the main part Circumference is prominent to radial outside and secures at least one protruding portion of the flange part,
The blocking portion has the flange part and the protruding portion.
4. pressure sensor according to claim 3, which is characterized in that
The protruding portion clamps the flange part in a thickness direction and calking fixes the flange part.
5. pressure sensor according to claim 3, which is characterized in that
At least one protruding portion includes multiple protruding portions of the circumferential array along the flange part.
6. pressure sensor according to claim 4, which is characterized in that
At least one protruding portion includes multiple protruding portions of the circumferential array along the flange part.
7. pressure sensor according to claim 3, which is characterized in that
The flange part has at least part of notch section for accommodating the protruding portion.
8. pressure sensor according to claim 3, which is characterized in that
The flange part is set to the end of the side of the shell.
9. pressure sensor according to claim 3, which is characterized in that
The thickness of the protruding portion is thinner than the thickness of the main part.
10. pressure sensor according to claim 8, which is characterized in that
The protruding portion is configured at the position of the deviation other side of the main part.
11. pressure sensor as claimed in any of claims 1 to 9, which is characterized in that
The blocking portion have claw, the claw be set to the shell and with the sensor support member the described 1st Interarea contact.
12. pressure sensor according to claim 3, which is characterized in that
The blocking portion have claw, the claw be set to the shell and with the sensor support member the described 1st Interarea contact.
13. pressure sensor according to claim 1, which is characterized in that
The nonmetallic materials are resin materials.
14. pressure sensor according to claim 1, which is characterized in that
The sensor support member is engaged with the shell by bonding agent.
15. pressure sensor according to claim 1, which is characterized in that
The pressure sensor has installing component, and the installing component is configured relative to the sensor support member described Side, which has the flow path that the fluid is guided to the sensor element, and is detachably installed on and is pacified Fill body.
16. pressure sensor according to claim 15 comprising:
Partition, the partition configuration is between the installing component and the sensor support member;And
Pressure transmission medium, the pressure transmission medium are housed inside the shape between the partition and the sensor support member At space in, and the pressure for being applied to the fluid of the partition is transmitted to the sensor element.
17. pressure sensor according to claim 15, which is characterized in that
The attached body is vehicle-mounted control valve.
18. pressure sensor according to claim 16, which is characterized in that
The attached body is vehicle-mounted control valve.
CN201822129309.7U 2017-12-21 2018-12-18 Pressure sensor Expired - Fee Related CN209296210U (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017244833A JP7087375B2 (en) 2017-12-21 2017-12-21 pressure sensor
JP2017-244833 2017-12-21

Publications (1)

Publication Number Publication Date
CN209296210U true CN209296210U (en) 2019-08-23

Family

ID=67222413

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201822129309.7U Expired - Fee Related CN209296210U (en) 2017-12-21 2018-12-18 Pressure sensor

Country Status (2)

Country Link
JP (1) JP7087375B2 (en)
CN (1) CN209296210U (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1114485A (en) * 1997-06-24 1999-01-22 Fuji Koki Corp Pressure sensor
JP2003287472A (en) 2002-03-28 2003-10-10 Fuji Koki Corp Pressure sensor
JP5157797B2 (en) * 2008-10-01 2013-03-06 株式会社デンソー Pressure sensor
DE102012222089A1 (en) 2012-12-03 2014-06-05 Robert Bosch Gmbh Pressure sensor module

Also Published As

Publication number Publication date
JP7087375B2 (en) 2022-06-21
JP2019113332A (en) 2019-07-11

Similar Documents

Publication Publication Date Title
US9310229B2 (en) Sensor system and method for manufacturing a sensor system
EP1984718B1 (en) Thick film technology based ultra high pressure sensor utilizing integral port and diaphragm construction
EP3128305B1 (en) A hermetic pressure sensor
EP3111182B1 (en) Differential pressure sensor
EP2749855A2 (en) Method of integrating a temperature sensing element
KR102006750B1 (en) Sensor assembly for measuring temperature or pressure
EP3111184B1 (en) Differential pressure sensing die
CA2940296A1 (en) Package for a differential pressure sensing die
CN110763392A (en) Physical quantity measuring sensor and sensor module
KR102587393B1 (en) Integrated pressure and temperature sensor
KR102169778B1 (en) Pressure sensor arrangement for detecting a pressure of a fluid medium in a measurement chamber
CN209296210U (en) Pressure sensor
JP6163148B2 (en) Pressure sensor
JP7005550B2 (en) Manufacturing method of physical quantity measuring device and physical quantity measuring device
CN211877068U (en) Sensor with a sensor element
CN209296205U (en) Pressure sensor
KR102365216B1 (en) Pressure sensor for detecting a pressure of a liquid medium in a measuring chamber
JP2014095558A (en) Connection component, and differential pressure/pressure transmitter
JP2014517316A (en) Pressure sensor device for detecting the pressure of a fluid medium in a measurement chamber
CN209606007U (en) Pressure sensor
CN214893828U (en) Pressure sensor
JP4952271B2 (en) Pressure sensor
JP3991787B2 (en) Pressure sensor
JP6357454B2 (en) Pressure detection device
JP2004045217A (en) Pressure sensor

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20190823