CN209256648U - Grinding device - Google Patents
Grinding device Download PDFInfo
- Publication number
- CN209256648U CN209256648U CN201821997440.9U CN201821997440U CN209256648U CN 209256648 U CN209256648 U CN 209256648U CN 201821997440 U CN201821997440 U CN 201821997440U CN 209256648 U CN209256648 U CN 209256648U
- Authority
- CN
- China
- Prior art keywords
- grinding
- grinding head
- head structure
- air extractor
- discharge chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000227 grinding Methods 0.000 title claims abstract description 154
- 239000003344 environmental pollutant Substances 0.000 claims abstract description 36
- 231100000719 pollutant Toxicity 0.000 claims abstract description 36
- 238000005086 pumping Methods 0.000 claims description 17
- 238000009434 installation Methods 0.000 claims description 16
- 239000007787 solid Substances 0.000 claims description 2
- 239000002245 particle Substances 0.000 abstract description 14
- 230000000694 effects Effects 0.000 abstract description 12
- 239000013078 crystal Substances 0.000 abstract description 5
- 238000010521 absorption reaction Methods 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000000356 contaminant Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 239000007788 liquid Substances 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000000740 bleeding effect Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000007717 exclusion Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000011982 device technology Methods 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000013618 particulate matter Substances 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Landscapes
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
The utility model provides a kind of grinding device, comprising: grinding head structure；And air extractor, it is set to above grinding head structure, to remove the pollutant on grinding head structure.The grinding device of the utility model, pass through the setting of air extractor, removing the pollutants such as the particle in the structures such as grinding head prevents influence of the pollutant to grinding wafer effect to prevent above-mentioned pollutant from falling on grinding crystal wafer, improve particle to be scattered risk, grinding effect is promoted, reduces wafer and therefore causes the case where scrapping, simultaneously, air extractor is improved, moveable exhaust chamber is conducive to the replacement of the grinding head structure of grinding device.
Description
Technical field
The utility model belongs to semi-conductor device technology field, more particularly to a kind of grinding device.
Background technique
Grinding is the common means of field of semiconductor manufacture, and the capital equipment of grinding generally comprises: grinding table, grinding pad
(Pad), grinding head, grinding pad are set on grinding table, and wafer to be ground, wafer and grinding pad to be ground are equipped on grinding head
Contact, lapping liquid flow to the surface of grinding pad with certain rate, and grinding head applies certain pressure to wafer to be ground, so that
The face to be ground of wafer to be ground and grinding pad generate Mechanical Contact, and during the grinding process, grinding head, grinding table rotation pass through
Mechanically and chemically effect removes the film of crystal column surface to be ground, to achieve the purpose that flattening wafer surface to be ground.
In traditional process of lapping, in chemical mechanical planarization process, grinding head top has lapping liquid crystallization
Grain generates, once particle is fallen on grinding pad, will result in grinding wafer effect and is affected, and causes wafer to be scratched scarce
It falls into, will lead to full wafer wafer loss when serious, equally, other pollutants or rotary shaft rotation in the structures such as grinding head etc.
The pollutant of generation may also be fallen, and also will affect wafer quality.
Therefore, how a kind of grinding device is provided, is necessary with solving the above problem in the prior art.
Utility model content
In view of the foregoing deficiencies of prior art, it the purpose of this utility model is to provide a kind of grinding device, is used for
The pollutant in the structures such as grinding head in the prior art is solved to fall on the problems such as the influence of the quality of grinding crystal wafer.
In order to achieve the above objects and other related objects, the utility model provides a kind of grinding device, comprising:
Grinding head structure；And
Air extractor is set to above the grinding head structure, to remove the pollutant on the grinding head structure.
As a kind of optinal plan of the utility model, the grinding device further includes rotary shaft and fixed bracket, wherein
The rotary shaft is connected between the fixed bracket and the grinding head structure, and the air extractor is set to the rotary shaft
Periphery and between the grinding head structure and the fixed bracket.
As a kind of optinal plan of the utility model, the grinding device further includes support holder structure, the support holder structure
Be set to the periphery of the rotary shaft and between the air extractor and the fixed bracket and with the fixed bracket phase
Contact.
As a kind of optinal plan of the utility model, the air extractor include exhaust chamber and with the discharge chamber
The gas exhaust piping that room is connected, wherein the exhaust chamber in a ring and is placed on the periphery of the rotary shaft.
As a kind of optinal plan of the utility model, shape between the inner annular edge of the exhaust chamber and the rotary shaft
At a gap, the gap is between 3mm-10mm；The outer ring edge of the exhaust chamber is in the upper of the grinding head structure
The distance between outer rim of the orthographic projection on surface and the grinding head structure is less than or equal to 1mm；The bottom of the exhaust chamber with
The distance between upper surface of the grinding head structure is between 8mm-15mm.
As a kind of optinal plan of the utility model, the exhaust chamber includes at least two discharge chamber units, described
Air extractor includes at least two gas exhaust pipings, wherein and each discharge chamber unit spliced forms the exhaust chamber, and
Each discharge chamber unit is respectively corresponded to be connected with a gas exhaust piping.
As a kind of optinal plan of the utility model, the air extractor further includes driving device, the driving device
It is connected with each discharge chamber unit, to drive the movement of each discharge chamber unit.
As a kind of optinal plan of the utility model, the driving device includes at least one of cylinder and motor,
When the driving device includes the cylinder, the cylinder drives the discharge chamber unit mobile by a connection structure, and
The cylinder is set on the fixed bracket.
As a kind of optinal plan of the utility model, the grinding device further includes control device, the air extractor
It further include being connected to be evacuated pump installation with the exhaust chamber, wherein the control device is connected with the driving device, with
The driving device work is controlled, the control device is connected with the pumping pump installation, to control the pumping pump installation
Work.
As a kind of optinal plan of the utility model, the air extractor further includes at least two and the discharge chamber list
The corresponding track-type facilities of member, wherein the track-type facilities are set on the fixed bracket, and the discharge chamber unit is along corresponding
The track-type facilities are mobile.
As described above, the grinding device of the utility model is removed in the structures such as grinding head by the setting of air extractor
The pollutants such as particle prevent pollutant to the shadow of grinding wafer effect to prevent above-mentioned pollutant from falling on grinding crystal wafer
It rings, improves particle and be scattered risk, promote grinding effect, reduce wafer and therefore cause the case where scrapping, meanwhile, pumping is filled
It sets and improves, moveable exhaust chamber is conducive to the replacement of the grinding head structure of grinding device.
Detailed description of the invention
Fig. 1 is shown as the structural schematic diagram of the grinding device of one example of the utility model offer.
Fig. 2 is shown as the structural schematic diagram for the grinding device that another example of the utility model provides.
Fig. 3 is shown as the structural schematic diagram of the cylinder of one example of the utility model offer.
Fig. 4 is shown as the mounting structure schematic diagram of the cylinder of the offer of one example of the utility model offer.
Fig. 5 is shown as the structural schematic diagram of the grinding device of the utility model comparative example offer.
Component label instructions
100 grinding head structures
101 rotary shafts
102 fixed brackets
103 exhaust chamber
103a discharge chamber unit
104 gas exhaust pipings
105 cylinders
105a air inlet
105b exhaust outlet
106 track-type facilities
107 connection structures
108 control devices
109 support holder structures
110 pollutants
200 grinding pads
300 grinding pads
301 grinding head structures
302 rotary shafts
303 fixed brackets
304 support holder structures
305 bearings
306 pollutants
Specific embodiment
The embodiments of the present invention is illustrated by particular specific embodiment below, those skilled in the art can be by this
Content disclosed by specification understands other advantages and effect of the utility model easily.
Fig. 1 is please referred to Fig. 5.It should be clear that this specification structure depicted in this specification institute accompanying drawings, ratio, size etc., only to
Cooperate the revealed content of specification, so that those skilled in the art understands and reads, is not intended to limit the utility model
Enforceable qualifications, therefore do not have technical essential meaning, the modification of any structure, the change of proportionate relationship or size
Adjustment, in the case where not influencing the effect of the utility model can be generated and the purpose that can reach, should all still fall in the utility model
Revealed technology contents obtain in the range of capable of covering.Meanwhile in this specification it is cited as "upper", "lower", " left side ",
The term on " right side ", " centre " and " one " etc. is merely convenient to being illustrated for narration, rather than enforceable to limit the utility model
Range, relativeness are altered or modified, under the content of no substantial changes in technology, enforceable when being also considered as the utility model
Scope.
As shown in Figs 1-4, the utility model provides a kind of grinding device, comprising:
Grinding head structure 100；And
Air extractor is set to 100 top of grinding head structure, to remove the pollutant on the grinding head structure
110。
Specifically, the utility model provides a kind of grinding device, it is such as used for the grinding device of chemical mechanical grinding, is ground at this
In mill apparatus, an air extractor is set, so as to by the pollutant removal on grinding head structure 100, wherein pollutant can be with
It is particulate contaminants, such as in conventional chemical-mechanical process of lapping, grinding head structure top has the production of lapping liquid crystalline particle
It is raw, once particle is fallen on grinding pad 200, it will result in grinding wafer effect and receive influence, will lead to full wafer when serious
Wafer loss, and the utility model is by way of increasing air extractor, it can be by way of pumping by dirts such as these particles
Object removal is contaminated, air suction mode can be negative pressure ventilation mode, and air extractor, which can be, picks up the pollutant on grinding head structure
Device.
As an example, the grinding device further includes rotary shaft 101 and fixed bracket 102, wherein the rotary shaft 101
It is connected between the fixed bracket 102 and the grinding head structure 100, the air extractor is set to the rotary shaft 101
Periphery and between the grinding head structure 100 and the fixed bracket 102.
Specifically, in one example, shown in Figure 1, grinding device provided by the utility model further includes rotary shaft 101
And fixed bracket 102, wherein the rotary shaft (spindle) 101 is connected with the grinding head structure 100, rotary shaft
(spindle) grinding wheel head structure (head) synchronous rotating shaft can be driven to be ground, can such as cooperate with a bearing (bearing) into
Row rotation, it is shown in Figure 5, cooperated with bearing 305, in addition, the fixed bracket (Carriage) 102, can be one
End is connected with the rotary shaft, and the structure that the other end is connected with a guide rail, the fixed bracket 102 can be led with along described
Rail is slided, and if guide rail can be a ring-shaped guide rail, the fixed bracket 102 can be rotated around ring-shaped guide rail, be arrived
It can be fixed on guide rail after up to designated position, at this point, rotary shaft 101 can drive grinding head structure 100 is synchronous to turn
Axis is ground, and further, in one example, multiple fixed brackets 102 can be set on a guide rail.In this example, institute
State air extractor be set to the periphery of the rotary shaft 101 and be located at the grinding head structure 100 and the fixed bracket 102 it
Between.
As an example, the grinding device further includes support holder structure 109, the support holder structure 109 is set to the rotation
It the periphery of axis 101 and is in contact between the air extractor and the fixed bracket 102 and with the fixed bracket 102.
Specifically, in one example, the grinding device further includes a support holder structure 109, as shown in Fig. 2, the pallet
The top of the grinding head structure 100 is arranged in structure 109, and in one example, and the support holder structure 109 in a ring and is nested with
In the periphery of the rotary shaft 101, wherein the support holder structure 109, which can receive, stops particulate matter etc., also has support holder structure
The molecule of interior accumulation can be fallen with the movement of component, be fallen on grinding head structure and grinding pad, thus
Cause the defect that wafer is scratched, in one example, orthographic projection of the outer rim of support holder structure 109 on grinding head structure 100 is small
In the size of grinding head structure outer rim, in another optional example, the support holder structure be located at the air extractor with it is described solid
Between fixed rack 102, so as to receive the pollutant on top, prevent the pollutants such as particle to the subsequent wafer for needing to grind
Influence, in a further example, as shown in Fig. 2, the support holder structure is in contact with the fixed bracket, i.e. support holder structure
Support bracket fastened lower surface is close in upper surface, so that the air extractor for being further conducive to lower section removes depollution by pumping
Object.
As an example, the air extractor includes exhaust chamber 103 and the exhaust that is connected with the exhaust chamber 103
Pipeline 104, wherein the exhaust chamber 103 in a ring and is placed on the periphery of the rotary shaft 101.
Specifically, in one example, referring to shown in Fig. 1 and Fig. 2, providing a kind of structure of air extractor, including discharge chamber
Room 103 and gas exhaust piping 104, wherein exhaust chamber 103 can pick up the pollutant above grinding head structure, the dirt picked up
Dye object can be excluded from the gas exhaust piping 104, to achieve the purpose that the pollutant removal on grinding head structure 100.?
In one example, the exhaust chamber 103 can be side namely the exhaust chamber in the close grinding head structure 100
Bottom, several bleeding points are set, to draw pollutant from the bleeding point, in addition, the exhaust chamber 103 may be used also
To be the completely open structure in bottom, to directly draw the pollutant of lower section, the pollutant of absorption is again from the exhaust pipe
Road excludes, in addition, the gas exhaust piping 104 can be the pipeline being connected with the exhaust chamber 103, by pollutant
Export is gone, it is of course also possible to be a plurality of pipeline being connected to respectively with exhaust chamber, so that pollution can be improved in a plurality of gas exhaust piping
Object removal efficiency.In addition, in one example, the shape of the exhaust chamber 103 in a ring, that is, forms an annular housing, such as Fig. 1
It is shown, around being nested in the rotary shaft 101, so as to effectively adsorb contaminant particle on grinding head structure etc..
As an example, forming a gap d 1, institute between the inner annular edge and the rotary shaft 101 of the exhaust chamber 103
Gap is stated between 3mm-10mm.
As an example, orthographic projection of the outer ring edge of the exhaust chamber 103 in the upper surface of the grinding head structure 100
The distance between the outer rim of grinding head structure d2 is less than or equal to 1mm.
As an example, the distance between the bottom of the exhaust chamber 103 and the upper surface of the grinding head structure 100 d3
Between 8mm-15mm.
Specifically, in one example, shown in d1 as shown in figure 1, annular exhaust chamber 103 is around the rotary shaft 101
Setting, and 103 inner ring side of the exhaust chamber, i.e., around the rotary shaft 101 close to the side of the rotating shaft surface, with
A gap d 1 is formed between the rotary shaft 101, for example, in one example, the rotary shaft 101 is cylinder, the annular
Chamber 103 is in circular ring shape, and the central axis of the two is overlapped, then the gap is the center for crossing the two in same level
Straight line cut at a distance from the rotating shaft surface is between exhaust chamber's inner ring surface, in one example, the gap between
Between 3mm-10mm, 5mm is selected as in this example, so that this preset clearance will not the row of friction when rotary shaft can be made to rotate
The stability of equipment and contaminant removal process improves in gas chamber.
In addition, in one example, also set up the exhaust chamber 103 outer rim edge and 100 side of grinding head structure
The distance between edge, shown in d2 as shown in figure 1, i.e., the outer ring edge of the described exhaust chamber 103 is in the grinding head structure 100
The distance between the outer rim of the orthographic projection of upper surface and the grinding head structure 100, for example, in one example, the discharge chamber
Room 103 is in circular ring shape, and the grinding head structure 100 is cylindrical, and the central axis of the two is overlapped, then the distance refers to same
The straight line at the center both crossed on horizontal plane cuts the outer of outer ring edge in the exhaust chamber and the grinding head structure
The distance between edge, in one example, the distance are less than or equal to 1mm, can be 0.2mm, 0.5mm etc., so as to so that exhaust
Chamber (chamber) can almost cover grinding head structure, improve the absorption efficiency of pollutant.In addition, in another example,
The bottom of the exhaust chamber 103 and the distance between the upper surface of the grinding head structure 100, d3 institute as shown in figure 1 are set
Show, i.e., between the lower surface of the described exhaust chamber and the upper surface of the grinding head structure 100 close with the exhaust chamber
Distance, in one example, which can be 10mm, 12mm etc. between 8mm-15mm, so as to prevent discharge chamber
There is scratch to arrive grinding head structure when room is mobile or grinding head structure is mobile.
As an example, the exhaust chamber 103 includes at least two discharge chamber units, the air extractor includes at least two
Gas exhaust piping 104 described in item, wherein each discharge chamber unit spliced forms the exhaust chamber, and each discharge chamber list
Member is respectively corresponded to be connected with a gas exhaust piping.
Specifically, in one example, the exhaust chamber 103 is set and is made of at least two discharge chamber units, Ke Yican
See the discharge chamber unit 103a in Fig. 4, each discharge chamber unit spliced forms the exhaust chamber, for example, exhaust chamber 103
It can consist of two parts, e.g., when the exhaust chamber 103 is in circular ring shape, the discharge chamber unit is in semi-circular shape, described
Exhaust chamber is formed by two discharge chamber unit spliceds, certainly, the discharge chamber unit be also possible to three and its more than,
In addition, splicing here can be close to each other between discharge chamber unit, it is also possible to pass through between connected discharge chamber unit
The mode of movable connection is fixed in interface, in addition, can be between the adjacent side of each discharge chamber unit each self-styled
Close, be also possible to open, in an optional example, each discharge chamber unit constitutes independent individual, adjacent side it
Between close, from bottom carry out pollutant absorption.In addition, when the exhaust chamber 103 includes at least two discharge chamber units
When, corresponding multiple gas exhaust pipings 104 are also further set, thus each gas exhaust piping 104 respectively with a discharge chamber list
Member is connected setting, can be effectively by the contaminant exclusion of absorption.
As an example, the air extractor further includes driving device, the driving device and each discharge chamber unit phase
Connection, to drive the movement of each discharge chamber unit.
As an example, the driving device includes at least one of cylinder 105 and motor.
As an example, the cylinder 105 passes through a connection structure 107 when the driving device includes the cylinder 105
Drive the discharge chamber unit mobile, in one example, the cylinder 105 is set on the fixed bracket 102.
Specifically, in one example, when the exhaust chamber 103 includes at least two discharge chamber unit, also setting
The driving device being connected with the discharge chamber unit is set, the driving device can drive each discharge chamber unit mobile,
To which the discharge chamber unit is removed the position far from the rotary shaft 101, to be conducive to carry out grinding head structure more
It changes.
In addition, can be motor or cylinder 105 for the driving device, each discharge chamber unit can be driven
Movement is carried out, as illustrated in fig. 1 and 2, cylinder can drive discharge chamber unit be moved by connection structure 107.One
In optional example, when selecting the cylinder 105 as the driving device, structure and setting are as shown in Figure 3 and Figure 4, gas
The working principle of cylinder 105 is shown in Figure 3, rod piece can be pushed to move based on air inlet 105a and exhaust outlet 105b, and then band
Dynamic discharge chamber unit is mobile, and in the example, cylinder 105 is connected by a connection structure 107 with the discharge chamber unit, when certainly
When the air inlet 105a of the cylinder passes through gas, under the drive of the connection structure 107, each discharge chamber unit is mutual
Close to closure, in absorption working condition, when being passed through gas from the exhaust outlet of the cylinder, in the band of the connection structure 107
Under dynamic, each discharge chamber unit is relatively distant from, far from the rotary shaft 101, shown in Figure 4, the discharge chamber unit
103a is separated from each other, so as to facilitate the replacement for carrying out grinding head structure.
As an example, the air extractor further includes at least two track-type facilities 106 corresponding with the discharge chamber unit,
Wherein, the track-type facilities 106 are set on the fixed bracket 102, and the discharge chamber unit is filled along the corresponding guide rail
Set movement.
Specifically, in one example, track-type facilities 106 corresponding with the discharge chamber unit are also set up, in an example
In, the track-type facilities 106 are arranged on the fixed bracket 102, referring to shown in Fig. 1, Fig. 2, so that described
Under the action of driving device, the discharge chamber unit is moved along the track-type facilities 106, in further optional example, such as Fig. 4
Shown, the position on the fixed bracket and close to the track-type facilities 106 is arranged in the cylinder 105, so as to advantageous
It is moved in control discharge chamber unit along the track-type facilities 106.
As an example, the grinding device further includes control device 108, the air extractor further includes one and the exhaust
Chamber 103, which is connected, is evacuated pump installation (not shown), wherein and the control device is connected with the driving device, with
Control the driving device work；The control device is connected with the pumping pump installation, to control the pumping pump installation
Work.
Specifically, also setting up a control device 108, in one example, the control in the grinding device of the utility model
Device 108 is connected with the driving device, to control the driving device work, to control the shifting of the discharge chamber unit
Dynamic, in addition, in an optional example, the air extractor further includes one being connected with the exhaust chamber and being evacuated pump installation, logical
It crosses the pumping pump installation and realizes the exhaust chamber to the absorption of the pollutant and the exclusion of pollutant, for example, described
Pumping pump installation can be set in the other end of the gas exhaust piping far from the exhaust chamber, thus realize above-mentioned function, into
One step, the pumping pump installation are connected with the control device 108, so that control device can control the pumping pump installation
Work, such as can by be arranged on the control device 108 exhaust valve realize, open the exhaust valve, the pumping
Pump installation carries out work and realizes above-mentioned function, closes the exhaust valve, the pumping pump installation stops working, the exhaust chamber
Stop carrying out pollutant absorption.Specifically, the control device includes the first control module and the second control in an optional example
Molding block, wherein first control module is used to control the movement of the discharge chamber unit, and dress is driven as described in through control
Realization is set, such as realizes that second control module is used to control the dirt of the exhaust chamber by the exhaust suction of control cylinder
Object absorption is contaminated, pumping pump installation is realized as described in through control, the first control module unit and second control module
Unit can independently carry out respective work.
In addition, the grinding device in the comparative example is not provided with institute as shown in figure 5, the utility model also provides a comparative example
Air extractor is stated, the grinding device in the comparative example includes fixed bracket 303, grinding head structure 301 and is connected to the two
Between rotary shaft 302, rotary shaft 302 can with 305 cooperating of bearing, drive grinding head structure 301 rotated, further include
The support holder structure 304 of the top of rotary shaft periphery grinding head structure 301 is set, in the comparative example, is accumulated in support holder structure 304
And the crystalline particle object on 301 surface of grinding head structure is easy to fall on grinding pad 300, and certainly, 301 table of grinding head structure
The pollutant 306 (particle) in face may be to fall on support holder structure 304, can especially fall with the movement of component, from
And the wafer ground on grinding pad 300 is caused to be scratched, it causes grinding wafer effect to be affected, will lead to full wafer when serious
Wafer loss.
In conclusion the utility model provides a kind of grinding device, grinding device includes: grinding head structure；And pumping
Device is set to above the grinding head structure, to remove the pollutant on the grinding head structure.Through the above scheme, originally
The grinding device of utility model removes the pollutants such as the particle in the structures such as grinding head by the setting of air extractor, thus anti-
Only above-mentioned pollutant is fallen on grinding crystal wafer, prevents influence of the pollutant to grinding wafer effect, is improved particle and is scattered risk,
Grinding effect is promoted, reduces wafer and therefore causes the case where scrapping, meanwhile, air extractor is improved, movably
Exhaust chamber is conducive to the replacement of the grinding head structure of grinding device.So the utility model effectively overcomes in the prior art
Various shortcoming and have high industrial utilization value.
The above embodiments are only illustrative of the principle and efficacy of the utility model, and not for limitation, this is practical new
Type.Any person skilled in the art can all carry out above-described embodiment under the spirit and scope without prejudice to the utility model
Modifications and changes.Therefore, such as those of ordinary skill in the art without departing from the revealed essence of the utility model
All equivalent modifications or change completed under mind and technical idea, should be covered by the claim of the utility model.
Claims (10)
1. a kind of grinding device characterized by comprising
Grinding head structure；And
Air extractor is set to above the grinding head structure, to remove the pollutant on the grinding head structure.
2. grinding device according to claim 1, which is characterized in that the grinding device further includes rotary shaft and fixed branch
Frame, wherein the rotary shaft is connected between the fixed bracket and the grinding head structure, and the air extractor is set to institute
State the periphery of rotary shaft and between the grinding head structure and the fixed bracket.
3. grinding device according to claim 2, which is characterized in that the grinding device further includes support holder structure, described
Support holder structure be set to the periphery of the rotary shaft and between the air extractor and the fixed bracket and with it is described solid
Fixed rack is in contact.
4. grinding device according to claim 2, which is characterized in that the air extractor include exhaust chamber and with institute
State the gas exhaust piping that exhaust chamber is connected, wherein the exhaust chamber in a ring and is placed on the periphery of the rotary shaft.
5. grinding device according to claim 4, which is characterized in that the inner annular edge of the exhaust chamber and the rotation
A gap is formed between axis, the gap is between 3mm-10mm；The outer ring edge of the exhaust chamber is in the grinding head
The distance between outer rim of the orthographic projection of the upper surface of structure and the grinding head structure is less than or equal to 1mm；The exhaust chamber
Bottom and the grinding head structure the distance between upper surface between 8mm-15mm.
6. grinding device according to claim 4, which is characterized in that the exhaust chamber includes at least two discharge chamber lists
Member, the air extractor include at least two gas exhaust pipings, wherein each discharge chamber unit spliced forms the exhaust
Chamber, and each discharge chamber unit respectively corresponds and is connected with a gas exhaust piping.
7. grinding device according to claim 6, which is characterized in that the air extractor further includes driving device, described
Driving device is connected with each discharge chamber unit, to drive the movement of each discharge chamber unit.
8. grinding device according to claim 7, which is characterized in that the driving device include in cylinder and motor extremely
Few one kind, when the driving device includes the cylinder, the cylinder drives the discharge chamber unit by a connection structure
It is mobile, and the cylinder is set on the fixed bracket.
9. grinding device according to claim 7, which is characterized in that the grinding device further includes control device, described
Air extractor further includes being connected to be evacuated pump installation with the exhaust chamber, wherein the control device and the driving device
It is connected, to control the driving device work, the control device is connected with the pumping pump installation, to control the pumping
Air pump device work.
10. the grinding device according to any one of claim 6-9, which is characterized in that the air extractor further includes
At least two track-type facilities corresponding with the discharge chamber unit, wherein the track-type facilities are set on the fixed bracket,
The discharge chamber unit is moved along the corresponding track-type facilities.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821997440.9U CN209256648U (en) | 2018-11-30 | 2018-11-30 | Grinding device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821997440.9U CN209256648U (en) | 2018-11-30 | 2018-11-30 | Grinding device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209256648U true CN209256648U (en) | 2019-08-16 |
Family
ID=67564906
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821997440.9U Expired - Fee Related CN209256648U (en) | 2018-11-30 | 2018-11-30 | Grinding device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209256648U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110935537A (en) * | 2019-12-19 | 2020-03-31 | 张忠 | Chemical industry pharmacy granulation machine with broken wall just prevents laminating caking |
| CN113714927A (en) * | 2021-08-27 | 2021-11-30 | 苏州斯尔特微电子有限公司 | Wafer grinding mechanical grinding process |
| CN117564917A (en) * | 2024-01-15 | 2024-02-20 | 北京芯美达科技有限公司 | Polycrystalline diamond polishing equipment |
-
2018
- 2018-11-30 CN CN201821997440.9U patent/CN209256648U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110935537A (en) * | 2019-12-19 | 2020-03-31 | 张忠 | Chemical industry pharmacy granulation machine with broken wall just prevents laminating caking |
| CN110935537B (en) * | 2019-12-19 | 2021-05-25 | 榫卯科技服务(温州)有限公司 | Chemical industry pharmacy granulation machine with broken wall just prevents laminating caking |
| CN113714927A (en) * | 2021-08-27 | 2021-11-30 | 苏州斯尔特微电子有限公司 | Wafer grinding mechanical grinding process |
| CN113714927B (en) * | 2021-08-27 | 2024-04-09 | 苏州斯尔特微电子有限公司 | Wafer chemical mechanical polishing process |
| CN117564917A (en) * | 2024-01-15 | 2024-02-20 | 北京芯美达科技有限公司 | Polycrystalline diamond polishing equipment |
| CN117564917B (en) * | 2024-01-15 | 2024-04-02 | 北京芯美达科技有限公司 | Polycrystalline diamond polishing equipment |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN209256648U (en) | Grinding device | |
| CN207900821U (en) | It is a kind of can be to sander that inner wall of the pipe is polished | |
| CN105538102A (en) | Flexible polishing and grinding equipment for metal plates | |
| KR101930240B1 (en) | Copper disc for sapphire polishing, and method of repairing double-face copper disc | |
| CN105598796A (en) | Wiredrawing, polishing and grinding system for metal plates | |
| CN102490102A (en) | Plate glass edging equipment and method | |
| CN101549225A (en) | Movable wire mesh belt cutting fluid purification equipment | |
| CN110181360B (en) | High-efficiency conversion device for optical glass round lens | |
| CN205271637U (en) | A edging device for arc glass on wall | |
| CN205415228U (en) | Metal sheet wire drawing polishing system of polishing | |
| CN104985503A (en) | Novel magnet ring chamfering device | |
| CN206632829U (en) | A kind of mobile-phone lens abrasive machining apparatus | |
| CN100566942C (en) | Cleaner and automatic polishing and burnishing machine | |
| CN206187921U (en) | Automatic dust collecting device of assembly line | |
| CN106002544B (en) | Depositing dust automatic polishing complexes in case | |
| CN106826446A (en) | A kind of efficient automobile bearing inner race chamfer processing method and device | |
| CN108339823A (en) | A kind of movable type workshop particulate adsorbent device | |
| CN203779307U (en) | Automatic grinding machine | |
| CN209681811U (en) | A kind of efficient grinding device of road construction | |
| CN110391156A (en) | A kind of sorting device that the stability based on chip encapsulation technology is high | |
| CN206064971U (en) | A kind of removing glue workbench | |
| CN2788966Y (en) | Grinding machine | |
| CN209207222U (en) | A kind of twin grinder | |
| CN208162255U (en) | A kind of movable type workshop particulate adsorbent device | |
| CN112496962A (en) | Intelligence processingequipment that polishes |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190816 |