CN209216680U - A kind of laser resistance adjuster - Google Patents

A kind of laser resistance adjuster Download PDF

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Publication number
CN209216680U
CN209216680U CN201822277756.7U CN201822277756U CN209216680U CN 209216680 U CN209216680 U CN 209216680U CN 201822277756 U CN201822277756 U CN 201822277756U CN 209216680 U CN209216680 U CN 209216680U
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China
Prior art keywords
laser
axis
resistance
resistance adjuster
motion controller
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CN201822277756.7U
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Chinese (zh)
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王文帆
李长团
梁宇鹏
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Shenzhen JPT Optoelectronics Co Ltd
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Shenzhen JPT Optoelectronics Co Ltd
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Abstract

This application provides a kind of laser resistance adjusters, belong to laser cutting device technical field.The laser resistance adjuster includes industrial personal computer, ACS multi-axis motion controller, multiaxis guide rail and laser, and the ACS multi-axis motion controller is electrically connected with the industrial personal computer, the laser and the multiaxis guide rail respectively.The laser resistance adjuster controls the opening and closing of laser by the control of ACS multi-axis motion controller based on resistance position to be adjusted, controlling multiaxis guide rail by ACS multi-axis motion controller simultaneously drives resistance cooperation transmitting laser angle to be adjusted to be moved, transmitting laser is avoided to occur cutting error over long distances, laser cutting accuracy is improved, carries out scribing line, Xiu Zuneng on same laser resistance adjuster.

Description

A kind of laser resistance adjuster
Technical field
This application involves laser cutting device technical fields, in particular to a kind of laser resistance adjuster.
Background technique
Laser resistance adjuster is beaten on thick, film resistor using a branch of superfine laser beam, is steamed by gasifying to resistor body Hair realizes thick, thin film circuit cutting.Laser beam thick, film resistor by the scheduled program cutting of computer is thick, thin by changing The geometry of film resistance is to change the resistance value of resistance.With the progress of laser cutting process, pass through real-time measurement circuit energy The variation of enough monitoring in real time thickness, film resistor resistance value, makes thick, film resistor resistance value constantly close to target resistance value.When thick, film Laser beam is closed after resistance reaches target resistance value, that is, realizes the process of laser resistor trimming.
In the prior art, laser resistance adjuster is all using PC machine as laser resistor trimming machine host, PC host passes through when in use Software program and hardware control circuit, which are realized, controls the laser scanning head opening and closing of laser resistance adjuster and angle.But PC host Due to feedback delay etc., laser resistor trimming application when control laser resistance adjuster executes optical codes and scan control driver Program runs discontinuous or pauses, laser opening and closing is asynchronous with Chip-R movement, causes scanning and is cut by laser unstable It is fixed, the problem of being easy to appear error in long range scribing line.
Utility model content
The application's is designed to provide a kind of laser resistance adjuster, is scanned and is cut by laser not in the prior art with improving Stablize, the problem of being easy to appear error in long range scribing line.
Embodiments herein is achieved in that
This application provides a kind of laser resistance adjuster, the laser resistance adjuster includes industrial personal computer, ACS Multi-axis motion control Device, multiaxis guide rail and laser, the ACS multi-axis motion controller respectively with the industrial personal computer, the laser and described The electrical connection of multiaxis guide rail;The ACS multi-axis motion controller controls the multiaxis guide rail and drives resistance to be adjusted mobile and pass through Therein hardware passes through the laser in the opening and closing for controlling the laser when adjusting resistance to be moved to predeterminated position Transmitting laser to the resistance to be adjusted carry out scribing line and resistance trimming.
During above-mentioned realization, drive resistance to be adjusted mobile by ACS multi-axis motion controller control multiaxis guide rail, thus Shoot laser after cooperation adjustment shooting angle accurately cuts testing resistance, meanwhile, ACS multi-axis motion controller may be used also To drive in multiaxis guide rail and directly be controlled when adjusting resistance to be moved to predeterminated position based on PEG (position event triggering) shift register The opening and closing of laser processed improves the response speed and cutting accuracy of laser, and transmitting laser is avoided to cut over long distances Error is cut, to allow same laser resistance adjuster to be crossed, resistance trimming, improves the resistance trimming precision and effect of laser resistance adjuster Rate.
In the application optional embodiment, the laser resistance adjuster further includes galvanometer and mark card, the mark card point Be not electrically connected with the galvanometer and the laser, galvanometer described in the mark card control to the transmitting laser of the laser into The adjustment of row angle.
During above-mentioned realization, accurately adjusted using angle of the mark card control galvanometer to shoot laser, and match The opening and closing that ACS multi-axis motion controller treats the position and laser of adjusting resistance is closed, to improve scribing line, repair the accurate of resistance Degree and efficiency.
In the application optional embodiment, the laser resistance adjuster further includes ccd image sensor, institute It states ccd image sensor to connect with the industrial personal computer, the reflected light of the resistance to be adjusted is incident by the galvanometer To the ccd image sensor.
During above-mentioned realization, industrial personal computer can be based on the resistance view to be adjusted of ccd image sensor acquisition Signal is controlled as data generate, so that ACS multi-axis motion controller, mark card are based respectively on control signal control multiaxis guide rail Scribing line resistance trimming is carried out with laser, to improve the accuracy of scribing line resistance trimming.
In the application optional embodiment, beam expanding lens is additionally provided between the galvanometer and the optical path of the laser.
During above-mentioned realization, using the beam diameter and the angle of divergence of beam expanding lens adjustment laser, make the laser after expanding Light beam is focused smaller, to improve the accuracy of laser cutting.
In the application optional embodiment, the multiaxis guide rail includes X-axis guide rail, Y-axis guide rail and R axis rail, the X Axis rail and the Y-axis guide rail are horizontally disposed and be mutually perpendicular to, driving of the R axis rail in direct drive motor Under can relatively horizontal orientation rotate predetermined angle.
During above-mentioned realization, multiaxis guide rail is led under the control of ACS multi-axis motion controller by X-axis guide rail, Y-axis Rail drives resistance to be adjusted mobile, and drives resistance to be adjusted to carry out horizontal alignment, accurate control laser cutting position by R axis rail It sets, improves the accuracy of laser resistor trimming.
In the application optional embodiment, the laser resistance adjuster further includes being arranged in right above the R axis rail Levelling camera.
In the application optional embodiment, the laser resistance adjuster further includes pinboard, the ACS Multi-axis motion control The internal hardware of device is connect by the pinboard with the laser, and the industrial personal computer passes sequentially through the ACS multiaxial motion Controller, the pinboard are connect with the laser.
During above-mentioned realization, the internal hardware of ACS multi-axis motion controller can be directly controlled sharp by pinboard The opening and closing of light device, industrial personal computer can control laser by ACS multi-axis motion controller, pinboard, to reduce The delay of laser control improves the accuracy of laser resistor trimming.
In the application optional embodiment, the laser resistance adjuster further includes handling module, and the handling module includes Motion control card, virgin material axis, old material axis, moves material axis and surveys resistance axis, the virgin material axis, the old material axis, institute servo drive motor It states shifting material axis and survey resistance axis passes through individual servo drive motor respectively and connect with the motion control card, the movement control Fabrication is connect with the industrial personal computer.
In the application optional embodiment, it is provided with ohmer on the survey resistance axis, the ohmer is hindered in the survey It moves vertically under the drive of axis.
In the application optional embodiment, the laser resistance adjuster includes the first electric-controlled plate and the second electric-controlled plate, described First electric-controlled plate is for placing the component for being easy to produce crosstalk, and second electric-controlled plate is for placing electic protection and input and output Component, the ACS multi-axis motion controller and the motion control card, servo drive motor setting are automatically controlled described first On plate.
During above-mentioned realization, it is arranged by the subregion of the first electric-controlled plate and the second electric-controlled plate, crosstalk will be easy to produce Component and power supply unit be separately positioned on the first electric-controlled plate and the second electric-controlled plate, reduce laser resistance adjuster inside string It disturbs, to improve safety and the operating accuracy of laser resistance adjuster.
In the application optional embodiment, breaker and filter, the open circuit are provided on second electric-controlled plate Device is for protecting the industrial personal computer, the ACS multi-axis motion controller, the galvanometer and the laser, the filter to set It sets between the laser resistance adjuster and power supply.
During above-mentioned realization, electic protection is carried out to laser resistance adjuster by breaker and filter, is further mentioned The high safety of laser resistance adjuster.
Detailed description of the invention
Technical solution in ord to more clearly illustrate embodiments of the present application, below will be to needed in the embodiment attached Figure is briefly described, it should be understood that the following drawings illustrates only some embodiments of the application, therefore is not construed as pair The restriction of range for those of ordinary skill in the art without creative efforts, can also be according to this A little attached drawings obtain other relevant attached drawings.
By the way that shown in attached drawing, above and other purpose, the feature and advantage of the application will be more clear, in all the attached drawings Identical appended drawing reference indicates identical part, does not deliberately draw attached drawing by actual size equal proportion scaling, it is preferred that emphasis is show The purport of the application out.
Fig. 1 is a kind of structural block diagram of laser resistance adjuster provided by the present application;
Fig. 2 is a kind of schematic diagram of light path system provided by the embodiments of the present application;
Fig. 3 is a kind of structural block diagram of handling module provided by the embodiments of the present application;
Fig. 4 is a kind of structural block diagram of first electric-controlled plate provided by the embodiments of the present application;
Fig. 5 is a kind of structural block diagram of second electric-controlled plate provided by the embodiments of the present application.
Icon: 10- laser resistance adjuster;11- industrial personal computer;12-ACS multi-axis motion controller;13- multiaxis guide rail;14- folder Tool;15- galvanometer;16- mark card;17- laser;18- handling module;181- motion control card;182- servo drive motor; 183- virgin material axis;184- old material axis;185- moves material axis;186- surveys resistance axis.
Specific embodiment
To keep the purposes, technical schemes and advantages of the embodiment of the present application clearer, below in conjunction with the embodiment of the present application In attached drawing, the technical scheme in the embodiment of the application is clearly and completely described, it is clear that described embodiment is Some embodiments of the present application, instead of all the embodiments.The application being usually described and illustrated herein in the accompanying drawings is implemented The component of example can be arranged and be designed with a variety of different configurations.
Therefore, the detailed description of the embodiments herein provided in the accompanying drawings is not intended to limit below claimed Scope of the present application, but be merely representative of the selected embodiment of the application.Based on the embodiment in the application, this field is common Technical staff's every other embodiment obtained without creative efforts belongs to the model of the application protection It encloses.
It should also be noted that similar label and letter indicate similar terms in following attached drawing, therefore, once a certain Xiang Yi It is defined in a attached drawing, does not then need that it is further defined and explained in subsequent attached drawing.
In the description of the present application, it should be noted that the orientation or positional relationship of the instructions such as term "inner", "outside" is base In orientation or positional relationship shown in the drawings or this application product using when the orientation or positional relationship usually put, only It is the application and simplified description for ease of description, rather than the device or element of indication or suggestion meaning must have specifically Orientation is constructed and operated in a specific orientation, therefore should not be understood as the limitation to the application.In addition, term " first ", " the Two " etc. are only used for distinguishing description, are not understood to indicate or imply relative importance.
In addition, the terms such as term "horizontal", "vertical" are not offered as requiring component abswolute level or pendency, but can be slightly Low dip.It is not to indicate that the structure has been had to if "horizontal" only refers to that its direction is more horizontal with respect to for "vertical" It is complete horizontal, but can be slightly tilted.
In the description of the present application, it is also necessary to which explanation is unless specifically defined or limited otherwise, term " setting ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally connect It connects;It can be mechanical connection, be also possible to be electrically connected;It can be directly connected, can also indirectly connected through an intermediary, it can To be the connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood with concrete condition Concrete meaning in this application.
Other feature and advantage of the application will be illustrated in subsequent specification, also, partly be become from specification It is clear that being understood and implementing the embodiment of the present application.The purpose of the application and other advantages can be by written Specifically noted structure is achieved and obtained in specification, claims and attached drawing.
Through the applicant the study found that for the thick-film resistor laser trimming being commonly used, since silk-screen printing is grasped The inaccuracy of work, substrate surface it is uneven and sintering condition not repeated, often there is positive negative error in thick-film resistor, if Resistance value is more than that nominal value will be unable to correct, and still, resistance value is lower than about the 30% of target value after printing firing under normal circumstances, institute Target value can only be reached by laser trimming.But during actual resistor trimming, the quick of resistance to be adjusted accurately is determined Position plays a crucial role last trimming precision and precision, and stepping electric platforms are used in existing resistance trimming equipment Or servo-electric platform carries out the positioning of resistance to be adjusted, and since PC host is due to feedback delay etc., controls laser resistance adjuster The operation of laser resistor trimming application program is discontinuous when executing optical codes and scan control driver or pauses, to cause laser The problem of cutting accuracy difference.Simultaneously as control signal delay also will cause laser opening and closing with Chip-R move it is asynchronous, To unstable in the presence of scanning and being cut by laser, the problem of being easy to appear error in long range scribing line.
To solve the above-mentioned problems, the embodiment of the present application provides a kind of laser resistance adjuster 10, referring to FIG. 1, Fig. 1 is this A kind of structural block diagram of the laser resistance adjuster provided is provided.
Laser resistance adjuster 10 includes industrial personal computer 11, ACS multi-axis motion controller 12, multiaxis guide rail 13 and laser 17, more Axis rail 13 drives resistance to be adjusted to be moved under the control of ACS multi-axis motion controller 12, and laser 17 is transported in ACS multiaxis Treated under the control of movement controller 12 and industrial personal computer 11 adjust resistance crossed, resistance trimming.It should be understood that laser resistance adjuster 10 It can also include fixture 14, galvanometer 15, mark card 16.ACS multi-axis motion controller 12 respectively with industrial personal computer 11, mark card 16, Laser 17 and multiaxis guide rail 13 are electrically connected, and mark card 16 is electrically connected with galvanometer 15 and laser 17 respectively.
Industrial personal computer 11 is industrial control computer, is a kind of using bus structures, to production process and electromechanical equipment, technique Equipment carries out the tool general name of Detection & Controling, and industrial personal computer 11 has important computer attribute and feature, such as has computer Mainboard, CPU, hard disk, memory, peripheral hardware and interface, and have operating system, control network and agreement, computing capability, close friend it is man-machine Interface.As an alternative embodiment, industrial personal computer 11 can be computerized numerical system (Computer Numerical control, CNC) type industrial control computer, use the numerical control system of microprocessor or dedicated microcomputer System realizes part or all of numerical control function by being stored in system program in memory (software) Lai Shixian control logic in advance, and Coupled by interface with peripheral equipment, is suitable for laser resistance adjuster 10 provided in this embodiment.
Industrial personal computer 11 can control signal to 12 output guide rail of ACS multi-axis motion controller in the present embodiment, by the guide rail Control signal is transmitted to ACS multi-axis motion controller 12 and controls the movement of multiaxis guide rail 13.Wherein, guide rail control signal can be work Test resistance value of the control machine 11 based on currently resistance to be adjusted and need resistance value generate, control laser resistance adjuster 10 in corresponding position It is cut by laser with the time.
ACS multi-axis motion controller 12 most 64 axis of multipotency synchronously control, open EtherCAT style can support The driving of tripartite and input/output interface, while software tool can also be cooperated to be analyzed, adjusted and diagnosed, it can be by setting It sets to control any type (single-phase, two-phase, three-phase, DC are brushless etc.) motor, and realizes open loop, closed loop or double-closed-loop control. In addition, ACS multi-axis motion controller 12 includes multiple functional modules, such as PEG (position event triggering) location register and electricity Machine band-type brake control module etc..
In the present embodiment, ACS multi-axis motion controller 12 controls multiaxis guide rail 13 and moves, and presss from both sides on fixture 14 to drive The transmitting laser for the resistance relative laser device 17 to be adjusted held is mobile, while ACS multi-axis motion controller 12 is also posted by the position PEG The position event Trigger Function of storage directly controls unlatching and the pass of laser 17 when multiaxis guide rail 13 moves to predeterminated position It closes, to improve the accuracy of testing resistance cutting part adjustment and the opening and closing response speed of laser 17, and reinforces Harmony between the two, further improves scribing line, resistance trimming efficiency and accuracy.
It should be understood that ACS multi-axis motion controller 12 can be but be not limited to the movement of ACS CMba-hp model Controller.
Multiaxis guide rail 13 may include X-axis guide rail, Y-axis guide rail and R axis rail.As an alternative embodiment, X-axis Guide rail and Y-axis guide rail are arranged in horizontal plane and are mutually perpendicular to, and respectively can be axially movable;R axis rail can be by direct The movable guiding rail of drive motor driving, the R axis rail relatively horizontal orientation can rotate certain angle driven by a motor, with Resistance to be adjusted is set to be in horizontality.Wherein, direct drive motor includes torque motor and linear motor, due to its output torque Greatly to eliminate the bindiny mechanisms such as retarder, gear-box, belt pulley.
In order to make R axis rail that fixture 14 be driven to carry out angular turn, need to determine whether resistance to be adjusted is in horizontality. As an alternative embodiment, levelling camera is arranged in the present embodiment right above R axis rail, it is levelling that industrial personal computer 11 is based on this The image for the resistance to be adjusted that camera obtains judges whether resistance to be adjusted is in horizontality.It should be understood that in other implementations In example, it can also determine whether resistance to be adjusted is in horizontal using the attitude transducer or other modes being arranged on fixture 14 State.
The laser transmitting laser of traditional laser marking machine is usually fixed pose, can not carry out angular adjustment, exist It is cut by laser flexibility ratio and the low problem of precision, therefore the laser resistance adjuster 10 of the embodiment of the present application is also using galvanometer 15 to laser The transmitting laser of device 17 carries out angle adjustment, so as to improve the low problem of laser cutting flexibility ratio and precision.Galvanometer 15 is to shake Mirror scanning type labelling head is mainly made of the mark software etc. of XY scanning mirror, galvanometer and computer control, its working principle is that will Laser beam is incident on two reflecting mirrors (scanning mirror), and the reflection angle for the reflecting mirror that computerizeds control, the two reflecting mirrors can divide Not along X, Y axis scanning, to reach the deflection of laser beam, make the laser focus point with certain power density on mark material By required requirement campaign, to leave permanent label on the surface of the material.Using the laser marking application range of galvanometer 15 Extensively, vector mark and dot matrix mark can be carried out, label range is adjustable, and has fast response time, mark speed high (each second Can the several hundred a characters of mark), mark quality is higher, optical path good seal performance, strong to environmental suitability etc. excellent, therefore the present embodiment Accurately, expeditiously cross to tune resistance can be treated after the progress mark control of laser 17 using galvanometer 15.
Meanwhile being carried out when adjusting the scribing line of resistance only with the deflection of the transmitting laser of the adjusting laser 17 of galvanometer 15, It would generally be due to the control signal delay of industrial personal computer 11 or opening and closing and the electricity to be adjusted of laser 17 when the length for needing to cross is longer The movement position of resistance is asynchronous, and generates scribing line offset.In the present embodiment, directly right using ACS multi-axis motion controller 12 The movement of multiaxis guide rail 13 and the opening and closing of laser 17 are controlled, and reduce the delay that industrial personal computer 11 is controlled, simultaneously The control harmony for strengthening the two, improves scribing line offset problem, so that laser resistance adjuster 10 be made to be able to carry out resistance to be adjusted Scribing line.
Galvanometer 15 needs to carry out drive control by mark card 16, industrial personal computer 11 is logical when controlling the deflection of 17 light beam of laser Mark card 16 is crossed to connect with galvanometer 15 and laser 17.Mark card 16 in the present embodiment can be but be not limited to SamLight mark card, SamLight mark card are connect by USB interface with industrial personal computer 11, calculate laser and galvanometer letter in real time Number, it is carried out to correct in wire grid, is suitable for two dimension and three-dimensional marking system.
It should be understood that industrial personal computer 11 will design laser scribing and resistance trimming according to the specific location and image of resistance to be adjusted Scheme, therefore the present embodiment also uses ccd image sensor to obtain the specific image data of resistance to be adjusted.Charge Coupled device image sensor (Charge Coupled Device, CCD) uses a kind of semiconductor material system of high sensitivity At, light can be transformed into charge, digital signal is converted by analog-digital converter chip, digital signal after overcompression by The flash memory or built-in hard disk card of camera internal save, thus data easily can be transferred to computer, and By means of the processing means of computer, image is modified as needed.
In order to improve laser degree of regulation, expansion is additionally provided between the present embodiment galvanometer 15 also and the optical path of laser 17 Shu Jing, then galvanometer 15, laser 17, beam expanding lens and ccd sensor form a light path system.
Further, in the present embodiment, light path system can also include galvanometer 15 being arranged in and wait adjust between resistance Field lens, galvanometer 15 are made of X galvanometer and Y galvanometer, and enter the reflected light received from galvanometer 15 by total reflective mirror and reflecting mirror It is incident upon in ccd sensor.Referring to FIG. 2, Fig. 2 is a kind of schematic diagram of light path system provided by the embodiments of the present application.
As an alternative embodiment, the present embodiment is consistent for the control for further increasing laser resistance adjuster 10 Property, it is additionally provided with pinboard.ACS multi-axis motion controller 12 is connect with pinboard, and the inside of ACS multi-axis motion controller 12 is hard The signal of part output, which directly passes through after pinboard is converted to the MO/PA signal that laser 17 needs, to be exported to laser 17, thus Directly control the opening and closing of laser 17.Meanwhile the control signal of industrial personal computer 11 can be exported by pinboard to laser 17.
Resistance is adjusted to be crossed, before resistance trimming treating using laser resistance adjuster 10, it is also necessary to it treats and resistance is adjusted to carry out blanking, Wherein, feeding is the resistance to be adjusted that new needs scribing line and resistance trimming are placed on fixture 14, and corresponding blanking is to take out fixture The resistance that scribing line, resistance trimming is completed in 14.In order to complete above-mentioned steps, the laser resistance adjuster 10 of the present embodiment further includes handling Module 18, referring to FIG. 3, Fig. 3 is a kind of structural block diagram of handling module provided by the embodiments of the present application.Handling module 18 includes Motion control card 181, virgin material axis 183, old material axis 184, moves material axis 185 and surveys resistance axis 186 servo drive motor 182, movement control Fabrication 181 is connect with industrial personal computer 11, is connect respectively with four servo drive motors 182 by serial communication mode, four servos Driving motor 182 respectively drives virgin material axis 183, old material axis 184, moves material axis 185 and surveys resistance axis 186.Wherein, virgin material axis 183 is used In the resistance to be adjusted for resistance of not crossed, repaired is transported to shifting material 185 corresponding position of axis, old material axis 184 will be for that will expect axis by moving 185 transport from the resistance crossed, repaired resistance for unloading fixture 14, move material axis 185 can by absorption, crawl or other Mode captures testing resistance, and surveying resistance axis 186 then is the Z axis of vertical direction in general three-dimensional shafting, which hinders on axis 186 Ohmer can be set, which can move to plane locating for fixture 14 to electricity to be measured under the drive for surveying resistance axis 186 Resistance value test is completed in resistance.
Further, it before the virgin material for carrying out virgin material axis 183 obtains or after the blanking of old material axis, usually also needs really The identification information etc. for determining processing object, the laser resistance adjuster 10 in the present embodiment can be set two dimensional code for identification or other The barcode scanning gun of mark.
It should be understood that the motion control card 181 in above-described embodiment can be but be not limited to PCI-7856 model, Servo drive motor 182 can be but not limited to the motor of MINAS A6 series, and ohmer can be but be not limited to RM3545 The measurement ammeter of model.
In addition to the accuracy and efficiency of laser resistor trimming, the safety in view of laser resistance adjuster 10 is usually also needed.In order to The safety of laser resistance adjuster 10 is improved, the present embodiment additionally uses electric-controlled plate and separates layout, and laser resistance adjuster 10 includes first Electric-controlled plate and the second electric-controlled plate, the first electric-controlled plate is for placing the component for being easy to produce crosstalk, and the second electric-controlled plate is for placing electricity Gas shielded and inputoutput unit so that source current be avoided to generate crosstalk to other component, and then improve laser resistance adjuster 10 safety and operation stability.
Referring to FIG. 4, Fig. 4 is a kind of structural block diagram of first electric-controlled plate provided by the embodiments of the present application.This is first automatically controlled Be equipped on plate ACS multi-axis motion controller 12, mark card 16,181, four servo drive motors 182 of motion control card and Laser power supply, galvanometer power supply and driving power.Wherein, laser power supply can be but be not limited to HRP-600-24 model Power supply;Driving power is used to power for ACS multi-axis motion controller 12 and servo drive motor 182, can be but unlimited Then the power supply of NDR-240-24 model;Galvanometer power supply can be suitable AC power source.
Referring to FIG. 5, Fig. 5 is a kind of structural block diagram of 182 second electric-controlled plate provided by the embodiments of the present application.Second electricity Breaker, contactor, relay, filter are provided on control plate.Breaker can be for protecting ACS multi-axis motion controller 12, the multi-circuit breaker of galvanometer 15, laser 17, motion control card 181 etc..The exchange accessed from power grid is then arranged in filter Between power supply and laser resistance adjuster 10, it to be used for filter current clutter.
During above-mentioned realization, it is arranged by the subregion of the first electric-controlled plate and the second electric-controlled plate, crosstalk will be easy to produce Component and power supply unit be separately positioned on the first electric-controlled plate and the second electric-controlled plate, reduce laser resistance adjuster 10 inside string It disturbs, to improve safety and the operating accuracy of laser resistance adjuster 10.And by setting breaker, contactor, after Electric appliance, filter carry out electic protection to laser resistance adjuster 10, further improve the safety and stabilization of laser resistance adjuster 10 Property.
The above descriptions are merely preferred embodiments of the present invention, is not intended to limit the utility model, for this For the technical staff in field, various modifications and changes may be made to the present invention.It is all in the spirit and principles of the utility model Within, any modification, equivalent replacement, improvement and so on should be included within the scope of protection of this utility model.

Claims (11)

1. a kind of laser resistance adjuster, which is characterized in that the laser resistance adjuster includes industrial personal computer, ACS multi-axis motion controller, more Axis rail and laser, the ACS multi-axis motion controller are led with the industrial personal computer, the laser and the multiaxis respectively Rail electrical connection;
The ACS multi-axis motion controller controls the multiaxis guide rail and drives resistance to be adjusted mobile and by therein hardware In the opening and closing for controlling the laser when adjusting resistance to be moved to predeterminated position, pass through the transmitting laser pair of the laser The resistance to be adjusted carries out scribing line and resistance trimming.
2. laser resistance adjuster according to claim 1, which is characterized in that the laser resistance adjuster further includes galvanometer and mark Card, the mark card are electrically connected with the galvanometer and the laser respectively, and galvanometer described in the mark card control swashs to described The transmitting laser of light device carries out angle adjustment.
3. laser resistance adjuster according to claim 2, which is characterized in that the laser resistance adjuster further includes charge-coupled device Part imaging sensor, the ccd image sensor are connect with the industrial personal computer, the reflected light of the resistance to be adjusted The ccd image sensor is incident on by the galvanometer.
4. laser resistance adjuster according to claim 2, which is characterized in that between the galvanometer and the optical path of the laser also It is provided with beam expanding lens.
5. laser resistance adjuster according to claim 1, which is characterized in that the multiaxis guide rail includes that X-axis guide rail, Y-axis are led Horizontally disposed and be mutually perpendicular to, the R axis rail exists for rail and R axis rail, the X-axis guide rail and the Y-axis guide rail It can relatively horizontal orientation rotation predetermined angle under the driving of direct drive motor.
6. laser resistance adjuster according to claim 5, which is characterized in that the laser resistance adjuster further includes being arranged described Levelling camera right above R axis rail.
7. laser resistance adjuster according to claim 1, which is characterized in that the laser resistance adjuster further includes pinboard, institute The internal hardware for stating ACS multi-axis motion controller is connect by the pinboard with the laser, and the industrial personal computer successively leads to Cross the ACS multi-axis motion controller, the pinboard is connect with the laser.
8. laser resistance adjuster according to claim 2, which is characterized in that the laser resistance adjuster further includes handling module, The handling module includes motion control card, servo drive motor, virgin material axis, old material axis, moves material axis and survey resistance axis, the virgin material Axis, the old material axis, shifting material axis and survey resistance axis pass through individual servo drive motor and the motion control respectively Card connection, the motion control card are connect with the industrial personal computer.
9. laser resistance adjuster according to claim 8, which is characterized in that it is provided with ohmer on the survey resistance axis, it is described Ohmer moves vertically under the drive for surveying resistance axis.
10. laser resistance adjuster according to claim 8, which is characterized in that the laser resistance adjuster includes the first electric-controlled plate With the second electric-controlled plate, first electric-controlled plate is for placing the component for being easy to produce crosstalk, and second electric-controlled plate is for placing Electic protection and inputoutput unit, the ACS multi-axis motion controller and the motion control card, the servo drive motor It is arranged on first electric-controlled plate.
11. laser resistance adjuster according to claim 10, which is characterized in that be provided with breaker on second electric-controlled plate And filter, the breaker for protect the industrial personal computer, the ACS multi-axis motion controller, the galvanometer and it is described swash Light device, the filter are arranged between the laser resistance adjuster and power supply.
CN201822277756.7U 2018-12-29 2018-12-29 A kind of laser resistance adjuster Active CN209216680U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114566340A (en) * 2022-02-22 2022-05-31 西安微电子技术研究所 Device for automatically trimming resistance of annular substrate and operation method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114566340A (en) * 2022-02-22 2022-05-31 西安微电子技术研究所 Device for automatically trimming resistance of annular substrate and operation method
CN114566340B (en) * 2022-02-22 2023-09-19 西安微电子技术研究所 Device for automatically trimming annular substrate resistance and operation method

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