CN209194038U - A kind of uniform vacuum coater of inflation - Google Patents
A kind of uniform vacuum coater of inflation Download PDFInfo
- Publication number
- CN209194038U CN209194038U CN201821803109.9U CN201821803109U CN209194038U CN 209194038 U CN209194038 U CN 209194038U CN 201821803109 U CN201821803109 U CN 201821803109U CN 209194038 U CN209194038 U CN 209194038U
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- plated film
- film case
- gas hood
- even gas
- air inlet
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Abstract
The utility model provides a kind of uniform vacuum coater of inflation, including plated film case, bottom is equipped with evaporation source in plated film case, and top connects film-plating umbrella stand by attachment device, and plated film case is controlled to a vacuum pump by exhaust tube, the plated film case is equipped with air inlet pipe, air inlet pipe is equipped with valve, and the even gas hood of lower ending opening is equipped in plated film case, and even gas hood is equipped with air hole, it is equipped with the through-hole passed through for attachment device at the top of even gas hood, is equipped with telescopic device between plated film case at the top of even gas hood.During the device inflates optical filter coating after the completion, air-flow improves the qualification rate of coated product even into plated film case.
Description
Technical field
The utility model belongs to optical filter production field, and in particular to a kind of uniform vacuum coater of inflation.
Background technique
Coated glass is in glass surface coating one or more layers metal, alloy or metal compound film, to change glass
The optical property of glass meets certain particular requirement.
When vacuum coating equipment works: first vacuumizing, so that vacuum chamber is in vacuum state, then by electron gun line to vacuum
Coating Materials (abbreviation coating materials) heating in the bottom portion crucible of room；After being heated to certain temperature, coating materials molecule can generate coating materials
Volatilization, product surface of the coating materials molecule deposition volatilized at the top of vacuum chamber form film.After the completion of coating machine plated film, it is
Product therein is taken out, can be inflated first into vacuum chamber.
But during inflation, the air-flow of inflation is agitated, and causes the film clast in coating machine to float, and then just plated
The product of film adsorbs, and is formed permanent bad.And the floating dust in air is also easy to enter coating machine during inflation
It is interior, influence the plated film yield of optical filter.
Summary of the invention
The technical problem to be solved by the utility model is to provide a kind of uniform vacuum coaters of inflation, make optical filter
During inflating after the completion of plated film, air-flow improves the qualification rate of coated product even into plated film case.
A kind of in order to solve the above technical problems, the technical scheme adopted by the utility model is: the uniform Vacuum Deposition of inflation
Film device, including plated film case, bottom is equipped with evaporation source in plated film case, and top passes through attachment device connection film-plating umbrella stand, plated film case
It is controlled to a vacuum pump by exhaust tube, the plated film case is equipped with air inlet pipe, and air inlet pipe is equipped with valve, is equipped with lower end in plated film case
The even gas hood of opening, even gas hood are equipped with air hole, and the through-hole passed through for attachment device, even gas hood top are equipped at the top of even gas hood
Telescopic device is equipped between plated film case.
In preferred scheme, the telescopic device is electric pushrod.
In preferred scheme, plated film case lower end is equipped with exhaust pipe, and exhaust pipe one end extends to even gas hood overlay area
Interior, even gas hood bottom is equipped with the groove cooperated with exhaust pipe, and exhaust pipe is equipped with check valve.
In further embodiment, the exhaust pipe is equipped with flowmeter.
In preferred scheme, the air inlet pipe is connect with air blower, and air inlet pipe is equipped with strainer.
In further embodiment, the air inlet of the air blower is connect by pipeline with cooling tower.
In preferred scheme, muffler is equipped in the air inlet pipe.
A kind of inflation provided by the utility model uniform vacuum coater when inflation, is driven even by telescopic device
Gas hood decline, the substrate in film-plating umbrella stand is located at completely in even gas hood, even by even gas hood into the air in plated film case
Enter in even gas hood after gas, therefore reduces and generate air surge or eddy flow when air enters and generate floating dust, and even gas hood pair
Dust in air has the function of filtering, to improve the yields of the plated film of product.
Detailed description of the invention
The utility model is described in further detail with reference to the accompanying drawings and examples:
Fig. 1 is the overall structure diagram of the utility model.
In figure: plated film case 1, evaporation source 2, attachment device 3, film-plating umbrella stand 4, exhaust tube 5, vacuum pump 6, air inlet pipe 7, valve
8, even gas hood 9, telescopic device 10, exhaust pipe 11, groove 12, check valve 13, flowmeter 14, muffler 15, air blower 16, strainer
17, cooling tower 18.
Specific embodiment
As shown in Figure 1, a kind of inflate uniform vacuum coater, including plated film case 1, bottom, which is equipped with, in plated film case 1 steams
Rise 2, top connects film-plating umbrella stand 4 by attachment device 3, and attachment device 3 can be connecting rod or hydraulically extensible cylinder, connection dress
It installs and is set to hydraulically extensible cylinder, thus it is possible to vary the height of film-plating umbrella stand 4, to need to adjust film-plating umbrella stand 4 according to plated film and steam
Rise the distance between 2.Plated film case 1 is connect by exhaust tube 5 with vacuum pump 6, and the plated film case 1 is equipped with air inlet pipe 7, air inlet pipe
7 are equipped with valve 8, the even gas hood 9 of lower ending opening are equipped in plated film case 1, even gas hood 9 is equipped with air hole, the diameter of air hole
For 1 ~ 3mm, it is equipped with the through-hole passed through for attachment device 3 at the top of even gas hood 9, is equipped between even 9 top of gas hood and plated film case 1 flexible
Device 10.
In the present embodiment, telescopic device 10 is electric pushrod.
When inflation, drives even gas hood 9 to decline by telescopic device 10, the substrate in film-plating umbrella stand 4 is located at completely even
In gas hood 9, enter in even gas hood 9 after the even gas of even gas hood 9 into the air in plated film case 1, therefore reduce air when entering
It generates air surge or eddy flow and generates floating dust, and even gas hood 9 has the function of filtering to the dust in air, to improve
The yields of the plated film of product.
The air inlet pipe 7 is connect with air blower 16, and air inlet pipe 7 is equipped with strainer 17.It is filled by the raising of air blower 16 of setting
The strainer 17 of gas velocity degree, setting is filtered the air being filled with, and reduces the dust content of air, improves coated product quality.
The air inlet of the air blower 16 is connect by pipeline with cooling tower 18.
In the prior art, after the completion of plated film, need just be inflated after cooling system is cooling, take product, it is cooling and
Inflation requires to consume a large amount of time.In the present invention, plated film case 1 is entered by the gas after cooling of cooling tower 18
In, it is air-cooled to product progress, be conducive to improve cooling velocity.
1 lower end of plated film case is equipped with exhaust pipe 11, and 11 one end of exhaust pipe extends in even 9 overlay area of gas hood, even gas
It covers 9 bottoms and is equipped with the groove 12 cooperated with exhaust pipe 11, exhaust pipe 11 is equipped with check valve 13.
Air is discharged can only from exhaust pipe 11 in the check valve 13 of setting, because plated film case 1 is closed space, fills for a long time
Gas causes 1 air pressure of plated film case to increase, and is easily damaged optical filter, and when the gas being filled with is cold air, to realize cooling effect,
Air needs circulate, and gas extra in plated film case 1 is discharged the exhaust pipe 11 of setting, prevent from excessively inflating and causing to produce
Product damage.
The exhaust pipe 11 is equipped with flowmeter 14.After the stability of flow that flowmeter 14 is shown, illustrate in plated film case 1
Gas is filled with, operation of unpacking can be carried out.
Muffler 15 is equipped in the air inlet pipe 7.The muffler 15 of setting reduces noise caused by when inflating.
Specific use process is as follows for the utility model: after the completion of plated film, opening air blower 16, starts to plated film case 1
It is inflated, enters plated film case 1 by the air after cooling of cooling tower 18, plated film case 1 is full of after the even gas of even gas hood 9, when
After the stability of flow that flowmeter 14 on exhaust pipe 11 is shown, opens plated film case 1 and be sampled.
The above embodiments are only the optimal technical scheme of the utility model, and are not construed as the limit for the utility model
System, the technical solution that the protection scope of the utility model should be recorded with claim, the technical solution recorded including claim
The equivalents of middle technical characteristic are protection scope.Equivalent replacement i.e. within this range is improved, also in the utility model
Protection scope within.
Claims (7)
1. a kind of uniform vacuum coater of inflation, including plated film case (1), plated film case (1) interior bottom are equipped with evaporation source (2),
Top is connect by exhaust tube (5) with vacuum pump (6) by attachment device (3) connection film-plating umbrella stand (4), plated film case (1), special
Sign is: the plated film case (1) is equipped with air inlet pipe (7), and air inlet pipe (7) is equipped with valve (8), and lower end is equipped in plated film case (1)
The even gas hood (9) of opening, even gas hood (9) are equipped with air hole, are equipped at the top of even gas hood (9) and lead to for what attachment device (3) passed through
Hole is equipped with telescopic device (10) between even gas hood (9) top and plated film case (1).
2. a kind of uniform vacuum coater of inflation according to claim 1, it is characterised in that: the telescopic device
It (10) is electric pushrod.
3. a kind of uniform vacuum coater of inflation according to claim 1, it is characterised in that: the plated film case (1)
Lower end is equipped with exhaust pipe (11), and exhaust pipe (11) one end extends in even gas hood (9) overlay area, and even gas hood (9) bottom is equipped with
With the groove (12) of exhaust pipe (11) cooperation, exhaust pipe (11) is equipped with check valve (13).
4. a kind of uniform vacuum coater of inflation according to claim 3, it is characterised in that: the exhaust pipe (11)
It is equipped with flowmeter (14).
5. a kind of uniform vacuum coater of inflation according to claim 1, it is characterised in that: the air inlet pipe (7)
It is connect with air blower (16), air inlet pipe (7) is equipped with strainer (17).
6. a kind of uniform vacuum coater of inflation according to claim 5, it is characterised in that: the air blower (16)
Air inlet connect with cooling tower (18) by pipeline.
7. a kind of uniform vacuum coater of inflation according to claim 1, it is characterised in that: the air inlet pipe (7)
It is interior to be equipped with muffler (15).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821803109.9U CN209194038U (en) | 2018-11-02 | 2018-11-02 | A kind of uniform vacuum coater of inflation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821803109.9U CN209194038U (en) | 2018-11-02 | 2018-11-02 | A kind of uniform vacuum coater of inflation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209194038U true CN209194038U (en) | 2019-08-02 |
Family
ID=67410209
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821803109.9U Active CN209194038U (en) | 2018-11-02 | 2018-11-02 | A kind of uniform vacuum coater of inflation |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209194038U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112403837A (en) * | 2020-11-11 | 2021-02-26 | 上饶市光耀光学设备制造有限公司 | Coating device is used in processing of high accuracy optical lens piece |
-
2018
- 2018-11-02 CN CN201821803109.9U patent/CN209194038U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112403837A (en) * | 2020-11-11 | 2021-02-26 | 上饶市光耀光学设备制造有限公司 | Coating device is used in processing of high accuracy optical lens piece |
| CN112403837B (en) * | 2020-11-11 | 2022-02-08 | 上饶市光耀光学设备制造有限公司 | Coating device is used in processing of high accuracy optical lens piece |
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