CN209192508U - A kind of conversion pallet for fixing silicon wafer - Google Patents

A kind of conversion pallet for fixing silicon wafer Download PDF

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Publication number
CN209192508U
CN209192508U CN201821453612.6U CN201821453612U CN209192508U CN 209192508 U CN209192508 U CN 209192508U CN 201821453612 U CN201821453612 U CN 201821453612U CN 209192508 U CN209192508 U CN 209192508U
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CN
China
Prior art keywords
cun
fixed
sleeve part
silicon wafer
rings
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Active
Application number
CN201821453612.6U
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Chinese (zh)
Inventor
戴金方
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Wuxi zhuohai Technology Co.,Ltd.
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Wuxi Zhuohai Technology Co Ltd
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Priority to CN201821453612.6U priority Critical patent/CN209192508U/en
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Publication of CN209192508U publication Critical patent/CN209192508U/en
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Abstract

The utility model relates to tray technology fields, in particular a kind of conversion pallet that can fix silicon wafer, including 6 cun of fixed rings, 4 cun of fixed rings and bottom fixed tray, it is fixedly connected on the inside of 6 cun of fixed ring upper ends with 3 cun of fixed sleeve part b, it is fixedly connected on the inside of 6 cun of fixed rings right end with 3 cun of fixed sleeve part a, 6 cun of fixed ring bottoms and bottom fixed tray bond.Fixed sleeve part b, 3 cun of fixed sleeve part a are elastic construction in the utility model, pass through elastic force, silicon wafer, which can be resisted, keeps its position fixed, reinforce stability, bottom fixed tray can be carried for different size of silicon wafer, the processing is simple, it is easy to use, be conducive to improve utilization rate of equipment and installations, save production cost, by on the inside of the upper end of fixed ring be provided with fixed sleeve part on the inside of right end, various sizes of fixed ring can be connected by fixed sleeve part, can be fixed for various sizes of silicon wafer.

Description

A kind of conversion pallet for fixing silicon wafer
Technical field
The utility model relates to tray technology field, specially a kind of conversion pallet that can fix silicon wafer.
Background technique
Measurement equipment can test a kind of fixed-size silicon wafer originally, and be measured for a kind of silicon wafer because The size difference of silicon wafer just needs different measuring devices to measure, not only complicated for operation, but also also reduces production efficiency, Therefore, a kind of conversion pallet that can fix silicon wafer is proposed regarding to the issue above.
Utility model content
The purpose of this utility model is to provide the conversion pallet that one kind can fix silicon wafer, fixed sleeve part b, 3 cun of fixing sleeves Part a is elastic construction, and by elastic force, can resist silicon wafer keeps its position fixed, reinforces stability, bottom fixed tray It can be carried for different size of silicon wafer, the processing is simple, and it is easy to use, be conducive to improve utilization rate of equipment and installations, save life Produce cost, by the inside of the upper end of fixed ring be provided with fixed sleeve part on the inside of right end, can be connected by fixed sleeve part Various sizes of fixed ring is connect, can be fixed for various sizes of silicon wafer, it is mentioned above in the background art to solve Problem.
To achieve the above object, the utility model provides the following technical solutions:
A kind of conversion pallet for fixing silicon wafer, including 6 cun of fixed rings, 4 cun of fixed rings and bottom fixed tray, described 6 It is fixedly connected on the inside of very little fixed ring upper end with 3 cun of fixed sleeve part b, it is solid with 3 cun of fixed sleeve part a on the inside of 6 cun of fixed rings right end Fixed connection, 6 cun of fixed ring bottoms and bottom fixed tray bond, and 6 cun of fixed rings pass through 3 cun of fixed sleeve part b, 3 cun Fixed sleeve part a is fixedly connected with 4 cun of fixed rings.
Preferably, lower end is provided with mounting groove on the left of 6 cun of fixed rings, and mounting groove be internally provided with positioning thimble or 3 cun of positioning thimbles, the positioning thimble are 4 cun or 6 cun of general thimbles.
Preferably, link slot, 3 cun of fixed sleeve parts are provided with right end inside on the inside of 4 cun of fixed ring upper ends B, 3 cun of fixed sleeve part a are connect with link slot.
Preferably, the bottom fixed tray is consistent with the diameter of 6 cun of fixed rings.
Compared with prior art, the utility model has the beneficial effects that
1, in the utility model, fixed sleeve part b, 3 cun of fixed sleeve part a are elastic construction, by elastic force, can resist silicon Piece keeps its position fixed, reinforces stability.
2, in the utility model, bottom fixed tray can be carried for different size of silicon wafer, and the processing is simple, makes With raising utilization rate of equipment and installations conveniently, is conducive to, production cost is saved.
3, in the utility model, by the inside of the upper end of fixed ring be provided with fixed sleeve part on the inside of right end, can be with Various sizes of fixed ring is connected by fixed sleeve part, can be fixed for various sizes of silicon wafer.
Detailed description of the invention
Fig. 1 is the conversion pallet overall structure diagram that the utility model one kind can fix silicon wafer;
In figure: 1,6 cun of fixed rings;2,4 cun of fixed rings;3, positioning thimble;4,3 cun of positioning thimbles;5, the fixed support in bottom Disk;6,3 cun of fixed sleeve part b;7,3 cun of fixed sleeve part a.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work Every other embodiment obtained, fall within the protection scope of the utility model.
Referring to Fig. 1, the utility model provides a kind of technical solution:
A kind of conversion pallet for fixing silicon wafer, including 6 cun of fixed rings, 1,4 cun of fixed ring 2 and bottom fixed tray 5, institute It states and is fixedly connected on the inside of 6 cun of 1 upper ends of fixed ring with 3 cun of fixed sleeve part b7,6 cun of fixed rings, 1 right end inside and 3 cun of fixations External member a6 is fixedly connected, and is provided with link slot, 3 cun of fixed sleeve parts with right end inside on the inside of 4 cun of fixed rings, 2 upper end B7,3 cun of fixed sleeve part a6 are connect with link slot, convenient for connecting various sizes of fixed ring, 6 cun of fixed rings, 1 bottom and bottom Portion's fixed tray 5 bonds, and the diameter of the bottom fixed tray 5 and 6 cun fixed ring 1 is consistent, can place various sizes of silicon Piece, 6 cun of fixed rings 1 are fixedly connected by 3 cun of fixed sleeve part b7,3 cun of fixed sleeve part a6 with 4 cun of fixed rings 2, and described 6 cun 1 left side lower end of fixed ring is provided with mounting groove, and mounting groove is internally provided with positioning thimble 3 or 3 cun of positioning thimbles 4, described fixed Position thimble 3 is 4 cun or 6 cun of general thimbles, can reinforce being fixedly connected by positioning thimble.
It should be understood that fixed sleeve part b, 3 cun of fixed sleeve part a are elastic construction, by elastic force, silicon wafer can be resisted Keep its position fixed, reinforce stability, bottom fixed tray can be carried for different size of silicon wafer, processing letter It is single, it is easy to use, be conducive to improve utilization rate of equipment and installations, production cost saved, by the inside of the upper end of fixed ring and in right end Side is provided with fixed sleeve part, and various sizes of fixed ring can be connected by fixed sleeve part, can be directed to various sizes of Silicon wafer is fixed.
While there has been shown and described that the embodiments of the present invention, for the ordinary skill in the art, It is understood that these embodiments can be carried out with a variety of variations in the case where not departing from the principles of the present invention and spirit, repaired Change, replacement and variant, the scope of the utility model is defined by the appended claims and the equivalents thereof.

Claims (4)

1. the conversion pallet that one kind can fix silicon wafer, it is characterised in that: including 6 cun of fixed rings (1), 4 cun of fixed rings (2) and bottom Fixed tray (5), 6 cun of fixed rings (1) upper end inside are fixedly connected with 3 cun of fixed sleeve part b (7), 6 cun of fixed rings (1) it is fixedly connected on the inside of right end with 3 cun of fixed sleeve part a (6), 6 cun of fixed rings (1) bottom and bottom fixed tray (5) are viscous It closes, 6 cun of fixed rings (1) are fixedly connected by 3 cun of fixed sleeve part b (7), 3 cun of fixed sleeve part a (6) with 4 cun of fixed rings (2).
2. the conversion pallet that one kind according to claim 1 can fix silicon wafer, it is characterised in that: 6 cun of fixed rings (1) Left side lower end is provided with mounting groove, and mounting groove is internally provided with positioning thimble (3) or 3 cun of positioning thimbles (4), the positioning top Needle (3) is 4 cun or 6 cun of general thimbles.
3. the conversion pallet that one kind according to claim 1 can fix silicon wafer, it is characterised in that: 4 cun of fixed rings (2) Link slot, 3 cun of fixed sleeve part b (7), 3 cun of fixed sleeve part a (6) and link slot are provided with right end inside on the inside of upper end Connection.
4. the conversion pallet that one kind according to claim 1 can fix silicon wafer, it is characterised in that: the bottom fixed tray (5) consistent with the diameter of 6 cun of fixed rings (1).
CN201821453612.6U 2018-09-05 2018-09-05 A kind of conversion pallet for fixing silicon wafer Active CN209192508U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201821453612.6U CN209192508U (en) 2018-09-05 2018-09-05 A kind of conversion pallet for fixing silicon wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201821453612.6U CN209192508U (en) 2018-09-05 2018-09-05 A kind of conversion pallet for fixing silicon wafer

Publications (1)

Publication Number Publication Date
CN209192508U true CN209192508U (en) 2019-08-02

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201821453612.6U Active CN209192508U (en) 2018-09-05 2018-09-05 A kind of conversion pallet for fixing silicon wafer

Country Status (1)

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CN (1) CN209192508U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110517955A (en) * 2019-08-29 2019-11-29 长春长光圆辰微电子技术有限公司 A kind of method of difference size dissimilar materials hybrid integrated

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110517955A (en) * 2019-08-29 2019-11-29 长春长光圆辰微电子技术有限公司 A kind of method of difference size dissimilar materials hybrid integrated
CN110517955B (en) * 2019-08-29 2021-05-14 长春长光圆辰微电子技术有限公司 Method for mixing and integrating heterogeneous materials with different sizes

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Address after: 214000 No. 11 Lijiang Road, Xinwu District, Wuxi City, Jiangsu Province

Patentee after: Wuxi zhuohai Technology Co.,Ltd.

Address before: 214000 room 906, building B, Wangzhuang science and technology entrepreneurship center, No. 4, Longshan Road, Xinwu District, Wuxi City, Jiangsu Province

Patentee before: WUXI ZHUOHAI TECHNOLOGY Co.,Ltd.