CN209182371U - A kind of full-automatic probe in detecting platform and its high-precision probe positioning module - Google Patents
A kind of full-automatic probe in detecting platform and its high-precision probe positioning module Download PDFInfo
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- CN209182371U CN209182371U CN201821360518.6U CN201821360518U CN209182371U CN 209182371 U CN209182371 U CN 209182371U CN 201821360518 U CN201821360518 U CN 201821360518U CN 209182371 U CN209182371 U CN 209182371U
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Abstract
The utility model discloses a kind of full-automatic probe in detecting platform and its high-precision probe positioning modules, the high-precision probe positioning module includes probe in detecting box, high power light source detection module is provided on the probe in detecting box, low power light source detection module, ccd image sensor, with optical path switching module, the optical path switching module includes path switching mechanisms, the path switching mechanisms include the switching connecting rod being rotatably connected in probe in detecting box, the switching cylinder of driving switching link rotatable and the shutter driven by drive link, high power light source module and low power light source module are blocked respectively in the shutter moving process, pass through above-mentioned setting, it is detected when use first with low power light source detection module, after ccd image sensor detects probe card position, control switching cylinder movement, drive shutter It is moved, switches to high power light source detection module, probe location is accurately positioned, easy to control, detection efficiency is high.
Description
Technical field
The utility model relates to chip detecting equipment field, in particular to a kind of full-automatic probe in detecting platform and its high-precision
Probe positioning module.
Background technique
Currently, to disclose a kind of encapsulation wafer array microprobe full-automatic for the Chinese patent of Publication No. CN104820181A
Test macro, including motion platform, wafer-supporting platform, vision module, motion control card, probe card module, four-wire type wire test machine
And computer, wherein wafer-supporting platform, vision module and probe card module are mounted on motion platform, as motion platform one starts shipment
Dynamic, the movement of motion control card control motion platform, probe card module is connect with four-wire type wire test machine, and computer and movement are controlled
Fabrication and the connection of four-wire type wire test machine.
The vision module of this probe test macro is only capable of carrying out position detection to encapsulation wafer to be measured, can not detection probe
Position, and when being detected to probe, since probe distribution is more, to the pinpoint high power light source of probe and camera lens first
When walking positioning probe card position, the difficulty for obtaining probe image is higher, and location efficiency is low.
Utility model content
The purpose of the utility model is to provide a kind of high-precision probe positioning modules, with easy switching, detection efficiency
High advantage.
The above-mentioned technical purpose of the utility model has the technical scheme that
A kind of probe positioning module, including probe in detecting box are provided with high power light source detection mould on the probe in detecting box
Block, for identification accurate position coordinates of probe；
Low power light source detection module, for tentatively identifying the position coordinates of probe；
Ccd image sensor will collect image and be converted into digital signal；
With optical path switching module, high power light source detection module and light source detection module are connect with ccd image sensor, institute
Stating optical path switching module includes path switching mechanisms, and the path switching mechanisms include being rotatably connected on cutting in probe in detecting box
Connecting rod is changed, the switching cylinder of driving switching link rotatable and the shutter driven by drive link, the shutter are moved through
High power light source module and low power light source module are blocked respectively in journey.
By using above-mentioned technical proposal, using optical path switching module by high power light source detection module and low power light source detection
Module is oriented to the same ccd image sensor, reduces probe positioning module to the occupancy in space；First with low power light when use
Source detection module is detected, and after ccd image sensor detects probe card position, control switching cylinder movement drives and hides
Baffle is moved, and is switched to high power light source detection module, is accurately positioned to probe location, easy to control, detection efficiency
It is high.
Further setting: the path switching mechanisms include the shading guide plate for being fixed on probe in detecting box, the fixation
Two light holes for respectively leading to high power light source detection module and low power light source detection module, the fixed plate point are provided on plate
For upper plate and lower plate, traction notch is offered on the upper plate, the shading guide plate slides are connected between upper plate and lower plate,
The shading guide plate includes the towing plate stretched out from traction notch, and the towing plate is right respectively under the drive of switching connecting rod
Two light holes are blocked.
By using above-mentioned technical proposal, drive link keeps towing plate sliding in traction indentation, there by exerting a force to towing plate
It is dynamic, so that barn door is blocked different light holes respectively, fixed plate limits the movement of barn door, improves barn door in movement
Stability in the process.
Further setting: it is provided with kidney-shaped towing pad on the towing plate, is provided with width and waist on the switching connecting rod
Shape draws the equal trussed shore of hole width.
By using above-mentioned technical proposal, switches connecting rod in the course of rotation, can occur simultaneously along fixed plate length side
To the movement with short transverse, the setting of waist-shaped hole avoids towing plate, and to barn door, pullling in a thickness direction, structure are closed
Reason.
Further setting: the change detection being electrically connected with high power power detection module is fixed in the probe in detecting box and is opened
It closes, the handover trigger piece of triggering change detection switch is fixed on the switching connecting rod.
By using above-mentioned technical proposal, handover trigger piece is mobile during switching link rotatable, switchs to change detection
It is triggered, controls the opening and closing of point light source and annular light source in high power detection module.
Further setting: being provided with target adjustment module on the probe in detecting box, the target adjustment module includes mark
The actuator of target fixing seat, the contraposition target being slidably connected in target fixing seat and driving contraposition target movement.
By using above-mentioned technical proposal, when in use, target will be aligned first with actuator and is moved to the inspection of low power light source
Before surveying module, after collecting probe card graphic using ccd image sensor, mobile contraposition target, and switch to the inspection of high power light source
Module is surveyed, the tip position of detection probe is used for subsequent positioning measurement；Target lighter in weight is moved when mobile using actuator
Dynamic, structure is simple, and camera lens, without movement, the optical path of probe in detecting module will not shift, and ensure that optical path
Accuracy, the situation for avoiding the offset due to eyeglass from causing measurement inaccurate, ensure that the accuracy of measurement result.
Further setting: the actuator is contraposition target point during target drives cylinder, target to drive cylinder moving
It Jing Guo not be before low power light source detection module and high power light source detection module.
By using above-mentioned technical proposal, drive contraposition target mobile using target driving cylinder, it is mobile quick, and position
It is accurate to set.
Further setting: the contraposition target includes sliding shoe and the target body that is fixed on sliding shoe, sets on the target body
It is equipped with index aperture, sliding rail is fixed in the target fixing seat, corresponding sliding slot is provided on the sliding shoe.
By using above-mentioned technical proposal, target is aligned in use, index aperture respectively reaches low power light source detection
Before module and high power light source detection module, auxiliary is positioned, and target body is respectively set with sliding shoe, when being partially damaged,
It can be replaced, and target body and sliding shoe split settings, it is more convenient in processing, slide the structure setting of rail and sliding slot
Simply, facilitate processing.
Further setting: target driving cylinder is set to the side of target fixing seat, be provided on the target body with
Target drives the target drive block of cylinder output connection.
By using above-mentioned technical proposal, target driving cylinder is arranged in the side of target fixing seat, probe positioning mould
Size of the group on cylinder length direction, reduces the space hold of probe in detecting mould group, and structure is more compact.
The another object of the utility model is to provide a kind of full-automatic probe in detecting platform, has the advantages that detection is accurate.
The above-mentioned technical purpose of the utility model has the technical scheme that
A kind of full-automatic probe in detecting platform, including body, be slidably connected at the intracorporal workbench of machine, case lid, be connected to case
The probe card covered is slidably connected at the intracorporal chip positioning mould group of machine and above-mentioned accurate formula probe in detecting mould group.
By using above-mentioned technical proposal, detection positioning, chip positioning are carried out to probe location using probe in detecting mould group
Then mould group makes the probe on chip face case lid by the movement to workbench, by work to the position of chip on workbench
Platform rises, and contradicts probe with chip and detects to chip；Probe positioning module when detecting, is examined first with low power light source
It surveys module to be detected, after ccd image sensor detects probe card position, control switching cylinder movement drives shutter
It is moved, switches to high power light source detection module, probe location is accurately positioned, easy to control, detection efficiency is high.
Further setting: the chip positioning mould group includes high power lens module, low power lens module, optical path oriented module
And height detecting module, optical path oriented module include high power lens entrance, and the first commutation rib is provided with before high power lens entrance
Mirror, the exit end of the first commutation prism are provided with the second commutation prism, and the exit end of the second commutation prism is provided with transmitting prism,
Low power lens entrance emits the exit direction of prism straight down towards transmitting prism.
By using above-mentioned technical proposal, chip positioning mould group detects operating position by high power lens module, then leads to
Low power lens module positioning chip specific location is crossed, and measures the vertical height of chip on workbench by height detecting module,
Bonding probes positioning module, by the tip alignment of chip and probe, workbench rises to be contradicted with probe, detection chip performance.
In conclusion the utility model has the following beneficial effects:
1. probe positioning module mould group is optimized by constructional depth, modular volume design is more compact, and light weight, is easy to
Installation, does not influence service behaviour；It is made of high power metallographic object lens, imaging definition is high, realizes precision positioning；The high power depth of field
It is small, automatic measurement probe height function is realized by auto-focusing mode, probe abrasion or damage or probe can be judged automatically
Card Rig up error；
2. automatic positioning chip module design has high camera lens optical path, it can accurately identify and adapt to different size size chip,
In addition, design has detection height mould group in mould group, for the thickness difference of automatic measurement different product, guarantee that probe and chip are good
Contact；
3. integrated vision aligns target, automatic positioning probe mould group can be calibrated automatically and is automatically positioned the phase of chip module
To coordinate, the reliability of entire calibration system is improved.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the probe positioning module of embodiment 1；
Fig. 2 is structural schematic diagram of the probe positioning module at another visual angle of embodiment 1；
Fig. 3 is the structural schematic diagram of embodiment 2；
Fig. 4 is the structural schematic diagram of the chip positioning mould group of embodiment 2；
Fig. 5 is the structural schematic diagram of the height detecting module of embodiment 2.
In figure, 1, chip positioning mould group；11, low power lens module；12, high power lens module；13, chip light path module；14, high
Spend detecting module；141, it pops one's head in；142, pressure sensor；2, probe positioning module；21, high power light source detection module；211, high
Times point light source；212, high power spectroscope；213, high power annular light source；214, high power lens；22, low power light source detection module；
221, low power point light source；222, low power spectroscope；223, low power annular light source；224, low power lens；23, optical path switching module；
231, high low power switching mechanism；232, high low power optical path spectroscope；233, reflective mirror；234, switch connecting rod；235, switch cylinder；
236, fixed plate；237, shutter；238, handover trigger piece；239, change detection switchs；24, ccd image sensor；241,
CCD connector sleeve；242, CCD latch segment；25, target adjustment module；251, target fixing seat；252, target drives cylinder；253,
Align target；26, probe in detecting box；3, workbench；4, body；41, horizontal sliding bar.
Specific embodiment
Below in conjunction with attached drawing, invention is further described in detail.
Embodiment 1: a kind of probe positioning module, referring to Figures 1 and 2, including the probe in detecting box being fixed on the worktable
26, be provided on probe in detecting box 26 low power light source detection module 22, high power light source detection module 21, optical path switching module 23,
Ccd image sensor 24 and target adjustment module 25.
Referring to Fig.1, low power light source detection module 22 include be fixed on probe in detecting box 26 low power annular light source 223,
Low power point light source 221, low power spectroscope 222 and low power lens 224, low power annular light source 223 and low power point light source 221 are pacified respectively
Mounted in the outside of orthogonal side wall, low power annular light source 223 is towards surface.223 center of low power annular light source has low
The light of the sending of low power point light source 221 is reflexed to low power point light source 221 by times 221 launch hole of point light source, low power spectroscope 222
Launch hole issues, and the design of low power lens 224 has retractable structure.
Referring to Fig.1, high power light source detection module 21 include be fixed on probe in detecting box 26 high power annular light source 213,
High power point light source 211, high power spectroscope 212 and high power lens 214, the center of high power annular light source 213 offer high power point light
211 launch hole of source, high power point light source 211 are threaded on 26 inner wall of probe in detecting box, the exit direction of high power point light source 211
Perpendicular to the launch hole of high power point light source 211, high power spectroscope 212 is supreme by the light reflection of the sending of high power point light source 211
Times 211 launch hole of point light source issues, and high power lens 214 is between high power spectroscope 212 and high power annular light source 213, high power
It is made of 20 times of metallographic object lens, it is ensured that imaging definition, while reducing Depth of field.
High low power focal length uses confocal design, i.e. it is consistent that CCD observes two kinds of multiplying power viewing distances of object space；Using high power as base
Standard, low power lens 224 designs retractable structure, repairing processing and rigging error, confocal to meet high low power, shortens high low power and cuts
Traveling time is changed, is improved efficiency.
Referring to Figures 1 and 2, high low power switching mechanism 231, reflective mirror 233 and high low power that optical path switching module 23 includes
Optical path spectroscope 232, high low power switching mechanism 231 include being fixed in probe in detecting box 26 to be rotatably connected on probe in detecting box
Switching connecting rod 234 in 26, the switching cylinder 235 of the driving switching rotation of connecting rod 234 are fixed on 26 inner wall of probe in detecting box
Fixed plate 236 and the shutter 237 for being switched the drive of connecting rod 234.The center of switching connecting rod 234, which is equipped with, is fixed on probe inspection
The rotating shaft screw bolt on box 26 is surveyed, fixed plate 236 is divided for upper plate and lower plate, 236 face low power lens 224 of fixed plate and high power lens
214 positions offer light hole, and shutter 237 is slidably connected between upper plate and lower plate, with the drive point of switching connecting rod 234
It is other that two light holes are blocked.Traction notch is offered on upper plate, shutter 237 includes the traction stretched out from traction notch
Plate is provided with kidney-shaped towing pad on towing plate, switches and is provided with the traction that draw hole width equal of width and kidney-shaped on connecting rod 234
Column, towing plate respectively block two light holes under the drive of switching connecting rod 234.It is further fixed in probe in detecting box 26
Change detection switch 239 switches the handover trigger piece 238 that triggering change detection switch 239 is fixed on connecting rod 234, switching inspection
Switch 239 is surveyed to be electrically connected with high power lens light source detection module and low power lens light source detection module.
Reflective mirror 233 is located at the underface of high power spectroscope 212, and high low power optical path spectroscope 232 is located at low power lens 224
Underface, light reflexes to high low power optical path spectroscope 232 by reflective mirror 233, and institute's low power optical path spectroscope is by light refraction
To ccd image sensor 24.
Referring to Fig. 2, target adjustment module 25 includes the target fixing seat 251 for being fixed on probe in detecting box 26, is slidably connected
The target of contraposition target 253 and the driving contraposition movement of target 253 in target fixing seat 251 drives cylinder 252.Register guide
Target 253 includes sliding shoe and the target body being fixed on sliding shoe, offers index aperture on target body, the direction of index aperture is vertical
, index aperture passes through high power exit portal and low power exit portal respectively in the moving process of target body.It is fixed in target fixing seat 251
Rail is slided, corresponding sliding slot is provided on sliding shoe, target driving cylinder 252 is threadedly connected to the side of target fixing seat 251, target
The target drive block connecting with target driving 252 output end of cylinder is wholely set on body.
Referring to Fig.1, it is threaded with 24 banding of ccd image sensor on side of the box body far from target adjustment module 25
CCD connector sleeve 241, CCD connector sleeve 241 includes banding mouth, is provided with CCD latch segment 242 at banding mouth, will be bound round by bolt
Tight mouth tightening；CCD clamping mode is fixed, and angular adjustment and flexible fine tuning, repairing processing and rigging error can be carried out.
When detection, probe card position is determined first with low power light source detection module 22, low power light source detection mould
After block 22 detects probe card position, switching cylinder 235 is acted, and shutter 237 blocks low power light source detection module 22, is switched
Detection probe needle point image is carried out to high power light source detection module 21, probe is accurately positioned by software algorithm, is captured
The distribution of probe and the needle point coordinate of correspondent probe.The visual-alignment target 253 of target adjustment module 25 is distinguished in handoff procedure
It switching to before high power perforation hole and before low power perforation hole, positioning software establishes position coordinates system on the basis of aligning target 253,
The movement of workbench 3 is controlled by software algorithm, drives probe positioning module 2 certain, workbench 3 is being moved to probe card just automatically
Lower section.
Embodiment 2: a kind of full-automatic probe in detecting platform, as shown in figure 3, including in chip positioning mould group 1 and embodiment 1
Probe positioning module 2, the probe for probe in detecting platform position, and probe in detecting platform includes body 4, workbench 3 and cover, cover
On probe card is installed.Along X, tri- direction movements of Y, Z in cabinet on workbench 3.Water is fixed on the inner wall of cabinet two sides
Smooth bar 41, be slidably connected at horizontal sliding bar 41 chip positioning mould group 1.
Referring to Fig. 4, chip positioning mould group 1 include high power lens module 12, low power lens module 11, chip light path module 13 and
Height detecting module 14.High power lens module 12 includes that chip ccd sensor, high power lens and high power light source, high power lens lead to chip
Light path module 13, chip ccd sensor are located at high power lens far from optical path oriented module one end.Low power lens module 11 includes chip
Ccd sensor, low power lens and low power light source, low power lens lead to chip light path module 13, and it is remote that chip ccd sensor is located at low power lens
Off-chip piece optical path is oriented to one end.Height detecting module 14 is made of probe 141 and pressure sensor 142, by contacting force feedback
Coherent signal.When work, risen by workbench 3, is contacted by workbench 3 with 141 contact heights of probe and chip with probe 141
Highly, the difference in height of the two calculates product thickness automatically, provides accurate data for entire calibration system.
Chip light path module 13 includes high power lens entrance, and the first commutation prism, the first commutation are provided with before high power lens entrance
The exit end of prism is provided with the second commutation prism, and the exit end of the second commutation prism is provided with transmitting prism, low power lens entrance
Towards transmitting prism, emit the exit direction of prism straight down, towards workbench 3.
The image on wafer is acquired using chip positioning mould group 1: being examined when acquisition first with low power lens module 11
It surveys, during chip positioning mould group 1 is moved along horizontal sliding bar 41, stops after detecting 3 position of workbench, start high power lens
Module 12 detects, and contact point and the corresponding coordinate of wafer is accurately positioned；And collected probe location coordinate is compared
To calculating, the movement of workbench 3 is controlled, automatically corresponds probe contact point on wafer and probe.
Embodiments described above does not constitute the restriction to the technical solution protection scope.It is any in above-mentioned implementation
Made modifications, equivalent substitutions and improvements etc., should be included in the protection model of the technical solution within the spirit and principle of mode
Within enclosing.
Claims (10)
1. a kind of high-precision probe positioning module, including probe in detecting box (26), it is provided on the probe in detecting box (26)
High power light source detection module (21), for identification accurate position coordinates of probe；
Low power light source detection module (22), for tentatively identifying the position coordinates of probe；
Ccd image sensor (24) will collect image and be converted into digital signal；
With optical path switching module (23), by high power light source detection module (21) and low power light source detection module (22) and ccd image
Sensor (24) connection, the optical path switching module (23) includes path switching mechanisms, and the path switching mechanisms include rotation
The switching connecting rod (234) being connected in probe in detecting box (26), driving switching connecting rod (234) rotation switching cylinder (235) with
And the shutter (237) driven by drive link, respectively to high power light source module and low in shutter (237) moving process
Times light source module is blocked.
2. high-precision probe positioning module according to claim 1, which is characterized in that the path switching mechanisms include solid
High power light source detection mould is respectively led to due to being provided in the fixed plate (236) of probe in detecting box (26), the fixed plate (236)
Two light holes of block (21) and low power light source detection module (22), the fixed plate (236) are divided into upper plate and lower plate, it is described on
Traction notch is offered on plate, barn door is slidably connected between upper plate and lower plate, and barn door includes stretching out from traction notch
Towing plate, the towing plate switching connecting rod (234) drive under two light holes are blocked respectively.
3. high-precision probe positioning module according to claim 2, which is characterized in that be provided with kidney-shaped on the towing plate
Towing pad, described switch are provided with the width trussed shore equal with kidney-shaped traction hole width on connecting rod (234).
4. high-precision probe positioning module according to claim 1, which is characterized in that solid in the probe in detecting box (26)
Surely there is change detection to switch (239), the switching touching of triggering change detection switch (239) is fixed on switching connecting rod (234)
It sends out piece (238).
5. high-precision probe positioning module according to claim 1, which is characterized in that set on the probe in detecting box (26)
It is equipped with target adjustment module (25), the target adjustment module (25) includes target fixing seat (251), to be slidably connected at target solid
The actuator of contraposition target (253) and driving contraposition target (253) movement in reservation (251).
6. high-precision probe positioning module according to claim 5, which is characterized in that the actuator is that target drives gas
Cylinder (252), target drive in cylinder (252) motion process, and low power light source detection module (22) is passed through in contraposition target (253) respectively
Before high power light source detection module (21).
7. high-precision probe positioning module according to claim 6, which is characterized in that the contraposition target (253) includes
Sliding shoe and the target body being fixed on sliding shoe, are provided with index aperture on the target body, fixed on the target fixing seat (251)
There is sliding rail, corresponding sliding slot is provided on the sliding shoe.
8. high-precision probe positioning module according to claim 6, which is characterized in that the target drives cylinder (252)
It is set to the side of target fixing seat (251), the target connecting with target driving cylinder (252) output end is provided on target body and is driven
Motion block.
9. a kind of full-automatic probe in detecting platform, it is characterised in that: including body (4), the workbench being slidably connected in body (4)
(3), case lid, the probe card being connected on case lid, chip positioning mould group (1) and the claim 1 being slidably connected in body (4)
High-precision probe positioning module described in~8 any one.
10. full-automatic probe in detecting platform according to claim 9, which is characterized in that the chip positioning mould group (1) includes
High power lens module (12), low power lens module (11), optical path oriented module and height detecting module (14), optical path oriented module packet
High power lens entrance is included, the first commutation prism is provided with before high power lens entrance, the exit end of the first commutation prism is provided with second and changes
To prism, the exit end of the second commutation prism is provided with transmitting prism, and low power lens entrance emits going out for prism towards transmitting prism
Penetrate direction straight down.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821360518.6U CN209182371U (en) | 2018-08-22 | 2018-08-22 | A kind of full-automatic probe in detecting platform and its high-precision probe positioning module |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201821360518.6U CN209182371U (en) | 2018-08-22 | 2018-08-22 | A kind of full-automatic probe in detecting platform and its high-precision probe positioning module |
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| CN209182371U true CN209182371U (en) | 2019-07-30 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112763193A (en) * | 2021-01-07 | 2021-05-07 | 上海浩创亘永科技有限公司 | CCD module detection device and CCD module detection method |
-
2018
- 2018-08-22 CN CN201821360518.6U patent/CN209182371U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112763193A (en) * | 2021-01-07 | 2021-05-07 | 上海浩创亘永科技有限公司 | CCD module detection device and CCD module detection method |
| CN112763193B (en) * | 2021-01-07 | 2023-05-30 | 上海浩创亘永科技有限公司 | CCD module detection device and CCD module detection method |
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Address after: 518172 Longgang District, Shenzhen City, Guangdong Province Patentee after: Silicon electric semiconductor equipment (Shenzhen) Co., Ltd Address before: 518172 Longgang District, Shenzhen City, Guangdong Province Patentee before: SHENZHEN SIDEA SEMICONDUCTOR EQUIPMENT Co.,Ltd. |
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