CN209133470U - Etaching device - Google Patents
Etaching device Download PDFInfo
- Publication number
- CN209133470U CN209133470U CN201822018495.7U CN201822018495U CN209133470U CN 209133470 U CN209133470 U CN 209133470U CN 201822018495 U CN201822018495 U CN 201822018495U CN 209133470 U CN209133470 U CN 209133470U
- Authority
- CN
- China
- Prior art keywords
- disk cover
- crossbeam
- fixed ring
- convex block
- etaching device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003028 elevating effect Effects 0.000 claims abstract description 7
- 238000009826 distribution Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 14
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 238000012797 qualification Methods 0.000 abstract description 4
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 238000010586 diagram Methods 0.000 description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 238000005530 etching Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000013618 particulate matter Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model relates to technical field of manufacturing semiconductors more particularly to a kind of Etaching devices.The Etaching device includes: disk cover；Disk cover outline border, is located above the disk cover, and an at least crossbeam is fixed on the disk cover outline border；Connection component, for connecting the crossbeam and the disk cover；Elevator connects the disk cover outline border, carries out elevating movement along the vertical direction for controlling the disk cover outline border.The utility model simplifies the operation that disk cover picks and places operation, reduces the burden of staff and security risk that may be present in disk cover fetching process, improves the qualification rate of operation.
Description
Technical field
The utility model relates to technical field of manufacturing semiconductors more particularly to a kind of Etaching devices.
Background technique
As the mobile terminals such as smart phone, tablet computer develop to the direction of miniaturization, intelligence, energy-saving, chip
High-performance, integrated trend it is obvious, promote chip manufacturing enterprise active adoption advanced technologies, to produce faster, more power saving
The pursuit of chip grow in intensity.The main element of especially many wireless telecommunications systems need to use 40nm or less sophisticated semiconductor skill
Art and technique, therefore the demand to advanced technologies production capacity significantly rises as compared with the past, and integrated circuit suppliers is driven constantly to promote work
Skill technical level, by reduce wafer both horizontally and vertically on characteristic size to improve chip performance and reliability, and
The modes such as the electrical property for influencing wafer by the utilization of the non-geometric technology such as 3D structure of modification and new material realize silicon collection
At raising, to cater to the market demand.However, the innovation or improvement of these technologies are all based on brilliant circle drawing, manufacture.
Wafer refers to silicon wafer used in silicon semiconductor production of integrated circuits, since its shape is circle, therefore referred to as wafer.
It can be processed on silicon, be fabricated to various circuit component structures, and be known as the IC products for having specific electrical functionality.
In the manufacturing process of product wafer, etching is an important step.But it is filled in the prior art to etching
When setting reaction chamber progress cleaning and maintenance of (such as Etaching device of Lam Kiyo/Metal series) inside, need to carry out several
The dismounting process of components, wherein the dismounting of disk cover is particularly difficult, the reason is as follows that: first, the volume of disk cover is big, quality weight, pacifies
Holding position is higher, all there is some potential safety problems to people or object in disassembly process；Second, disk cover material is frangible, is picking and placing
It must handle with care, the technical level of staff be required very high in the process；Third must not touch in fetching process
Disk cover lower surface and the coating on disk cover lower surface, are otherwise also easy to produce particulate matter, lead to etching defect, influence wafer production
The yield of product.
Therefore, the load of staff in disk cover fetching process how is reduced, reduces security risk, and ensure product wafer
Yield, be a technical problem to be solved urgently.
Utility model content
The utility model provides a kind of Etaching device, and the disk cover for solving Etaching device in the prior art picks and places difficulty
Greatly and there are problems that larger security risk.
To solve the above-mentioned problems, the utility model provides a kind of Etaching device, comprising:
Disk cover；
Disk cover outline border, is located above the disk cover, and an at least crossbeam is fixed on the disk cover outline border；
Connection component connects the crossbeam and the disk cover；
Elevator connects the disk cover outline border, carries out elevating movement along the vertical direction for controlling the disk cover outline border.
Preferably, the disk cover sidewall surfaces have multiple symmetrical side slots, one end card of the connection component
It is fixed in the side slot, the other end is connect with the crossbeam.
Preferably, the connection component include a fixed ring and with multiple side slots multiple clamps correspondingly；
The both ends of the clamp engage with the side slot, the fixed ring respectively；The fixed ring is placed in the disk cover surface, and leads to
Cable is crossed to connect with the crossbeam.
Preferably, multiple symmetrical first through hole are provided in the fixed ring；An at least crossbeam includes two flat
The crossbeam of row setting, has several the second through-holes being axially distributed along the crossbeam in each crossbeam；The cable
One end is connect by the first through hole with the fixed ring, the other end is connect by second through-hole with the crossbeam.
Preferably, setting is provided with there are four symmetrical first through hole in the every crossbeam in the fixed ring
Two second through-holes.
Preferably, the fixed ring includes the first surface and second surface of Relative distribution, the first surface with it is described
The upper surface of disk cover contacts, and is provided on the second surface and multiple side slots multiple recess correspondingly；It is described
Clamp is engaged by the recess with the fixed ring, and the fixed ring can enclose rotatable around its axis.
Preferably, the clamp includes horizontally extending first support and vertical with the first support connects
The second support for connecing and extending along the vertical direction；The first support is provided with away from the end of the second support along vertical
The first convex block that direction extends, the second support are provided with horizontally extending the away from the end of the first support
Third convex block, the third convex block and institute are provided on the inside of two convex blocks, the first support and the second support junction
Stating has the first card slot between the first convex block, have the second card slot between the third convex block and second convex block, and described the
One card slot and the second card slot vertical connection；First convex block with the side slot for engaging, the second convex block energy
Enough inner rings that the fixed ring is slid into through the recess, to connect the disk cover and the fixed ring.
Preferably, multiple side slots include four side slots.
Preferably, the width of the side slot is greater than the width of the recess.
Preferably, the surface that the crossbeam is contacted with the disk cover outline border has groove, and the groove is used for and the disk
Lid outline border is fixed.
Etaching device provided by the utility model, the crossbeam of load-bearing is used for by being arranged in disk cover outline border, and passes through company
Connected components connect the crossbeam and disk cover, using the elevating movement of elevator control panel cover rim vertical direction, indirectly described in drive
The movement of disk cover along the vertical direction is realized that the pick-and-place to the disk cover, the operation of automation simplify disk cover and pick and place operation, is reduced
The burden and security risk that may be present of staff, improves the qualification rate of operation in disk cover fetching process.
Detailed description of the invention
Attached drawing 1 is the overall structure diagram of Etaching device in specific embodiment of the present invention；
Attached drawing 2 is the structural schematic diagram of fixed ring in specific embodiment of the present invention；
Attached drawing 3 is the structural schematic diagram of clamp in specific embodiment of the present invention；
Attached drawing 4 is that clamp is fixed the structural schematic diagram before ring and disk cover in specific embodiment of the present invention；
Attached drawing 5 is that clamp is fixed the structural schematic diagram after ring and disk cover in specific embodiment of the present invention；
Attached drawing 6 is that clamp is fixed the schematic cross-section after ring and disk cover in specific embodiment of the present invention.
Specific embodiment
It elaborates with reference to the accompanying drawing to the specific embodiment of Etaching device provided by the utility model.
Present embodiment provides a kind of Etaching device, and attached drawing 1 is etched in specific embodiment of the present invention
The overall structure diagram of device.As shown in Figure 1, the Etaching device that present embodiment provides includes:
Disk cover 10；
Disk cover outline border 11 is located at 10 top of disk cover, and at least a crossbeam 12 is fixed on the disk cover outline border 11；
Connection component connects the crossbeam 12 and the disk cover 10；
Elevator connects the disk cover outline border 11, carries out lifting fortune along the vertical direction for controlling the disk cover outline border 11
It is dynamic.
Specifically, the disk cover outline border 11 is set to the surface of the disk cover, the disk cover outline border 11 along Z-direction
Opposite sides along the x axis is respectively provided with a form 110, and the crossbeam 12 extends along the x axis, and passes through two views
Window 110, and connect with the frame for constituting the form 110, the crossbeam 12 is fixed on the disk cover outline border 11.It is described
Disk cover 10 is connect with the crossbeam 12 by a connection component.The disk cover outline border 11 described in the elevator drives is along Z-direction
When carrying out elevating movement, by the crossbeam 12 and the connection component, the disk cover 10 is driven also to be gone up and down along Z-direction
Movement, to realize the automatic clamping and placing to the disk cover 10.Wherein, the specific structure of the connection component, those skilled in the art
Member can be selected according to actual needs, as long as the connection that can the be consolidated crossbeam 12 and the disk cover 10.
Present embodiment drives the disk cover 10 to carry out elevating movement along the vertical direction indirectly using elevator, automatically
The operation of change simplifies disk cover and picks and places operation, reduces the burden of staff and peace that may be present in disk cover fetching process
Full hidden danger improves the qualification rate of operation.Simultaneously as picking and placing the disk cover 10 is realized by the elevator, it is therefore prevented that
Staff directly contacts with the inner surface of disk cover 10, avoids and generates particulate matter in the reaction chamber of Etaching device, it is ensured that
The yield of product wafer.
Preferably, 10 sidewall surfaces of disk cover have multiple symmetrical side slots 13, the one of the connection component
End is fastened in the side slot 13, the other end is connect with the crossbeam 12.Specifically, symmetrical multiple side slots 13
It can make the uniform force in fetching process of disk cover 10, further improve the safety in disk cover fetching process.Only
The side slot 13 is opened up in the sidewall surfaces of the disk cover 10, the overall structure of the disk cover 10 will not be impacted, is saved
The cost of Etaching device is saved.The particular number of the side slot 13, those skilled in the art can carry out according to actual needs
Selection, such as selected according to weight, the volume etc. of the disk cover 10.It is more excellent in order to simplify the structure of the Etaching device
Choosing, multiple side slots 13 include four side slots 13.
Preferably, the connection component include a fixed ring 14 and with the one-to-one multiple cards of multiple side slots 13
First 16；The both ends of the clamp 16 engage with the side slot 13, the fixed ring 14 respectively；The fixed ring 14 is placed in described
10 surface of disk cover, and connect by cable 18 with the crossbeam 12.
Specifically, the axis of the fixed ring 14 is overlapped with the axis of the disk cover 10.The disk cover 10 passes sequentially through
The clamp 16, the fixed ring 14, the cable 18 are connect with the crossbeam 12, to further ensure that the disk cover 10 takes
During putting under the premise of uniform force, avoid that the frangible disk cover 10 is caused to damage.
In order to be further simplified the structure of the Etaching device, and enhance between the crossbeam 12 and the fixed ring 14
Connective stability, it is preferred that multiple symmetrical first through hole 17 are provided in the fixed ring 14；An at least crossbeam 12 packet
Two crossbeams 12 disposed in parallel are included, have several second be axially distributed along the crossbeam 12 logical in each crossbeam 12
Hole 19；One end of the cable 18 is connect by the first through hole 17 with the fixed ring 14, the other end is by described second
Through-hole 19 is connect with the crossbeam 12.It is furthermore preferred that be arranged in the fixed ring 14 there are four symmetrical first through hole 17,
There are two second through-holes 19 for setting in the every crossbeam 12.
Specifically, by the way that two crossbeams 12 are arranged, it is possible to reduce the power being applied on each crossbeam 12,
While improving 12 service life of crossbeam, also avoids the disk cover 10 and shaken in fetching process.The line
One end of cable 18 can be connect by a knot that can be undone by a pull with the first through hole 17, the other end can be by another knot that can be undone by a pull and described second
Through-hole 19 connects, to improve flexibility of Etaching device during picking and placing disk cover 10.
Preferably, the surface that the crossbeam 12 is contacted with the disk cover outline border 11 has groove, and the groove is used for and institute
Disk cover outline border 11 is stated to be fixed.By in the bottom surface that the crossbeam 12 is contacted with the disk cover outline border 11 setting and the disk cover
The groove that outline border 11 engages may be implemented being bonded for the crossbeam 12 and the disk cover outline border 11, avoid the crossbeam 12
It is slid in the disk cover outline border 11.
Attached drawing 2 is the structural schematic diagram of fixed ring in specific embodiment of the present invention.Preferably, institute as shown in Figure 1, Figure 2
Show, the fixed ring 14 includes the first surface and second surface of Relative distribution, and the first surface is upper with the disk cover 10
Surface contact, is provided on the second surface and the one-to-one multiple recess 15 of multiple side slots 13；The clamp
16 are engaged by the recess 15 with the fixed ring 14, and the fixed ring 14 can enclose rotatable around its axis.
Attached drawing 3 is the structural schematic diagram of clamp in specific embodiment of the present invention.It is furthermore preferred that the clamp 16 wraps
Include first support 30 that (such as X-direction in Fig. 3) in the horizontal direction extends and it is vertical with the first support 30 connect,
And the second support 31 that (such as Z-direction in Fig. 3) extends along the vertical direction；The first support 30 deviates from described second
The end of frame 31 is provided with the first convex block 33 extended along the vertical direction, and the second support 31 is away from the first support 30
End is provided with the second horizontally extending convex block 32, and the first support 30 is interior with 31 junction of second support
Side is provided with third convex block 34, has the first card slot 35, the third between the third convex block 34 and first convex block 33
There is the second card slot 36, first card slot 35 is vertical with second card slot 36 to be connected between convex block 34 and second convex block 32
It is logical；For first convex block 33 for engaging with the side slot 13, second convex block 32 can slide into institute through the recess 15
The inner ring of fixed ring 14 is stated, to connect the disk cover 10 and the fixed ring 14.
Attached drawing 4 is that clamp is fixed the structural schematic diagram before ring and disk cover in specific embodiment of the present invention, attached
Fig. 5 is that clamp is fixed the structural schematic diagram after ring and disk cover in specific embodiment of the present invention, and attached drawing 6 is that this is practical
Clamp is fixed the schematic cross-section after ring and disk cover in novel specific embodiment.Specifically, pass through the clamp 16
Connect the specific steps of the disk cover 10 and the fixed ring 14 are as follows: firstly, being aligned with the side slot 13 with the recess 15
Mode the fixed ring 14 is placed in 10 surface of disk cover, i.e., the opening direction of described side slot 13 and the recess 15
Same direction, as shown in Figure 4；Then, second convex block 32 in a clamp 16 is inserted into a side slot 13, together
When, first convex block 33 in the clamp 16 slides into the inner ring of the fixed rings 14 along the recess 15；Then, institute is surrounded
The axis for stating fixed ring 14 rotates the fixed ring 14, so that the recess 15 is staggered with first convex block 33, so that described
First card slot 35 agrees with the fixed ring 14, as shown in Figure 5, Figure 6.It repeats the above steps and other clamps is installed, described in realization
Disk cover 10 is stably connected with the fixed ring 14.After the installation for completing the clamp 16, connected by the cable 18
The fixed ring 14 and the crossbeam 12.
Preferably, the width of the side slot 13 is greater than the width of the recess 15.By by the width of the side slot 13
Degree is set greater than the width of the recess 15, can increase the alignment windows of the side slot 13 with the recess 15, simplify
The installation of the clamp 16 operates.
The Etaching device that present embodiment provides, the crossbeam of load-bearing is used for by being arranged in disk cover outline border, and is led to
It crosses connection component and connects the crossbeam and disk cover, using the elevating movement of elevator control panel cover rim vertical direction, drive indirectly
The movement of the disk cover along the vertical direction realizes that the pick-and-place to the disk cover, the operation of automation simplify disk cover and pick and place operation,
Reduce the burden of staff and security risk that may be present in disk cover fetching process, improves the qualification rate of operation.
The above is only the preferred embodiment of the utility model, it is noted that for the common skill of the art
Art personnel can also make several improvements and modifications without departing from the principle of this utility model, these improvements and modifications
Also it should be regarded as the protection scope of the utility model.
Claims (10)
1. a kind of Etaching device characterized by comprising
Disk cover；
Disk cover outline border, is located above the disk cover, and an at least crossbeam is fixed on the disk cover outline border；
Connection component connects the crossbeam and the disk cover；
Elevator connects the disk cover outline border, carries out elevating movement along the vertical direction for controlling the disk cover outline border.
2. Etaching device according to claim 1, which is characterized in that the disk cover sidewall surfaces have multiple symmetrical
Side slot, one end of the connection component is fastened in the side slot, the other end is connect with the crossbeam.
3. Etaching device according to claim 2, which is characterized in that the connection component include a fixed ring and with
Multiple side slots multiple clamps correspondingly；The both ends of the clamp engage with the side slot, the fixed ring respectively；Institute
It states fixed ring and is placed in the disk cover surface, and connect by cable with the crossbeam.
4. Etaching device according to claim 3, which is characterized in that be provided in the fixed ring multiple symmetrical
First through hole；An at least crossbeam includes two crossbeams disposed in parallel, with several along the crossbeam in each crossbeam
The second through-hole being axially distributed；One end of the cable is connect by the first through hole with the fixed ring, the other end passes through
Second through-hole is connect with the crossbeam.
5. Etaching device according to claim 4, which is characterized in that there are four symmetrical for setting in the fixed ring
First through hole, there are two second through-holes for setting in the every crossbeam.
6. Etaching device according to claim 3, which is characterized in that the fixed ring includes the first surface of Relative distribution
And second surface, the first surface are contacted with the upper surface of the disk cover, be provided on the second surface with it is multiple described
Side slot multiple recess correspondingly；The clamp is engaged by the recess with the fixed ring, and the fixed ring can
It encloses rotatable around its axis.
7. Etaching device according to claim 6, which is characterized in that the clamp includes horizontally extending first
Bracket and the second support connecting and extend along the vertical direction vertical with the first support；The first support deviates from institute
The end for stating second support is provided with the first convex block extended along the vertical direction, and the second support is away from the first support
End is provided with the second horizontally extending convex block, the inside setting of the first support and the second support junction
There is third convex block, there is the first card slot, the third convex block and described second between the third convex block and first convex block
There is the second card slot, first card slot and the second card slot vertical connection between convex block；First convex block is used for and institute
State the engaging of side slot, second convex block can slide into the inner ring of the fixed ring through the recess, with connect the disk cover with
The fixed ring.
8. Etaching device according to claim 6, which is characterized in that multiple side slots include four side slots.
9. Etaching device according to claim 8, which is characterized in that the width of the side slot is greater than the width of the recess
Degree.
10. Etaching device according to claim 1, which is characterized in that the table that the crossbeam is contacted with the disk cover outline border
Mask is fluted, and the groove with the disk cover outline border for being fixed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822018495.7U CN209133470U (en) | 2018-12-03 | 2018-12-03 | Etaching device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822018495.7U CN209133470U (en) | 2018-12-03 | 2018-12-03 | Etaching device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209133470U true CN209133470U (en) | 2019-07-19 |
Family
ID=67247783
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822018495.7U Expired - Fee Related CN209133470U (en) | 2018-12-03 | 2018-12-03 | Etaching device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209133470U (en) |
-
2018
- 2018-12-03 CN CN201822018495.7U patent/CN209133470U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190719 |