CN209132497U - A kind of mechanical speed-control device of mirror surface - Google Patents
A kind of mechanical speed-control device of mirror surface Download PDFInfo
- Publication number
- CN209132497U CN209132497U CN201822231948.4U CN201822231948U CN209132497U CN 209132497 U CN209132497 U CN 209132497U CN 201822231948 U CN201822231948 U CN 201822231948U CN 209132497 U CN209132497 U CN 209132497U
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- CN
- China
- Prior art keywords
- workbench
- mirror surface
- rotary shaft
- slideway
- work
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Abstract
A kind of mechanical speed-control device of mirror surface, it is related to mirror surface detection technique field.It includes pedestal, work slideway, sliding rail, workbench, sliding block, rotary shaft, mirror surface, angle adjustment lever, angular wheel group, pedestal is equipped with arc work slideway, slideway two sides work equipped with sliding rail, workbench bottom is equipped with groove, groove is equipped with sliding block, sliding block is slidably connected with sliding rail, workbench is equipped with rotary shaft, rotary shaft lower end and workbench are rotatablely connected, rotary shaft upper end is located at outside workbench, rotary shaft top is connect with mirror surface, and workbench side is equipped with angle adjustment lever, and angle adjustment lever is connect by angular wheel group with rotary shaft lower end.It can be realized mirror surface by the cooperation of angle adjustment lever and rotary shaft and rotates around its centre of gyration by fixed angle, it can be realized the adjustment that mirror surface swings posture by the guiding movement of workbench and work slideway, multidimensional pose adjustment is realized using mechanical drive mode, and low in cost.
Description
Technical field
The utility model relates to mirror surface detection technique fields, and in particular to a kind of machinery adjustment dress of mirror surface
It sets.
Background technique
Extreme ultraviolet photolithographic (Extreme Ultraviolet Lithography), commonly referred to as EUV lithography, it is with wavelength
Photoetching technique of 10-14 nanometers of the extreme ultraviolet as light source.Specially use wavelength for the soft x ray of 13.4nm.Extreme ultraviolet
Line, which just refers to, to be needed then to radiate ultraviolet light by the pole K of energization excited ultraviolet pipe.Extreme ultraviolet photolithographic in the related technology,
Sub-nanometer magnitude is reached to optical component surface shape detection accuracy, this proposes high requirement to optical detective technology.In height
In resolution optical element surface testing method, it is desirable that tested optical element can be rotated around its centre of gyration by fixed angle, and
The swing that spherical surface tangential direction does certain angle can be prolonged as origin using the centre of sphere for being tested spherical surface, realize multidimensional pose adjustment.
It is mostly to be independent rotating mechanism, turntable, straight-line displacement at present in the device that mirror surface is adjusted
Mechanism and tilt adjustments platform etc., the product that can be met the requirements simultaneously is less, and the tune of mirror surface is carried out by motor driven
Whole higher cost is not suitable for the experiment of early period.
Utility model content
The purpose of this utility model is that it is in view of the drawbacks of the prior art and insufficient, a kind of mechanical tune of mirror surface is provided
Engagement positions, it can make tested mirror surface rotate around its centre of gyration by fixed angle by the way of mechanical, and energy
It is enough that the swing that spherical surface tangential direction does certain angle is prolonged as origin using the centre of sphere for being tested spherical surface, realize multidimensional pose adjustment, cost
It is cheap.
To achieve the above object, the utility model is using following technical scheme: it include pedestal, work slideway, sliding rail,
Workbench, sliding block, rotary shaft, mirror surface, angle adjustment lever, angular wheel group are provided with work slideway, institute on the pedestal
The arc-shaped setting of work slideway is stated, the two sides for the slideway that works are fixedly connected with sliding rail, and the workbench setting is working on slideway,
The setting of workbench bottom is fluted, and sliding block is provided in the groove, and the sliding block is slidably connected with sliding rail cooperation, the work
Rotary shaft is vertically arranged on platform, the rotary shaft lower end and workbench are rotatablely connected, and the upper end of rotary shaft is arranged in workbench
The top in outside, rotary shaft is fixedly connected with mirror surface, and the side of the workbench is provided with angle adjustment lever, the angle
Bar is adjusted to be sequentially connected by the lower end of angular wheel group and rotary shaft.
Further, the workbench bag contains cabinet, slide unit, and the bottom of box two sides are provided with slide unit, the slide unit
It is inside provided with the groove adaptable with arc work slideway shape, is provided with sliding block in the groove.
Further, the pedestal includes bottom plate, vertical plate, and the two sides of the bottom plate are provided with vertical plate, described two vertical plates
Between be provided with work slideway, the work slideway is fixedly connected with bottom plate, vertical plate.
Further, the rotary shaft is connect by first bearing seat with workbench.
Further, the angle adjustment lever is connect by second bearing seat with workbench.
Further, the side of the angle adjustment lever is provided with rotating disc, is provided with angle index on the rotating disc
Line.
Working principle of the utility model is: mirror surface is mounted on the upper surface of rotary shaft, rotational angle tune when work
Whole bar, angle adjustment lever are able to drive rotary shaft by angular wheel group and rotate, and rotary shaft drives mirror surface around its axial direction side
To rotation, the specific rotational angle of rotary shaft is adjusted, according on rotating disc by the rotating disc on the outside of angle adjustment lever
Rotational angle graduation mark can guarantee that rotary shaft is rotated by fixed angle；Work slideway on pedestal is by sliding rail to work
The lower end for making platform carries out motion guide, and workbench is able to carry out fixed support and slide-and-guide, rotation by sliding block and sliding rail cooperation
Shaft is vertically mounted on above workbench, and by workbench, movement can be realized mirror surface and swing posture on work slideway
Adjustment.
After adopting the above technical scheme, the utility model has the beneficial effect that its structure is simple, design rationally, passes through angle
The cooperation of adjustment bar and rotary shaft can be realized mirror surface and rotate around its centre of gyration by fixed angle, pass through workbench and work
The guiding movement for making slideway can be realized the adjustment that mirror surface swings posture, realize multidimensional posture tune using mechanical drive mode
It is whole and low in cost.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only
It is some embodiments of the utility model, for those of ordinary skill in the art, before not making the creative labor property
It puts, is also possible to obtain other drawings based on these drawings.
Fig. 1 is the main view of the utility model；
Fig. 2 is the top view of corresponding diagram 1；
Fig. 3 is the schematic diagram of internal structure of the utility model；
Fig. 4 is the structural schematic diagram of workbench in the utility model.
Description of symbols: pedestal 1, work slideway 2, sliding rail 3, workbench 4, sliding block 5, rotary shaft 6, mirror surface 7, angle
Degree adjustment bar 8, angular wheel group 9, first bearing seat 10, second bearing seat 11, rotating disc 12, bottom plate 1-1, vertical plate 1-2, groove
4-1, cabinet 4-2, slide unit 4-3.
Specific embodiment
Referring to shown in Fig. 1-Fig. 4, present embodiment the technical solution adopted is that: it include pedestal 1, work slideway 2,
Sliding rail 3, workbench 4, sliding block 5, rotary shaft 6, mirror surface 7, angle adjustment lever 8, angular wheel group 9 are arranged on the pedestal 1
There is work slideway 2, the two sides of the arc-shaped setting of the work slideway 2, work slideway 2 are fixedly connected with sliding rail 3, the workbench
On work slideway 2, fluted 4-1 is arranged in 4 bottom of workbench for 4 settings, is provided with sliding block 5, the sliding block in the groove 4-1
5 are slidably connected with the cooperation of sliding rail 3, and arc work slideway 2 is for being oriented to workbench 4, so that the work slideway on pedestal 1
2 carry out motion guide by lower end of the sliding rail 3 to workbench 4, are vertically arranged with rotary shaft 6, the rotation on the workbench 4
6 lower end of axis and workbench 4 are rotatablely connected, and the upper end setting of rotary shaft 6 is in 4 outside of workbench, the top of rotary shaft 6 and reflecting mirror
Face 7 is fixedly connected, and the side of the workbench 4 is provided with angle adjustment lever 8, and the angle adjustment lever 8 passes through angular wheel group 9
It is sequentially connected with the lower end of rotary shaft 6, angle adjustment lever 8 is able to drive the rotation of rotary shaft 6, rotary shaft 6 by angular wheel group 9
Mirror surface 7 is driven to rotate around its axial direction.
The workbench 4 is provided with slide unit 4-3 comprising cabinet 4-2, the two sides of the bottom slide unit 4-3, the cabinet 4-2, described
It is provided in slide unit 4-3 in the groove 4-1, the groove 4-1 adaptable with arc work 2 shape of slideway and is provided with sliding block 3, work
Make platform 4 to be clamped on sliding rail 3 by the sliding block 3 on slide unit 4-3, be supported on work slideway 2 so that workbench 4 is capable of fixing,
And workbench 4 can be crossed and do guiding movement along the arcuate structure of work slideway 2.
The pedestal 1 includes bottom plate 1-1, vertical plate 1-2, and the two sides of the bottom plate 1-1 are provided with vertical plate 1-2, described two
Work slideway 2 is provided between vertical plate 1-2, the work slideway 2 is fixedly connected with bottom plate 1-1, vertical plate 1-2, passes through vertical plate 1-2
Work slideway 2 is supported, work slideway 2 is structure as a whole with pedestal 1, and specific works slideway 2 is bolted with pedestal 1
Connection is integrally formed.
The rotary shaft 6 is connect by first bearing seat 10 with workbench 4.
The angle adjustment lever 8 is connect by second bearing seat 11 with workbench 4.
The side of the angle adjustment lever 8 is provided with rotating disc 12, is provided with angle index line on the rotating disc 12, leads to
The rotational angle graduation mark crossed on rotating disc 12 can guarantee that rotary shaft 6 is rotated by fixed angle, to guarantee to reflect
Mirror surface 7 can be rotated around its centre of gyration by fixed angle.
When it is implemented, mirror surface 7 is mounted on the upper surface of rotary shaft 6, rotational angle adjusts bar 8, angle adjustment
Bar 8 is able to drive the rotation of rotary shaft 6 by angular wheel group 9, and rotary shaft 6 drives mirror surface 7 to rotate around its axial direction, rotation
The specific rotational angle of shaft 6 is adjusted, according to turning on rotating disc 12 by the rotating disc 12 in 8 outside of angle adjustment lever
Dynamic angle index line can guarantee that rotary shaft 6 is rotated by fixed angle；Work slideway 2 on pedestal 1 is right by sliding rail 3
The lower end of workbench 4 carries out motion guide, and workbench 4 is able to carry out fixed support with the cooperation of sliding rail 3 by sliding block 5 and sliding is led
To rotary shaft 6 is vertically mounted on 4 top of workbench, and by workbench 4, movement can be realized mirror surface 7 on work slideway 2
Swing the adjustment of posture.
The above is merely intended for describing the technical solutions of the present application, but not for limiting the present application, those of ordinary skill in the art couple
The other modifications or equivalent replacement that the technical solution of the utility model is made, without departing from technical solutions of the utility model
Spirit and scope should all cover in the scope of the claims of the utility model.
Claims (6)
1. a kind of mechanical speed-control device of mirror surface, it is characterised in that: it include pedestal, work slideway, sliding rail, workbench,
Sliding block, rotary shaft, mirror surface, angle adjustment lever, angular wheel group are provided with work slideway, the work on the pedestal
The arc-shaped setting of slideway, the two sides for the slideway that works are fixedly connected with sliding rail, and the workbench setting is on work slideway, workbench
Bottom setting is fluted, and sliding block is provided in the groove, and the sliding block is slidably connected with sliding rail cooperation, erects on the workbench
It is directly provided with rotary shaft, the rotary shaft lower end and workbench are rotatablely connected, and the upper end of rotary shaft is arranged on the outside of workbench, rotation
The top of shaft is fixedly connected with mirror surface, and the side of the workbench is provided with angle adjustment lever, the angle adjustment lever
It is sequentially connected by the lower end of angular wheel group and rotary shaft.
2. a kind of mechanical speed-control device of mirror surface according to claim 1, it is characterised in that: the workbench bag contains
Cabinet, slide unit, the bottom of box two sides are provided with slide unit, are provided in the slide unit and are adapted with arc work slideway shape
Groove, be provided with sliding block in the groove.
3. a kind of mechanical speed-control device of mirror surface according to claim 1, it is characterised in that: the pedestal includes bottom
Plate, vertical plate, the two sides of the bottom plate are provided with vertical plate, and work slideway, the work slideway are provided between described two vertical plates
It is fixedly connected with bottom plate, vertical plate.
4. a kind of mechanical speed-control device of mirror surface according to claim 1, it is characterised in that: the rotary shaft passes through
First bearing seat is connect with workbench.
5. a kind of mechanical speed-control device of mirror surface according to claim 1, it is characterised in that: the angle adjustment lever
It is connect by second bearing seat with workbench.
6. a kind of mechanical speed-control device of mirror surface according to claim 1, it is characterised in that: the angle adjustment lever
Side be provided with rotating disc, angle index line is provided on the rotating disc.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822231948.4U CN209132497U (en) | 2018-12-28 | 2018-12-28 | A kind of mechanical speed-control device of mirror surface |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822231948.4U CN209132497U (en) | 2018-12-28 | 2018-12-28 | A kind of mechanical speed-control device of mirror surface |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209132497U true CN209132497U (en) | 2019-07-19 |
Family
ID=67249539
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822231948.4U Expired - Fee Related CN209132497U (en) | 2018-12-28 | 2018-12-28 | A kind of mechanical speed-control device of mirror surface |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209132497U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110749972A (en) * | 2019-12-04 | 2020-02-04 | 上海航天控制技术研究所 | Prism installation device convenient to fine setting |
| CN110954142A (en) * | 2019-12-10 | 2020-04-03 | 京东方科技集团股份有限公司 | Optical micromotor sensor, substrate and electronic equipment |
-
2018
- 2018-12-28 CN CN201822231948.4U patent/CN209132497U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110749972A (en) * | 2019-12-04 | 2020-02-04 | 上海航天控制技术研究所 | Prism installation device convenient to fine setting |
| CN110954142A (en) * | 2019-12-10 | 2020-04-03 | 京东方科技集团股份有限公司 | Optical micromotor sensor, substrate and electronic equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190719 Termination date: 20191228 |