CN209079257U - A kind of micro-fluidic chip paster structure - Google Patents
A kind of micro-fluidic chip paster structure Download PDFInfo
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- CN209079257U CN209079257U CN201821975038.0U CN201821975038U CN209079257U CN 209079257 U CN209079257 U CN 209079257U CN 201821975038 U CN201821975038 U CN 201821975038U CN 209079257 U CN209079257 U CN 209079257U
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Abstract
The utility model discloses a kind of micro-fluidic chip paster structures, belong to micro fluidic chip technical field.The micro-fluidic chip paster structure of the utility model, including substrate and cover plate, substrate interior surface is equipped with channel slot, the inner surface of channel slot and cover plate is enclosed the fluid channel of micro-fluidic chip, it is located at the gluing plane that on the outside of channel slot there is height to be lower than substrate interior surface on substrate, the channel profile for protruding from channel slot and gluing plane is formed on the inside of substrate, the inner surface of gluing plane and cover plate is enclosed the open injecting glue gap of surrounding, is marked with solidified glue in injecting glue gap and substrate and cover plate patch are compound in one.The utility model is compound using the injecting glue gap gluing that gluing plane and cover plate inner surface are enclosed, realize micro-fluidic chip sealing patch, and solidified glue does not penetrate into fluid channel and causes to block, and manufacture craft is simple, manufacture difficulty is small, the cost of manufacture and defect rate for reducing micro-fluidic chip, improve producing efficiency.
Description
Technical field
The utility model relates to a kind of micro-fluidic chips, more specifically to a kind of micro-fluidic chip paster structure.
Background technique
Microfluidic chip technology (Microfluidics) is biological, chemical, medical analysis process sample preparation, instead
It the basic operation units such as answers, separate, detecting be integrated on the chip of one piece of micro-meter scale, being automatically performed analysis overall process.Due to
It in the great potential in the fields such as biology, chemistry, medicine, have been developed as a biology, chemistry, medicine, fluid, electronics,
The brand-new research field of the subject crossings such as material, machinery.
The characteristics of micro-fluidic chip is exactly that microfluid is operated and controlled under microscopic dimensions, and as operation and is controlled
Its is small for the Fluid Volume postscript of the object of system, and the flow behavior of microfluid is caused to be very different with macroscopic view.Specifically from structure
For upper, there is fine channel inside micro-fluidic chip, generallys use the bonding of two plate sheets and be made.It is bonded two panels surface is clear
Clean, atomically flating homogeneity or heterogeneous semiconductor material are bound directly under certain condition through surface clean and activation processing,
The technology for being integrally formed bonding chip by Van der Waals force, molecular force even atomic force.And in two plate sheet bonding process, it is right
It has higher requirements in the material of thin slice, and very high to the requirement of the clean level of sheet surface, material and cleanliness directly affect key
Close the leakproofness of intensity and micro-fluidic chip.In order to guarantee the cleanliness of sheet surface, usually pass through ethyl alcohol, acetone, deionization
The modes such as water ultrasonic technique and plasma cleaning are repeated, and technique is cumbersome and results in waste of resources.
Production for micro-fluidic chip, currently available technology mostly use greatly the bonding of chemical reagent auxiliary or high temperature hot pressing
The mode of Direct Bonding carries out.On the one hand, chemical reagent itself is the third substance in addition to chip and processing target, very
The compatibility in more biologic applications fields is bad；Chemical reagent can even bring pollution inside micro-fluidic chip, the pollution so that
The chip of preparation is not available in many biologic applications, so that the applicability for obtaining chip is substantially reduced, and for
The material of micro-fluidic chip requires, and the chip bonding of unlike material, which needs to match different chemical reagent, to carry out, complicated for operation
And process is cumbersome, so that technical process low efficiency, increases the cost of entire chip preparation.On the other hand, high temperature thermal bonding side
For formula generally directed to the micro-fluidic chip of plastic material, which will lead to the thermal deformation of micro-fluidic chip microchannel to cause to lead to
Road blocking, in addition common thermal bonding mode bond strength is bad, and cracking phenomena easily occurs in use for chip.
Chinese Patent Application No. 201710888052.0, data of publication of application are on March 9th, 2018, invention and created name are as follows:
A kind of micro-fluidic chip bonding method and micro-fluidic chip, this application are related to a kind of micro-fluidic chip bonding method and micro-fluidic
Chip.Method includes: to provide a kind of micro-fluidic chip substrate, and substrate upper surface is equipped with microchannel structure；It is micro- in substrate upper surface
Ultrasonic bond energy-oriented-ridge is set at channel design surrounding edge or corresponds to substrate surface microchannel structure position week on cover plate
Enclose setting ultrasonic bond energy-oriented-ridge；The adhesion surface sticking two-faced adhesive tape on substrate or cover plate bonds cover plate and substrate；To substrate
Ultrasonic bond is carried out with cover plate, is allowed to that first step bonding occurs；Pressure fixing or hot pressing are implemented to chip, make sticking double faced adhesive tape
Substrate and cover plate secure bond.This application ensure that the stability of micro-fluidic chip bonding to a certain extent, avoid shadow
Ring the physicochemical properties of micro-fluidic chip itself.But its manufacture craft still remains following deficiency:
1) the main bonding action of the micro-fluidic chip bonds substrate and cover plate by double-sided adhesive, on the one hand, double-sided adhesive
Certain performances it is poor, such as heat resistance is poor, poor for the applicability of some micro-fluidic chips for high-temperature process,
After being influenced by high temperature, the bond strength of micro-fluidic chip can be reduced；On the other hand, due to double-sided adhesive be pasted onto advance substrate or
Higher for substrate and the compound positioning accuracy request of cover plate on cover plate, it is i.e. difficult after adhered by double sided plaster to pass through once substrate and cover plate
To be adjusted；Further, since the fluid channel size on micro-fluidic chip is smaller and channel design design is complex, therefore
The bond locations that double-sided adhesive is controlled on substrate or cover plate are more difficult, especially are generally difficult to paste close to the part of fluid channel two-sided
Glue, when the sealing in first step ultrasonic bond energy-oriented-ridge position is failed, double-sided adhesive is difficult to reach to the close of micro-fluidic chip
Envelope requires and leakage easily occurs.
2) manufacture craft needs to first pass through first step ultrasonic bond energy-oriented-ridge ultrasonic bond, then passes through double-sided adhesive key again
It closes, it is higher for the thickness requirement of double-sided adhesive and ultrasonic bond energy-oriented-ridge, generally require the thickness that double-sided adhesive thickness is greater than energy-oriented-ridge
Degree, this thickness difference have larger impact for the quality of ultrasonic bond, are easy to cause ultrasonic bond sealing loosely, so as to cause
Micro-fluidic chip leaks.
Summary of the invention
1. utility model technical problems to be solved
The purpose of the utility model is to overcome existing micro-fluidic chip bonding technology, there are complex manufacturing technology, production are difficult
The deficiencies of degree is big, cost of manufacture is high, defect rate is high and producing efficiency is lower, provides a kind of micro-fluidic chip paster structure, uses
The technical solution of the utility model, the gluing plane for being lower than substrate interior surface by the way that height is arranged on the outside of the channel slot of substrate,
Make to form the channel profile for protruding from channel slot and gluing plane on the inside of substrate, to enclose using gluing plane and cover plate inner surface
It is compound to close the injecting glue gap gluing formed, realizes micro-fluidic chip sealing patch, and solidified glue do not penetrate into fluid channel and
Channel block being caused, and manufacture craft is simple, manufacture difficulty is small, the cost of manufacture and defect rate of micro-fluidic chip are reduced,
Improve the producing efficiency of micro-fluidic chip.
2. technical solution
In order to achieve the above objectives, technical solution provided by the utility model are as follows:
A kind of micro-fluidic chip paster structure of the utility model, including substrate and cover plate, the substrate interior surface are set
There is channel slot, after substrate and cover plate are compound, the inner surface of the channel slot and cover plate is enclosed the stream of micro-fluidic chip
Body channel is located at the gluing plane that on the outside of channel slot there is height to be lower than substrate interior surface on the substrate, on the inside of substrate
Form the channel profile for protruding from channel slot and gluing plane；After substrate and cover plate are compound, the gluing plane and cover plate
Inner surface be enclosed the open injecting glue gap of surrounding, be marked with solidified glue in the injecting glue gap and paste substrate and cover plate
Piece is compound in one.
Further, the depth of the fluid channel is greater than the depth in injecting glue gap.
Further, the inlet and liquid outlet of communicating passage slot are additionally provided on the substrate.
Further, the substrate is quartz plate or sheet glass, channel slot and gluing plane on the substrate
It is formed using etch process.
3. beneficial effect
Using technical solution provided by the utility model, compared with existing well-known technique, there is following remarkable result:
(1) a kind of micro-fluidic chip paster structure of the utility model, by the way that height is arranged on the outside of the channel slot of substrate
Lower than the gluing plane of substrate interior surface, make to form the channel profile for protruding from channel slot and gluing plane on the inside of substrate, thus
The injecting glue gap gluing being enclosed using gluing plane and cover plate inner surface is compound, realizes micro-fluidic chip sealing patch, and
Solidified glue does not penetrate into fluid channel and causes channel block, and manufacture craft is simple, and manufacture difficulty is small, reduces miniflow
The cost of manufacture and defect rate for controlling chip, improve the producing efficiency of micro-fluidic chip；
(2) depth of a kind of micro-fluidic chip paster structure of the utility model, fluid channel is greater than injecting glue gap
Depth, convenient for the processing and fabricating in injecting glue gap, and it is whole convenient for being filled using capillarity of the solidified glue in injecting glue gap
A injecting glue gap, easily facilitates the seal bond of substrate and cover plate；
(3) a kind of micro-fluidic chip paster structure of the utility model, substrate is quartz plate or sheet glass, on substrate
Channel slot and gluing plane are formed using etch process, and for the micro-fluidic chip of quartz or glass material, manufacture craft is more
Add simply, manufacture difficulty is greatly reduced.
Detailed description of the invention
Fig. 1 is a kind of schematic cross-sectional view of micro-fluidic chip paster structure of the utility model；
Fig. 2 is a kind of structural schematic diagram of the substrate of micro-fluidic chip paster structure of the utility model.
Label declaration in schematic diagram:
1, substrate；1-1, channel slot；1-2, gluing plane；1-3, channel profile；2, cover plate；3, solidified glue；4, feed liquor
Mouthful；5, liquid outlet.
Specific embodiment
For the content for further appreciating that the utility model, the utility model is described in detail in conjunction with the accompanying drawings and embodiments.
Embodiment
Referring to figs. 1 and 2, a kind of micro-fluidic chip paster structure of the present embodiment, including substrate 1 and cover plate 2, base
1 inner surface of piece is equipped with channel slot 1-1, and after substrate 1 and cover plate 2 are compound, channel slot 1-1 and the inner surface of cover plate 2 are enclosed
The fluid channel of micro-fluidic chip, being located on substrate 1 on the outside of channel slot 1-1 has height flat lower than the gluing of 1 inner surface of substrate
Face 1-2 forms the channel profile 1-3 for protruding from channel slot 1-1 and gluing plane 1-2 on the inside of substrate 1；In substrate 1 and cover plate 2
After compound, the inner surface of gluing plane 1-2 and cover plate 2 is enclosed the open injecting glue gap of surrounding, and injecting glue gap and fluid are logical
It is separated between road by channel profile 1-3, solidified glue 3 is marked in injecting glue gap, substrate 1 and 2 patch of cover plate are compound in one.
Using the above structure, the injecting glue gap gluing being enclosed using gluing plane 1-2 and 2 inner surface of cover plate is compound, realizes miniflow
Chip sealing patch is controlled, and solidified glue does not penetrate into fluid channel and causes channel block, and manufacture craft is simple, production
Difficulty is small, reduces the cost of manufacture and defect rate of micro-fluidic chip, improves the producing efficiency of micro-fluidic chip.
As shown in Figure 1, in the present embodiment preferably, the depth of fluid channel is greater than the depth in injecting glue gap, fluid is logical
The depth and shape in road according to specific needs depending on, the depth in injecting glue gap only needs to meet capillary gluing needs, such as
0.1mm~1mm, in this way, being convenient for the processing and fabricating in injecting glue gap, and convenient for utilizing capillary of the solidified glue in injecting glue gap
Entire injecting glue gap is filled in effect, easily facilitates the seal bond of substrate 1 and cover plate 2.Certainly, under some specific needs, stream
The depth in body channel can also be equal to or less than the depth in injecting glue gap.The width of channel profile 1-3 can also as needed depending on,
Such as 0.5mm~2mm, it is only necessary to guarantee to separate injecting glue gap with fluid channel, glue is avoided to penetrate into fluid channel
?.As shown in Fig. 2, being additionally provided with the inlet 4 and liquid outlet 5 of communicating passage slot 1-1, inlet 4 and liquid outlet 5 on substrate 1
It can be pre-machined on the substrate 1, it can also be after substrate 1 and cover plate 2 be complex as a whole again in substrate 1 or the corresponding position of cover plate 2
On be process.
A kind of micro-fluidic chip paster structure of the present embodiment, is applicable to the micro-fluidic chip of various materials, has wide
General applicability.The micro-fluidic chip or quartz of such as PMMA (polymethyl methacrylate) and PS (polystyrene) plastic material
Above-mentioned piece paster structure can be used in the micro-fluidic chip of the materials such as piece and sheet glass, and the micro-fluidic chip of unlike material only needs
Channel slot 1-1 and gluing plane 1-2 are processed using corresponding processing method on the substrate 1.In the present embodiment, substrate
1 is quartz plate or sheet glass, and channel slot 1-1 and gluing plane 1-2 on substrate 1 are formed using etch process, compared to existing
Quartz or glass micro-fluidic chips using the paster technique of chemical reagent auxiliary bonding, the paster structure in the present embodiment is more
Simply, production is more convenient, and producing efficiency is higher, and the micro-fluidic chip quality produced is more reliable and more stable.
Referring to figure 1 and figure 2, the present embodiment also discloses a kind of micro-fluidic chip paster technique, comprising the following steps:
(a) prepare the substrate 1 and cover plate 2 of micro-fluidic chip:
Channel slot 1-1 is processed in the inner surface of substrate 1, and processes height lower than in substrate 1 on the outside of channel slot 1-1
The gluing plane 1-2 on surface makes to form the channel profile 1-3 for protruding from channel slot 1-1 and gluing plane 1-2 on the inside of substrate 1, lead to
The width of road profile 1-3 can also as needed depending on, such as 0.5mm~2mm, it is only necessary to guarantee injecting glue gap and stream
Body channel separates, and glue is avoided to penetrate into fluid channel.In the present embodiment preferably, substrate 1 be quartz plate or sheet glass,
The depth of channel slot 1-1 on substrate 1 is greater than the depth of gluing plane 1-2, and the depth and shape of fluid channel can be according to specific
Depending on needing, the depth in injecting glue gap only needs to meet capillary gluing needs, such as 0.1mm~1mm, in this way, being convenient for
The processing and fabricating in injecting glue gap, while convenient for utilizing solidified glue 3 between the capillarity in injecting glue gap fills entire injecting glue
Gap easily facilitates the seal bond of substrate 1 and cover plate 2.Certainly, under some specific needs, the depth of fluid channel can also be with
Equal to or less than the depth in injecting glue gap；Channel slot 1-1 and gluing plane 1-2 preferably use etch process to form, and pass through control
Etching period channel slot 1-1 different with gluing plane 1-2 carrys out the different depth of control channel slot 1-1 and gluing plane 1-2, adopts
With above-mentioned paster structure, for the micro-fluidic chip of quartz or glass material, manufacture craft is simpler, and manufacture difficulty is substantially
It reduces.The plate that cover plate 2 can be used that one is block-shaped and size and substrate 1 match, the material of cover plate 2 can it is identical as substrate 1 or
It is different, it is desirable that 2 inner surface of cover plate is smooth.
(b) substrate 1 and 2 patch of cover plate is compound:
After dry to substrate 1 and 2 surface clean of cover plate, substrate 1 and the clamping of cover plate 2 are combined with each other, channel slot 1-1 is made
The fluid channel of micro-fluidic chip, the inner surface enclosing shape of gluing plane 1-2 and cover plate 2 are enclosed with the inner surface of cover plate 2
At the open injecting glue gap of surrounding.The cleaning of substrate 1 and cover plate 2 and drying process can be used existing technique and complete, and guarantee base
The channel profile 1-3 of piece 1 and the bright and clean no dirt of the inner surface of cover plate 2；Special tooling realization can be used in substrate 1 and the clamping of cover plate 2,
The top and bottom of substrate 1 and cover plate 2 are pressed together, for example, by using disclosed in Chinese Patent Application No. 201711450477.X
The technical solution of " a kind of thermocompression bonding method of micro-fluidic chip ", utilizes the hard ceramic pressing plate of lower part and being filled with for top
Compressed gas and the air bag that expands realize the clamping of substrate 1 and cover plate 2.
(c) injecting glue is compound:
Solidified glue 3 is squeezed into injecting glue gap from the outer side for clamping the substrate 1 and cover plate 2 that are combined with each other, using admittedly
Capillarity of the tensol 3 in injecting glue gap fills entire injecting glue gap, by substrate 1 and cover plate 2 after the solidification of glue 3 to be solidified
Permanent bond together, obtains micro-fluidic chip finished product.Due to injecting glue gap size very little, using solidified glue 3 between injecting glue
Injecting glue gap can be quickly full of by the capillarity in gap, it should be noted that gluing discharge directions during gluing, avoid by
Gluing dead angle is generated in that can not be vented, therefore some corner spaces also can be filled effectively, and due to channel
The isolation of profile 1-3, glue do not penetrate into fluid channel and passage.In addition, thermosetting can be used in above-mentioned solidified glue 3
Glue, by heating 3 rapid curing of solidified glue for making to fill in injecting glue gap；UV glue can also be used, made by ultraviolet light irradiation
3 rapid curing of solidified glue filled in injecting glue gap.
A kind of micro-fluidic chip paster structure of the utility model is lower than by the way that height is arranged on the outside of the channel slot of substrate
The gluing plane of substrate interior surface makes to form the channel profile for protruding from channel slot and gluing plane on the inside of substrate, to utilize
Gluing plane and the injecting glue gap gluing that cover plate inner surface is enclosed are compound, realize micro-fluidic chip sealing patch, and solidify
Glue does not penetrate into fluid channel and causes channel block, and manufacture craft is simple, and manufacture difficulty is small, reduces micro-fluidic core
The cost of manufacture and defect rate of piece, improve the producing efficiency of micro-fluidic chip.
Schematically the utility model and embodiments thereof are described above, description is not limiting, attached drawing
Shown in be also one of the embodiments of the present invention, actual structure is not limited to this.So if this field
Those of ordinary skill enlightened by it, without deviating from the purpose of the present invention, without creatively designing
Frame mode similar with the technical solution and embodiment, all should belong to the protection range of the utility model.
Claims (4)
1. a kind of micro-fluidic chip paster structure, including substrate (1) and cover plate (2), the substrate (1) inner surface is equipped with channel
Slot (1-1), after substrate (1) and cover plate (2) are compound, the inner surface of the channel slot (1-1) and cover plate (2) is enclosed micro-
The fluid channel of fluidic chip, it is characterised in that: being located on the outside of channel slot (1-1) on the substrate (1), there is height to be lower than
The gluing plane (1-2) of substrate (1) inner surface forms on the inside of substrate (1) and protrudes from channel slot (1-1) and gluing plane (1-
2) channel profile (1-3)；After substrate (1) and cover plate (2) are compound, the interior table of the gluing plane (1-2) and cover plate (2)
Face is enclosed the open injecting glue gap of surrounding, is marked with solidified glue (3) for substrate (1) and cover plate in the injecting glue gap
(2) patch is compound in one.
2. a kind of micro-fluidic chip paster structure according to claim 1, it is characterised in that: the depth of the fluid channel
Degree is greater than the depth in injecting glue gap.
3. a kind of micro-fluidic chip paster structure according to claim 2, it is characterised in that: on the substrate (1) also
Inlet (4) and liquid outlet (5) equipped with communicating passage slot (1-1).
4. a kind of micro-fluidic chip paster structure according to claim 1 or 2 or 3, it is characterised in that: the substrate
(1) be quartz plate or sheet glass, channel slot (1-1) and gluing plane (1-2) on the substrate (1) use etch process at
Type.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109334028A (en) * | 2018-11-28 | 2019-02-15 | 常州工程职业技术学院 | A kind of micro-fluidic chip paster structure and paster technique |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109334028A (en) * | 2018-11-28 | 2019-02-15 | 常州工程职业技术学院 | A kind of micro-fluidic chip paster structure and paster technique |
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