CN209013750U - Aluminium nitride ceramics high-temperature hydrogen sintering furnace - Google Patents
Aluminium nitride ceramics high-temperature hydrogen sintering furnace Download PDFInfo
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- CN209013750U CN209013750U CN201821825472.0U CN201821825472U CN209013750U CN 209013750 U CN209013750 U CN 209013750U CN 201821825472 U CN201821825472 U CN 201821825472U CN 209013750 U CN209013750 U CN 209013750U
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Abstract
A kind of aluminium nitride ceramics high-temperature hydrogen sintering furnace is provided, including furnace body, furnace body is suitable for reading to be closed by upper bell lid, under furnace body mouth by can oscilaltion travelling oven bottom cover close, furnace interior is equipped with low volatile-type furnace lining, and low volatile-type furnace lining is made of all-metal tungsten and molybdenum material, and volatile quantity is extremely low under high temperature, aluminium nitride material in furnace will not be polluted, effectively improve the quality of aluminium nitride substrate；Homogeneous temperature type heater is equipped with inside low volatile-type furnace lining, homogeneous temperature type heater includes primary heater and auxiliary heater and bottom auxiliary heater at the top of furnace inner top and bottom setting, for compensating the thermal losses of two ends in flue, guarantee the requirement of equipment uniform temperature, equipment uniform temperature is made to can achieve ± 5 °；Upper air channel and lower outlet passageway form the hydrogen access way structure of upper entering and lower leaving, can take away aluminium nitride volatile matter in time, aluminium nitride is avoided to be attached to the heat-proof quality on metallic insulation screen and inboard wall of furnace body and reducing metallic insulation screen.
Description
Technical field
A kind of the utility model category sintering furnace technical field, and in particular to aluminium nitride ceramics high-temperature hydrogen sintering furnace.
Background technique
Aluminium nitride ceramics high temperature sintering furnace is widely used in the sintering of aluminum nitride ceramic substrate, and aluminium nitride ceramics has
Excellent heat conductivity, reliable electrical insulating property, low dielectric constant and dielectric loss, high comprehensive performance are adapted to very much
Semiconductor chip and construction packages material are widely used in LED, sensor, power semiconductor field.Existing aluminium nitride is burnt
Knot mostly uses graphite furnace, does heater using graphite, graphite carbon felt does heat preservation furnace lining, this sintering furnace structure, waves under graphite high temperature
Greatly, it is serious to pollute slag inclusion to hair for the serious quality for influencing aluminium nitride substrate.Another technology uses the vertical height of bell jar of import
Warm sintering furnace, unreasonable structural design, thermal field uniform temperature is poor, and two end temperature difference are very big up and down for warm area short transverse, bottom temperature
It is too low to spend height, head temperature, only intermediate sub-fraction can burn qualified products.Equipment efficiently uses that space is minimum, nothing
Function loss is excessive, constrains the performance of production capacity.It is unreasonable that hydrogen paths design is passed in and out simultaneously, causes volatilization in furnace very big, nitridation
Aluminium is attached on metallic insulation screen and inboard wall of furnace body, reduces the heat-proof quality of metallic insulation screen, and screen deflection is big, and it is tight to leak heat
Weight, seriously affects equipment average temperature performance.It is therefore desirable to propose to improve.
Utility model content
The technical problem solved by the utility model is:to provide a kind of aluminium nitride ceramics high-temperature hydrogen sintering furnace, the utility model
Low volatile-type furnace lining is made of all-metal tungsten and molybdenum material, and the saturated vapour pressure of tungsten and molybdenum material is high, and volatile quantity is extremely low under high temperature, no
Aluminium nitride material in furnace can be polluted, effectively improve the quality of aluminium nitride substrate；Homogeneous temperature type heater includes primary heater
And it is set to furnace inner top and bottom setting top auxiliary heater and bottom auxiliary heater, for compensating two ends in flue
Thermal losses guarantees the requirement of equipment uniform temperature, equipment uniform temperature is made to can achieve ± 5 °；Using the hydrogen access way of upper entering and lower leaving
Structure can take away aluminium nitride volatile matter in time, avoid aluminium nitride from being attached on metallic insulation screen and inboard wall of furnace body and reduce gold
The heat-proof quality of category heat screen prevents the problems such as heat screen deflection is big, leakage heat is serious, influence equipment uniform temperature.
The technical solution adopted in the utility model: aluminium nitride ceramics high-temperature hydrogen sintering furnace, including furnace body, on the furnace body
Mouthful closed by upper bell lid, under the furnace body mouth by can the travelling oven bottom cover of oscilaltion close, the activity bottom of boiler passes through solid
It is achived up and down due to the platform lifting drive system on ground, the furnace interior is equipped with and prevents to aluminium nitride material in furnace
The low volatile-type furnace lining polluted, the low volatile-type furnace lining inside add equipped with the homogeneous temperature type for being able to maintain in-furnace temperature equilibrium
Hot device, the upper bell be equipped with upper air channel, the activity bottom of boiler be equipped with lower outlet passageway, the upper air channel and
Lower outlet passageway forms the hydrogen access way structure of upper entering and lower leaving.
Above-mentioned technical proposal is further limited, the low volatile-type furnace lining includes being set to the one week side in furnace body inside face
Heat screen, the top heat screen being fixed on the inside of bell and the bottom thermal insulation screen being fixed on the inside of activity bottom of boiler, the furnace body
Inner surface is equipped with the side screen positioning device that opposite side heat screen is positioned, the side heat screen, top heat screen and bottom thermal insulation
Screen is all made of all-metal tungsten and molybdenum material and is made.
Above-mentioned technical proposal is further limited, the side heat screen is mainly the unilateral screen by multiple fittings together
Composition, the multiple unilateral outer tops of screen of the fitting together are equipped with side platen bracket, and the multiple unilateral screen is supported by side screen
Column is fixedly connected with side platen bracket, is equipped with screen spacer post component in side between the two neighboring unilateral screen, inside and outside the side heat screen
Side screen transverse bar is equipped on surface, the side heat screen inner surface lower part is equipped with side screen shaping ring；The top heat screen includes
Multiple top single screen pieces, the multiple top single screen piece are fixed in the screen support plate of top by upper bolt assembly；The bottom every
Heat shielding includes multiple bottom single screen pieces, and the multiple bottom single screen piece is fixed in the screen support plate of bottom by lower bolt assembly.
Above-mentioned technical proposal is further limited, the homogeneous temperature type heater includes being set to low volatile-type furnace lining inside portion
One week primary heater, set on low volatile-type furnace lining internal upper part top auxiliary heater and be set to low volatile-type furnace lining in lower part
Bottom auxiliary heater；It is equipped with main heated for controlling temperature thermocouple and detection thermocouple on the inside of the primary heater, is set on the upper bell
There is main heating extraction electrode；The top auxiliary heater is connect by the connector across top heat screen with upper bell, institute
Bell is stated equipped with top heated for controlling temperature thermocouple and top heating extraction electrode；The bottom auxiliary heater passes through the bottom of across
The connector of portion's heat screen is fixedly connected with activity bottom of boiler, and the activity bottom of boiler is equipped with bottom temperature-controlling thermal couple and bottom-heated draws
Electrode out.
Above-mentioned technical proposal is further limited, the primary heater is made of tungsten plate material, the top auxiliary
Heater and bottom auxiliary heater are all made of tungsten bar material and are made.
Above-mentioned technical proposal is further limited, the top heat screen is equipped with into hydrogen channel, and the top is heat-insulated
Shield top outer and is equipped with gear hydrogen ring.
Above-mentioned technical proposal is further limited, upper air channel outer end is connect with gas source control cabinet, the gas
It is equipped with hydrogen control gas circuit in the control cabinet of source and nitrogen controls gas circuit, the hydrogen control gas circuit is equipped with hydrogen control bound door
With hydrogen detection stream meter, the nitrogen control gas circuit is equipped with nitrogen control bound door and nitrogen detection stream meter, the hydrogen
It is connect by stainless steel tube with upper air channel entrance end after gas control gas circuit and nitrogen control gas circuit outlet end engagement；Under described
Outlet passageway outlet end is connect by bellows with igniter.
The utility model compared with prior art the advantages of:
1, low volatile-type furnace lining is made of all-metal tungsten and molybdenum material in this programme, and the saturated vapour pressure of tungsten and molybdenum material is high,
Volatile quantity is extremely low under high temperature, will not pollute to aluminium nitride material in furnace, effectively improve the quality of aluminium nitride substrate；
2, the homogeneous temperature type heater for being able to maintain in-furnace temperature equilibrium is equipped in this programme inside low volatile-type furnace lining,
The primary heater of limited heater is made of tungsten plate material, and tungsten plate surface load is high, and load power is big, improves resistance under high temperature
Shape ability extends calandria service life；And auxiliary heater and bottom auxiliary add at the top of furnace inner top and bottom setting
Hot device guarantees the requirement of equipment uniform temperature for compensating the thermal losses of two ends in flue, make equipment uniform temperature can achieve ±
5 °, equipment effective use space is big, reactive loss is small；
3, the hydrogen access way structure of upper entering and lower leaving, energy are formed in this programme using upper air channel and lower outlet passageway
It is enough to take away aluminium nitride volatile matter in time, avoid aluminium nitride from being attached on metallic insulation screen and inboard wall of furnace body and reduce metallic insulation screen
Heat-proof quality, prevent that heat screen deflection is big, leakage heat is serious, influences the problems such as equipment uniform temperature.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the structural schematic diagram of side heat screen in the utility model；
Fig. 3 is the structural schematic diagram of top heat screen in the utility model；
Fig. 4 is the structural schematic diagram of bottom heat screen in the utility model；
Fig. 5 is the structural front view of primary heater in the utility model；
Fig. 6 is the structure top view of primary heater in the utility model；
Fig. 7 is the structural schematic diagram of gas source control cabinet in the utility model.
Specific embodiment
To keep the purposes, technical schemes and advantages of the application clearer, below in conjunction with the attached drawing 1-7 in embodiment,
Technical solution in embodiment is clearly and completely described, it is clear that described embodiment is only that the application a part is real
Apply example, rather than whole embodiments.Based on the embodiment provided, those of ordinary skill in the art are not making creative work
Under the premise of every other embodiment obtained, shall fall in the protection scope of this application.
Aluminium nitride ceramics high-temperature hydrogen sintering furnace, as shown in Figure 1, including furnace body 1, the furnace body 1 is suitable for reading to pass through upper bell 7
Gai He, the lower mouth of the furnace body 1 by can the activity bottom of boiler 2 of oscilaltion cover and close, being equipped with inside the furnace body 1 prevents to nitrogen in furnace
Change the low volatile-type furnace lining 3 that aluminium material pollutes, specifically, the low volatile-type furnace lining 3 includes being set to 1 medial surface one of furnace body
The side heat screen 4 in week, the top heat screen 5 for being fixed on 7 inside of bell and the bottom thermal insulation screen for being fixed on 2 inside of activity bottom of boiler
6,1 inner surface of furnace body is equipped with the side screen positioning device 17 that is positioned of opposite side heat screen 4, the side heat screen 4, top every
Heat shielding 5 and bottom thermal insulation screen 6 are all made of all-metal tungsten and molybdenum material and are made, and the saturated vapour pressure of tungsten and molybdenum material is high, volatilize under high temperature
It measures extremely low, aluminium nitride material in furnace will not be polluted, effectively improve the quality of aluminium nitride substrate.
As shown in Fig. 2, the side heat screen 4 is mainly to be made of the unilateral screen 401 of multiple fittings together, the fitting
401 outer tops of multiple unilateral screens together are equipped with side platen bracket 402, and the multiple unilateral screen 401 passes through side screen support column 403
It is fixedly connected with side platen bracket 402, is equipped with side screen spacer post component 404 between the two neighboring unilateral screen 401, monolithic side screen
It expands unfettered, thermal deformation can be effectively eliminated；Side screen transverse bar 405 is equipped on 4 surfaces externally and internally of side heat screen, it is described
Heat screen 4 inner surface lower part in side is equipped with side screen shaping ring 406, can integrally improve rigidity, improve the non-deformability of screen.Such as figure
Shown in 3, the top heat screen 5 includes multiple top single screen pieces 501, and the multiple top single screen piece 501 passes through upper bolt group
Part 502 is fixed in the screen support plate 503 of top；As shown in figure 4, the bottom thermal insulation screen 6 includes multiple bottom single screen pieces 601, institute
Multiple bottom single screen pieces 601 are stated to be fixed in bottom screen support plate 603 by lower bolt assembly 602.
The homogeneous temperature type heater 16 for being able to maintain in-furnace temperature equilibrium is equipped with inside the low volatile-type furnace lining 3, specifically,
As shown in Figure 1, the homogeneous temperature type heater 16 includes set on the low 3 one week primary heater in inside portion 8 of volatile-type furnace lining, set on low
The top auxiliary heater 10 of 3 internal upper part of volatile-type furnace lining and in low volatile-type furnace lining 3 lower part bottom auxiliary heater
9；Main heated for controlling temperature thermocouple 14 and detection thermocouple 15 are equipped on the inside of the primary heater 8, the upper bell 7 is equipped with main heating and draws
Electrode 11 out；The top auxiliary heater 10 is connect by the connector across top heat screen 5 with upper bell 7, it is described on
Bell 7 is equipped with top heated for controlling temperature thermocouple 13 and extraction electrode 12 is heated at top；The bottom auxiliary heater 9 by across
The connector of bottom thermal insulation screen 6 is fixedly connected with activity bottom of boiler 2, and the activity bottom of boiler 2 is equipped with bottom temperature-controlling thermal couple 18 and bottom
Heat extraction electrode 19 in portion.Preferably, the primary heater 8 is made of tungsten plate material, 10 He of top auxiliary heater
Bottom auxiliary heater 9 is all made of tungsten bar material and is made, and tungsten plate surface load is high, and the big extension calandria of load power uses the longevity
Life improves non-deformability under high temperature as it can be seen in figures 5 and 6, the design of tungsten plate has reinforcing rib structure.The utility model combines main add
Hot device 8, auxiliary heater 10 and bottom auxiliary heater 9 at the top of furnace inner top and bottom setting, for compensating two in flue
The thermal losses of end guarantees the requirement of equipment uniform temperature, equipment uniform temperature is made to can achieve ± 5 °, equipment efficiently use space it is big,
Reactive loss is small.
As shown in Figure 1, the upper bell 7 is equipped with upper air channel 20, the activity bottom of boiler 2 is equipped with lower outlet passageway
23, the hydrogen access way structure in the upper air channel 20 and lower outlet passageway 23 formation upper entering and lower leaving, this structure can
Aluminium nitride volatile matter in furnace is taken away in time, aluminium nitride is avoided to help on metallic insulation screen and inboard wall of furnace body and reduce metallic insulation
The heat-proof quality of screen prevents the problems such as heat screen deflection is big, leakage heat is serious, influence equipment uniform temperature.The top heat screen 5
It is equipped with into hydrogen channel 21, the 5 top outer of top heat screen is equipped with gear hydrogen ring 22, and pressure allows hydrogen by into hydrogen channel 21
In through furnace；The lower outlet passageway 23 is cooling equipped with jacket type, and the hydrogen after equipment carries out lighting processing out.
20 outer end of upper air channel is connect with gas source control cabinet 25, as shown in fig. 7, setting in the gas source control cabinet 25
There are hydrogen control gas circuit 26 and nitrogen control gas circuit 29, the gas source inlet of the hydrogen control gas circuit 26 and nitrogen control gas circuit 29
Fixed filter, it is ensured that reliable operation, failsafe.The hydrogen control gas circuit 26 is equipped with hydrogen control bound door 28 and hydrogen
Detection stream meter 27, the nitrogen control gas circuit 29 is equipped with nitrogen control bound door 31 and nitrogen detection stream meter 30, described
The main valve both ends of two gas circuits necessary manually-operated gate in parallel, uses, flowmeter is for inspection when two main valves break down
Each road gas flow is looked into and adjusts to use.By not after the hydrogen control gas circuit 26 and nitrogen control 29 outlet end of gas circuit engagement
Rust steel pipe 32 is connect with 20 input end of upper air channel, and the steel pipe before hydrogen enters furnace chamber winds mica heating tape outside, to hydrogen
Gas is heated, and the impact to hot-zone in furnace is prevented.23 outlet end of lower outlet passageway passes through bellows 33 and igniter
34 connections.
To guarantee that workpiece is steady in lifting, as shown in Figure 1, the activity bottom of boiler 2 passes through the platform that is fixed on ground
Lifting drive system 24 achives up and down, and platform lifting drive system 24 drives the forward and reverse rotation of main shaft using motor after slowing down
Turn, drives four ball-screw positive and negative rotations respectively by reversing box, screw nut driven pair makes guide and locating mechanism along guide rail
Lower movement drives 2 rise and fall of activity bottom of boiler, and there are four buffer spring and taper localization machines for installation in guide and locating mechanism
Structure guarantees accurate positioning and sealed reliable, installs limit switches in fixed guide rail, plays upper and lower limits safety and interlocking is protected
Shield, since four lead screws are independently fixed, thus entirely elevating mechanism run smoothly it is reliable, non-interference.Activity bottom of boiler 2 is used
Lifting structure has increased stove platform while reducing intermediate transverse girder, operator can be allowed to have when taking on furnace bigger
Space, from three sides of stove can very easily shove charge, entire platform lifting drive system 24 runs smoothly can
It leans on.In 2 lower bands of activity bottom of boiler, there are four wheels, make under wheel contact track and arrival when platform lifting drive system 24 drops to
When limit, activity bottom of boiler 2 and part can be removed furnace bottom along track manually together, for using when later Maintenance and Repair.
The safety precautions of this hydrogen sintering furnace: since this furnace uses hydrogen as working gas, therefore safety guarantee is arranged
Apply it is particularly important, so be equipped with the necessary safety precautions of the following:
(1) it is furnished with and first evacuates again the last hydrogen aerator of nitrogen charging, it is ensured that furnace gas volumetric mixture ratio is well below explosion pole
Limit；
(2) superpressure automatic decompression device is furnished in furnace roof, it is ensured that safety；
(3) the hydrogen gas leakage amount of equipment ensures to meet national standard.
(4) high-quality brand is selected to security-related valve and control element, guarantee reliable operation.
(5) it is furnished with program behavior and alarm system, when there is abnormal condition, issues sound-light alarm, and take automatic guarantor
Shield measure, to guarantee the safety of equipment and the person.
Above-described embodiment, the only preferred embodiment of the utility model are not used to limit the utility model practical range,
Therefore all equivalence changes done with content described in the utility model claims, the utility model claims model should all be included in
Within enclosing.
Claims (7)
1. aluminium nitride ceramics high-temperature hydrogen sintering furnace, it is characterised in that: including furnace body (1), the furnace body (1) is suitable for reading to pass through upper furnace
(7) lid is covered to close, under the furnace body (1) mouth by can the activity bottom of boiler (2) of oscilaltion cover and close, the activity bottom of boiler (2) passes through
The platform lifting drive system (24) being fixed on ground achives up and down, and being equipped with inside the furnace body (1) prevents in furnace
The low volatile-type furnace lining (3) that aluminium nitride material pollutes, internal be equipped with of the low volatile-type furnace lining (3) are able to maintain temperature in furnace
Balanced homogeneous temperature type heater (16) is spent, the upper bell (7) is equipped with upper air channel (20), on the activity bottom of boiler (2)
Equipped with lower outlet passageway (23), the hydrogen disengaging of the upper air channel (20) and lower outlet passageway (23) formation upper entering and lower leaving is logical
Road structure.
2. aluminium nitride ceramics high-temperature hydrogen sintering furnace according to claim 1, it is characterised in that: the low volatile-type furnace lining
(3) include set on furnace body (1) medial surface one week side heat screen (4), the top heat screen (5) that is fixed on the inside of bell (7)
With the bottom thermal insulation screen (6) being fixed on the inside of activity bottom of boiler (2), furnace body (1) inner surface is carried out equipped with opposite side heat screen (4)
The side screen positioning device (17) of positioning, the side heat screen (4), top heat screen (5) and bottom thermal insulation screen (6) are all made of full gold
Belong to tungsten and molybdenum material to be made.
3. aluminium nitride ceramics high-temperature hydrogen sintering furnace according to claim 2, it is characterised in that: the side heat screen (4)
It is mainly made of the unilateral screen (401) of multiple fittings together, multiple unilateral screen (401) the outer tops of the fitting together
Equipped with side platen bracket (402), the multiple unilateral screen (401) connects by the way that side screen support column (403) and side platen bracket (402) are fixed
It connects, the two neighboring unilateral side, which is shielded, is equipped with side screen spacer post component (404) between (401), on side heat screen (4) surfaces externally and internally
It is equipped with side screen transverse bar (405), side heat screen (4) the inner surface lower part is equipped with side screen shaping ring (406)；The top is heat-insulated
Shielding (5) includes multiple top single screen pieces (501), and the multiple top single screen piece (501) is fixed on by upper bolt assembly (502)
On top screen support plate (503)；The bottom thermal insulation screen (6) includes multiple bottom single screen pieces (601), the multiple bottom single screen piece
(601) it is fixed in bottom screen support plate (603) by lower bolt assembly (602).
4. aluminium nitride ceramics high-temperature hydrogen sintering furnace according to claim 2, it is characterised in that: the homogeneous temperature type heater
(16) include set on the one week primary heater in low volatile-type furnace lining (3) inside portion (8), be set to low volatile-type furnace lining (3) internal upper part
Top auxiliary heater (10) and be set to the interior lower part of low volatile-type furnace lining (3) bottom auxiliary heater (9)；The main heating
Main heated for controlling temperature thermocouple (14) and detection thermocouple (15) are equipped on the inside of device (8), the upper bell (7) is equipped with main heating and draws electricity
Pole (11)；The top auxiliary heater (10) is connect by the connector across top heat screen (5) with upper bell (7), institute
Bell (7) are stated equipped with top heated for controlling temperature thermocouple (13) and top heating extraction electrode (12)；The bottom auxiliary heating
Device (9) is fixedly connected by passing through the connector of bottom thermal insulation screen (6) with activity bottom of boiler (2), and the activity bottom of boiler (2) is equipped with
Bottom temperature-controlling thermal couple (18) and bottom-heated extraction electrode (19).
5. aluminium nitride ceramics high-temperature hydrogen sintering furnace according to claim 4, it is characterised in that: the primary heater (8)
It is made of tungsten plate material, the top auxiliary heater (10) and bottom auxiliary heater (9) are all made of tungsten bar material and are made.
6. aluminium nitride ceramics high-temperature hydrogen sintering furnace according to claim 2, it is characterised in that: the top heat screen
(5) it is equipped with into hydrogen channel (21), top heat screen (5) the top outer is equipped with gear hydrogen ring (22).
7. aluminium nitride ceramics high-temperature hydrogen sintering furnace according to claim 2, it is characterised in that: the upper air channel
(20) outer end is connect with gas source control cabinet (25), and hydrogen control gas circuit (26) and nitrogen control are equipped in the gas source control cabinet (25)
Gas circuit (29) processed, hydrogen control gas circuit (26) are equipped with hydrogen control bound door (28) and hydrogen detection stream meter (27),
Nitrogen control gas circuit (29) is equipped with nitrogen control bound door (31) and nitrogen detection stream meter (30), the hydrogen control
Pass through stainless steel tube (32) and upper air channel (20) input end after gas circuit (26) and nitrogen control gas circuit (29) outlet end engagement
Connection；Lower outlet passageway (23) outlet end is connect by bellows (33) with igniter (34).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821825472.0U CN209013750U (en) | 2018-11-07 | 2018-11-07 | Aluminium nitride ceramics high-temperature hydrogen sintering furnace |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821825472.0U CN209013750U (en) | 2018-11-07 | 2018-11-07 | Aluminium nitride ceramics high-temperature hydrogen sintering furnace |
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| Publication Number | Publication Date |
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| CN209013750U true CN209013750U (en) | 2019-06-21 |
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ID=66841689
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| Application Number | Title | Priority Date | Filing Date |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111020703A (en) * | 2019-12-26 | 2020-04-17 | 北京北方华创微电子装备有限公司 | High-temperature vacuum furnace and semiconductor processing equipment |
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2018
- 2018-11-07 CN CN201821825472.0U patent/CN209013750U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111020703A (en) * | 2019-12-26 | 2020-04-17 | 北京北方华创微电子装备有限公司 | High-temperature vacuum furnace and semiconductor processing equipment |
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