CN208985956U - Detection device - Google Patents
Detection device Download PDFInfo
- Publication number
- CN208985956U CN208985956U CN201821278385.8U CN201821278385U CN208985956U CN 208985956 U CN208985956 U CN 208985956U CN 201821278385 U CN201821278385 U CN 201821278385U CN 208985956 U CN208985956 U CN 208985956U
- Authority
- CN
- China
- Prior art keywords
- check bit
- detection
- probe groups
- platform
- silicon wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000001514 detection method Methods 0.000 title claims abstract description 111
- 239000000523 sample Substances 0.000 claims abstract description 68
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 46
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 46
- 239000010703 silicon Substances 0.000 claims abstract description 46
- 239000000463 material Substances 0.000 claims description 5
- 238000007689 inspection Methods 0.000 claims description 4
- 238000012360 testing method Methods 0.000 abstract description 7
- 235000012431 wafers Nutrition 0.000 description 38
- 210000004027 cell Anatomy 0.000 description 3
- 210000003850 cellular structure Anatomy 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 208000033748 Device issues Diseases 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000994 depressogenic effect Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The utility model provides a kind of detection device, it includes detection platform, probe groups and the photographic device above detection platform, the detection platform includes the first check bit and the second check bit, the probe groups are located in the detection platform and move back and forth between first check bit and second check bit, when the probe groups are located at first check bit, the photographic device carries out appearance detection in second check bit, when the probe groups are located at second check bit, the photographic device carries out Function detection in second check bit.The utility model utilizes a kind of detection device of silicon wafer, it will test that platform is divided into the first check bit and the second check bit is worked continuously, and carry out the detection of appearance and function simultaneously using photographic device, it can effectively realize the high efficiency of silicon wafer detection operation and the validity of testing result.
Description
Technical field
The utility model relates to a kind of detection device more particularly to a kind of detection dresses for photovoltaic solar cell component
It sets.
Background technique
With new energy vigorous growth, solar energy is by spies such as its reliability, safety, the feature of environmental protection, resource adequacys
Point is more and more paid close attention to by people.Widely popularize and background using solar energy green energy resource under, solar battery sheet
Demand also with day increase severely.
Due to the continuous development of solar battery sheet industry, half battery component is increasingly paid attention to by industry.It is making too
It is positive silicon wafer to be scratched to the thickness of about half using laser generator, then again break silicon wafer into two with one's hands during the leading portion of cell piece,
Break two silicon wafer half having no progeny and be placed in a detection platform progress blanking appearance detection, for detect silicon wafer in scribing and
Whether outer surface causes to damage during breaking piece.It, need to be by manufactured cell piece during making the back segment of solar battery sheet
It is placed on special detection board and carries out Function detection, for detecting inside solar battery sheet with the presence or absence of defect.
Due to only making appearance detection to cell piece in front-end process, and Function detection need to carry out in back-end process, then
The silicon wafer that some internal existing defects certainly will be will cause cannot detected by the detection of simple appearance, continue subsequent
Processing assembling, to greatly cause the loss in material and working hour.
In view of this, it is necessory to be improved to the detection device for photovoltaic solar cell component, on solving
State problem.
Utility model content
The purpose of this utility model is to provide a kind of easily to operate for the detection dress of photovoltaic solar cell component
It sets.
To achieve the above objectives, the present invention adopts the following technical solutions:
A kind of detection device comprising detection platform, probe groups and the photographic device above detection platform, the inspection
Surveying platform includes the first check bit and the second check bit, and the probe groups are located in the detection platform and in first detection
Move back and forth between position and second check bit, when the probe groups are located at first check bit, the photographic device
Appearance detection is carried out in second check bit, when the probe groups are located at second check bit, the photographic device exists
Second check bit carries out Function detection.
As the further improved technical solution of the utility model, when appearance detects, it is exposed to and takes the photograph above the second check bit
As device.
As the further improved technical solution of the utility model, the probe groups are connected with the upper Denso independently powered on
It sets, the electrifying device is powered in second check bit.
As the further improved technical solution of the utility model, the detection platform further includes carriage, the cunning
Dynamic device includes sliding rail and the sliding block on the sliding rail, and the probe groups are located on bracket, and the bracket is connected to described
Sliding block, the sliding rail are located at the two sides of the detection platform, the sliding block drive the probe groups in first check bit and
Move back and forth between second check bit.
As the further improved technical solution of the utility model, cylinder is provided on the sliding block, the cylinder drives
The bracket and probe groups are relative to the detection platform raising and lowering.
As the further improved technical solution of the utility model, the probe groups include several probes, in the branch
It is arranged into several rows on frame, is serially connected between the probe of every row.
As the further improved technical solution of the utility model, the detection device further includes backlight, the detection
Platform is made of light-transmitting materials, and the backlight is located at below second check bit and can penetrate second check bit.
As the further improved technical solution of the utility model, the detection device further includes control device, connection
In the detection platform, the probe groups, the carriage and the photographic device.
As the further improved technical solution of the utility model, photographic device includes photographing module and Function detection mould
Block.
As the further improved technical solution of the utility model, it is placed with silicon wafer in the detection platform, when the spy
When needle group is located at first check bit, the probe groups pushing is placed on the silicon wafer, described in the carriage drive
Probe groups and silicon wafer move to second check bit；The probe groups are moved back to first check bit from second check bit
When, the silicon wafer stays in second check bit, and top is exposed to the photographic device.
The beneficial effects of the utility model are: will test platform using a kind of detection device of silicon wafer and be divided into the first inspection
Location and the second check bit are worked continuously, and carry out the detection of appearance and function simultaneously using photographic device, can be effective
Realize the high efficiency of silicon wafer detection operation and the validity of testing result.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the detection device of the utility model silicon wafer；
Fig. 2 is the top view of detection device in Fig. 1.
Specific embodiment
In order to keep the purpose of this utility model, technical solution and advantage clearer, with reference to the accompanying drawing and it is embodied
The utility model is described in detail in example.
As shown in Figure 1, the structural schematic diagram of the detection device for the utility model silicon wafer 16 comprising detection platform 11,
Probe groups 12 and the photographic device 13 above detection platform 11.Detection platform 11 includes the first check bit 111 and the second inspection
The size of location 112, the first check bit 111 and the second check bit 112 is slightly larger than 16 size of silicon wafer, breaks piece convenient for placing completely
Silicon wafer 16 afterwards.Probe groups 12 are located in detection platform 11 and move back between the first check bit 111 and the second check bit 112
It is dynamic, operation is carried out simultaneously convenient for the first check bit 111 of cooperation and the second check bit 112.
Detection platform 11 includes carriage 113, and silicon wafer 16 and probe groups 12 can be achieved the in the setting of carriage 113
Move back and forth between one check bit 111 and the second check bit 112.Carriage 113 is including sliding rail 1131 and is located at sliding rail 1131
On sliding block 1132, sliding rail 1131 is located at 11 two sides of detection platform, and sliding rail 1131 is with movable slider 1132 in the first check bit 111
And second move back and forth between check bit 112, so that silicon wafer 16 and probe groups 12 be driven to move back and forth.
As shown in Fig. 2, for the top view of detection device in Fig. 1.Probe groups 12 are located on bracket 121, and bracket 121 is connected to
On sliding block 1132 on carriage 113.Cylinder (not shown) is provided on sliding block 1132, connecting bracket 121 on cylinder,
Cylinder can drive bracket 121 and probe groups 12 relative to 11 raising and lowering of detection platform.When probe groups 12 are with carriage 113
When being moved to the first check bit 111, probe groups 12 decline with cylinder while being pressed on the silicon wafer 16 of the first check bit 111；With
Afterwards, carriage 113 drives silicon wafer 16 and probe groups 12 to be moved to the second check bit 112, and probe groups 12 are to the second check bit 112
On silicon wafer 16 powered on and discharged infrared ray, make photographic device 13 carry out Function detection.After Function detection, probe groups
12 and bracket 121 rise under the cylinder drive, be then moved back to the first check bit 111 from the second check bit 112.
Probe groups 12 include several probes, and several rows are arranged on bracket 121, are mutually gone here and there between the probe of every row
Connection, 12 upper end of probe groups is connected to independent electrifying device 14, convenient for 14 independent control probe groups 12 of electrifying device when powering on
Between；12 lower end aligned detection platform 11 of probe groups, convenient for being pressed onto the main gate line of silicon wafer 16 when the pushing of probe groups 12.It is detecting
The top of platform 11 is equipped with photographic device 13, when probe groups 12 power on the silicon wafer 16 on the second check bit 112, photographic device
13 pairs of silicon wafers 16 carry out Function detection；When then probe groups 12 rise and are moved to the first check bit 111, probe groups 12 are right
The silicon wafer 16 carries out appearance detection.
Photographic device 13 is installed on the top of detection platform 11, and photographic device 13 includes photographing module and functional module, together
When compatible appearance and Function detection function.When probe groups 12 are located at the first check bit 111, photographic device 13 is in the second check bit
112 carry out appearance detection, and when probe groups 12 are located at the second check bit 112, photographic device 13 is carried out in the second check bit 112
Function detection.
As shown in Figure 1, further, detection device is equipped with backlight 15, detection platform 11 is made of light-transmitting materials, institute
Backlight 15 is stated to be located at 112 lower section of the second check bit and the second check bit 112 made of light-transmitting materials can be penetrated.It is examined when to second
When silicon wafer 16 on location 112 carries out appearance detection shooting, backlight 15 is opened, makes photographic device 13 for providing backlighting for
Shoot 16 profile of silicon wafer；When the silicon wafer 16 on the second check bit 112 carries out Function detection, backlight 15 is closed, avoids interfering
The Function detection of subsequent progress.
Further, control device (not shown) is additionally provided in detection device, it is flat that control device is connected to detection
Whether platform 11, probe groups 12, carriage 113 and photographic device 13, control device are placed on two check bits for incuding
Silicon wafer 16 simultaneously issues control signal.When being placed with silicon wafer 16 in detection platform 11, control device, which issues signal, makes detection platform
11, probe groups 12, carriage 113 and photographic device 13 carry out corresponding operation.
It is as follows that detection device detects the step of silicon wafer 16:
On the first check bit 111: firstly, the silicon wafer 16 broken is placed on the first check bit 111 by mechanical arm, control
Device issues control signal, and sliding block 1132 drives probe groups 12 to be moved to the first check bit 111 and be depressed into 16 main gate line of silicon wafer
On；Then carriage 113 moves together probe groups 12 and silicon wafer 16 to the second check bit 112,111 weight of the first check bit
New placement silicon slice under test 16.
On the second check bit 112: firstly, probe groups 12 and silicon wafer 16 are moved together to after the second check bit 112, opening
Electrifying device 14 powers on probe groups 12, and photographic device 13 carries out Function detection；Etc. then, after Function detections shooting, visit
Needle group 12, which first rises from the second check bit 112, is moved back to the first check bit 111, rear to repeat the step on the first check bit 111；Silicon
Piece 16 stays in the second check bit 112, is exposed to photographic device 13 above the second check bit 112；Finally, opening the second check bit
112 lower section backlight 15 to silicon wafer 16 carry out appearance detection shooting, after mechanical arm take silicon wafer 16 away to blanking box.
Operation on first check bit 111 and the second check bit 112 is to carry out simultaneously, and photographic device 13 completes function and outside
After seeing shooting, the picture of shooting need to be carried out software analysis processing, to complete function and appearance detection.
In conclusion the utility model provides a kind of detection device comprising detection platform 11, probe groups 12 and be located at
The photographic device 13 of 11 top of detection platform, detection platform 11 include the first check bit 111 and the second check bit 112, probe groups
12 are located in detection platform 11 and move back and forth between the first check bit 111 and the second check bit 112, when probe groups 12 are located at
When the first check bit 111, photographic device 13 carries out appearance detection in the second check bit 112, when probe groups 12 are located at the second detection
When position 112, photographic device 13 carries out Function detection in the second check bit 112.The utility model utilizes a kind of detection of silicon wafer 16
Device, will test that platform 11 is divided into the first check bit 111 and the second check bit 112 is worked continuously, and utilize camera shooting dress
It sets 13 while carrying out the detection of appearance and function, can effectively realize that silicon wafer 16 detects the high efficiency and testing result of operation
Validity.
It is used herein such as "upper", "lower", "left", "right", "front", "rear", representation space relative position term
It is to describe relationship of the feature relative to another feature as shown in the drawings for the purpose convenient for explanation.It can manage
Solution, according to the difference of product placement position, the term of relative space position can be intended to include other than orientation as shown in the figure
Different direction, should not be interpreted as limitations on claims.In addition, descriptor "horizontal" used herein and non-fully
It is equal to along the inclination for perpendicular to gravity direction, allowing to have certain angle.
In addition, above embodiments are merely to illustrate the utility model and not limit technical side described in the utility model
Case, understanding of this description should be based on persons of ordinary skill in the field, although this specification is referring to above-mentioned
Embodiment has been carried out detailed description to the utility model, still, those skilled in the art should understand that, affiliated skill
The technical staff in art field still can be modified or replaced equivalently the utility model, and all not depart from this practical new
The technical solution and its improvement of the spirit and scope of type, should all cover in the scope of the claims of the utility model.
Claims (10)
1. a kind of detection device, it is characterised in that: it includes detection platform, probe groups and the camera shooting dress above detection platform
It sets, the detection platform includes the first check bit and the second check bit, and the probe groups are located in the detection platform and in institute
It states and moves back and forth between the first check bit and second check bit, when the probe groups are located at first check bit, institute
It states photographic device and carries out appearance detection in second check bit, it is described when the probe groups are located at second check bit
Photographic device carries out Function detection in second check bit.
2. detection device according to claim 1, it is characterised in that: when appearance detects, be exposed to above the second check bit
Photographic device.
3. detection device according to claim 1, it is characterised in that: the probe groups are connected with the upper Denso independently powered on
It sets, the electrifying device is powered in second check bit.
4. detection device according to claim 1, it is characterised in that: the detection platform further includes carriage, described
Carriage includes sliding rail and the sliding block on the sliding rail, and the probe groups are located on bracket, and the bracket is connected to institute
Sliding block is stated, the sliding rail is located at the two sides of the detection platform, and the sliding block drives the probe groups in first check bit
Move back and forth between second check bit.
5. detection device according to claim 4, it is characterised in that: be provided with cylinder, the cylinder band on the sliding block
The bracket and probe groups are moved relative to the detection platform raising and lowering.
6. detection device according to claim 4, it is characterised in that: the probe groups include several probes, described
It is arranged into several rows on bracket, is serially connected between the probe of every row.
7. detection device according to claim 1, it is characterised in that: the detection device further includes backlight, the inspection
It surveys platform to be made of light-transmitting materials, the backlight is located at below second check bit and can penetrate second check bit.
8. detection device according to claim 4, it is characterised in that: the detection device further includes control device, is connected
It is connected to the detection platform, the probe groups, the carriage and the photographic device.
9. detection device according to claim 1, it is characterised in that: photographic device includes photographing module and Function detection mould
Block.
10. detection device according to claim 4, it is characterised in that: silicon wafer is placed in the detection platform, when described
When probe groups are located at first check bit, the probe groups pushing is placed on the silicon wafer, and the carriage drives institute
It states probe groups and silicon wafer moves to second check bit；The probe groups are moved back to first detection from second check bit
When position, the silicon wafer stays in second check bit, and top is exposed to the photographic device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821278385.8U CN208985956U (en) | 2018-08-09 | 2018-08-09 | Detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821278385.8U CN208985956U (en) | 2018-08-09 | 2018-08-09 | Detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208985956U true CN208985956U (en) | 2019-06-14 |
Family
ID=66781158
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821278385.8U Active CN208985956U (en) | 2018-08-09 | 2018-08-09 | Detection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208985956U (en) |
-
2018
- 2018-08-09 CN CN201821278385.8U patent/CN208985956U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN205679544U (en) | Glass edge angular defect automatic detection device | |
| CN108689111A (en) | A kind of power supply adaptor test automatic charging equipment | |
| CN206440635U (en) | Detect the device of mobile phone screen slight crack | |
| CN103181339A (en) | Device for automatically screening embryonated eggs | |
| CN104527193A (en) | Image system laminator | |
| CN208603251U (en) | Automatic charging equipment is used in a kind of test of power supply adaptor | |
| CN207963793U (en) | A kind of leaded light slab warping automatic detection device | |
| CN207952023U (en) | A kind of round-ring like piece test screening installation | |
| CN108628015A (en) | Detection device and its detection method, detection device | |
| CN109759755A (en) | AI intelligent process anomalous identification processing system and solar cell chip bonding machine | |
| CN109557110A (en) | The full surface blemish detection device of bearing ring and method based on machine vision | |
| CN208985956U (en) | Detection device | |
| CN108469439A (en) | Based on electroluminescent solar battery sheet defect detecting device and method | |
| CN108380521B (en) | Automatic light guide plate luminance measurement and feeding and discharging sorting equipment based on machine vision | |
| CN204422729U (en) | The testing integrated automatic test machine of a kind of battery ATE and BQ | |
| CN208000606U (en) | Magnetic shoe surface microdefect vision inspection apparatus | |
| CN207117571U (en) | A kind of test device | |
| CN206990465U (en) | The defects of liquid crystal panel detection means | |
| CN108716895A (en) | Desktop grade angularity scan method and equipment | |
| CN208297378U (en) | Based on electroluminescent solar battery sheet defect detecting device | |
| CN211613467U (en) | Keyboard finished product detection equipment | |
| CN202710178U (en) | Photoelectric detection device of LED light source module | |
| CN218350442U (en) | Automatic test equipment for laser chip | |
| CN208458974U (en) | A kind of mobile phone screen optical lens detection device | |
| CN208879131U (en) | Contact lenses sorting machine |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 224100 No.5 Yongsheng Road, economic development zone, Dafeng District, Yancheng City, Jiangsu Province Patentee after: YANCHENG DAFENG CANADIAN SOLAR ELECTRIC POWER TECHNOLOGY Co.,Ltd. Patentee after: Atlas sunshine Power Group Co.,Ltd. Address before: 224100 No.5 Yongsheng Road, economic development zone, Dafeng District, Yancheng City, Jiangsu Province Patentee before: YANCHENG DAFENG CANADIAN SOLAR ELECTRIC POWER TECHNOLOGY Co.,Ltd. Patentee before: CSI SOLAR POWER GROUP Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder |