CN208953887U - Hollow rotating stage apparatus - Google Patents
Hollow rotating stage apparatus Download PDFInfo
- Publication number
- CN208953887U CN208953887U CN201821963091.9U CN201821963091U CN208953887U CN 208953887 U CN208953887 U CN 208953887U CN 201821963091 U CN201821963091 U CN 201821963091U CN 208953887 U CN208953887 U CN 208953887U
- Authority
- CN
- China
- Prior art keywords
- bearing
- hollow shaft
- bevel gear
- hollow
- chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model belongs to puddle development field in manufacture of semiconductor, specifically a kind of hollow rotating stage apparatus, including unit platforms, bearing assembly, hollow shaft, chuck, bevel gear A, bevel gear B and motor, hollow shaft is rotatablely installed by bearing assembly in unit platforms, one end of hollow shaft is connected with chuck, and the other end is connect with negative pressure source；Motor is installed in unit platforms, and the output shaft of motor is connected with bevel gear A, and bevel gear B is equipped on hollow shaft, and bevel gear B is meshed with bevel gear A；Wafer is placed on chuck, and is adsorbed on chuck by the vacuum that negative pressure source provides.Common ordinary motor can be selected in the utility model, achievees the purpose that chuck rotates by bevel gear engaging structure；The hollow shaft of the utility model realizes the function of vacuum suction, solves unit motor and uses the applications such as the amount of dedicated hollow rotating motor is small, face is narrow, price is high, occupied space is big restricted.
Description
Technical field
The utility model belongs to puddle development field in manufacture of semiconductor, specifically a kind of hollow rotating platform dress
It sets.
Background technique
Traditional puddle development machine equipment, unit is interior substantially directly to drive chuck (carrying by hollow rotating motor
Platform) carry out wafer process operation, Incision Machine's by internal structure of motor realization.Such dedicated hollow rotating motor
Measure that small, brand is few, face is narrow and price is relatively high on the market, the assembly space of the occupancy on unit is also bigger.
Utility model content
In order to solve directly to drive chuck operation and the existing above problem, the utility model using hollow rotating motor
Be designed to provide a kind of hollow rotating stage apparatus.
The purpose of this utility model is achieved through the following technical solutions:
The utility model includes unit platforms, bearing assembly, hollow shaft, chuck, bevel gear A, bevel gear B and motor,
Middle hollow shaft is rotatablely installed by bearing assembly in unit platforms, and one end of the hollow shaft is connected with the chuck, the other end
It is connect with negative pressure source；The motor is installed in unit platforms, and the output shaft of the motor is connected with bevel gear A, the hollow shaft
On bevel gear B is installed, which is meshed with the bevel gear A；Wafer is placed on the chuck, and by described
The vacuum that negative pressure source provides is adsorbed on chuck；
Wherein: the axial direction of the motor output shaft and the axial direction of hollow shaft are perpendicular, i.e., the described motor by bevel gear A with
The engaged transmission driving hollow shaft rotation of bevel gear B, is converted into vertical pivot to rotation for X direction；
The hollow mandrel interior is provided in the axial direction with vacuum passage A, and the other end of the hollow shaft is equipped with vacuum interface, described
Hollow shaft is connected by the vacuum interface with negative pressure source；
The chuck is hollow structure inside, and the lower part of the hollow structure is set in one end of the hollow shaft and in
Empty axis interlocks, and the top of the hollow structure is vacuum passage B；
The bearing assembly includes bearing block, bearing, bearing (ball) cover and locking nut, which is mounted on the unit
On platform, hollow shaft is passed through by the bearing block, and is rotatablely connected by bearing and bearing block, and the lower end of the bearing block is affixed
There is bearing (ball) cover, the centre of the bearing (ball) cover is equipped with the locking nut being threadedly coupled with the hollow shaft；
The bearing includes deep groove ball bearing and angular contact ball bearing setting up and down, the deep groove ball bearing and angular contact ball
It is equipped between bearing and covers the intermediate sleeve on the hollow shaft；The outer ring of the deep groove ball bearing and angular contact ball bearing passes through axis
Hold the seam allowance and bearing (ball) cover axially position on an inner wall, the inner ring of the deep groove ball bearing and angular contact ball bearing passes through intermediate sleeve
And locking nut axially position.
The advantages of the utility model and good effect are as follows:
Common ordinary motor can be selected in the utility model, achievees the purpose that chuck rotates by bevel gear engaging structure；This
The hollow shaft of utility model realizes the function of vacuum suction, solve unit motor using dedicated hollow rotating motor amount it is small,
The applications such as face is narrow, price is high, occupied space is big are restricted.
Detailed description of the invention
Fig. 1 is the internal structure cross-sectional view of the utility model；
Fig. 2 is the structure top view of the utility model；
Wherein: 1 is unit platforms, and 2 be bearing assembly, and 201 be bearing block, and 202 be deep groove ball bearing, and 203 be intermediate sleeve,
204 be angular contact ball bearing, and 205 be bearing (ball) cover, and 206 be locking nut, and 3 be hollow shaft, and 4 be chuck (plummer), and 5 are
Bevel gear A, 6 be bevel gear B, and 7 be motor, and 8 be vacuum interface, and 9 be vacuum passage A, and 10 be vacuum passage B, and 11 be wafer.
Specific embodiment
The utility model is described in further detail with reference to the accompanying drawing.
As shown in Figure 1 and Figure 2, the utility model includes unit platforms 1, bearing assembly 2, hollow shaft 3, chuck4, bevel gear
A5, bevel gear B6 and motor 7, wherein motor 7 is fixed on the downside of unit platforms 1, and hollow shaft 3 passes through the rotation peace of bearing assembly 2
Loaded in unit platforms 1, one end (upper end) of the hollow shaft 3 is connected with chuck4, and the other end (lower end) is equipped with vacuum interface 8,
Hollow shaft 3 is connected by the vacuum interface 8 with negative pressure source.The output shaft of motor 7 is connected with bevel gear A5, close on hollow shaft 3
The position of lower end is equipped with bevel gear B6, and the bevel gear B6 and hollow shaft 3 are keyed, and by being located at the lock below bevel gear B6
Tight part (such as locking nut) axially position, and bevel gear B6 is meshed with bevel gear A5.The axial direction and hollow shaft of 7 output shaft of motor
3 axial direction is perpendicular, i.e., motor 7 is rotated by the engaged transmission driving hollow shaft 3 of bevel gear A5 and bevel gear B6, by X direction
Vertical pivot is converted into rotation.
Hollow shaft 3 axially inside offers vacuum passage A9.Chuck4 is hollow structure inside, under the hollow structure
Portion is set in outside the upper end of hollow shaft 3 and interlocks with hollow shaft 3, and the top of hollow structure is vacuum passage B10, the vacuum
Channel B10 is connected with the vacuum passage A9 inside hollow shaft 3.Wafer 11 is placed on chuck4, and is provided by negative pressure source
Vacuum be adsorbed on chuck4.
Bearing assembly 2 includes bearing block 201, bearing, bearing (ball) cover 205 and locking nut 206, and the bearing block 201 is affixed
In the downside of unit platforms 1, hollow shaft 3 is passed through by bearing block 201, and is rotatablely connected by bearing and bearing block 201, bearing block
201 lower end is connected with bearing (ball) cover 205, and the centre of the bearing (ball) cover 205 is equipped with the locking nut being threadedly coupled with hollow shaft 3
206.The bearing of the present embodiment includes deep groove ball bearing 202 and angular contact ball bearing 204 setting up and down, the deep groove ball bearing
It is equipped between 202 and angular contact ball bearing 204 and covers the intermediate sleeve 203 on hollow shaft 3.Deep groove ball bearing 202 and angular contact ball
The outer ring of bearing 204 by 205 axially position of seam allowance and bearing (ball) cover on 201 inner wall of bearing block, the deep groove ball bearing 202 and
The inner ring of angular contact ball bearing 204 passes through 206 axially position of intermediate sleeve 203 and locking nut.
The working principle of the utility model are as follows:
Horizontal motor 7, which works, to be run, and band dynamic bevel gear A5 is rotated, and passes through the engaged transmission of bevel gear A5 and bevel gear B6
Hollow shaft 3 and chuck4 rotation are driven, the wafer 11 above chuck4 is made to carry out process operation.Process operation is carried out in wafer 11
While need chuck4 can vacuum suction wafer 11, guarantee wafer 11 can be concentric and opposing stationary in chuck4, to avoid
Wafer 11 flies out when with chuck4 high speed rotation.
Vacuum is accessed by the vacuum interface 8 of 3 lower end of hollow shaft, inside the vacuum passage A9 inside hollow shaft 3 and chuck4
Vacuum passage B10 communicate so that wafer 11 can be sucked in the surface chuck4.
The utility model can replace the function of the access vacuum line of dedicated hollow rotating motor completely, while realize with electricity
The high-speed rotating purpose of machine solves the application limitations such as dedicated hollow rotating motor amount is small, face is narrow, price is high, occupied space is big
Property.
Claims (6)
1. a kind of hollow rotating stage apparatus, it is characterised in that: including unit platforms (1), bearing assembly (2), hollow shaft (3),
Chuck (4), bevel gear A (5), bevel gear B (6) and motor (7), wherein hollow shaft (3) is rotatablely installed by bearing assembly (2)
In on unit platforms (1), one end of the hollow shaft (3) is connected with the chuck (4), and the other end is connect with negative pressure source；The electricity
Machine (7) is installed on unit platforms (1), and the output shaft of the motor (7) is connected with bevel gear A (5), is pacified on the hollow shaft (3)
Equipped with bevel gear B (6), which is meshed with the bevel gear A (5)；Wafer (11) is placed on the chuck (4)
On, and be adsorbed on chuck (4) by the vacuum that the negative pressure source provides.
2. hollow rotating stage apparatus according to claim 1, it is characterised in that: the axial direction of motor (7) output shaft
Perpendicular with the axial direction of hollow shaft (3), i.e., the described motor (7) is driven by the engaged transmission of bevel gear A (5) and bevel gear B (6)
Hollow shaft (3) rotation, is converted into vertical pivot to rotation for X direction.
3. hollow rotating stage apparatus according to claim 1, it is characterised in that: the hollow shaft (3) is axially inside
Vacuum passage A (9) are offered, the other end of the hollow shaft (3) is equipped with vacuum interface (8), and the hollow shaft (3) passes through the vacuum
Interface (8) is connected with negative pressure source.
4. hollow rotating stage apparatus according to claim 1, it is characterised in that: the chuck (4) is inner hollow knot
Structure, the lower part of the hollow structure are set in one end of the hollow shaft (3) and interlock with hollow shaft (3), the hollow structure
Top is vacuum passage B (10).
5. hollow rotating stage apparatus according to claim 1, it is characterised in that: the bearing assembly (2) includes bearing
Seat (201), bearing, bearing (ball) cover (205) and locking nut (206), the bearing block (201) are mounted on the unit platforms (1)
On, hollow shaft (3) is passed through by the bearing block (201), and is rotatablely connected by bearing and bearing block (201), the bearing block
(201) lower end is connected with bearing (ball) cover (205), and the centre of the bearing (ball) cover (205) is equipped with to be connected with the hollow shaft (3) screw thread
The locking nut (206) connect.
6. hollow rotating stage apparatus according to claim 5, it is characterised in that: the bearing includes depth setting up and down
Ditch ball bearing (202) and angular contact ball bearing (204) are equipped between the deep groove ball bearing (202) and angular contact ball bearing (204)
Cover the intermediate sleeve (203) on the hollow shaft (3)；The outer ring of the deep groove ball bearing (202) and angular contact ball bearing (204)
By the seam allowance and bearing (ball) cover (205) axially position on bearing block (201) inner wall, the deep groove ball bearing (202) and angular contact
The inner ring of ball bearing (204) passes through intermediate sleeve (203) and locking nut (206) axially position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821963091.9U CN208953887U (en) | 2018-11-27 | 2018-11-27 | Hollow rotating stage apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821963091.9U CN208953887U (en) | 2018-11-27 | 2018-11-27 | Hollow rotating stage apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208953887U true CN208953887U (en) | 2019-06-07 |
Family
ID=66745194
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821963091.9U Active CN208953887U (en) | 2018-11-27 | 2018-11-27 | Hollow rotating stage apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208953887U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111221220A (en) * | 2018-11-27 | 2020-06-02 | 沈阳芯源微电子设备股份有限公司 | Hollow rotating platform device |
-
2018
- 2018-11-27 CN CN201821963091.9U patent/CN208953887U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111221220A (en) * | 2018-11-27 | 2020-06-02 | 沈阳芯源微电子设备股份有限公司 | Hollow rotating platform device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN206201053U (en) | A kind of liftable cutting machine | |
| CN205393604U (en) | Chamfer machinery | |
| CN208953887U (en) | Hollow rotating stage apparatus | |
| CN207914376U (en) | Cylindrical battery slot rolling fixture and slot rolling device | |
| CN106965963B (en) | Sealing device | |
| CN106040084A (en) | Sealant dispersing system having stirring knife lifting adjusting function | |
| CN105909897B (en) | A kind of automatic compensation type high-pressure rotary joint | |
| CN105855919B (en) | A kind of high speed dry cutting gear-hobbing machine turntable | |
| CN111221220A (en) | Hollow rotating platform device | |
| CN206775308U (en) | A kind of new electric pushrod | |
| CN105036027B (en) | White wine filling device | |
| CN107008930B (en) | Numerically controlled lathe servo turret | |
| CN205745773U (en) | A kind of automatic compensation type high-pressure rotary joint | |
| CN104858501B (en) | Cylinder piston ring separate machine | |
| CN204025626U (en) | A kind of oil-leakage-prevention speed-change gear box | |
| CN208959709U (en) | A kind of closed high speed disperser of environmental protection | |
| CN208321677U (en) | Straightening mechanism for axle housing Set and Positioning | |
| CN209394307U (en) | A kind of precise rotating platform | |
| CN205715262U (en) | Compound bearing arrangement | |
| CN207974934U (en) | A kind of drive assembly of axial plunger pump | |
| CN206708346U (en) | A kind of axle sealing structure of speed changer one | |
| CN105108609A (en) | Pressure cooker cover polishing machine | |
| CN205096583U (en) | Hole cleaning apparatus | |
| CN105386955A (en) | Worm gear and worm speed reduction type three-plunger reciprocating pump | |
| CN206303806U (en) | The device assembly that is of coupled connections of food blending machine |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |