CN208945957U - A kind of pressurization cleaning equipment - Google Patents
A kind of pressurization cleaning equipment Download PDFInfo
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- CN208945957U CN208945957U CN201821601113.7U CN201821601113U CN208945957U CN 208945957 U CN208945957 U CN 208945957U CN 201821601113 U CN201821601113 U CN 201821601113U CN 208945957 U CN208945957 U CN 208945957U
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- lower chamber
- cleaning equipment
- upper cavity
- water inlet
- sealing space
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Abstract
The utility model discloses a kind of pressurization cleaning equipments, including upper cavity and lower chamber, upper cavity, together in sealing space is formed on lower chamber, is equipped with air intake and water inlet at the top of upper cavity by articulation piece kinge-joint knot, air intake connects air inlet pipe, and water inlet connects water inlet pipe；Lower chamber bottom is equipped with venthole；Annular tooling is equipped in sealing space, annular tooling inner circumferential is equipped with ring-shaped step；Collecting tank is equipped with below lower chamber.The cleaning equipment of the utility model, part is placed in the annular tooling with step, annular tooling is snapped on the annular slot in cleaning equipment sealing space, then cleansing medium is added in sealing space at the top of sealing space under the action of pressurization, these media pass through aperture or irregularly-shaped hole on part and gap, to achieve the effect that make part equilibrium to be cleaned by pressure, uniform force when can guarantee Cleaning of Parts, reduction is scrapped, human factor influence is minimized by the efficiency for improving cleaning simultaneously.
Description
Technical field
The utility model belongs to semiconductor material cleaning equipment technical field, and in particular to a kind of pressurization cleaning equipment.
Background technique
Semiconductor device material be fragile material, existing some models part processing after, above simultaneously have it is hundreds of very
To thousands of a apertures or irregularly-shaped hole, existing dredging cleaning technique means are mostly air pressure gun, giant or drill bit and the dredging of hard object
It is cleaned with ultrasonic wave or chemical agent, because of semiconductor material hydrophobic property, is not had in aperture or irregularly-shaped hole and gap again afterwards
Gas chamber can be generated when gravity or pressure, causes chemical agent or clear water that can not circulate in hole, to be unable to reach cleaning part
Requirement.And fragile material local compression unevenness in the case where will appear crackle, chipping, breakage the problems such as, the prior art
It is by manual operation, to be cleared up one by one the hole of part, first the pressure of localized contact point by parts fixation on fixture
Meeting unbalance stress, secondly cleaning efficiency is low.During Cleaning of Parts, there is uncontrollability, therefore right when because of manual operation
The cleannes of part are simultaneously uncontrollable, cause part that cleaning is not achieved and require, are manually easy when dredging aperture or irregularly-shaped hole one by one
Part is damaged because material property also results in aperture inner wall while destroying surface integrity, such long processing time, low efficiency,
And uncertainty when can be because of manual operation, thus faulty part.
In view of the above-mentioned problems, proposing the utility model.
Utility model content
The purpose of the utility model is to provide a kind of pressurization cleaning equipments.
To realize above-mentioned purpose of utility model, the technical solution of the utility model is: a kind of pressurization cleaning equipment, including upper
Cavity 2 and lower chamber 1, in which:
Lower chamber is set on bracket 4, upper cavity 2 by 16 kinge-joint knot of articulation piece together in forming sealing space on lower chamber 1,
At the top of upper cavity 2 be equipped with air intake 13 and water inlet 14, air intake 13 connection connection air inlet pipe 22, water inlet 14 connect into
Water pipe 8；1 bottom of lower chamber is equipped with venthole；
Annular tooling 10 is equipped in sealing space, annular 10 inner circumferential of tooling is equipped with the annular table for placing circular pieces 9
Rank, annular 10 level of tooling are snapped on the ring-shaped step card slot 11 on sealing space inner wall；
Collecting tank 3 is equipped with below lower chamber 1, collecting tank 3 is set on bracket 4.
Wherein, pressure relief opening 15 is equipped at the top of upper cavity 2, pressure relief opening 15 is equipped with relief valve, and relief valve passes through blowdown line 17
Connect the refluxing opening 19 of 1 bottom of lower chamber.
Wherein, upper cavity 2 is equipped with pressure gauge 21, and pressure gauge 21 is used to measure the pressure of 9 top of part.
Wherein, 8 one end of water inlet pipe connects water inlet 14, and the other end connects 3 bottom water outlet of collecting tank, sets on water inlet pipe 8
There are delivery pump 6 and pressure sensor 7.
Wherein, 3 bottom of collecting tank is equipped with sewage draining exit 20.
Wherein, lower chamber 1 is equipped with travel switch 12.
Wherein, 1 bottom of lower chamber is equipped with the diversion cavity 5 of taper, and venthole is set to 5 bottom of diversion cavity.
Wherein, support rod 18 is equipped on the outside of lower chamber 1,18 one end of support rod is articulated with 1 outside of lower chamber, and the other end is equipped with
Detachable buckle is connected to 2 outside of upper cavity.
Wherein, collecting tank 3 is equipped with liquid level detection device 24.
Wherein, upper cavity 2 is fastened and connected with lower chamber 1 by hasp 23.
The beneficial effects of the utility model are:
Part is directly placed in the annular tooling with step, the outer circle of part by the cleaning equipment of the utility model
End face contacts in annular tooling, and annular tooling is snapped on the annular slot in cleaning equipment sealing space, then Jiang Shui, change
It learns the media such as medicament, grinding mortar to be added in sealing space at the top of sealing space under the action of pressurization, these media are logical
Aperture on part or irregularly-shaped hole and gap are crossed, to achieve the effect that clean part equilibrium by pressure, adjusts pressure release
The pressure of the cleansing medium of application can be become free controllable state by valve, by the use of the invention, that is, can guarantee that part is clear
Uniform force when washing, reduction are scrapped, while improving the efficiency of cleaning, and human factor influence is minimized.
Detailed description of the invention
When considered in conjunction with the accompanying drawings, by referring to following detailed description, it can more completely more fully understand that this is practical new
Type and being easy learns many adjoint advantages, but attached drawing described herein is used to provide to the utility model into one
Step understands, constitutes a part of the utility model, and the illustrative embodiments and their description of the utility model are practical for explaining
It is novel, it does not constitute improper limits to the present invention, in which:
Fig. 1 is the structural schematic diagram under a kind of pressurization cleaning equipment closed state of the utility model；
Fig. 2 is the structural schematic diagram under a kind of pressurization cleaning equipment opening-wide state of the utility model.
Specific embodiment
Below in conjunction with attached drawing to the utility model, the technical scheme in the embodiment of the utility model is carried out clear, complete
Site preparation description.
As shown in Figs. 1-2, a kind of pressurization cleaning equipment, including upper cavity 2 and lower chamber 1, in which:
Lower chamber is set on bracket 4, upper cavity 2 by 16 kinge-joint knot of articulation piece together in forming sealing space on lower chamber 1,
At the top of upper cavity 2 be equipped with air intake 13 and water inlet 14, air intake 13 connection connection air inlet pipe 22, water inlet 14 connect into
Water pipe 8；1 bottom of lower chamber is equipped with venthole；
Annular tooling 10 is equipped in sealing space, annular 10 inner circumferential of tooling is equipped with the annular table for placing circular pieces 9
Rank, annular 10 level of tooling are snapped on the ring-shaped step card slot 11 on sealing space inner wall；
Collecting tank 3 is equipped with below lower chamber 1, collecting tank 3 is set on bracket 4.
More preferably, it is equipped with check valve on air intake 13 and water inlet 14, prevents from flowing backwards.
Working principle: part 9 is placed on the ring-shaped step of annular tooling 10, as shown in Fig. 2, usually ring-shaped step height
Lower than the level height of annular tooling.Then on the annular slot annular tooling buckle being installed in sealing space, this ring
Shape card slot preferred levels are set in lower chamber.Sealing space has been divided into two parts, the top of middle and upper part by tooling annular in this way
Portion is equipped with the entrance of water and gas, and the bottom of lower part is equipped with venthole.So by top conveying come in gas or water by
In having pressure, equilibrium is discharged by aperture, irregularly-shaped hole and the gap on part, while by the impurity in this some holes and gap,
Achieve the effect that cleaning.Guarantee uniform force when Cleaning of Parts, reduction is scrapped, while improving the efficiency of cleaning, by human factor
Influence is minimized.
The size of annular tooling major diameter fit annular slot, internal diameter and fixed ring-shaped step press different part sizes
Processing a, so cleaning equipment can be equipped with multiple annular toolings or an annular tooling inner circumferential last time is equipped with difference
Height and size ring-shaped step.
In the above-mentioned technical solutions, pressure relief opening 15 is equipped at the top of upper cavity 2, pressure relief opening 15 is equipped with relief valve, and relief valve is logical
Cross the refluxing opening 19 that blowdown line 17 connects 1 bottom of lower chamber.Pressure relief opening 15 and relief valve are located at 2 top of upper cavity, for adjusting
Pressure above whole part avoids pressure excessive, and the cleansing medium of pressure release is flowed by blowdown line 17 by refluxing opening 19
In lower chamber 1.More preferably, lower chamber 1 is equipped with filter bag in venthole upstream, and refluxing opening is set to above filter bag, the cleaning after pressure release
The filter bag top that medium is guided in lower chamber 1 by this mouthful reflux, finally flows into collecting tank after filtering.
In the above-mentioned technical solutions, upper cavity 2 is equipped with pressure gauge 21, and pressure gauge 21 is used to measure the pressure of 9 top of part
Power prevents hypertonia, while being conveniently adjusted relief valve.
In the above-mentioned technical solutions, 8 one end of water inlet pipe connects water inlet 14, and the other end connects the water outlet of 3 bottom of collecting tank
Mouthful, water inlet pipe 8 is equipped with delivery pump 6 and pressure sensor 7.Medium in collecting tank is delivered to by delivery pump 6 by water inlet pipe 8
At water inlet 14, cleansing medium can be made to reuse, avoid wasting.More preferably, pressure sensor is connect with delivery pump, works as pressure
When power is lower than setting value, stops conveying pump work, avoid dallying.
In the above-mentioned technical solutions, 3 bottom of collecting tank is equipped with sewage draining exit 20.Discharge the medium in collecting tank.It is preferred to receive
It is tapered to collect trench bottom, sewage draining exit is set to taper low side, convenient for discharging liquid in collecting tank when cleaning.
In the above-mentioned technical solutions, lower chamber 1 is equipped with travel switch 12.For detecting whether upper and lower cavities correctly close
It closes, avoids opening delivery pump in the not closed state of upper and lower cavities.
In the above-mentioned technical solutions, 1 bottom of lower chamber is equipped with the diversion cavity 5 of taper, and venthole is set to 5 bottom of diversion cavity.
For accepting the cleansing medium to flow back after cleaning with pressure relief opening, (cleansing medium is water, detergent, chemical agent, lapping liquid, polishing
Liquid, compressed air, wherein liquid is conveyed by water pipeline and is recycled, and compressed air is conveyed by gas pipeline) and it is guided to collection
In slot, filter bag is installed in diversion cavity, for filtering, to reach recycling, reduces waste.
In the above-mentioned technical solutions, support rod 18 is equipped on the outside of lower chamber 1,18 one end of support rod is articulated with outside lower chamber 1
Side, the other end are equipped with detachable buckle and are connected to 2 outside of upper cavity.Upper cavity is supported when opening for upper and lower cavities, avoids dashing forward
It so falls and causes to damage, when closure removes, and similar car engine cover supports.
In the above-mentioned technical solutions, collecting tank 3 is equipped with liquid level detection device 24.Liquid level detection device includes level sensing
Device, liquid level sensor are connect with delivery pump, and for detecting the liquid level in collecting tank, when being lower than specified liquid level, water pump is not
Starting, avoids dallying.
In the above-mentioned technical solutions, upper cavity 2 is fastened and connected with lower chamber 1 by hasp 23.Industrial high intensity hasp,
Play quick lock in upper and lower cavities closure.
In the above-mentioned technical solutions, it is equipped with sealing ring between upper cavity and lower chamber, plays sealing function.
In conclusion the cleaning equipment of the utility model, part is directly placed in the annular tooling with step, zero
The circle end face of part contacts in annular tooling, and annular tooling is snapped on the annular slot in cleaning equipment sealing space, so
The media such as water, chemical agent, grinding mortar are added in sealing space at the top of sealing space under the action of pressurization afterwards, this
A little media are by aperture or irregularly-shaped hole on part and gap, thus achieve the effect that clean part equilibrium by pressure,
The pressure of the cleansing medium of application can be become free controllable state by adjustment relief valve, pass through the use of the invention, Ji Nengbao
Uniform force when demonstrate,proving Cleaning of Parts, reduction is scrapped, while improving the efficiency of cleaning, and human factor influence is minimized.
Claims (10)
1. a kind of pressurization cleaning equipment, which is characterized in that including upper cavity (2) and lower chamber (1), in which: the lower chamber is set
In on bracket (4), the upper cavity (2) by articulation piece (16) kinge-joint knot together in forming sealing space on lower chamber (1), it is described
Air intake (13) and water inlet (14) are equipped at the top of upper cavity (2), air intake (13) connection connects air inlet pipe (22),
The water inlet (14) connects water inlet pipe (8)；Lower chamber (1) bottom is equipped with venthole；
Annular tooling (10) is equipped in the sealing space, annular tooling (10) inner circumferential, which is equipped with, places circular pieces
(9) ring-shaped step, the annular tooling (10) is horizontal to be snapped on the ring-shaped step card slot (11) on sealing space inner wall；
Collecting tank (3) are equipped with below the lower chamber (1), the collecting tank (3) is set on bracket (4).
2. a kind of pressurization cleaning equipment according to claim 1, which is characterized in that be equipped with and let out at the top of the upper cavity (2)
It presses mouth (15), the pressure relief opening (15) is equipped with relief valve, and the relief valve connects lower chamber (1) bottom by blowdown line (17)
Refluxing opening (19).
3. a kind of pressurization cleaning equipment according to claim 1, which is characterized in that the upper cavity (2) is equipped with pressure
Table (21), the pressure gauge (21) are used to measure the pressure above part (9).
4. a kind of pressurization cleaning equipment according to claim 1, which is characterized in that described water inlet pipe (8) one end connect into
The mouth of a river (14), the other end connect collecting tank (3) bottom water outlet, and the water inlet pipe (8) is equipped with delivery pump (6) and pressure sensing
Device (7).
5. a kind of pressurization cleaning equipment according to claim 1, which is characterized in that collecting tank (3) bottom is equipped with row
Dirty mouth (20).
6. a kind of pressurization cleaning equipment according to claim 1, which is characterized in that the lower chamber (1) is equipped with stroke
It switchs (12).
7. a kind of pressurization cleaning equipment according to claim 1, which is characterized in that lower chamber (1) bottom is equipped with cone
The diversion cavity (5) of shape, the venthole are set to diversion cavity (5) bottom.
8. a kind of pressurization cleaning equipment according to claim 1, which is characterized in that be equipped with branch on the outside of the lower chamber (1)
Strut (18), described support rod (18) one end are articulated on the outside of lower chamber (1), and the other end is equipped with detachable buckle and is connected to epicoele
On the outside of body (2).
9. a kind of pressurization cleaning equipment according to claim 1, which is characterized in that the collecting tank (3) is equipped with liquid level
Detection device (24).
10. a kind of pressurization cleaning equipment according to claim 1, which is characterized in that the upper cavity (2) and lower chamber
(1) it is fastened and connected by hasp (23).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821601113.7U CN208945957U (en) | 2018-09-29 | 2018-09-29 | A kind of pressurization cleaning equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821601113.7U CN208945957U (en) | 2018-09-29 | 2018-09-29 | A kind of pressurization cleaning equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208945957U true CN208945957U (en) | 2019-06-07 |
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ID=66740211
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821601113.7U Active CN208945957U (en) | 2018-09-29 | 2018-09-29 | A kind of pressurization cleaning equipment |
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| Country | Link |
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| CN (1) | CN208945957U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108972361A (en) * | 2018-09-29 | 2018-12-11 | 北京亦盛精密半导体有限公司 | A kind of pressurization cleaning equipment |
-
2018
- 2018-09-29 CN CN201821601113.7U patent/CN208945957U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108972361A (en) * | 2018-09-29 | 2018-12-11 | 北京亦盛精密半导体有限公司 | A kind of pressurization cleaning equipment |
| CN108972361B (en) * | 2018-09-29 | 2024-08-09 | 北京亦盛精密半导体有限公司 | Supercharging cleaning equipment |
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