CN208917296U - 镀膜装置 - Google Patents
镀膜装置 Download PDFInfo
- Publication number
- CN208917296U CN208917296U CN201821276670.6U CN201821276670U CN208917296U CN 208917296 U CN208917296 U CN 208917296U CN 201821276670 U CN201821276670 U CN 201821276670U CN 208917296 U CN208917296 U CN 208917296U
- Authority
- CN
- China
- Prior art keywords
- interrupter
- sensor
- position sensor
- support plate
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Coating Apparatus (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201821276670.6U CN208917296U (zh) | 2018-08-08 | 2018-08-08 | 镀膜装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201821276670.6U CN208917296U (zh) | 2018-08-08 | 2018-08-08 | 镀膜装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN208917296U true CN208917296U (zh) | 2019-05-31 |
Family
ID=66701811
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201821276670.6U Active CN208917296U (zh) | 2018-08-08 | 2018-08-08 | 镀膜装置 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN208917296U (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113684463A (zh) * | 2021-08-19 | 2021-11-23 | 北京北方华创真空技术有限公司 | 一种平板连续pvd设备及其载板偏压导入装置 |
CN113774364A (zh) * | 2021-01-11 | 2021-12-10 | 宣城睿晖宣晟企业管理中心合伙企业(有限合伙) | 镀膜装置 |
-
2018
- 2018-08-08 CN CN201821276670.6U patent/CN208917296U/zh active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113774364A (zh) * | 2021-01-11 | 2021-12-10 | 宣城睿晖宣晟企业管理中心合伙企业(有限合伙) | 镀膜装置 |
CN113684463A (zh) * | 2021-08-19 | 2021-11-23 | 北京北方华创真空技术有限公司 | 一种平板连续pvd设备及其载板偏压导入装置 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN208917296U (zh) | 镀膜装置 | |
US7750818B2 (en) | System and method for introducing a substrate into a process chamber | |
CN104329509B (zh) | 智能阀及其控制方法 | |
CN102386117B (zh) | 晶圆位置的检测装置 | |
CN109712114A (zh) | 一种应用于拉链缺陷检测的***及其检测方法 | |
CN106157465B (zh) | 一种大额出钞装置的控制方法 | |
CN110361088B (zh) | 变压器机械稳定故障监测诊断*** | |
CN109891207B (zh) | 用于食品工业的、包括泄漏检测装置的工业机器人 | |
CN109975007B (zh) | 阀门检测方法及*** | |
JP2011026013A (ja) | エレベータのドア制御装置 | |
CN108562088A (zh) | 一种基于云平台的共享电冰箱和方法 | |
CN104416256A (zh) | 钎焊充氮智能监控设备 | |
CN101984393B (zh) | 一种提高红外触摸屏精度的方法 | |
CN208589424U (zh) | 防夹装置 | |
CN103752526A (zh) | 灯检机剔瓶验证方法及灯检机 | |
CN103295946B (zh) | 炉管设备的前开口接口机械标准装置 | |
CN108128690B (zh) | 一种可减缓电梯光幕发射功率衰减的控制方法 | |
CN106643855A (zh) | 检测托盘是否搭边的方法 | |
CN102080737A (zh) | 一种带有阀位反馈信号的先导式电磁阀 | |
KR102185340B1 (ko) | 공압 밸브 장치 및 공압 밸브 모니터링 방법 | |
CN114544162A (zh) | 一种数字阀岛故障诊断方法 | |
JP2018077187A (ja) | 容器のリーク検査装置及びリーク検査方法 | |
CN208478300U (zh) | 一种冷却站 | |
WO2006052426A2 (en) | Camera sensor job selection method | |
CN106154878A (zh) | 一种运动机构的检测装置、运动机构及其控制方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder |
Address after: 100176 Beijing Daxing District Beijing economic and Technological Development Zone Rongchang East Street 7 hospital 6 Building 3001 room. Patentee after: Beijing Dingrong Photovoltaic Technology Co.,Ltd. Address before: 100176 Beijing Daxing District Beijing economic and Technological Development Zone Rongchang East Street 7 hospital 6 Building 3001 room. Patentee before: BEIJING APOLLO DING RONG SOLAR TECHNOLOGY Co.,Ltd. |
|
CP01 | Change in the name or title of a patent holder | ||
TR01 | Transfer of patent right |
Effective date of registration: 20210329 Address after: Room 201, Building A, 1 Qianwan Road, Qianhai Shenzhen-Hong Kong Cooperation Zone, Shenzhen, Guangdong Province Patentee after: Shenzhen Zhengyue development and Construction Co.,Ltd. Address before: 100176 Beijing Daxing District Beijing economic and Technological Development Zone Rongchang East Street 7 hospital 6 Building 3001 room. Patentee before: Beijing Dingrong Photovoltaic Technology Co.,Ltd. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20210827 Address after: No.66210, 3rd floor, Pudong Free Trade Zone, Shanghai, China Patentee after: Shanghai zuqiang Energy Co.,Ltd. Address before: Room 201, Building A, 1 Qianwan Road, Qianhai Shenzhen-Hong Kong Cooperation Zone, Shenzhen, Guangdong Province Patentee before: Shenzhen Zhengyue development and Construction Co.,Ltd. |
|
TR01 | Transfer of patent right |