A kind of three-dimensional shape measuring apparatus position detecting device
Technical field
The utility model belongs to machine-building field of measuring technique more particularly to a kind of three-dimensional shape measuring apparatus position detection
Device.
Background technique
With modern precision processing and manufacturing development, required precision and quality requirement to piece surface are increasingly
Height, traditional two-dimensional measurement technology can no longer meet the market demand, and three-dimensional surface measurement can provide the complete of piece surface
Whole information, therefore the three dimensional topography of piece surface is measured be particularly important;Wherein three dimensional topography includes
Contour area, surface defect, surface abrasion and surface roughness etc..
Currently, partial 3-D topography measurement instrument uses laser reflecting measurement principle;I.e. the cantilever of three-dimensional shape measuring apparatus is visited
Needle acts on the surface of product to be measured, and the laser beam that laser issues focuses on the back of cantilever probe by optical system transmitting mirror
Face, and from the backside reflection of cantilever probe into position detector;It is necessary to ensure that flare in-position is detected before measuring
In device, that is, need to be based on position detector in the reflection light that cantilever probe generates.Most of three-dimensional appearances are surveyed
Position detector position on amount instrument is fixed or only fine-tuning whole, cannot achieve being adjusted flexibly for Multi-orientation multi-angle;Only lead to
The one-sided angles and positions for changing laser are crossed to achieve the purpose that flare is located on position detector;It is not easy to user
Adjustment in use.
Utility model content
In order to overcome above-mentioned the deficiencies in the prior art, the utility model provides a kind of three-dimensional shape measuring apparatus position
Detection device;Structure is simple and achievable position detector Multi-orientation multi-angle is adjusted flexibly.
A kind of in order to solve the above technical problems, the technical scheme adopted by the utility model is: three-dimensional shape measuring apparatus position
Detection device is set, the position detecting device includes position detector, further includes that connecting plate, angle adjustment platform and manual two dimension are adjusted
Whole;
The angle adjustment platform is rotatably arranged on the connecting plate, is provided with position inspection on the angle adjustment platform
Device supporting plate is surveyed, the angle adjustment platform is used to adjust the angle of the position detector supporting plate;
The manual two-dimension adjustment platform is set to the side of the position detector supporting plate, and the position detector setting exists
On the driving part of the manual two-dimension adjustment platform, the manual two-dimension adjustment platform is used to adjust the position of the position detector
It sets.
Preferably, the angle adjusts the adjustment block that platform includes ontology and connect with the ontology;The ontology is disc-shaped
Structure is provided with handle on the ontology, and an end face of the ontology is provided with the rotation for being rotatablely connected with the connecting plate
Shaft;The adjustment block be equipped with arcuate guide hole, a holding screw one end be pierced by the arcuate guide hole and with the connection
Plate is threadedly coupled, and the center of circle in the arcuate guide hole is overlapped with the center of the rotary shaft.
Preferably, the position detector supporting plate is L-shaped, the bottom of the position detector supporting plate be equipped with for it is described
Angle adjusts the first mounting hole and the second mounting hole of platform connection, wherein second mounting hole is waist-shaped hole, the position inspection
The side of device supporting plate is surveyed equipped with the third mounting hole for connecting with the manual two-dimension adjustment platform.
Preferably, the manual two-dimension adjustment platform includes the first slide unit module and the second slide unit module, first slide unit
Module and the second slide unit module are for making the relatively described position detector supporting plate of the position detector make two-dimensional adjustment
It is mobile.
Preferably, the first slide unit module and the second slide unit module are dovetail slide unit structure;The dovetail is sliding
Platform structure includes mutually matched dovetail slide block and dovetail guide, and the end of the dovetail guide is equipped with fixing seat, the fixation
Seat is equipped with the adjusting screw for adjusting sliding stroke between the dovetail slide block and the dovetail guide, the adjusting screw
It is threadedly engaged with the dovetail slide block;
The dovetail guide is equipped with positioning plate, and the positioning plate is equipped with waist-shaped hole, the extending direction of the waist-shaped hole
It is consistent with the glide direction of the dovetail slide block, one end of a fastening screw pass through the waist-shaped hole and with the dovetail slide block spiral shell
Line connection;
The dovetail guide of the first slide unit module is fixedly connected with the position detector supporting plate, and described second is sliding
The dovetail guide of platform module is fixedly connected with the dovetail slide block of the first slide unit module, the second slide unit module
The dovetail slide block be fixedly connected with the position detector.
By using above-mentioned technical proposal, the beneficial effect that the utility model obtains is:
The three-dimensional shape measuring apparatus position detecting device of the utility model mainly adjusts platform and manual two-dimension adjustment by angle
Platform is constituted, and utilizes the angle for the angle adjustment platform adjustment position detector supporting plate being rotatably installed on connecting plate, Indirect method
The angle of position detector;By the manual two-dimension adjustment platform on position detector supporting plate, examine position detector relative position
It surveys device supporting plate and makees two-dimensional adjustment movement, complete position adjustment.
To sum up, the utility model structure is simple and adjusts platform and manual two-dimension adjustment platform completion position detection using angle
Device Multi-orientation multi-angle is adjusted flexibly;With ensure using when the flare that generates be located on position detector;Convenient for subsequent
The development of measuring three-dimensional morphology.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model embodiment;
Fig. 2 is the decomposition texture schematic diagram of Fig. 1;
Fig. 3 is the structural schematic diagram of angle adjustment platform in Fig. 2;
Fig. 4 is the structural schematic diagram of manual two-dimension adjustment platform in Fig. 2;
Fig. 5 is the general assembly drawing of the utility model embodiment and generating device of laser;
Fig. 6 is the structural schematic diagram using the three-dimensional shape measuring apparatus of the utility model embodiment;
In figure: a- optical platform, b-XY linear motion device, c-Z axis lifting device, d- sample stage, 1- position detection dress
It sets, 11- connecting plate, 12- angle adjustment platform, 121- ontology, 122- adjustment block, 123- handle, 124- rotary shaft, 125- arc is led
Xiang Kong, 126- holding screw, 13- position detector supporting plate, the first mounting hole of 131-, the second mounting hole of 132-, 133- third peace
Fill hole, the manual two-dimension adjustment platform of 14-, 141- the first slide unit module, 142- the second slide unit module, 143- dovetail slide block, 144- swallow
Tail guide rail, 145- fixing seat, 146- adjusting screw, 147- positioning plate, 148- waist-shaped hole, 149- fastening screw, 150- dovetail are sliding
Block, 151- dovetail guide, 15- position detector, 2- fixed plate, 3- probe unit, 4- generating device of laser.
Specific embodiment
To keep the above objects, features, and advantages of the utility model more obvious and easy to understand, with reference to the accompanying drawing to this
The embodiment of utility model is described in detail.
Common shown as shown in Figure 1 to Figure 4, wherein position detecting device 1 includes position detector 15, connecting plate 11, angle tune
Whole 12 and manual two-dimension adjustment platform 14;Angle adjustment platform 12 is rotatably arranged on connecting plate 11, and angle adjusts on platform 12
It is provided with position detector supporting plate 13, angle adjustment platform 12 is used to adjust the angle of position detector supporting plate 13, Indirect method position
Set the angle of detector 15.Manual two-dimension adjustment platform 14 is set to the side of position detector supporting plate 13, and position detector 15 is set
It sets on the driving part of manual two-dimension adjustment platform 14, manual two-dimension adjustment platform 14 is used to adjust the position of position detector 15.
In the present embodiment, angle adjustment platform 12 includes ontology 121 and the adjustment block 122 connecting with ontology 121;Ontology 121
Disc-shaped structure, handle 123 is provided on ontology 121, and an end face of ontology 121 is provided with for being rotatablely connected with connecting plate 11
Rotary shaft 124;Adjustment block 122 is equipped with arcuate guide hole 125, and 126 one end of a holding screw is pierced by arcuate guide hole 125 simultaneously
It is threadedly coupled with connecting plate 11, the center of circle in arcuate guide hole 125 is overlapped with the center of rotary shaft 124.Holding screw 126 is loosened,
Control handle 123, ontology 121 are rotated around the central axis of rotary shaft 124, while arcuate guide hole 125 and holding screw 126 are sent out
Raw relative motion, then fastens holding screw 126, completes the adjustment of angle.
In the present embodiment, position detector supporting plate 13 is L-shaped, the bottom of position detector supporting plate 13 set there are two for
Angle adjusts the first mounting hole 131 and the second mounting hole 132 that the ontology 121 of platform 12 connects, wherein the second mounting hole 132 is waist
Type hole, the side of position detector supporting plate 13 are equipped with the third mounting hole 133 for connecting with manual two-dimension adjustment platform 14.
In the present embodiment, manual two-dimension adjustment platform 14 include the first slide unit module 141 and the second slide unit module 142, first
Slide unit module 141 and the second slide unit module 142 are for making 15 relative position detector supporting plate 13 of position detector make two-dimensional tune
Whole movement.
Wherein: the first slide unit module 141 and the second slide unit module 142 are dovetail slide unit structure;Below with the second slide unit
Dovetail slide unit structure is described in detail for module 5242.Second slide unit module 142 includes mutually matched dovetail slide block
143 and dovetail guide 144, the end of dovetail guide 144 is equipped with fixing seat 145, rotates and is provided with for adjusting in fixing seat 145
The adjusting screw 146 of sliding stroke between dovetail slide block 143 and dovetail guide 144, adjusting screw 146 and 143 spiral shell of dovetail slide block
Line cooperation;The cavity for accommodating adjusting screw 146 is equipped with inside dovetail guide 144, adjusting screw 146 stretches out the one of fixing seat 145
The knob that end is provided with convenient for operation;The bottom of dovetail slide block 143 is equipped with interconnecting piece in the present embodiment, and adjusting screw 146 is practical
It is to be threadedly engaged to connect with interconnecting piece.
One side of dovetail guide 144 is equipped with positioning plate 147, and positioning plate 147 is equipped with waist-shaped hole 148, waist-shaped hole 148
Extending direction is consistent with the glide direction of dovetail slide block 143, and one end of a fastening screw 149 passes through waist-shaped hole 148 and and dovetail
Sliding block 143 is threadedly coupled.
The dovetail guide 151 of first slide unit module 141 is fixedly connected with position detector supporting plate 13, the second slide unit module
142 dovetail guide 144 is fixedly connected with the dovetail slide block 150 of the first slide unit module 141, the dovetail of the second slide unit module 142
Sliding block 143(is driving part mentioned above) it is fixedly connected with position detector 15.
As Fig. 5 and Fig. 6 jointly shown in, using the three-dimensional shape measuring apparatus of the present embodiment position detecting device 1;
Three-dimensional shape measuring apparatus is mainly by optical platform a, XY linear motion device b, Z axis lifting device c, sample stage d, position
This several part of detection device 1, fixed plate 2, probe unit 3 and generating device of laser 4 are set to constitute.
Wherein: XY linear motion device b and Z axis lifting device c are set on optical platform a;Sample stage d setting is straight in XY
On line telecontrol equipment b power output part, XY linear motion device b is for driving sample stage d to move in a straight line in X/Y plane;
Fixed plate 2 is arranged on Z axis lifting device c power output part, and Z axis lifting device c is for driving fixed plate 2 to move up and down.
Position detecting device 1, probe unit 3 and generating device of laser 4 are installed in fixed plate 2;Adjust angle adjustment
Platform 12 and manual two-dimension adjustment platform 14 focus on the laser that laser issues in generating device of laser 4 in probe unit 3 and detect
The back side of element, and on from the backside reflection of detecting element to the position detector 15 of position detecting device 1, i.e., position is examined at this time
Device 15 is surveyed to be based in the reflection light of detecting element generation.
To sum up, the utility model structure is simple and adjusts platform 12 and manual two-dimension adjustment platform 14 completion position using angle
15 Multi-orientation multi-angle of detector is adjusted flexibly;With ensure using when the flare that generates be located on position detector 15;
Convenient for the development of subsequent measuring three-dimensional morphology.
The specific embodiments of the present invention are described in detail above with reference to the accompanying drawings, but the utility model is not
Be limited to above embodiment, technical field those of ordinary skill within the scope of knowledge, can also not depart from
Various changes can be made under the premise of the utility model aims.