CN208835026U - A kind of novel wafer slider - Google Patents
A kind of novel wafer slider Download PDFInfo
- Publication number
- CN208835026U CN208835026U CN201821771773.XU CN201821771773U CN208835026U CN 208835026 U CN208835026 U CN 208835026U CN 201821771773 U CN201821771773 U CN 201821771773U CN 208835026 U CN208835026 U CN 208835026U
- Authority
- CN
- China
- Prior art keywords
- column
- pull rod
- push jack
- pin shaft
- hole
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The utility model discloses a kind of novel wafer sliders, including pedestal, pull rod supporting element, several push jack units, column, column base, pull rod, handle and pin shaft, pull rod supporting element is fixed below base plate, and the horizontal through hole on left and right directions is offered on pull rod supporting element, several push jack units connect with column and can rotate around the column, the column lower end is fixedly connected with column base, and pin shaft receiving hole is offered thereon, pull rod is fixedly connected with the left side level of column base, and pass through the horizontal through hole on pull rod supporting element, handle is fixedly connected on pull rod left end, pin shaft hole is equipped on several push jack units, each push jack unit can independently be rotated around column to push jack side, pin shaft hole is passed through by pin shaft, it injects again fixed in the pin shaft receiving hole.It solves and is unable to safety non-pollution to specified chip several weeks turn.
Description
Technical field
The utility model relates to chip auxiliary tool field more particularly to a kind of novel wafer sliders.
Background technique
Chip is very widely used in production and living, often has enough to meet the need to chip, in order to avoid reducing chip week
Turn caused by scratch and particle contamination it is bad, often need to be had enough to meet the need by tool, currently, the tool taken is chip push jack
Device, but it can only disposably have enough to meet the need whole box chip, it is not possible to the chip that a part in a box needs to choose is had enough to meet the need, is usually needed
It to use vacuum WAND to carry out operation, but will cause chip scuffing in operation, wafer contamination etc. is bad, and the reality of slider
Border effect is not played.
Utility model content
In view of prior art Shortcomings, the utility model provides a kind of novel directional type and chooses piece device, to solve existing skill
Art cannot according to demand facilitate the specified chip number in a box in turnover wafer process and have enough to meet the need, and have enough to meet the need
The bad technical problem such as scuffing, particle contamination is also easy to produce in operation process.
To solve the above problems, the utility model adopts the following technical scheme: a kind of novel wafer slider, including base
Seat, pull rod supporting element, several push jack units, column, column base, pull rod, handle and pin shaft, the pull rod supporting element are fixedly connected on
The horizontal through hole on left and right directions, several push jacks are offered on the lower surface of base plate, and on the pull rod supporting element
Unit connect with the column and can rotate around the column, and the column lower end is fixedly connected with the column base, described
Pin shaft receiving hole is offered above column base, the pull rod is fixedly connected with the left side level of the column base, and is passed through described
Horizontal through hole on pull rod supporting element, the handle are fixedly connected on the pull rod left end, are all provided on several push jack units
There is pin shaft hole, each push jack unit can independently be rotated around the column to push jack side, be passed through by the pin shaft described
Pin shaft hole, then inject in the pin shaft receiving hole, the fixed push jack unit.
Further, the push jack unit is fixed on the column by bearing, and can be rotated horizontally around column.
Further, the upper surface of the handle and pull rod left end coupling part is attached on the lower surface of the pedestal
Sliding, and remain the pull rod and pushed away by parallel drawing.
Further, recess is offered in the middle part of the right end of the base.
Further, several push jack units are 25, and each push jack unit can be independently horizontal around the column
Rotation.
Compared with prior art, the utility model has the beneficial effect that
The utility model is simple and reasonable, is easy to use, by that can may be selected to release around the push jack unit that column rotates
Specified chip, not only increases working efficiency, also avoids the scuffing and pollution of chip.
Detailed description of the invention
Attached drawing is only used for showing the purpose of specific embodiment, and is not considered as limitations of the present invention.
FIG. 1 is a schematic structural view of the utility model.
Fig. 2 is Fig. 1 structure bottom view.
Fig. 3 is push jack cellular construction schematic diagram.
In figure: 1- pedestal, 101- recess, 2- pull rod supporting element, 201- horizontal through hole, several push jack units of 3-, 301- pin
Axis hole, 4- column, 5- column base, 501- pin shaft receiving hole, 6- pull rod, 7- handle, 8- pin shaft.
Specific embodiment
Further explanation is made to the utility model with reference to the accompanying drawing, the utility model embodiment includes but is not limited to
The following example.
As shown in Figure 1, Figure 2 and Figure 3, the utility model provides a kind of novel wafer slider, including pedestal 1, pull rod
Supporting element 2, several push jack units 3, column 4, column base 5, pull rod 6, handle 7 and pin shaft 8, pull rod supporting element 2 are fixedly connected on base
On the lower surface of 1 plate of seat, connection is located proximate to 1 right end of pedestal, offers on the pull rod supporting element 2 being fixed on pedestal 1
Horizontal through hole 201 on left and right directions, i.e., along 1 longitudinal direction of pedestal, several push jack units 3 connect with column 4 and can be around
Column 4 rotates, and each push jack unit 3 independently can do 360 degree of horizontal rotations around column 4, it is preferable that each push jack unit 3 passes through
Bearing is fixed on column 4 and can rotate horizontally around column 4 to push jack side, and 4 lower end of column is fixedly connected with column base 5, vertical
Pin shaft receiving hole 501 is offered on 4 left side column base of column, 5 face, pull rod 6 is fixedly connected with the left side level of column base 5, and is passed through
Horizontal through hole 201 on pull rod supporting element 2, pull rod 6 horizontal sliding, handle 7 can be fixedly connected on drawing in horizontal through hole 201
6 left end of bar, pin shaft hole 301 is equipped in each 3 same area of push jack unit, and each push jack unit 3 can independently be revolved around column 4
Push jack side is gone to, pin shaft hole 301 is passed through by pin shaft 8, then inject in pin shaft receiving hole 501, fixed push jack unit 3 guarantees to push away
Blade unit 3 can be directed at corresponding particular wafer or specified chip.
In order to guarantee that the parallel both ends of 6 all-the-time stable of pull rod are not stuck up, horizontal through hole 201 will have certain length to increase and pull rod 6
Contact area, while the upper surface of handle 7 and 6 left end coupling part of pull rod is attached on the lower surface of pedestal 1 and slides, and makes pull rod
6 remain and are pushed away by parallel drawing.Guarantee that push jack unit push jack 3 has enough to meet the need accurate.
In order to shorten the length of push jack unit 3, recess 101 is offered in the middle part of 1 right end of pedestal, has push jack list to facilitate
The column 4 of member 3 is able to enter.
Above-mentioned several push jack units 3 are made of several push jack units 3, they are i.e. independent and uniformly, preferably several to push away
Blade unit 3 is 25, and it can be arc can also be other shapes includes selection that push jack unit 3, which pushes away chip end, it is therefore an objective to not hurt crystalline substance
Piece.
In use, when needing to choose specific Partial wafer into another wafer case from whole box chip, as long as will
Push jack side i.e. push jack side, which is gone to, with the push jack unit 3 for needing to choose particular wafer and being in same level only chooses spy with needs
Determine chip and be in the corresponding push jack unit 3 of same level, and pin shaft hole 301 is passed through by pin shaft 8 and injects pin shaft receiving hole
It is fixed in 501, then pull pull rod 6 to drive push jack unit 3 by handle 7, push jack unit 3 will be by corresponding specific crystalline substance
Piece is gone in another wafer case in week from a wafer case, equally, is gone to separately from a box week when needing to have enough to meet the need whole box chip
When one box, only 25 push jack units 3 need to be gone to push jack side, pin shaft hole 301 is passed through by pin shaft 8 and injects pin shaft receiving hole 501
Middle fixation, then carry out above-mentioned same operation.
The preferable specific embodiment of the above, only the utility model, but the protection scope of the utility model is not
It is confined to this, anyone skilled in the art within the technical scope disclosed by the utility model, can readily occur in
Change or replacement, should be covered within the scope of the utility model.
Claims (5)
1. a kind of novel wafer slider, it is characterised in that: including pedestal, pull rod supporting element, several push jack units, column, column
Seat, pull rod, handle and pin shaft, the pull rod supporting element are fixedly connected on the lower surface of base plate, and the pull rod supports
The horizontal through hole on left and right directions is offered on part, several push jack units connect with the column and can be around described vertical
Column rotation, the column lower end is fixedly connected with the column base, offers pin shaft receiving hole above the column base, the pull rod with
The left side level of the column base is fixedly connected, and passes through the horizontal through hole on the pull rod supporting element, and the handle is fixed
Be connected to the pull rod left end, be equipped with pin shaft hole on several push jack units, each push jack unit can independently around
The column is rotated to push jack side, passes through the pin shaft hole by the pin shaft, then inject in the pin shaft receiving hole, fixed institute
State push jack unit.
2. a kind of novel wafer slider according to claim 1, it is characterised in that: the push jack unit is solid by bearing
It is scheduled on the column, and can be rotated horizontally around column.
3. a kind of novel wafer slider according to claim 1, it is characterised in that: the handle and the pull rod left end
The upper surface of coupling part is attached on the lower surface of the pedestal and slides, and remains the pull rod and pushed away by parallel drawing.
4. a kind of novel wafer slider according to claim 1, it is characterised in that: offered in the middle part of the right end of the base
Recess.
5. according to claim 1 to any a kind of novel wafer slider in 4, it is characterised in that: several push jacks
Unit is 25, and each push jack unit can be rotated horizontally independently around the column.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821771773.XU CN208835026U (en) | 2018-10-30 | 2018-10-30 | A kind of novel wafer slider |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821771773.XU CN208835026U (en) | 2018-10-30 | 2018-10-30 | A kind of novel wafer slider |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208835026U true CN208835026U (en) | 2019-05-07 |
Family
ID=66319795
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821771773.XU Active CN208835026U (en) | 2018-10-30 | 2018-10-30 | A kind of novel wafer slider |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208835026U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112331602A (en) * | 2020-10-23 | 2021-02-05 | 北京北方华创微电子装备有限公司 | Semiconductor processing equipment and sheet pushing device |
-
2018
- 2018-10-30 CN CN201821771773.XU patent/CN208835026U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112331602A (en) * | 2020-10-23 | 2021-02-05 | 北京北方华创微电子装备有限公司 | Semiconductor processing equipment and sheet pushing device |
| CN112331602B (en) * | 2020-10-23 | 2024-03-26 | 北京北方华创微电子装备有限公司 | Semiconductor process equipment and pushing piece device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20221229 Address after: No. 98, Yangshan Road, Xuzhou Economic and Technological Development Zone, Xuzhou, Jiangsu 221000 Patentee after: Xuzhou Meixing Photoelectric Technology Co.,Ltd. Address before: No. 98, Yangshan Road, Xuzhou Economic Development Zone, Jiangsu Province, 221000 Patentee before: XUZHOU GAPSS OE TECHNOLOGY Co.,Ltd. |
|
| TR01 | Transfer of patent right |