CN208759292U - A kind of reel-to-reel high-efficiency and continuous chemistry mechanical polisher - Google Patents
A kind of reel-to-reel high-efficiency and continuous chemistry mechanical polisher Download PDFInfo
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- CN208759292U CN208759292U CN201821565085.8U CN201821565085U CN208759292U CN 208759292 U CN208759292 U CN 208759292U CN 201821565085 U CN201821565085 U CN 201821565085U CN 208759292 U CN208759292 U CN 208759292U
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Abstract
The utility model discloses a kind of reel-to-reel high-efficiency and continuous chemistry mechanical polisher, including six polishing roller arrangements, first level speed regulation detection device and the second horizontal speed regulation detection device are respectively arranged with before and after six polishing roller arrangements, it is provided with unwinding device on the outside of the first level speed regulation detection device, is provided with wrap-up on the outside of the described second horizontal speed regulation detection device；Clearing and drying device is provided between described second horizontal speed regulation detection device and the polishing roller arrangement；Polishing roll is installed, the polishing roll side is provided with spray equipment, and the polishing roll bottom of device is provided with waste liquid collecting box on the polishing roller arrangement.Reel-to-reel high-efficiency and continuous chemistry mechanical polisher provided by the utility model shows that the Roll-to-Roll of substrate is efficiently produced, it can be achieved that the manufacture with flexible display forms seamless interfacing for ultrathin flexible, improves production efficiency.
Description
Technical field
The utility model relates to microelectronics, photoelectron, flexible display substrate manufacture in Ultraprecision Machining field,
More particularly to a kind of reel-to-reel high-efficiency and continuous chemistry mechanical polisher.
Background technique
Microelectronics, photoelectron, IC manufacturing are the bases for integrating national interests, the wisdom of humanity and newest science and technology
Property and strategic industry, be measure a statehood and overall national strength one of the important signs that, be the world today competition it is most sharp
Strong, the most rapid field of development, only grasp advanced microelectronics and optoelectronic fabrication techniques just and can efficiently control cost and
It expands the scale of production, it could the survival and development in fierce market competition.Microelectronics and the advanced manufacture of photoelectron are as national
Economic basic industry, guiding industry, pillar industry and strategic industry, to Chinese national economy, national security, people's lives
Increasingly important role is being played with social progress.
With science and technology progress and continuous development, flexible display technologies just gradually improve people's lives with exchange,
And significantly promote information visualization.In recent years, the advantage of Flexible Displays becomes increasingly conspicuous, flexible electronic with as FPD
LCD, OLED show with plasma and compare that with ultra-thin, light weight, durable, storage capacity is big, design is free, and deflection can be received
The performances such as volume and impact resistance, are widely used in mobile phone, personal digital assistant PDA, laptop, trade mark, secure identity
File, e-book, electronic poster, fascia, RF identifying system, sensor, environment show, medical treatment, general lighting, machine
People feels the industry such as skin, civilian and military industry, and flexible display can also allow display screen to be easier to become ornament materials, benefit
Engineering design is made to be not limited to planarize the display pattern, it can be achieved that diversification external form with the bendability characteristics of Flexible Displays.
The huge market prospects of Flexible Displays, make the research institution of many countries and regions and production firm put into flexibility
In the research and application of display technology, and achieve significant achievement.Currently, be also in i.e. will be before industrialization for flexible electronic
At night, still there is also many technical bottlenecks, and the stage of research and exploration is also in for material, technique, design etc..Flexibility is aobvious
The technology of showing is to integrate large scale integrated circuit, precision processing technology, photoelectron technology new high-tech industry, is related to partly leading
Numerous high-tech area such as body, optics, microelectronics, chemical material, precision machinery and processing.
In flexible display device, flexible substrate is the basis that flexibility of research and development is shown.Flat-panel monitor is all with glass base
Plate is substrate production, and flexible display be then using flexible material as substrate, to the surface quality requirements of flexible substrate with
Glass substrate is the same, and surface smoothness and thickness requirement are very strict, the surface quality and machining accuracy of Yao Shixian flexible substrate,
Most common method is surface polishing technique.
Chemical Mechanical Polishing Technique is considered as that can take into account the best technique of surface roughness and surface smoothness requirement
Method, it has also become hard brittle crystal material, metal material and other materials realize the most practical of the not damaged processing of surface ultra-smooth
One of technology, and be widely used in the photoelectrons such as super large-scale integration, semiconductor lighting, optical glass, FPD,
The fields such as microelectronics, aerospace and mechanical engineering.By analysis with research, chemical Mechanical Polishing Technique may be most suitable
And be entirely capable of Roll-to-Roll (reel-to-reel) efficient Ultra-precision Turning for large-size ultra-thin Flexible Displays substrate surface
In, to obtain the undamaged finished surface of ultra-smooth.
Another key factor of exploitation flexible display is that its technique may be by Sheet-fedbatch
Processing (individual batch production) is converted into Roll-to-Rollmanufacturing (reel-to-reel production), and efficiency is significantly
It improves, it is meant that the cost of display may substantially reduce.
Flexible Displays substrate with super-smooth surface has inestimable application prospect.But currently, do not have also in the market
There is Roll-to-Roll high-efficiency soft to show the Ultraprecision Machining of substrate, there are no suitable Roll-to-Roll efficiently to produce
Specific purpose tool, the equipment and technology of Flexible Displays substrate.
Utility model content
It is above-mentioned existing to solve the purpose of the utility model is to provide a kind of reel-to-reel high-efficiency and continuous chemistry mechanical polisher
Technology there are the problem of, for ultrathin flexible show substrate Roll-to-Roll efficiently produce, it can be achieved that and flexible display
Manufacture form seamless interfacing, improve production efficiency.
To achieve the above object, the utility model provides following scheme:
The utility model provides a kind of reel-to-reel high-efficiency and continuous chemistry mechanical polisher, including six polishing roller arrangements, and six
First level speed regulation detection device and the second horizontal speed regulation detection device are respectively arranged with before and after a polishing roller arrangement, it is described
It is provided with unwinding device on the outside of first level speed regulation detection device, is provided with winding on the outside of the described second horizontal speed regulation detection device
Device；Clearing and drying device is provided between described second horizontal speed regulation detection device and the polishing roller arrangement；The polishing
Polishing roll is installed, the polishing roll side is provided with spray equipment, and the polishing roll bottom of device is provided with useless on roller arrangement
Liquid collecting box.
Optionally, the unwinding device includes unreeling rack and let off roll, and the let off roll both ends are connected separately with connection
Axis, the connecting shaft are set to described unreel in rack by deep groove ball bearing and bearing block；Outside one of them described connecting shaft
Side is connected with brake disc, and arrester shell is arranged with outside the brake disc；Described unreel is equipped with collecting box in rack, the collection
Case is located at below the let off roll.
Optionally, the wrap-up includes winding frame and wind-up roll, and described wind-up roll one end is arranged by connecting shaft
In in the winding frame, the other end is set in the winding frame by transmission shaft, and the end part of driving shaft, which is connected with, to be subtracted
Speed motor.
Optionally, the first level speed regulation detection device includes speed regulation rack, is equipped with level in the speed regulation rack
Regulating roller；The speed regulation rack top is equipped with sensor rack, and sensor rack lower end is equipped with sensor probe, institute
Sensor probe is stated to be located above the Level tune roller；Described second horizontal speed regulation detection device and first level speed regulation detect
Apparatus structure is identical.
Optionally, the polishing roll includes symmetrically arranged upper polishing roll and lower polishing roll；The polishing roller arrangement includes
Polishing roll quick assembling/disassembling mechanism, the polishing roll quick assembling/disassembling mechanism include polishing roller frame, and the polishing roller frame passes through throwing
Smooth roll support device is connect with the upper polishing roll and the lower polishing roll respectively；Pass through connection on the outside of the polishing roll support device
Axis device is connected with shaft, is connected with variable-frequency motor on the outside of the shaft；The polishing roll support device includes being set to the throwing
Polishing roll bearing seat in smooth roll rack.
Optionally, the polishing roller arrangement further includes polish pressure adjustment mechanism, and the polish pressure adjustment mechanism includes
The guide rail being set on the polishing roller frame, the upper polishing roll are set to described by the shaft and polishing roll bearing seat
On guide rail；Screw rod is equipped on the polishing roller frame, the screw rod lower end is connected with connecting rod, the company by bindiny mechanism
Extension bar is set in the polishing roll bearing seat, and the polishing roll bearing seat lower end is set to the polishing roll by studdle
In rack.
Optionally, the compressed spring connecting with the polishing roll bearing seat bottom is provided on the studdle, it is described
Polishing roll bearing seat is connect with the connecting rod by pressure sensor；The studdle bottom by support ball with it is described
Polish roller frame connection.
Optionally, the polishing roller surface is provided with polishing pad.
Optionally, there are six institutes for setting between the first level speed regulation detection device and the second horizontal speed regulation detection device
State polishing roller arrangement.
The utility model achieves following technical effect compared with the existing technology:
Reel-to-reel high-efficiency and continuous chemistry mechanical polisher provided by the utility model can overcome existing traditional machine well
There is easy fold in tool polishing technology when polishing to ultrathin flexible substrate material, the uniformity is difficult to control, ultrathin flexible substrate
The size of material is limited by rotary table size, can only be individual batch production, clamping difficulty, to ultrathin flexible substrate material
Material carries out sized divisions, the problems such as cannot being polished in rolls, the polishing machine do not need to show ultrathin flexible substrate material into
Row segmentation, can directly carry out continuous polishing, can mutually integrate with polishing efficiency height with subsequent conditioning circuit processing procedure in rolls；Overcome individual batch
The low problem of production efficiency, the length of ultrathin flexible substrate material are unrestricted；It is suitble to rectangle ultrathin flexible substrate material
The polishing of entire volume, it is consistent with current display shape, and can realize that single side also realizes twin polishing, entire volume handling letter
It is single, the lay day of workpiece is shortened, polishing efficiency is improved；Ultrathin flexible can be achieved and show that substrate rough polishing and essence are thrown, once
Reach the final demand of surface quality, and design has wiper mechanism, can carry out surface clean after a polish.Entire volume polishing
Afterwards, it can directly be put in storage, into next processing procedure.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Needed in attached drawing be briefly described, it should be apparent that, the accompanying drawings in the following description is only the utility model
Some embodiments for those of ordinary skill in the art without any creative labor, can also basis
These attached drawings obtain other attached drawings.
Fig. 1 is the utility model reel-to-reel high-efficiency and continuous chemistry mechanical polisher schematic diagram；
Fig. 2 is the utility model reel-to-reel high-efficiency and continuous chemistry mechanical polisher side view；
Fig. 3 is the unwinding device structural schematic diagram of the utility model reel-to-reel high-efficiency and continuous chemistry mechanical polisher；
Fig. 4 is the wrap-up structural schematic diagram of the utility model reel-to-reel high-efficiency and continuous chemistry mechanical polisher；
Fig. 5 is the polish pressure adjustment mechanism schematic diagram of the utility model reel-to-reel high-efficiency and continuous chemistry mechanical polisher；
Fig. 6 is the horizontal speed regulation detection device schematic diagram of the utility model reel-to-reel high-efficiency and continuous chemistry mechanical polisher；
Fig. 7 is the polishing roll quick despatch structural representation of the utility model reel-to-reel high-efficiency and continuous chemistry mechanical polisher
Figure；
Wherein, 1 it is polishing roller arrangement, 2 be first level speed regulation detection device, 3 is the second horizontal speed regulation detection device, 4
It is clearing and drying device for unwinding device, 5 wrap-ups, 6,7 be polishing roll, 8 be spray equipment, 9 be waste liquid collecting box, 10 is
Unreel rack, 11 be let off roll, 12 be connecting shaft, 13 be deep groove ball bearing, 14 be bearing block, 15 be brake disc, 16 be braking
Device shell, 17 be collecting box, 18 be sealing ring, 19 be spacer ring, 20 be gland, 21 be adjusting pad, 22 be winding frame, 23 be winding
Roller, 24 be decelerating motor, 25 be speed regulation rack, 26 be Level tune roller, 27 be sensor rack, 28 be sensor probe, 29
It is polishing roll support device for polishing roller frame, 30,31 be variable-frequency motor, 32 be polishing roll bearing seat, 33 be guide rail, 34 is spiral shell
Bar, 35 be connecting rod, 36 be compressed spring, 37 be pressure sensor, 38 be support ball, 39 be polishing pad, 40 be shield, 41
It is polish pressure display for sealing plate, 42,43 be locating piece, 44 is studdle.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
It is above-mentioned existing to solve the purpose of the utility model is to provide a kind of reel-to-reel high-efficiency and continuous chemistry mechanical polisher
Technology there are the problem of, for ultrathin flexible show substrate Roll-to-Roll efficiently produce, it can be achieved that and flexible display
Manufacture form seamless interfacing, improve production efficiency.
To keep the above objects, features, and advantages of the utility model more obvious and easy to understand, with reference to the accompanying drawing and have
Body embodiment is described in further detail the utility model.
Reel-to-reel high-efficiency and continuous chemistry mechanical polisher provided by the utility model, as shown in Fig. 1-Fig. 7, including polishing roll
Device 1, polishing 1 both ends of roller arrangement are respectively arranged with first level speed regulation detection device 2 and the second horizontal speed regulation detection device 3,
It is provided with unwinding device 4 on the outside of first level speed regulation detection device 2, is provided with winding on the outside of the second horizontal speed regulation detection device 3
Device 5；Clearing and drying device 6 is provided between second horizontal speed regulation detection device 3 and polishing roller arrangement 1；It polishes on roller arrangement 1
Polishing roll 7 is installed, 7 side of polishing roll is provided with spray equipment 8, and polishing 1 bottom of roller arrangement is provided with waste liquid collecting box 9.
Unwinding device 4 includes unreeling rack 10 and let off roll 11, and 11 both ends of let off roll are connected separately with connecting shaft 12, connection
Axis 12 is set to and is unreeled in rack 10 by deep groove ball bearing 13 and bearing block 14；System is connected on the outside of one of connecting shaft 12
Moving plate 15, brake disc 15 are arranged with arrester shell 16 outside；It unreels and collecting box 17 is installed in rack 10, collecting box 17, which is located at, to be unreeled
11 lower section of roller, specifically as shown in figure 3, further including sealing ring 18；Spacer ring 19；Gland 20；Adjusting pad 21.
Wrap-up 5 includes winding frame 22 and wind-up roll 23, and 23 one end of wind-up roll is set to winder by connecting shaft
On frame 22, the other end is set in winding frame 23 by transmission shaft, and end part of driving shaft is connected with decelerating motor 24.
It includes speed regulation rack 25 that first level, which adjusts the speed detection device 2, adjusts the speed and is equipped with Level tune roller 26 in rack 25；It adjusts
Fast 25 top of rack is equipped with sensor rack 27, and 27 lower end of sensor rack is equipped with sensor probe 28, sensor probe
28 are located at 26 top of Level tune roller；Second horizontal speed regulation detection device 3 is identical as first level speed regulation 2 structure of detection device.
Polishing roll 7 includes symmetrically arranged upper polishing roll and lower polishing roll；Polishing roller arrangement 1 includes polishing roll quick despatch
Mechanism, polishing roll quick assembling/disassembling mechanism include polishing roller frame 29, and polishing roller frame 29 is distinguished by polishing roll support device 30
It is connect with upper polishing roll and lower polishing roll；Shaft is connected with by shaft coupling on the outside of polishing roll support device 30, is connected on the outside of shaft
It is connected to variable-frequency motor 31；Polishing roll support device 30 includes the polishing roll bearing seat 32 being set on polishing roller frame 29.
It is further preferred that polishing roller arrangement 1 further includes polish pressure adjustment mechanism, polish pressure adjustment mechanism includes setting
The guide rail 33 being placed on polishing roller frame 29, upper polishing roll are set on guide rail 33 by shaft and polishing roll bearing seat 32；It throws
Screw rod 34 is equipped in smooth roll rack 29,34 lower end of screw rod is connected with connecting rod 35 by bindiny mechanism, and connecting rod 35 is set to
It polishes in roll bearing seat 32, polishing 32 lower end of roll bearing seat is set on polishing roller frame 29 by studdle 44.This is practical
It is novel to be additionally provided with shield 40, sealing plate 41 and polish pressure display 42, so as to preferably protect the utility model
Internal structure.
It is provided with the compressed spring 36 connecting with polishing 32 bottom of roll bearing seat on studdle 44, polishes roll bearing seat 32
It is connect with connecting rod 35 by pressure sensor 37；44 bottom of studdle is connected by support ball 38 and polishing roller frame 29
It connects.7 surface of polishing roll is provided with polishing pad 39.First level adjusts the speed between detection device 2 and the second horizontal speed regulation detection device 3
There are three polish roller arrangement 1 for setting.
Wind-up roll and shaft connection place are provided with locating piece 43, by a roll of ultrathin flexible band before utility model device polishing
Be put on let off roll, ultrathin flexible material work piece be drawn out to wrap-up, then starts to be chemically-mechanicapolish polished, workpiece from
--- cleaning that half essence is thrown --- essence is thrown --- that let off roll is to wind-up roll, under the driving of front and back driving device, continuously across rough polishing
The continuous high-efficient ultraprecise chemical mechanical polishing of reel-to-reel is realized in process flow；The single side that ultrathin flexible material can be achieved is continuous
Chemically mechanical polishing can also realize two-sided continuous chemical mechanical polishing；First level adjusts the speed detection device 2 and the second horizontal speed regulation
There are three roller arrangement 1 is polished, respectively rough polishing roller arrangement, half essence throws roller arrangement and finishing polish roller for setting between detection device 3
Mechanism, the pressure for polishing each pair of polishing roll and workpiece in roller arrangement can be adjusted according to the needs.
By rough polishing to essence throw after, can to the upper and lower surfaces of workpiece carry out continuous wash, remove workpiece surface waste liquid and
Dirt, when workpiece upper and lower surfaces by cleaning solution cleaning after, and by the compressed air of wind shower device cleaning (it is cold,
Heat) workpiece surface is dried up.
Polishing fluid and cleaning collection device collect polishing fluid and polishing residue extra in polishing.It needs to illustrate
, six polishing roller arrangements of the utility model can be with combination of two at rough polishing --- half essence throw ---, and essence throws process, can also be with
One, two, three is combined into rough polishing --- half essence is thrown --- essence throwing process, can also be combined into three, two, one slightly
Throwing --- half essence is thrown ---, essence throws process etc..The polishing roller arrangement of the utility model can also increase according to the actual situation.
Embodiment one
The stainless superthin section of a roll of wide cut 600mm, thickness 0.1mm, length 100m, the throwing needed are processed in chemically mechanical polishing
Light pressure is 2psi.
(1) the stainless superthin section for taking a roll of wide cut 600mm, thickness 0.1mm, length 200m, is put into and unreels on roller mechanism, uses
Workpiece is directed across horizontal roller and adjusts the speed detection device, throws across 2 groups of polishing rolls of rough polishing process, across half essence by guiding mechanism
Two groups of polishing rolls of process, two groups of polishing rolls that process is thrown across essence after passing through cleaning process, are fixed on wind-up roll, then
Wind-up roll is rotated, workpiece is tensioned.
(2) according to the CMP process parameter of optimization, each polishing roll and workpiece in finishing polish process mechanism are adjusted
Between polish pressure and revolving speed, half finishing polish process mechanism of adjustment in polish pressure between each polishing roll and workpiece and turn
Polish pressure and revolving speed, adjustment winding roll driving apparatus in speed, adjustment rough polishing process mechanism between each polishing roll and workpiece
The revolving speed of motor.
(3) it according to the polishing process parameter of optimization, adjusts the polishing flow quantity in each polishing fluid spray equipment, polish liquid stream
Speed and polishing fluid spray direction.
(4) according to the cleaning process parameter of optimization, cleaning solution flow in each cleaning solution spray equipment, wash liquid stream are adjusted
Speed and cleaning solution spray direction.
(5) technological parameter is drenched according to the wind of optimization, adjusts air quantity, wind speed and the wind direction of hot and cold wind in each wind shower device,
Meet cleaning to require.
(6) it starts polishing machine to be chemically-mechanicapolish polished, after polishing, removes polished band from winding roller mechanism
Material volume, carries out package encapsulation, is transported to next process.
Specific case is applied in the utility model to be expounded the principles of the present invention and embodiment, it is above
The explanation of embodiment is merely used to help understand the method and its core concept of the utility model；Meanwhile for the one of this field
As technical staff, based on the idea of the present invention, there will be changes in the specific implementation manner and application range.To sum up
Described, the content of the present specification should not be construed as a limitation of the present invention.
Claims (9)
1. a kind of reel-to-reel high-efficiency and continuous chemistry mechanical polisher, it is characterised in that: including six polishing roller arrangements, described in six
First level speed regulation detection device and the second horizontal speed regulation detection device, first water are respectively arranged with before and after polishing roller arrangement
It is provided with unwinding device on the outside of Heibei provincial opera speed detector, is provided with wrap-up on the outside of the described second horizontal speed regulation detection device；
Clearing and drying device is provided between described second horizontal speed regulation detection device and the polishing roller arrangement；The polishing roller arrangement
On polishing roll is installed, the polishing roll side is provided with spray equipment, and the polishing roll bottom of device is provided with waste collection
Case.
2. reel-to-reel high-efficiency and continuous chemistry mechanical polisher according to claim 1, it is characterised in that: the unwinding device
Including unreeling rack and let off roll, the let off roll both ends are connected separately with connecting shaft, and the connecting shaft passes through deep groove ball bearing
Described unreel in rack is set to bearing block；Brake disc is connected on the outside of one of them described connecting shaft, outside the brake disc
It is arranged with arrester shell；Described unreel is equipped with collecting box in rack, the collecting box is located at below the let off roll.
3. reel-to-reel high-efficiency and continuous chemistry mechanical polisher according to claim 1, it is characterised in that: the wrap-up
Including winding frame and wind-up roll, described wind-up roll one end is set in the winding frame by connecting shaft, and the other end passes through
Transmission shaft is set in the winding frame, and the end part of driving shaft is connected with decelerating motor.
4. reel-to-reel high-efficiency and continuous chemistry mechanical polisher according to claim 1, it is characterised in that: the first level
Adjusting the speed detection device includes speed regulation rack, is equipped with Level tune roller in the speed regulation rack；The speed regulation rack top installation
There is sensor rack, sensor rack lower end is equipped with sensor probe, and the sensor probe is located at the horizontal tune
It saves above roller；Described second horizontal speed regulation detection device is identical as first level speed regulation structure of the detecting device.
5. reel-to-reel high-efficiency and continuous chemistry mechanical polisher according to claim 1, it is characterised in that: the polishing roll packet
Include symmetrically arranged upper polishing roll and lower polishing roll；The polishing roller arrangement includes polishing roll quick assembling/disassembling mechanism, the polishing
Roller quick assembling/disassembling mechanism include polishing roller frame, the polishing roller frame pass through polishing roll support device respectively with the upper polishing
Roller is connected with the lower polishing roll；Shaft, the shaft outside are connected with by shaft coupling on the outside of the polishing roll support device
It is connected with variable-frequency motor；The polishing roll support device includes the polishing roll bearing seat being set on the polishing roller frame.
6. reel-to-reel high-efficiency and continuous chemistry mechanical polisher according to claim 5, it is characterised in that: the polishing roll dress
Setting further includes polish pressure adjustment mechanism, and the polish pressure adjustment mechanism includes being set to leading on the polishing roller frame
Rail, the upper polishing roll are set on the guide rail by the shaft and polishing roll bearing seat；It is worn on the polishing roller frame
Equipped with screw rod, the screw rod lower end is connected with connecting rod by bindiny mechanism, and the connecting rod is set to the polishing roller bearing
On seat, the polishing roll bearing seat lower end is set on the polishing roller frame by studdle.
7. reel-to-reel high-efficiency and continuous chemistry mechanical polisher according to claim 6, it is characterised in that: the studdle
On be provided with and pass through with the compressed spring that connect of the polishing roll bearing seat bottom, the polishing roll bearing seat with the connecting rod
Pressure sensor connection；The studdle bottom is by supporting ball to connect with the polishing roller frame.
8. reel-to-reel high-efficiency and continuous chemistry mechanical polisher according to claim 1, it is characterised in that: the polishing roll table
Face is provided with polishing pad.
9. reel-to-reel high-efficiency and continuous chemistry mechanical polisher according to claim 1, it is characterised in that: the first level
Adjust the speed the polishing roller arrangement there are six being arranged between detection device and the second horizontal speed regulation detection device.
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| CN201821565085.8U CN208759292U (en) | 2018-09-25 | 2018-09-25 | A kind of reel-to-reel high-efficiency and continuous chemistry mechanical polisher |
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| CN201821565085.8U CN208759292U (en) | 2018-09-25 | 2018-09-25 | A kind of reel-to-reel high-efficiency and continuous chemistry mechanical polisher |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108972305A (en) * | 2018-09-25 | 2018-12-11 | 河南科技学院 | A kind of reel-to-reel high-efficiency and continuous chemistry mechanical polisher |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108972305A (en) * | 2018-09-25 | 2018-12-11 | 河南科技学院 | A kind of reel-to-reel high-efficiency and continuous chemistry mechanical polisher |
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