CN208747644U - A kind of trichlorosilane synthesis exhaust gas pressurization cryogenic system - Google Patents
A kind of trichlorosilane synthesis exhaust gas pressurization cryogenic system Download PDFInfo
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- CN208747644U CN208747644U CN201821431896.9U CN201821431896U CN208747644U CN 208747644 U CN208747644 U CN 208747644U CN 201821431896 U CN201821431896 U CN 201821431896U CN 208747644 U CN208747644 U CN 208747644U
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- exhaust gas
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- silicon powder
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Abstract
The utility model discloses a kind of trichlorosilane synthesis exhaust gas pressurization cryogenic systems, it includes surge tank before exhaust gas, silicon powder filter, compressor, surge tank after exhaust gas, off-gas condenser, exhaust gas deep freezer, accident gas buffer tank, condensate drum, condensate pump and eluting column, pass through the pressurization deep cooling route of design, increase 21.4% chlorosilane yield, silicon powder filter is designed before the compressor, the problem of avoiding the small silicon powder damage compressor in exhaust gas, and regulating valve is set on the outlet gas line of surge tank before exhaust gas, avoid Compressor Inlet Pressure superpressure stop jumping failure caused by exhausted air quantity increases suddenly.Therefore, the utility model can make the exhaust gas chlorosilane content being discharged into exhaust gas eluting column be in reduced levels, reduce chlorosilane consumption, reduce Ca0 consumption, triple effect evaporation steam consumption, outer bed drain purge.
Description
Technical field
The utility model relates to a kind of exhaust treatment systems, and in particular to a kind of trichlorosilane synthesis exhaust gas pressurization deep cooling system
System.
Background technique
Trichlorosilane is the important intermediate of synthesizing organo-silicon, and prepares the primary raw material of polysilicon.Prepare trichlorine hydrogen
The technique of silicon comparative maturity is prepared using metallic silicon power and gas hydrogen chloride, and main flow includes: hydrogen chloride synthesis, trichlorine
The master operations such as the synthesis of hydrogen silicon, trichlorosilane separating-purifying.
Trichlorosilane exhaust gas main component produced during the preparation process is hydrogen, hydrogen chloride and chlorosilane, processing method
Be one of the hot topic of domestic industry, generally handled in the prior art using water spray neutralisation treatment method, exhaust gas it is micro- just
It presses under (30KPa) after deep cooling extremely -60 DEG C, not condensed gas phase is hydrolyzed into exhaust gas eluting column, the chlorine silicon condensed out
Alkane recycles, but because being low pressure condensation, condensation effect is limited, still has the loss of part chlorosilane, results in waste of resources, cause to give birth to
Produce increased costs.This part chlorosilane of loss enters the hydrolysis of exhaust gas eluting column, will cause the increase of exhaust gas eluting column load, sewage
Handle load increase, CaO consumption increases, triple effect evaporation load increases (steam consumption increase), bed drain purge increase and environment
The consequences such as pressure exacerbation.
Utility model content
In view of this, in view of the deficiencies of the prior art, it is deep that the utility model provides a kind of trichlorosilane synthesis exhaust gas pressurization
Cooling system makes the exhaust gas chlorosilane content being discharged into exhaust gas eluting column be in reduced levels, reduces chlorosilane consumption, reduces
Ca0 consumption, triple effect evaporation steam consumption, outer bed drain purge.
In order to solve the above technical problems, the technical solution of the utility model is that exhaust gas pressurization is synthesized using a kind of trichlorosilane
Cryogenic system, it includes that surge tank, off-gas condenser, exhaust gas are deep after surge tank, silicon powder filter, compressor, exhaust gas before exhaust gas
Cooler, accident gas buffer tank, condensate drum, condensate pump and eluting column, surge tank gas vent connects silicon powder mistake before exhaust gas
Filter, the gas vent connect compressor of silicon powder filter, compressor gas outlet connect surge tank after exhaust gas, buffer after exhaust gas
Tank gas vent connect off-gas condenser tube-side inlet, off-gas condenser tube side outlet connection exhaust gas deep freezer tube side into
Mouthful, the shell side import of the tube side outlet connection off-gas condenser of exhaust gas deep freezer, the shell-side outlet of off-gas condenser connects accident
The gas vent of gas buffer tank, accident gas buffer tank connects eluting column, the condensate liquid of off-gas condenser and exhaust gas deep freezer
Outlet connection condensate drum, condensate drum outlet connection condensate pump.
Further, exhaust gas is forced into after 0.45MPa by the compressor enter exhaust gas after surge tank.
Further, the gas of pressure stabilizing pipeline to silicon powder filter is provided with after the exhaust gas on the gas vent of surge tank
Entrance, to guarantee the normal work of compressor.
Further, due to meeting in surge tank after surge tank, silicon powder filter, exhaust gas before exhaust gas and accident gas buffer tank
Have a small amount of chlorosilane condensate liquid, especially in winter when, so surge tank, silicon powder filter, accident gas before exhaust gas are delayed
The liquid outlet connection condensate pump import of tank is rushed, the liquid outlet of surge tank connects condensate drum after exhaust gas, according to liquidometer
It shows level condition, starts condensate pump for condensate liquid and be delivered to subsequent handling.
Further, the gas vent of surge tank is provided with the gas of emergency pipe line Yu accident gas buffer tank before the exhaust gas
Exhaust gas can be directly discharged into accident off-gas buffer tank by emergency pipe line when compressor breaks down by the connection of body entrance, then
It is discharged into eluting column processing, avoids loss caused by downtime.
Further, it is provided with regulating valve on the outlet gas line of surge tank before the exhaust gas, when exhausted air quantity increases suddenly
When big, portion can be discharged into accident off-gas buffer tank by emergency pipe line, then be discharged into eluting column processing, prevent exhausted air quantity
Compressor Inlet Pressure superpressure stop jumping failure caused by increasing suddenly.
Further, it is provided with regulating valve on the outlet gas line of the off-gas condenser shell side, it can be by preceding system
Pressure is stablized in 0.45MPa, achievees the purpose that pressurization condensation, increases the condensing recovery amount of chlorosilane.
Compared with prior art, trichlorosilane synthesis pressurization cryogenic system provided by the utility model, passes through adding for design
Deep cooling route is pressed, can more recycle chlorosilane, through testing, the yield of chlorosilane increases to from 252.58Kg/h
306.69Kg/h increases 21.4% chlorosilane yield, so as to further decrease the consumption of chlorosilane, reduces Ca0
Consumption, triple effect evaporation steam consumption and outer bed drain purge.The utility model designs silicon powder filter before the compressor simultaneously,
The problem of avoiding the small silicon powder damage compressor in exhaust gas, and be arranged on the gas access pipeline of surge tank before exhaust gas and adjust
Valve is saved, Compressor Inlet Pressure superpressure stop jumping failure caused by exhausted air quantity increases suddenly is avoided.
To sum up, Tthe utility model system structure is simple, easy to use, in addition to it can reduce production cost, mitigate environmental pressure,
It also will further decrease the indexs such as existing chlorine consumption, silicon consumption, hydrogen consumption.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model.
Marginal data:
Surge tank before 1- exhaust gas, 2- silicon powder filter, 3- compressor, surge tank after 4- exhaust gas, 5- off-gas condenser, 6-
Exhaust gas deep freezer, 7- accident gas buffer tank, 8- condensate drum, 9- condensate pump, 10- eluting column, 11- regulating valve, 12- pressure stabilizing
Pipeline, 13- emergency pipe line, 14- regulating valve.
Specific embodiment
In order to make those skilled in the art more fully understand the technical solution of the utility model, with reference to the accompanying drawing with it is excellent
Selecting embodiment, the utility model is described in further detail.
Referring to Fig. 1, the utility model provides a kind of trichlorosilane synthesis exhaust gas pressurization cryogenic system, before it includes exhaust gas
Surge tank 4, off-gas condenser 5, exhaust gas deep freezer 6, accident gas are slow after surge tank 1, silicon powder filter 2, compressor 3, exhaust gas
Tank 7, condensate drum 8, condensate pump 9 and eluting column 10 are rushed, the gas vent of surge tank 1 connects silicon powder filter 2 before exhaust gas,
The gas vent connect compressor 3 of silicon powder filter 2,3 gas vent of compressor connect surge tank 4 after exhaust gas, buffer after exhaust gas
4 gas vent of tank connects the tube-side inlet of off-gas condenser 5, the pipe of the tube side outlet connection exhaust gas deep freezer 6 of off-gas condenser 5
Journey import, the shell side import of the tube side outlet connection off-gas condenser 5 of exhaust gas deep freezer 6, the shell-side outlet warp of off-gas condenser 5
Accident gas buffer tank 7 is connected before regulating valve 14 is stablized after system pressure, the gas vent of accident gas buffer tank 7 connects elution
The condensate outlet of tower 10, off-gas condenser 5 connects condensate drum 8, condensate drum 8 with the condensate outlet of exhaust gas deep freezer 6
Outlet connection condensate pump 9.The gas of pressure stabilizing pipeline 12 to silicon powder filter 2 is provided with after exhaust gas on the gas vent of surge tank 4
Body entrance, to guarantee the normal work of compressor.The liquid of surge tank 1, silicon powder filter 2 and accident gas buffer tank 7 before exhaust gas
Body outlet connects condensate pump 9, and the liquid outlet of surge tank 4 connects condensate drum 8 after exhaust gas, shows liquid level feelings according to liquidometer
Condensate liquid is delivered to subsequent handling by condition, starting condensate pump 9.Tune is provided with before exhaust gas on the outlet gas line of surge tank 1
Save valve 11, Compressor Inlet Pressure superpressure stop jumping failure caused by preventing exhausted air quantity from increasing suddenly.The gas of surge tank 1 before exhaust gas
Outlet is provided with emergency pipe line 13 and connect with the gas access of accident gas buffer tank 7, when compressor breaks down, can incite somebody to action
Exhaust gas is directly discharged into accident off-gas buffer tank by emergency pipe line, then is discharged into eluting column processing, avoids damage caused by downtime
It loses.
The specific workflow of the utility model are as follows: exhaust gas enters surge tank 1 before exhaust gas, after the filtering of silicon powder filter 2,
After compressor 3 is forced into 0.45MPa enter exhaust gas after surge tank 4, through 5 tube side of off-gas condenser, 6 tube side of exhaust gas deep freezer,
Enter in accident gas buffer tank 7 after regulating valve 14 stablizes preceding system pressure again after 5 shell side of off-gas condenser, then is emitted into leaching
It washes in tower 10 and is handled, and the chlorosilane that 5 tube side of off-gas condenser and 6 tube side of exhaust gas deep freezer condense out enters condensate liquid
In tank 8, level condition is shown according to the liquidometer in condensate drum 8, starts condensate pump 9 for condensate liquid and is delivered to subsequent work
Sequence.
Through testing orthogonal statistics, exhaust gas, the recycling of chlorosilane are synthesized using the trichlorosilane that Tthe utility model system is handled
Measure average out to 306.69Kg/h.
The above-mentioned identical trichlorosilane synthesis existing exhaust treatment system of exhaust gas is handled, i.e., exhaust gas is directly through condensing
Eluting column processing is discharged into after device condensation, condensate liquid enters condensate drum storage, is tested orthogonal statistics, and the yield of chlorosilane is average
For 252.58Kg/h.
To sum up, the utility model increases 21.4% chlorosilane yield by the pressurization deep cooling route of design, thus
The consumption that chlorosilane can be further decreased reduces consumption, triple effect evaporation steam consumption and the outer bed drain purge of Ca0.
It should be pointed out that above-mentioned preferred embodiment is not construed as limitations of the present invention, the utility model
Protection scope should be defined by the scope defined by the claims..For those skilled in the art, not
It is detached from the spirit and scope of the utility model, several improvements and modifications can also be made, these improvements and modifications also should be regarded as
The protection scope of the utility model.
Claims (7)
- The cryogenic system 1. a kind of trichlorosilane synthesis exhaust gas pressurizes, it is characterised in that: including surge tank, silicon powder filtering before exhaust gas Surge tank, off-gas condenser, exhaust gas deep freezer, accident gas buffer tank, condensate drum, condensate pump after device, compressor, exhaust gas And eluting column, surge tank gas vent connects silicon powder filter, the gas vent connect compressor of silicon powder filter, pressure before exhaust gas Contracting machine gas vent connects surge tank after exhaust gas, and the tube-side inlet of surge tank gas vent connection off-gas condenser, gives up after exhaust gas The tube side import of the tube side outlet connection exhaust gas deep freezer of gas condenser, the tube side outlet connection off-gas condenser of exhaust gas deep freezer Shell side import, the shell-side outlet of off-gas condenser connects accident gas buffer tank, and the gas vent of accident gas buffer tank connects Eluting column is connect, off-gas condenser connects condensate drum, condensate drum outlet connection condensation with the condensate outlet of exhaust gas deep freezer Liquid pump.
- The cryogenic system 2. a kind of trichlorosilane synthesis exhaust gas according to claim 1 pressurizes, it is characterised in that: the compression Exhaust gas is forced into after 0.45MPa by machine enter exhaust gas after surge tank.
- The cryogenic system 3. a kind of trichlorosilane synthesis exhaust gas according to claim 1 pressurizes, it is characterised in that: the exhaust gas Pressure stabilizing pipeline is provided on the gas vent of surge tank afterwards to the gas access of silicon powder filter.
- The cryogenic system 4. a kind of trichlorosilane synthesis exhaust gas according to claim 1 pressurizes, it is characterised in that: the exhaust gas Preceding surge tank, silicon powder filter, accident gas buffer tank liquid outlet connect condensate pump import, the liquid of surge tank after exhaust gas Body outlet connection condensate drum.
- The cryogenic system 5. a kind of trichlorosilane synthesis exhaust gas according to claim 1 pressurizes, it is characterised in that: the exhaust gas The gas vent of preceding surge tank is provided with emergency pipe line and connect with the gas access of accident gas buffer tank.
- The cryogenic system 6. a kind of trichlorosilane synthesis exhaust gas according to claim 1 pressurizes, it is characterised in that: the exhaust gas Regulating valve is provided on the outlet gas line of condenser shell side.
- The cryogenic system 7. a kind of trichlorosilane synthesis exhaust gas according to claim 1 pressurizes, it is characterised in that: the exhaust gas The gas vent of preceding surge tank is provided with regulating valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821431896.9U CN208747644U (en) | 2018-08-31 | 2018-08-31 | A kind of trichlorosilane synthesis exhaust gas pressurization cryogenic system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821431896.9U CN208747644U (en) | 2018-08-31 | 2018-08-31 | A kind of trichlorosilane synthesis exhaust gas pressurization cryogenic system |
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| Publication Number | Publication Date |
|---|---|
| CN208747644U true CN208747644U (en) | 2019-04-16 |
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ID=66082919
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821431896.9U Active CN208747644U (en) | 2018-08-31 | 2018-08-31 | A kind of trichlorosilane synthesis exhaust gas pressurization cryogenic system |
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| Country | Link |
|---|---|
| CN (1) | CN208747644U (en) |
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2018
- 2018-08-31 CN CN201821431896.9U patent/CN208747644U/en active Active
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| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Sichuan Yongxiang Energy Technology Co.,Ltd. Assignor: SICHUAN YONGXIANG NEW ENERGY Co.,Ltd. Contract record no.: X2023510000014 Denomination of utility model: A pressurized deep cooling system for trichlorosilane synthesis waste gas Granted publication date: 20190416 License type: Common License Record date: 20230816 |