CN208744185U - A kind of air-floatation planar locating platform - Google Patents
A kind of air-floatation planar locating platform Download PDFInfo
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- CN208744185U CN208744185U CN201821432059.8U CN201821432059U CN208744185U CN 208744185 U CN208744185 U CN 208744185U CN 201821432059 U CN201821432059 U CN 201821432059U CN 208744185 U CN208744185 U CN 208744185U
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- granite
- air bearing
- guide rail
- ultraprecise
- gas suspension
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Abstract
The utility model relates to a kind of air-floatation planar locating platforms, ultraprecise granite benchmark square chest is provided in granite supporting platform, X moves air bearing guide rail part to movement air bearing guide rail part and Y-direction, ultraprecise granite benchmark square chest is rectangular frame structure, the Y-direction movement that benchmark square chest can be achieved in Y-direction movement air bearing guide rail part is arranged in it, the X is arranged to movement air bearing guide rail part in the outside of benchmark square chest, X is rectangular frame structure to air bearing guide rail part is moved, benchmark square chest and X are equipped with air floating structure film to four contact surfaces between movement air bearing guide rail part, X is equipped with X to the upper surface of movement air bearing guide rail part and determines grating assembly to driving linear motor assembly and X to detection, X X can be moved to air bearing to movement air bearing guide rail part on benchmark square chest.By the positioning accuracy of two-dimensional gas floating motion locating platform, from micron to sub-micron and even, nanoscale direction is approached.
Description
Technical field
The utility model belongs to field of mechanical technique, and in particular to a kind of air-floatation planar locating platform.
Background technique
With the rapid development of science and technology, Ultraprecision Machining has not in national defense construction and the national economic development
Alternative effect, it is the important support technology of tech war, and modern basic science technology development is important
It ensures.Ultraprecision Machining is in numerous high skills such as aerospace, precision instrument, war industry, optics and electric communication, new energy
Art field increasingly plays great function, and ultra-precision machine tool is the crucial carrier for realizing Ultra-precision Turning, it directly determines zero
Precision, the efficiency and reliability of part processing.Therefore research and development ultra-precision machine tool has China's science and technology and industrial expansion
Important reality and strategic importance.
Recent domestic gradually increases accurate and Ultra-precision Turning and measuring device demand, accurate and ultraprecise
Motion guide rail and platform are provided in fields such as photoetching technique, Ultra-precision Turning, Measurement for Biotechnique, nano topography measurements
It is widely applied.The precise motion and accurately control that accurate and ultraprecise motion guide rail and platform can be realized processing or test object
System, is one of the important component in various fields in Precision Machining and precision checking equipment, including litho machine, ultraprecise numerical control machine
Bed, three-coordinates measuring machine etc..With the development of the new scientific and trechnolocial undertakings such as microelectric technique, information technology and bioengineering, processing
Micron, sub-micron gradually are developed to from millimeter with the characteristic size of test object, has reached nanometer level and Xiang Yana at present
Meter Fa Zhan proposes high-precision, high-resolution, low vibration, low pollution etc. to accurate and ultraprecise motion guide rail and platform
More strict requirements.To mechanism support design, driving, control, detection positioning in accurate and ultraprecise motion guide rail and platform
And various key technologies such as manufacture propose challenge.
Ultra-precision machine tool is the primary basic condition for realizing Ultra-precision Turning, and guide rail part and power driving part are super
Critical component in precision machine tool and measuring device.As the emerging technologies such as microelectric technique, information technology and bioengineering are led
The characteristic size of the development in domain, processing and test object gradually develops to micron, sub-micron from millimeter, has reached nanometer at present
It is horizontal simultaneously to develop to sub-nanometer, to accurate and ultraprecise motion guide rail and platform propose high-precision, high-resolution, low vibration,
Low pollution etc. more strict requirements.To mechanism support design, driving, control in accurate and ultraprecise motion guide rail and platform
Various key technologies such as system, detection positioning and manufacture propose challenge.Domestic and international industry is largely ground with academia
Study carefully personnel constantly to study and promoted without friction support technology and directly drive without friction and control technology, improves accurate and ultraprecise
The kinematic accuracy and positioning accuracy of motion guide rail and platform.Therefore development of new high speed and precision drive system is research both domestic and external
Hot spot.The appearance of linear motor solves the deficiency of traditional feed servo-system so that linear drive technique in sophisticated manufacturing and
Measure industry using increasingly extensive.
Since aerostatic guide way has many advantages, such as that viscosity is low, with small vibration, thermal stability is good and pollution-free, ultraprecise adds
The precision machineries such as work and measurement are more and more to use aerostatic guide way；The positioning of aerostatic guide way, kinematic accuracy can reach
To submicron order even nanoscale, therefore aerostatic guide way in Ultra-precision Turning field using more and more extensive.Although
Compared with conventional motion mechanism, gas suspension significantly improves the dynamic performance of ultraprecise motion guide rail, but in gas suspension
Portion's air motion causes the vibration in flow field still to can not be ignored.The Oscillation Amplitude of micro-vibration is smaller, generally at several nanometers to several hundred
Between nanometer；Pneumatic hammer vibration is that the amplitude of pneumatic hammer is big, it destroys the stability of gas suspension, so that gas film lubrication layer fails.
As the positioning accuracy of air bearing motion guide rail is promoted to nanometer even sub-nanometer magnitude, even the micro-vibration of gas suspension also will
As the key factor for restricting ultraprecise motion guide rail performance, the common concern of international academic community is caused.Pursuing high speed, height
In the case where precision, to linear motor driving motive force stability and air bearing hydrostatic slideway air film stability it is also proposed that
High requirement, small disturbance can all influence the precision of entire kinematic system；Therefore, need to develop the X- of a ultraprecise
Y-direction locating platform.
Summary of the invention
The application for current precision measurement and manufacture field to high speed, high accelerate driving servo-system and high-accuracy determine
Position, the requirement moved, provide a kind of air-floatation planar locating platform, solve locating platform position inaccurate in the prior art, positioning
The big defect of error.
The technical solution of the utility model is as follows:
A kind of air-floatation planar locating platform, including granite supporting platform are provided in the granite supporting platform
Ultraprecise granite benchmark square chest, X move air bearing guide rail part, ultraprecise flower hilllock to movement air bearing guide rail part and Y-direction
The quasi- square chest of ground mass is rectangular frame structure, and the setting of ultraprecise granite benchmark square chest can be real in Y-direction movement air bearing guide rail part
The Y-direction movement of existing ultraprecise granite benchmark square chest, is arranged the X to fortune in the outside of the ultraprecise granite benchmark square chest
Take offence floating guide rail part, the X to movement air bearing guide rail part be rectangular frame structure, the ultraprecise granite benchmark square chest
Air floating structure film is equipped with to four contact surfaces between movement air bearing guide rail part with X, and the X is to movement air bearing rail portion
The upper surface of part is equipped with X and determine grating assembly to driving linear motor assembly and X to detection, X to move air bearing guide rail part can be
X is moved to air bearing on ultraprecise granite benchmark square chest.
Further, the X includes that the upward granite air bearing exercise stress of X, X spend downwards hilllock to movement air bearing guide rail part
Stone gas suspension sliding block, X granite gas suspension sliding block and X granite gas suspension sliding block to the right to the left, the upward granite of X
The downward granite gas suspension sliding block of air bearing exercise stress, X, X granite gas suspension sliding block and X granite gas to the right to the left
Over draft holds sliding block and surrounds rectangular frame structure, and the upward granite air bearing exercise stress upper surface the X is provided with several connections
Hole, the upward granite air bearing exercise stress lower end surface X are provided with porous integrated flow controller, flat in the upward granite air bearing campaign of X
Supply air line is provided in plate, supply air line is connected to porous integrated flow controller；In the downward granite air bearing branch of the X
The upper surface for holding sliding block is provided with porous integrated flow controller, is provided with supply air line in the downward granite gas suspension sliding block of X, supplies
Air pipe is connected to porous integrated flow controller；It is provided in the inner side end of X granite gas suspension sliding block to the left porous
Integrated flow controller, X are provided with supply air line in granite gas suspension sliding block to the left, and supply air line and porous integrated flow controller connect
It is logical；The inner side end of X granite gas suspension sliding block to the right is provided with porous integrated flow controller, X granite gas to the left
Over draft holds and is provided with supply air line in sliding block, and supply air line is connected to porous integrated flow controller.
Further, the Y-direction movement air bearing guide rail part includes that two groups of symmetrically arranged Y-directions move air-float guide rail list
Member, every group of Y-direction movement air bearing rail unit includes granite gas suspension guide rail under Y-direction, Y-direction side granite gas suspension
Granite gas suspension guide rail on guide rail and Y-direction, the ultraprecise granite benchmark square chest setting are led in two groups of Y-direction movement air bearings
Between rail unit, the contact surface up and down of ultraprecise granite benchmark square chest 7 and two groups of Y-direction movement air bearing rail units is equipped with air bearing
The Y-direction that is equipped with of film, the Y-direction movement air bearing guide rail part drives linear motor assembly and Y-direction detection to determine grating assembly.
Further, the upper and lower end face at ultraprecise granite benchmark square chest both ends and side end face are respectively provided with porous
Integrated flow controller, is arranged supply air line, supply air line is connected to porous integrated flow controller in ultraprecise granite benchmark square chest.
Further, the X determine grating assembly to include X determines grating scale and X to detection to determine grating reading to detecting to detection
Head.
Further, it includes that Y-direction detection determines grating scale and Y-direction detects and determines grating reading that grating assembly determine in Y-direction detection
Head.
Further, the X to driving linear motor assembly include X to driving linear motor stator electric component and X to driving
Linear motor rotor component.
Further, adjustment block is provided between described two groups symmetrically arranged Y-direction movement air bearing rail units.
The utility model has the beneficial effects that
The utility model proposes a kind of air-floatation planar locating platform, which is divided using the symmetrical of " case raising middle flask "
Cloth structure, realizes the air bearing static pressure movement in the direction X-Y in two-dimensional surface respectively, the direction X-Y moving component used in the structure and leads
Rail is all on the basis of the ultraprecise granite benchmark square chest of rectangular frame structure, by the positioning accurate of two-dimensional gas floating motion locating platform
From micron to sub-micron and even, nanoscale direction approaches degree.
Detailed description of the invention
Fig. 1 is the overall structure diagram of utility model device；
Fig. 2 is the sectional view along A-A of Fig. 1；
Fig. 3 is the B-B direction cross-sectional view of Fig. 2；
Fig. 4 is the side end face schematic diagram of ultraprecise granite benchmark square chest；
Fig. 5 is the D direction view of Fig. 4；
Fig. 6 is the C direction view of Fig. 4；
Fig. 7 is the side end face schematic diagram of the upward granite air bearing exercise stress of X；
Fig. 8 is the J direction view of Fig. 7；
Fig. 9 is the K direction view of Fig. 7；
Figure 10 is the upper surface schematic diagram of the downward granite gas suspension sliding block of X；
Figure 11 is the inner face schematic diagram of X granite gas suspension sliding block to the left；
Figure 12 is the inner face schematic diagram of X granite gas suspension sliding block to the right；
In figure, 1- granite supporting platform, 2- adjustment block, 3-Y to driving linear motor component, the upward granite gas of 4-X
Grating scale is determined in floating exercise stress, the detection of 5- Y-direction, and 6-Y determines grating reading head, 7- ultraprecise granite benchmark square chest, 8- to detection
Granite gas suspension guide rail under Y-direction, 9-Y determine grating scale, 11-X to detection to side granite gas suspension guide rail, 10- X
Grating reading head, the upward granite gas suspension guide rail of 12-Y, the downward granite gas suspension sliding block of 13-X, 14-X are determined to detection
Granite gas suspension sliding block to the left, 15-X to driving linear motor stator electric component, 16-X to driving linear motor rotor component,
17-X granite gas suspension sliding block to the right, 18- connecting hole, the porous integrated flow controller of 19-, 20- supply air line.
Specific embodiment
The utility model is described in further detail below by specific embodiment combination attached drawing.It is wherein different to implement
Similar component uses associated similar element numbers in mode.In the following embodiments, many datail descriptions are
In order to enable the application can be better understood.However, those skilled in the art can recognize without lifting an eyebrow, it is part of
Feature is dispensed in varied situations, or can be substituted by other elements, material, method.In some cases,
The relevant some operations of the application are there is no display in the description or describe, this is the core in order to avoid the application
It is flooded by excessive description, and to those skilled in the art, these relevant operations, which are described in detail, not to be necessary,
They can completely understand relevant operation according to the general technology knowledge of description and this field in specification.
A kind of air-floatation planar locating platform as shown in Figure 1, Figure 2, Figure 3 shows, including the granite supporting platform for pedestal
1, ultraprecise granite benchmark square chest 7 is provided in granite supporting platform 1, X is moved to movement air bearing guide rail part and Y-direction
Air-float guide rail component, ultraprecise granite benchmark square chest 7 are rectangular frame structure, and ultraprecise granite benchmark square chest 7 is arranged in Y
The Y-direction of ultraprecise granite benchmark square chest 7 can be realized by Y-direction driving linear motor assembly 3 into movement air bearing guide rail part
Air bearing campaign, and grating assembly is determined by Y-direction detection and controls accurate Y-direction air bearing campaign；In ultraprecise granite benchmark square chest 7
Outside be arranged X to movement air bearing guide rail part, X to movement air bearing guide rail part be rectangular frame structure, ultraprecise granite
It is thin that benchmark square chest 7 and the X being arranged outside it to four contact surfaces formed between movement air bearing guide rail part are equipped with air floating structure
Film, X are equipped with X to the upper surface of movement air bearing guide rail part and determine grating assembly to driving linear motor assembly and X to detection, X to
Movement air bearing guide rail part X can move on ultraprecise granite benchmark square chest 7 to air bearing.
Fig. 4 is the side end face schematic diagram of ultraprecise granite benchmark square chest 7, needs strictly to protect during designing and manufacturing
Demonstrate,prove the quality requirement of its flatness and surface roughness, followed by each face verticality requirement of ultraprecise granite benchmark square chest 7.
Referring to figs. 5 and 6, in order to realize that the ultraprecise static air pressure of ultraprecise granite benchmark square chest 7 supports, in ultraprecise granite
The both ends and side end face of the upper and lower end face of benchmark square chest 7 are provided with the porous integrated flow controller 19 according to certain regular distribution,
Intimate frictionless motion and Gao Gang of the ultraprecise granite benchmark square chest 7 relative to Y-direction movement air bearing guide rail part may be implemented
Degree bearing；It is internally provided with supply air line 20 in ultraprecise granite benchmark square chest 7, supply air line 20 divides for total supply air line
With each branch pipeline, then external high pressure gas supply is by respectively enteing each branch pipeline after total supply air line, finally by porous integrated
Flow controller enters 7 both ends of ultraprecise granite benchmark square chest and Y-direction movement air bearing guide rail part two moves between supporting plane, real
Existing air bearing lubrication and bearing.In order to realize the guarantee of high accuracy positioning kinematic accuracy detection and driving, in ultraprecise granite base
The upper and lower surfaces of quasi- square chest 7 are provided with high-precision grating mounting hole and high-precision linear moves motor installing hole.
The upward granite air bearing exercise stress 4 of X, the downward granite gas suspension sliding block 13 of X, the X branch of granite air bearing to the left
Hold the rectangular frame frame structure of sliding block 14 and X 17 4 component forming closeds of granite gas suspension sliding block to the right.Wherein X
Granite gas suspension sliding block 14, X granite gas suspension sliding block 17 and ultraprecise granite benchmark square chest 7 etc. to the right to the left
It is high；In order to realize high-precision driving and high rigidity, X to driving linear motor stator electric component 15, X to driving linear motor rotor portion
Part 16 is installed on X to the left in the mounting groove of granite gas suspension sliding block 14；High-precision X determines grating scale 10 to detection and is installed on X
To the right in the mounting groove of granite gas suspension sliding block 17.
Referring to Fig. 7-Fig. 9, the upward granite air bearing exercise stress 4 of X mainly has following two effect: first is that carrying is made
With: most terminal processing object or test object are installed on upward 4 upper surface of granite air bearing exercise stress the X, then flat at this
The upper surface of plate is provided with several mounting hole interfaces；Second is that air bearing supporting role: in the upward granite air bearing exercise stress 4 of X
It is realized on lower end surface and supports relative motion with the ultraprecise static air pressure of 7 upper surface of ultraprecise granite benchmark square chest, it is upward in X
The lower end surface of granite air bearing exercise stress 4 is provided with the porous integrated flow controller 19 according to certain regular distribution, may be implemented
It is supported with the intimate frictionless motion and high rigidity of ultraprecise granite benchmark square chest 7, is internally provided with air bearing branch in plate 4
The supply air line 20 held, external high pressure gas supply respectively enter each supply air line 20, enter finally by porous integrated flow controller 19
It moves between supporting plane, realizes air bearing lubrication and bearing.In order to realize the upward granite air bearing exercise stress 4 of X respectively with X to
Granite gas suspension sliding block 17 is connected and fixed to the right by left granite gas suspension sliding block 14, X, in the upward granite air bearing of X
Several connection holes 18 are set on exercise stress 4.
Referring to Figure 10, the downward granite gas suspension sliding block 13 of X is provided in the upper surface of the sliding block 13 according to certain
The intimate no friction with 7 lower end surface of ultraprecise granite benchmark square chest may be implemented in the porous integrated flow controller 19 of regular distribution
Movement and high rigidity bearing, in the supply air line 20 for being internally provided with gas suspension of the downward granite gas suspension sliding block 13 of X,
External high pressure gas supply respectively enters each supply air line 20, finally by porous integrated flow controller 19 enter movement supporting plane it
Between, realize air bearing lubrication and bearing.Several connection holes 18 are set on the downward granite gas suspension sliding block 13 of X, for realizing X
Granite gas suspension is sliding to the right by granite gas suspension sliding block 14, X to the left with X respectively for downward granite gas suspension sliding block 13
Block 17 is connected and fixed.
Referring to Figure 11, Figure 11 is X granite gas suspension sliding block 14 to the left, in X granite gas suspension sliding block to the left
14 side is provided with the porous integrated flow controller 19 according to certain regular distribution, may be implemented and ultraprecise granite benchmark side
The intimate frictionless motion and high rigidity of 7 side wall of case support, and in X, granite gas suspension sliding block 14 is internally provided with confession to the left
Air pipe 20, supply air line 20 include total supply air line, each branch pipeline and the single gas circuit of gas suspension, and external high pressure gas supply passes through
Each branch pipeline then is respectively enterd after total supply air line, finally enters single gas circuit, movement is entered by porous integrated flow controller 19
Between supporting plane, air bearing lubrication and bearing are realized.In order to realize the guarantee of high-precision driving and high rigidity, hilllock is spent to the left in X
Mounting groove is arranged in the upper surface of stone gas suspension sliding block 14, for installing X to driving linear motor stator electric component 15 and X to driving
Linear motor rotor component 16.
Referring to Figure 12, Figure 12 is X granite gas suspension sliding block 17 to the right, in X granite gas suspension sliding block to the right
17 side is provided with the porous integrated flow controller 19 according to certain regular distribution, may be implemented and ultraprecise granite benchmark side
The intimate frictionless motion and high rigidity of 7 side wall of case support, and in X, granite gas suspension sliding block 17 is internally provided with confession to the right
Air pipe 20, supply air line 20 include total supply air line, each branch pipeline and single gas circuit, and external high pressure gas supply passes through total supply air line
Then respectively enter each branch pipeline afterwards, finally enter single gas circuit, by porous integrated flow controller 19 enter movement supporting plane it
Between, realize air bearing lubrication and bearing.In order to realize the guarantee of high accuracy positioning kinematic accuracy detection and high rigidity, spent to the right in X
Position slot was installed in the upper surface setting of hilllock stone gas suspension sliding block 17, installed height in ultraprecise granite benchmark square chest 7 for giving
Precision X allows position when determining grating scale 10 to detection.
The installation method of utility model device is described below:
1) X is installed and debugs first to movement air bearing guide rail part.On the basis of ultraprecise granite benchmark square chest 7, by X
Upward granite air bearing exercise stress 4, the downward granite gas suspension sliding block 13 of X, X granite gas suspension sliding block 14, X to the left
The granite frame structure of 17 4 component forming closed of granite gas suspension sliding block to the right, by ultraprecise granite benchmark side
Case 7 is enclosed in inside；Then X is installed on to driving linear motor stator electric component 15, X to driving linear motor rotor component 16
High-precision X in the mounting groove of granite gas suspension sliding block 14, is determined grating scale 10 to detection, X determines grating to detection and reads to the left by X
X is installed on for several 11 to the right in the mounting groove of granite gas suspension sliding block 17；Under aeration status, adjusts separately X and spend upwards
Hilllock stone air bearing exercise stress 4, the downward granite gas suspension sliding block 13 of X, granite gas suspension sliding block 14, X are spent to the right X to the left
The position gap of hilllock stone gas suspension sliding block 17 4 component and ultraprecise granite benchmark square chest 7, until reaching X to kinematic system
Position detection, the design requirement of driving and positioning accuracy.
2) X is secondly installed and debugs to movement air bearing guide rail part；Granite gas suspension guide rail 8 under two groups of Y-directions is put
It is placed in granite supporting platform 1 and is adjusted and fixes, ultraprecise granite benchmark square chest 7 is placed in flower under two groups of Y-directions
On hilllock stone gas suspension guide rail 8, while Y is placed and be installed on to left and right Y-direction side granite gas suspension guide rail 9 tentatively
On downward granite gas suspension guide rail 8；Then will a pair of of granite bearing matched with ultraprecise granite benchmark square chest 7 with
Adjustment block 2 is isometric to be placed under Y-direction on granite gas suspension guide rail 8, by adjusting granite bearing and adjustment block 2 and Y-direction
9 mutual alignment gap of side granite gas suspension guide rail, then installs granite gas suspension guide rail 12 in two groups of Y-directions；?
In the case where ventilation, on the basis of ultraprecise granite benchmark square chest 7, granite gas suspension guide rail 12 and Y-direction in Y-direction are adjusted
The mutual alignment and gap of side granite gas suspension guide rail 9 adjust Y-direction side granite gas suspension guide rail 9 and superfinishing
The mutual alignment and gap of close granite benchmark square chest 7；Finally grating is determined in installation Y-direction driving linear motor component 3, Y-direction detection
Grating reading head 6 is determined in ruler 5 and Y-direction detection.
3) it is finally fixed and is mounted and packaged.On the basis of ultraprecise granite benchmark square chest 7, to ultraprecise X-Y gas
Each performance parameter of floating plane positioning platform total system is tested and is debugged, until debugging and test reaches design requirement
Until, finally whole system is fixed and is mounted and packaged.
Use above specific case is illustrated the utility model, is merely used to help understand the utility model, and
Not to limit the utility model.Think of for those skilled in the art of the present invention, according to the utility model
Think, several simple deductions, deformation or replacement can also be made.
Claims (8)
1. a kind of air-floatation planar locating platform, it is characterised in that: including granite supporting platform (1), supported in the granite
It is provided with ultraprecise granite benchmark square chest (7), X on platform (1) and moves air bearing rail portion to movement air bearing guide rail part and Y-direction
Part, the ultraprecise granite benchmark square chest (7) are rectangular frame structure, and ultraprecise granite benchmark square chest (7) is arranged in Y-direction
The Y-direction air bearing campaign that ultraprecise granite benchmark square chest (7) can be achieved in air bearing guide rail part is moved, on ultraprecise flower hilllock
The outside of the quasi- square chest of ground mass (7) is arranged the X to movement air bearing guide rail part, and the X is rectangle to air bearing guide rail part is moved
Frame structure, the ultraprecise granite benchmark square chest (7) and X are all provided with to four contact surfaces between movement air bearing guide rail part
There is an air floating structure film, the X is equipped with X to driving linear motor assembly and X to inspection to the upper surface of movement air bearing guide rail part
Grating assembly is measured, X X can be moved to air bearing to movement air bearing guide rail part on ultraprecise granite benchmark square chest (7).
2. air-floatation planar locating platform according to claim 1, it is characterised in that: the X to movement air bearing guide rail part packet
Include the upward granite air bearing exercise stress (4) of X, the downward granite gas suspension sliding block (13) of X, X granite gas suspension to the left
Granite gas suspension sliding block (17) to the right sliding block (14) and X, the upward granite air bearing exercise stress (4) of X, the downward granite of X
Gas suspension sliding block (13), granite gas suspension sliding block (17) encloses X to the right by granite gas suspension sliding block (14) and X to the left
Rectangular frame structure is provided with several connecting holes (18) in upward granite air bearing exercise stress (4) upper surface the X, X to
Upper granite air bearing exercise stress (4) lower end surface is provided with porous integrated flow controller (19), flat in the upward granite air bearing campaign of X
It is provided with supply air line (20) in plate (4), supply air line (20) is connected to porous integrated flow controller (19)；It is spent downwards in the X
The upper surface of hilllock stone gas suspension sliding block (13) is provided with porous integrated flow controller (19), the downward granite gas suspension sliding block of X
(13) it is provided with supply air line (20) in, supply air line (20) is connected to porous integrated flow controller (19)；Hilllock is spent to the left in the X
The inner side end of stone gas suspension sliding block (14) is provided with porous integrated flow controller (19), X granite gas suspension sliding block to the left
(14) it is provided with supply air line (20) in, supply air line (20) is connected to porous integrated flow controller (19)；Hilllock is spent to the right in the X
The inner side end of stone gas suspension sliding block (17) is provided with porous integrated flow controller (19), X granite gas suspension sliding block to the right
(17) it is provided with supply air line (20) in, supply air line (20) is connected to porous integrated flow controller (19).
3. air-floatation planar locating platform according to claim 1 or claim 2, it is characterised in that: the Y-direction moves air bearing guide rail part
Air bearing rail unit is moved including two groups of symmetrically arranged Y-directions, every group of Y-direction movement air bearing rail unit includes the hilllock YXiang Xiahua
Granite gas suspension guide rail (12) in stone gas suspension guide rail (8), Y-direction side granite gas suspension guide rail and Y-direction, it is described
Ultraprecise granite benchmark square chest (7) setting is between two groups of Y-direction movement air bearing rail units, ultraprecise granite benchmark square chest
(7) contact surface up and down with two groups of Y-direction movement air bearing rail units is equipped with air bearing film, and the Y-direction moves air bearing guide rail part
Be equipped with Y-direction driving linear motor assembly (3) and Y-direction detect determine grating assembly.
4. air-floatation planar locating platform according to claim 3, it is characterised in that: the ultraprecise granite benchmark square chest
(7) the upper and lower end face at both ends and side end face are respectively provided with porous integrated flow controller (19), in ultraprecise granite benchmark square chest
(7) supply air line (20) are set in, supply air line (20) is connected to porous integrated flow controller (19).
5. air-floatation planar locating platform according to claim 4, it is characterised in that: it includes X that the X, which determines grating assembly to detection,
Grating scale (10) and X, which are determined, to detection determines grating reading head (11) to detection.
6. air-floatation planar locating platform according to claim 5, it is characterised in that: it includes Y that grating assembly is determined in the Y-direction detection
Grating scale (5) is determined to detection and grating reading head (6) are determined in Y-direction detection.
7. air-floatation planar locating platform according to claim 6, it is characterised in that: the X to driving linear motor assembly packet
Include X to driving linear motor stator electric component (15) and X to drive linear motor rotor component (16).
8. air-floatation planar locating platform according to claim 7, it is characterised in that: two groups of symmetrically arranged Y-direction movements
Adjustment block (2) are provided between air-float guide rail unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821432059.8U CN208744185U (en) | 2018-09-03 | 2018-09-03 | A kind of air-floatation planar locating platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821432059.8U CN208744185U (en) | 2018-09-03 | 2018-09-03 | A kind of air-floatation planar locating platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208744185U true CN208744185U (en) | 2019-04-16 |
Family
ID=66082931
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821432059.8U Withdrawn - After Issue CN208744185U (en) | 2018-09-03 | 2018-09-03 | A kind of air-floatation planar locating platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208744185U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108890324A (en) * | 2018-09-03 | 2018-11-27 | 西安工业大学 | Ultraprecise X-Y air-floatation planar locating platform based on square chest |
-
2018
- 2018-09-03 CN CN201821432059.8U patent/CN208744185U/en not_active Withdrawn - After Issue
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108890324A (en) * | 2018-09-03 | 2018-11-27 | 西安工业大学 | Ultraprecise X-Y air-floatation planar locating platform based on square chest |
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