CN208645713U - A kind of silicon single crystal rod conveying device and cutting machine - Google Patents

Abstract

The utility model relates to a kind of silicon single crystal rod conveying device and cutting machine, including workbench, idler wheel mechanism and to knife Material moving device；It include sucker, Material moving device and testing agency to knife Material moving device, wherein testing agency includes attachment base, round nut, slidiing pin, reset spring, inductive switch and tablet, it is threadedly coupled between attachment base and shifting material frame, round nut is sheathed on outside attachment base, accommodating hole is offered on attachment base, reset spring is located in accommodating hole, slidiing pin one end connects reset spring, the other end connects tablet, inductive switch is fixed on attachment base, the induction end of inductive switch and the side wall of attachment base are flush, and tablet is flush with the sucker face after silicon single crystal rod is sucked.The feeding process of the present apparatus is simpler, and silicon single crystal rod travelling speed is fast, high in machining efficiency, guarantees to ensure that the accuracy of silicon single crystal rod and original point position guarantees its machining accuracy to reduce silicon single crystal rod Cutting Length error by the testing agency added.

Description

A kind of silicon single crystal rod conveying device and cutting machine

Technical field

The utility model relates to hard and brittle material cutting technology field more particularly to a kind of silicon single crystal rod conveying device and cuttings Machine.

Background technique

In Chinese patent literature, publication number CN107443601A, it discloses a kind of silicon single crystal rod MATERIAL CUTTING equipment, Including rack, can on chassis the silicon single crystal rod feed device of sliding and running, the cutting frame being mounted on chassis, be mounted on Saw blade cutting mechanism on cutting frame, fetches and delivers material robot and material at the silicon single crystal rod jacking device that can be slided on chassis Vehicle is characterized by: on back-up roller wheel component firm banking, the clamping jaw of two moveable clamping units is located at back-up roller wheel Top, clamping unit may pass through the space below cutting frame, and saw blade cutting mechanism is single hop cutting, and servo motor driving is slowed down Machine drives wheel and rack engagement to realize the movement of bar floating jacking device, and feeding robot is located at bar floating jacking device Side.The equipment has the following deficiencies:

Silicon single crystal rod realizes self-centering clamping, one cutting action of every execution by the clamping jaw of two groups of removable clamping units Must all repeat the steps of: clamping unit unclamps silicon single crystal rod and is placed on roll wheel assembly, moves clamping unit to specific bit It sets, clamps silicon single crystal rod disengaging roll wheel assembly again again, drives silicon single crystal rod to given cut position, cumbersome operation, meeting again The working efficiency of equipment is substantially reduced, yield is reduced.

Furthermore it is not disclosed how guaranteeing the cutting accuracy of silicon single crystal rod, and traditional silicon crystal bar shear is all in the equipment It is that silicon crystal bar is transplanted on by cutting work station by feeding mechanism, then determination is cut by way of artificial observation or bracing wire positioning Position is cut, and determines Cutting Length in this way, error is larger, and cutting accuracy is low.

Summary of the invention

For this reason, it may be necessary to provide a kind of silicon single crystal rod conveying device and cutting machine, sent to solve silicon single crystal rod in the prior art Expect cumbersome low efficiency, the problem that silicon single crystal rod Cutting Length error is big, machining accuracy is low.

To achieve the above object, a kind of silicon single crystal rod conveying device is inventor provided, the conveying device includes work Platform, idler wheel mechanism and to knife Material moving device；

The idler wheel mechanism is set on workbench, and idler wheel mechanism is arranged to two rows along workbench；

Described includes sucker, Material moving device and testing agency to knife Material moving device, the Material moving device include move material frame and Driving mechanism, the driving mechanism move material frame along workbench axial movement for driving, and the sucker is fixed on shifting material frame, is inhaled For pasting suction in an end face of silicon single crystal rod, the testing agency includes attachment base, round nut, slidiing pin, resets bullet disk Spring, inductive switch and tablet are threadedly coupled between the attachment base and shifting material frame, and the round nut is sheathed on outside attachment base, Accommodating hole is offered on attachment base, the reset spring is located in accommodating hole, and described slidiing pin one end connects reset spring, separately One end connects tablet, and the inductive switch is fixed on attachment base, and the induction end of inductive switch and the side wall of attachment base are mutually neat Flat, the tablet is flush with the sucker face after silicon single crystal rod is sucked.

As a kind of preferred structure of the utility model, the attachment base includes fixing seat and sliding seat, the fixing seat It is threadedly coupled with moving between material frame, is slidably socketed between the sliding seat and fixing seat, inside the fixing seat and sliding seat Accommodating hole is offered, sliding seat is connected to fixing seat, and the reset spring is located in the accommodating hole of fixing seat, the slidiing pin One end is connect with reset spring, and the other end connects tablet, and the inductive switch is fixed on sliding seat.

As a kind of preferred structure of the utility model, described further includes clamping workpiece to knife Material moving device, the clamping Workpiece is fixed on shifting material frame, and clamping workpiece is located at the two sides of sucker, and the clamping workpiece includes clamping seat, the first cylinder It being fixed on the side wall of clamping seat with the cylinder body of the second cylinder, first cylinder, the telescopic rod of the first cylinder runs through clamping seat, Telescopic rod passes through clamping seat one end and is fixed with withstanding tight block, and the telescopic rod outer cover between the withstanding tight block and clamping seat side wall is equipped with The cylinder body of round extensible cover, second cylinder is fixed on the side wall of clamping seat, and the telescopic rod of the second cylinder is flexible to be realized With the first Telescopic-cylinder bar against or separate, positioned at the equal direction of telescopic rod of the first cylinder of the clamping workpiece of sucker two sides Sucker setting.

As a kind of preferred structure of the utility model, the conveying device further includes feeding mechanism, the feeding mechanism Including clamping device and conveying mechanism, the clamping device for clamping silicon single crystal rod, the conveying mechanism include carriage and Driving mechanism, the clamping device are fixed on carriage, and the driving mechanism is for driving carriage along table spindle to fortune It is dynamic.

As a kind of preferred structure of the utility model, the driving mechanism includes servo motor, transmission gear and transmission Rack gear, the driving rack are arranged on the side wall of workbench, and the transmission gear is meshed with driving rack, the servo electricity The output shaft of machine is connect with transmission gear.

As a kind of preferred structure of the utility model, the clamping device includes the first master jaw, the second master jaw, card The one of pawl and extensible member, the arc-shaped structure of first master jaw, the second master jaw, one end of the first master jaw and extensible member End is hinged, and the other end of the first master jaw is fixed with claw, and one end of the second master jaw and the other end of extensible member are hinged, and second The other end of master jaw is fixed with claw, and the first master jaw passes through support column with the second master jaw and connect carriage, the first card Pawl seat and the second master jaw can be rotated around with support column junction.

As a kind of preferred structure of the utility model, the idler wheel mechanism includes U-shaped rolling wheel support frame, connecting rod and rolling Wheel, the U-shaped rolling wheel support frame are fixedly connected with bench top, and the idler wheel is fixed on rolling wheel support frame via connecting rod In U-lag, idler wheel can be rotated around connecting rod.

As a kind of preferred structure of the utility model, the extended line of idler wheel center line is formed default in two rows of idler wheel mechanisms Angle β, the angle β are 30-60 °.

Inventor additionally provides a kind of silicon single crystal rod cutting machine, and the cutting machine includes saw blade cutting operating mechanism and monocrystalline Silicon rod conveying device, the silicon single crystal rod conveying device are the above-mentioned silicon single crystal rod conveying device stated.

It is different from the prior art, above-mentioned technical proposal has the advantages that the utility model silicon single crystal rod conveying device, makes An end face of silicon single crystal rod is sucked with the sucker mobile to knife Material moving device, and passes through Material moving device for silicon single crystal rod along idler wheel Mechanism drags to given cut position, and feeding process is simpler, and silicon single crystal rod travelling speed is fast, high in machining efficiency；Furthermore exist When the end face of silicon single crystal rod is sucked in sucker completely, the cutting origin of silicon single crystal rod is determined, and the testing agency by adding guarantees Ensure the accuracy of silicon single crystal rod and original point position, to reduce silicon single crystal rod Cutting Length error, guarantees its machining accuracy.

Detailed description of the invention

Fig. 1 is the oblique view of structural diagram of one embodiment of the utility model silicon single crystal rod conveying device；

Fig. 2 is the oblique view of structural diagram of one embodiment of workbench of the utility model silicon single crystal rod conveying device；

Fig. 3 is the schematic front view of one embodiment of workbench of the utility model silicon single crystal rod conveying device；

Fig. 4 is the strabismus structural representation to one embodiment of knife Material moving device of the utility model silicon single crystal rod conveying device Figure；

Fig. 5 is the oblique view of structural diagram of one embodiment of testing agency of the utility model silicon single crystal rod conveying device；

Fig. 6 is the schematic cross-sectional view of one embodiment of testing agency of the utility model silicon single crystal rod conveying device；

Fig. 7 is the oblique view of structural diagram of one embodiment of clamping workpiece of the utility model silicon single crystal rod conveying device；

Fig. 8 is the oblique view of structural diagram of one embodiment of feeding mechanism of the utility model silicon single crystal rod conveying device；

Fig. 9 is the oblique view of structural diagram of one embodiment of idler wheel mechanism of the utility model silicon single crystal rod conveying device；

Figure 10 is the oblique view of structural diagram of one embodiment of the utility model silicon single crystal rod cutting machine.

Description of symbols:

1, workbench；

2, to knife Material moving device；

21, sucker；

221, material frame is moved；

2221, servo motor；2222, transmission gear；2223, driving rack；2224, speed reducer；2225, linear guide； 2226, sliding block；

23, testing agency；231, fixing seat；232, sliding seat；233, round nut；234, slidiing pin；235, bullet is resetted Spring；236, inductive switch；237, tablet；

24, clamping workpiece；241, clamping seat；242, the first cylinder；243, the second cylinder；244, withstanding tight block；245, round Extensible cover；

3, feeding mechanism；

311, the first master jaw；312, the second master jaw；313, claw；314, extensible member；315, support column；316, it supports Plate；

321, carriage；

4, idler wheel mechanism；41, U-shaped rolling wheel support frame；42, connecting rod；43, idler wheel；

5, silicon single crystal rod；

6, saw blade cutting operating mechanism.

Specific embodiment

Technology contents, construction feature, the objects and the effects for detailed description technical solution, below in conjunction with specific reality It applies example and attached drawing is cooperated to be explained in detail.

Fig. 1 to Figure 10 is please referred to, the utility model provides a kind of silicon single crystal rod conveying device, and the conveying device includes Workbench 1, idler wheel mechanism 4 and to knife Material moving device 2.Bearing structure of the workbench 1 as monocrystalline silicon to be processed, monocrystalline silicon The movement of stick 5 is completed on workbench 1 with processing.

The idler wheel mechanism 4 is set on workbench 1, and idler wheel mechanism 4 is arranged to two rows along workbench 1；The roller machine Structure 4 is directly contacted with silicon single crystal rod 5, and 43 face of idler wheel along idler wheel mechanism 4 of silicon single crystal rod 5 is slided, so that silicon single crystal rod 5 Movement is more smoothly.In actual use, the silicon single crystal rod 5 is manually pushed away along the feeding of idler wheel mechanism 4 either passing through It is dynamic, it can also be realized by special feeding mechanism 3.

It is described that Material moving device is fed as the one of the present apparatus to knife Material moving device 2, mobile silicon single crystal rod 5 had both been played to finger Determine the effect of Working position, and play the role of calibrating knife, guarantees the accuracy of 5 working origin of silicon single crystal rod, to ensure it Machining accuracy.Specifically, described includes sucker 21, Material moving device and testing agency 23, the Material moving device to knife Material moving device 2 Including moving material frame 221 and driving mechanism, the driving mechanism is for driving shifting material frame 221 to be axially moved along workbench 1, the suction Disk 21 is fixed on shifting material frame 221, and for pasting suction in an end face of silicon single crystal rod 5, the testing agency 23 includes sucker 21 Attachment base, round nut 233, slidiing pin 234, reset spring 235, inductive switch 236 and tablet 237, the attachment base with It moves between material frame 221 and is threadedly coupled, the round nut 233 is sheathed on outside attachment base, and accommodating hole is offered on attachment base, described multiple Position spring 235 is located in accommodating hole, and described 234 one end of slidiing pin connects reset spring 235, and the other end connects tablet 237, The inductive switch 236 is fixed on attachment base, and the induction end of inductive switch 236 and the side wall of attachment base are flush, the sense Plate 237 is answered to be flush with 21 face of sucker after silicon single crystal rod 5 is sucked.

Referring to Fig. 4, in the present embodiment, the front end face that silicon single crystal rod 5 is sucked to the sucker 21 of knife Material moving device 2 touch Sucker 21 is transported when the position that sucker 21 sucks 5 front end face of the silicon single crystal rod completely origin long as cutting meter by Material moving device Dynamic drive sucks the silicon single crystal rod 5 on sucker 21 and moves forward, and when Material moving device moves to specified position, starts cutter Make.The origin long as cutting meter of silicon single crystal rod 5 determines, then guarantees the accuracy of knife position, then the Cutting Length of silicon single crystal rod 5 It is entirely accurate, and more efficient for the determination of Cutting Length using this structure, to provide adding for whole device Work efficiency rate.Fig. 5 and Fig. 6 are please referred to, in order to further increase the Cutting Length precision of silicon single crystal rod 5, is gone back in knife Material moving device 2 Provided with testing agency 23, the accuracy of long origin in terms of ensuring to cut, specifically tablet 237 and suction in testing agency 23 Sucker 21 face of the disk 21 after sucking silicon single crystal rod 5 is flush, and when sucker 21 does not suck silicon single crystal rod 5, tablet 237 should In the front of sucker 21, silicon single crystal rod 5 is struck first on tablet 237, and tablet 237 moves backward, before silicon single crystal rod 5 End face strikes when being sucked completely on sucker 21 by sucker 21, and tablet 237 is flush with 21 face of sucker, at this time tablet 237 Contact inductive switch 236 is touched backward, inductive switch 236 lights the accuracy to guarantee silicon single crystal rod 5 and original point position, To reduce 5 Cutting Length error of silicon single crystal rod, guarantee its machining accuracy, after silicon single crystal rod 5 is detached from sucker 21, is resetting Under the action of spring 235, tablet 237 is returned to original state, to carry out next calibration.And when inductive switch 236 is bright It rises and sucker 21 does not drive silicon single crystal rod 5 mobile or silicon single crystal rod 5 is dragged by sucker 21, and inductive switch 236 is without anti- It answers, illustrates that error occur in silicon single crystal rod 5 and original point position, then cutting length determines precision then and will receive reduction, adjustment connection at this time The position of seat, adjustment connecting screw locks the position for moving the depth for expecting frame 221 to adjust tablet 237, so that sucker 21 is being inhaled 21 face of sucker after tight silicon single crystal rod 5 is flush with tablet 237, determines that the accuracy of long origin is counted in the cutting of silicon single crystal rod 5, After rotation attachment base regulates the position of tablet 237, then the round nut 233 by being set in outside attachment base locks.It is excellent Choosing, the sucker 21 is circle, and the center that the sucker 21 moved on material frame 221 is arranged in is corresponding with the center of silicon single crystal rod 5.

In embodiment as shown in Figure 5 and Figure 6, the attachment base includes fixing seat 231 and sliding seat 232, the fixation It is threadedly coupled, is slidably socketed between the sliding seat 232 and fixing seat 231, the fixing seat between seat 231 and shifting material frame 221 231 with sliding seat 232 inside offer accommodating hole, sliding seat 232 is connected to fixing seat 231, and the reset spring 235 is located at In the accommodating hole of fixing seat 231, described 234 one end of slidiing pin is connect with reset spring 235, and the other end connects tablet 237, The inductive switch 236 is fixed on sliding seat 232.Fixing seat 231 expects being directly connected to for frame 221 as testing agency 23 and shifting Attachment base is divided into fixing seat 231 and the purpose of sliding seat 232 to be by structure: being missed when detecting that the long origin of cutting meter exists When poor, then the front-rear position to tablet 237 is needed to be adjusted, that is, screw thread locks shifting material frame in adjustment fixing seat 231 221 depth carries out rotation adjustment in fixing seat 231 because what is used between sliding seat 232 and fixing seat 231 is slidably connected When locking depth, when 232 position in the radial direction of sliding seat, is constant, then the inductive switch 236 being fixed on sliding seat 232 It can then keep constant with 237 relative position of tablet, to prevent normally detection work impacts to inductive switch 236.Having In the embodiment of body, one end that the connection of the slidiing pin 234 and reset spring 235 can be slidiing pin 234 is direct With one end of reset spring 235 against or slidiing pin 234 extend into reset spring 235 inward turning cavity in, slidiing pin The retention bead that is arranged on 234 and 235 one end of reset spring against.Preferably, 237 plastic material of tablet is made, It is that tablet 237 impacts the quality of silicon single crystal rod 5, because silicon wafer and ferrous material directly contact, ferrous material pole Possible with magnetic conductive substance is contained, lead to the complication of silicon wafer magnetic field edge effect, to influence silicon crystal block after cutting Quality.

Fig. 4 and Fig. 7 are please referred to, as a kind of preferred structure of the utility model, described further includes dress to knife Material moving device 2 Workpiece 24 is pressed from both sides, the clamping workpiece 24 is fixed on shifting material frame 221, and clamping workpiece 24 is located at the two sides of sucker 21, described Clamping workpiece 24 includes clamping seat 241, the first cylinder 242 and the second cylinder 243, and the cylinder body of first cylinder 242 is fixed on On the side wall of clamping seat 241, the telescopic rod of the first cylinder 242 runs through clamping seat 241, and telescopic rod is solid across 241 one end of clamping seat Surely there is withstanding tight block 244, the telescopic rod outer cover between 241 side wall of the withstanding tight block 244 and clamping seat is equipped with round extensible cover 245, the cylinder body of second cylinder 243 is fixed on the side wall of clamping seat 241, and the telescopic rod of the second cylinder 243 is flexible to be realized With 242 telescopic rod of the first cylinder against or separate, the first cylinder 242 positioned at the clamping workpieces 24 of 21 two sides of sucker is stretched Contracting bar is arranged towards sucker 21.It is overweight in 5 mass of silicon single crystal rod to be processed, sucker 21 can be cooperated by clamping workpiece 24 It is mobile to drag silicon single crystal rod 5, clamping workpiece 24 can also be used in when silicon single crystal rod 5 is cut, solid to the clamping of silicon single crystal rod 5 It is fixed.In actual use, 242 telescopic rod of the first cylinder elongation drives withstanding tight block 244 to be resisted against on silicon single crystal rod 5, and then second 243 telescopic rod of cylinder is flexible to be caused to oppress to the telescoping cylinder of the first cylinder 242, passes through 24 pairs of lists of clamping workpiece of 21 two sides of sucker Crystalline silicon rod 5 is clamped, and guarantees stability when silicon single crystal rod 5 is cut.Preferably, 24 liang of the clamping workpiece of 21 two sides of sucker is stretched It is 60-100 ° that contracting bar, which is formed by angle,.Preferably, the clamping seat 241 is used to install the through-hole of 242 telescopic rod of the first cylinder The center of center deviation clamping seat 241, and it is located at the distal end of 243 mounting surface of the second cylinder, 243 telescopic rod of the second cylinder and first 242 telescopic rod of cylinder is mutually perpendicular to, and for the installation site of the second cylinder 243 close to ejection end, which apply the second cylinder 243 The pressure for adding to 242 telescopic rod of the first cylinder is bigger, and frictional force is more stable.Clamping workpiece 24 using the above structure, clamping 24 second cylinder 243 of workpiece can be the biggish frictional force on 242 telescopic rod of the first cylinder with lesser ejection pressure conversion, Silicon single crystal rod 5 shakes in cutting process caused by capable of substantially reducing because of air cylinder air source pressure transient, and then collapses The generation of side or wavy surface, to guarantee the cut quality of silicon single crystal rod 5；After silicon single crystal rod 5 is cut off, the clamping workpiece 24 of withdrawal Withstanding tight block 244, silicon single crystal rod 5 falls on idler wheel mechanism 4, and the sucker 21 passed through on automatic tool preset Material moving device 2 drives monocrystalline Silicon rod 5 is moved to discharging region, high degree of automation, processing quality height.

As illustrated in figures 1 and 8, as a kind of preferred embodiment of the utility model, the conveying device further includes feeding Mechanism 3, the feeding mechanism 3 include clamping device and conveying mechanism, and the clamping device is described for clamping silicon single crystal rod 5 Conveying mechanism includes carriage 321 and driving mechanism, and the clamping device is fixed on carriage 321, and the driving mechanism is used It is axially moved in drive carriage 321 along workbench 1.Mounting rack first driving mechanism band of the carriage 321 as clamping device The dynamic movement of carriage 321 drives carriage 321 to move, to drive the clamping device movement of clamping silicon single crystal rod 5, reach it is mobile to Process the effect of silicon single crystal rod 5.

Referring to FIG. 1 to FIG. 4, as a kind of preferred embodiment of the utility model, the driving mechanism includes servo electricity Machine 2221, transmission gear 2222 and driving rack 2223, the driving rack 2223 is arranged on the side wall of workbench 1, described Transmission gear 2222 is meshed with driving rack 2223, and the output shaft of the servo motor 2221 is connect with transmission gear 2222. In the present invention, the driving mechanism is two sets of driving mechanisms, respectively as to knife Material moving device 2 and feeding mechanism 3 Power source.

In feeding mechanism 3, the output shaft of the servo motor 2221 connects through carriage 321 and transmission gear 2222 It connects, the servo motor 2221 starts, and the output shaft of servo motor 2221 drives the transmission gear 2222 engaged to occur to turn Dynamic, the rotation of transmission gear 2222 drives carriage 321 to move along a straight line along driving rack 2223.To knife Material moving device 2 In, the output shaft of the servo motor 2221 is connect through material frame 221 is moved with transmission gear 2222, and the servo motor 2221 opens Dynamic, the output shaft of servo motor 2221 drives the transmission gear 2222 engaged to rotate, and transmission gear 2222 rotates band The dynamic material frame 221 that moves moves along a straight line along driving rack 2223.Preferably, the servo motor 2221 and transmission gear 2222 Between be additionally provided with speed reducer 2224, the speed reducer 2224 is used to after reducing the high revolving speed that servo motor 2221 exports pass through Output shaft output.Using such driving mechanism, clever structure, manufacture is more simple, and driving mechanism is entirely set to workbench It is convenient for safeguarding on 11 side.Preferably, the first driving mechanism and the second driving mechanism are respectively arranged at two of workbench 1 On side.Preferably, it is additionally provided with linear guide 2225 on the workbench 11, therewith compatible shifting material frame 221 and defeated It send and is provided with guide rail slide block 2226 on frame 321, to guarantee that it is more stable that shifting material frame 221 and carriage 321 move.

Referring to Fig. 8, a kind of preferred embodiment as the utility model, the clamping device includes the first master jaw 311, the second master jaw 312, claw 313 and extensible member 314, first master jaw 311, the second master jaw 312 are arc-shaped Structure, one end of the first master jaw 311 and one end of extensible member 314 are hinged, and the other end of the first master jaw 311 is fixed with claw 313, one end of the second master jaw 312 and the other end of extensible member 314 are hinged, and the other end of the second master jaw 312 is fixed with card Pawl 313, the first master jaw 311 connect carriage 321, the first master jaw 311 by support column 315 with the second master jaw 312 It can be rotated around with 315 junction of support column with the second master jaw 312.In the present embodiment, the elongation of extensible member 314 will drive solid The first master jaw 311 and the second master jaw 312 being scheduled on carriage 321 are inwardly rotated around support column 315, the first claw 313 With the clamping inner cavity close to each other to shrink clamping device of the second claw 313, it is also secured to the claw of 313 open ends of claw 313 shrink, enable clamping device to clamp the silicon single crystal rod 5 on workbench 1, when extensible member 314 shrink when, the first deck with Second master jaw 312 will be separated from each other, to decontrol silicon single crystal rod 5, using the structural clamp mechanism to the folder of silicon single crystal rod 56 It takes fixed very simple and convenient.Preferably, the extensible member 314 can be equal for electric cylinder, hydraulic cylinder or linear motor It can.Preferably, it is additionally provided with cushion on the claw 313 and the contact surface of silicon single crystal rod 5, cushion uses polyurethane material system At.Preferably, the clamping device further includes support plate 316, the both ends of the support plate 316 respectively with the first master jaw 311 and the side walls hinged fixation of the second master jaw 312, the support plate 316 is used to improve the structural rigidity of entire clamping device, increases Firmness is played by force.

In embodiment as shown in Figure 9, the idler wheel mechanism 4 includes U-shaped rolling wheel support frame 41, connecting rod 42 and idler wheel 43, the U-shaped rolling wheel support frame 41 is fixedly connected with 1 top surface of workbench, and the idler wheel 43 is fixed on idler wheel via connecting rod 42 In the U-lag of 43 support frames, idler wheel 43 can be rotated around connecting rod 42.Idler wheel 43 on workbench 1 is arranged to above structure, The installation of idler wheel 43 is fairly simple, without opening up 43 mounting hole of idler wheel on workbench 1, saves complicated installation process, is rolling Wheel 43, which occurs to wear only to need to dismantle 43 support frame of idler wheel where wearing idler wheel 43, to be replaced, and is replaced simple brief Cost, and idler wheel 43 is installed using 43 support frame of idler wheel, it is only necessary to control the tilt angle of 43 support frame of idler wheel Very easily the extended line of 43 center line of idler wheel is formed by angle, that is, the holding angle to silicon single crystal rod 5.Preferably, two It is 30-60 ° that the extended line of 43 center line of idler wheel, which is formed by angle, in group idler wheel mechanism 45, and idler wheel 43 is arranged to this angle and exists It is more firm to the limit of silicon single crystal rod 5 when silicon single crystal rod 5 is cut.

Referring to Fig. 10, the utility model additionally provides a kind of silicon single crystal rod cutting machine, the cutting machine includes that scroll saw is cut Operating mechanism 6 and silicon single crystal rod conveying device are cut, the silicon single crystal rod conveying device is the above-mentioned silicon single crystal rod conveying device stated. Slice or truncation work of the saw blade cutting operating mechanism 6 for silicon single crystal rod 5.Specifically, the saw blade cutting fortune Row mechanism 6 includes rack, saw blade cutting unit and hoisting mechanism, and the saw blade cutting unit is located at the top of workbench 1, scroll saw Cutter unit is fixed via hoisting mechanism and rack, and the hoisting mechanism drives saw blade cutting unit to add monocrystalline silicon wafer Work.

It should be noted that being not intended to limit although the various embodiments described above have been described herein The scope of patent protection of the utility model.Therefore, based on the innovative idea of the utility model, embodiment described herein is carried out Change and modification or equivalent structure or equivalent flow shift made based on the specification and figures of the utility model, directly Or above technical scheme is used in other related technical areas indirectly, it is included in the patent protection model of the utility model Within enclosing.

Claims (9)

1. a kind of silicon single crystal rod conveying device, which is characterized in that the conveying device includes workbench, idler wheel mechanism and moves to knife Expect mechanism；

The idler wheel mechanism is set on workbench, and idler wheel mechanism is arranged to two rows along workbench；

Described includes sucker, Material moving device and testing agency to knife Material moving device, and the Material moving device includes moving material frame and driving Mechanism, the driving mechanism move material frame along workbench axial movement for driving, and the sucker is fixed on shifting material frame, and sucker is used It is inhaled on an end face of silicon single crystal rod in patch, the testing agency includes attachment base, round nut, slidiing pin, reset spring, sense Inductive switch and tablet are threadedly coupled between the attachment base and shifting material frame, and the round nut is sheathed on outside attachment base, attachment base On offer accommodating hole, the reset spring is located in accommodating hole, and described slidiing pin one end connects reset spring, and the other end connects Tablet is connect, the inductive switch is fixed on attachment base, and the induction end of inductive switch and the side wall of attachment base are flush, described Tablet is flush with the sucker face after silicon single crystal rod is sucked.

2. silicon single crystal rod conveying device according to claim 1, which is characterized in that the attachment base includes fixing seat and cunning Dynamic seat is threadedly coupled between the fixing seat and shifting material frame, is slidably socketed between the sliding seat and fixing seat, the fixing seat With accommodating hole is offered inside sliding seat, sliding seat is connected to fixing seat, and the reset spring is located at the accommodating hole of fixing seat In, described slidiing pin one end is connect with reset spring, and the other end connects tablet, and the inductive switch is fixed on sliding seat On.

3. silicon single crystal rod conveying device according to claim 2, which is characterized in that described further includes dress to knife Material moving device Workpiece is pressed from both sides, the clamping workpiece is fixed on shifting material frame, and clamping workpiece is located at the two sides of sucker, and the clamping workpiece includes The cylinder body of clamping seat, the first cylinder and the second cylinder, first cylinder is fixed on the side wall of clamping seat, and the first cylinder is stretched Contracting bar runs through clamping seat, and telescopic rod passes through clamping seat one end and is fixed with withstanding tight block, between the withstanding tight block and clamping seat side wall Telescopic rod outer cover is equipped with round extensible cover, and the cylinder body of second cylinder is fixed on the side wall of clamping seat, the second cylinder Telescopic rod it is flexible realize with the first Telescopic-cylinder bar against or separate, positioned at the first gas of the clamping workpiece of sucker two sides The telescopic rod of cylinder is arranged towards sucker.

4. silicon single crystal rod conveying device according to claim 1, which is characterized in that the conveying device further includes feeder Structure, the feeding mechanism include clamping device and conveying mechanism, and the clamping device is for clamping silicon single crystal rod, the conveyer Structure includes carriage and driving mechanism, and the clamping device is fixed on carriage, and the driving mechanism is for driving carriage It is axially moved along workbench.

5. silicon single crystal rod conveying device according to claim 4, which is characterized in that the driving mechanism includes servo electricity Machine, transmission gear and driving rack, the driving rack are arranged on the side wall of workbench, the transmission gear and driving rack It is meshed, the output shaft of the servo motor is connect with transmission gear.

6. silicon single crystal rod conveying device according to claim 4, which is characterized in that the clamping device includes the first claw Seat, the second master jaw, claw and extensible member, the arc-shaped structure of first master jaw, the second master jaw, the first master jaw One end and one end of extensible member are hinged, and the other end of the first master jaw is fixed with claw, one end of the second master jaw and extensible member The other end it is hinged, the other end of the second master jaw is fixed with claw, and the first master jaw and the second master jaw pass through support column Carriage is connected, the first master jaw and the second master jaw can be rotated around with support column junction.

7. silicon single crystal rod conveying device according to claim 1, which is characterized in that the idler wheel mechanism includes U-shaped idler wheel Support frame, connecting rod and idler wheel, the U-shaped rolling wheel support frame are fixedly connected with bench top, and the idler wheel is via connecting rod It is fixed in the U-lag of rolling wheel support frame, idler wheel can be rotated around connecting rod.

8. silicon single crystal rod conveying device according to claim 1, which is characterized in that idler wheel center line in two rows of idler wheel mechanisms Extended line form default angle β, the angle β is 30-60 °.

9. a kind of silicon single crystal rod cutting machine, which is characterized in that the cutting machine includes saw blade cutting operating mechanism and silicon single crystal rod Conveying device, which is characterized in that the silicon single crystal rod conveying device is that silicon single crystal rod described in claim 1-8 any one is defeated Send device.