CN208588819U - A kind of positioning device of resistivity tester standard film - Google Patents

Abstract

The utility model discloses a kind of positioning devices of resistivity tester standard film in electrical resistivity measuring technique field, resistivity tester includes tester objective table, positioning device includes locating plate, the locating plate is arranged on the tester objective table, standard film limiting slot is offered on the locating plate, the utility model move standard film can not by control locating plate and standard film limiting slot, enable the operation in bigger shake and movement of tester objective table, standard film is also not susceptible to be displaced, improve the convenience used when test, with the position of faster speed adjustment tester objective table, standard film is also not easy to shake, reduce the operating error of tester, improve the accuracy of test result.

Description

A kind of positioning device of resistivity tester standard film

Technical field

The utility model relates to electrical resistivity measuring technique fields, more particularly to a kind of determining for resistivity tester standard film Position device.

Background technique

Resistivity measuring instrument resistivity tester is applied to semicon industry semiconductor material resistivity, the survey of square resistance Amount, resistivity measuring instrument is that function is simplified on the basis of guaranteeing performance, and environmental suitability is strong, clearly indicates, easily Operation and excellent test performance make it have very high cost performance.

It is calibrated when calibrating resistance rate tester usually using circle impedance standard piece at present, standard film is placed in resistance It measures in tester loading, since there are resistivity non-uniform phenomenons for standard film, so needing to adjust standard film position, marks at present The positioning method of quasi- built-in testing point has manually to manually control to be controlled with computer, manually controls the position of tester objective table, can It is inaccurate that positioning can be will appear, not to medium factor, increase new error, and computer control tester objective table is mobile, Tester objective table has mobile suddenly in mobile process and stops suddenly, has strong pause and transition in rhythm or melody sense, the excessive appearance of inertia It easily is subjected to displacement standard film, to generate error, leads to test point position inaccurate, introduces error, it is now desired to which one kind is given Resistivity tester designs a kind of device for being able to solve standard film positioning and being not allowed, be easy to happen the case where displacement.

Based on this, the utility model devises a kind of positioning device of resistivity tester standard film, to solve above-mentioned ask Topic.

Summary of the invention

The purpose of this utility model is to provide a kind of positioning devices of resistivity tester standard film, in tester loading When platform is mobile, standard film is also not easy to shake, and increases the stability of standard film, improves the accurate of testing efficiency and test result Property.

The utility model is realized in this way: a kind of positioning device of resistivity tester standard film, resistivity tester Including tester objective table, positioning device includes locating plate, and the locating plate is arranged on the tester objective table, described fixed Standard film limiting slot is offered on bit slice.

Further, the standard film limiting slot is circle, the diameter of the internal diameter of the standard film limiting slot than standard film It is 0.1 millimeter big.

Further, a plurality of locating plate limit holes are offered on the locating plate, the locating plate limit hole runs through institute State locating plate.

Further, a plurality of objective table location holes, a plurality of objective tables are offered on the tester objective table Location hole and a plurality of locating plate limit hole sites correspond.

Further, the tester objective table and the locating plate are locked by positioning pin；The positioning pin and loading Between platform location hole, between the positioning pin and locating plate limit hole all for interference fit.

It further, is detachable to paste connection between the locating plate and tester objective table.

Further, the locating plate is round or rectangular.

Further, the locating plate has a plurality of replacement locating plates, opens up respectively on a plurality of replacement locating plates There are the refill-unit limiting slot identical but of different sizes as standard film limit groove shape, and the replacement of a plurality of replacement locating plates Part limiting slot size is different.

The beneficial effects of the utility model are: the utility model makes standard film by control locating plate and standard film limiting slot It can not move, enable the operation in bigger shake and movement of tester objective table, standard film is also not susceptible to be displaced, improve The convenience used when test, with the position of faster speed adjustment tester objective table, standard film is also not easy to shake, and reduces The operating error of tester, improves the accuracy of test result.

Detailed description of the invention

The utility model is further described in conjunction with the embodiments with reference to the accompanying drawings.

Fig. 1 is the utility model texture edge cross-sectional view；

Fig. 2 is the utility model locating plate top view.

In attached drawing, parts list represented by the reference numerals are as follows:

1- tester objective table, 11- objective table location hole, 2- locating plate, 21- locating plate limit hole, the limit of 22- standard film Slot, 3- positioning pin.

Specific embodiment

It please refers to shown in Fig. 1 to 2, the utility model provides a kind of technical solution: a kind of resistivity tester standard film Positioning device, resistivity tester include tester objective table 1, and positioning device includes locating plate 2, and the setting of locating plate 2 is being tested On instrument objective table 1, standard film limiting slot 22 is offered on locating plate 2, and locating plate 2 is installed to tester objective table 1 in this way, makes to mark Quasi- piece can be stuck in standard film limiting slot 22, increase the stability of standard film, improve measurement accuracy.

Wherein, standard film limiting slot 22 is circle, and the internal diameter of the standard film limiting slot 22 is bigger than the diameter of standard film by 0.1 Millimeter, makes standard film accurate positioning, and convenient for disassembly and assembly, will not damage standard film, and a plurality of locating plate limits are offered on locating plate 2 Hole 21, locating plate limit hole 21 run through locating plate 2, facilitate locating plate 2 and tester objective table 1 to position and use, tester loading A plurality of objective table location holes 11, a plurality of objective table location holes 11 and a plurality of locating plate limit holes 21 are offered on platform 1 One-to-one correspondence is set, is mutually located tester objective table 1 and locating plate 2 accurately, tester objective table 1 and locating plate 2 are by determining Position pin 3 locks；All match between positioning pin 3 and objective table location hole 11, between positioning pin 3 and locating plate limit hole 21 for interference It closes, firmly installs positioning pin 3, to be detachable between locating plate 2 and tester objective table 1 by 2 accurate positioning of locating plate Formula pastes connection, on tester objective table 1 without objective table location hole 11 can easy disassembly locating plate, keep the present apparatus suitable Wider with range, locating plate 2 is circle or rectangular, adapts to different testers and uses, locating plate 2 has a plurality of replacements to position Piece offers the refill-unit identical but of different sizes with 22 shape of standard film limiting slot on a plurality of replacement locating plates respectively Limiting slot, and the refill-unit limiting slot size of a plurality of replacement locating plates is different, multiple spare refill-units, with suitable Various sizes of standard film detection is answered to use.

One concrete application of embodiment are as follows: a plurality of positioning pins 3 are inserted into test by the utility model one by one when in use The objective table location hole 11 opened up on instrument objective table 1, and positioning pin 3 is pressed, positioning pin 3 and 11 bottom of objective table location hole cooperate Closely, after installing positioning pin 3, standard plate shape is circle or rectangular, according to the common size of standard film, pre-production Size accurately locating plate 2, then select the standard film limiting slot 22 with standard film cooperation, only one on each locating plate 2 The standard film limiting slot 22 of a fixed shapes and sizes finds out suitable positioning by the size and shape of standard film limiting slot 22 Then standard film is embedded in the standard film limiting slot 22 of locating plate 2 by piece 2, then limit the locating plate opened up on locating plate 2 Position hole 21 is aligned one by one with positioning pin 3, presses locating plate 2, locating plate 2 is limited on positioning pin 3, and then shift tester carries Standard film is directed at four probes, can be tested by object platform 1, and such fixed form is convenient and efficient, and cooperation is accurate, can not On resistivity tester using positioning pin 3, locating plate 2 is directly sticked on tester objective table 1 by seamless adhesive tape, this Mode needs to calibrate locating plate 2 in advance and is in center, and the utility model makes standard film by precalibrated locating plate 2 It positioning more acurrate, by fixed locating plate 2, makes tester objective table 1 when moving, standard film is not easy to shake, reduce error, And the center that may insure four probe alignment standard films, improves the accuracy of testing result, and it is of different shapes fixed to increase Bit slice 2 can cooperate different tester objective tables 1 to use, and also increase the replacement positioning of different size refill-unit limiting slot Piece makes the standard film of more sizes, can be positioned and be measured with the utility model.

Although those familiar with the art answers the foregoing describe specific embodiment of the present utility model Working as understanding, we are merely exemplary described specific embodiment, rather than for the limit to the scope of the utility model Fixed, those skilled in the art modification and variation equivalent made by the spirit according to the utility model all should Cover in the scope of the claimed protection of the utility model.

Claims (8)

1. a kind of positioning device of resistivity tester standard film, resistivity tester includes tester objective table (1), feature Be: positioning device includes locating plate (2), and the locating plate (2) is arranged on the tester objective table (1), the positioning Standard film limiting slot (22) are offered on piece (2).

2. a kind of positioning device of resistivity tester standard film according to claim 1, it is characterised in that: the standard Piece limiting slot (22) is circle, and the internal diameter of the standard film limiting slot (22) is 0.1 millimeter bigger than the diameter of standard film.

3. a kind of positioning device of resistivity tester standard film according to claim 1, it is characterised in that: the positioning A plurality of locating plate limit holes (21) are offered on piece (2), the locating plate limit hole (21) runs through the locating plate (2).

4. a kind of positioning device of resistivity tester standard film according to claim 3, it is characterised in that: the test Offer a plurality of objective table location holes (11) on instrument objective table (1), a plurality of objective table location holes (11) with it is a plurality of Locating plate limit hole (21) position corresponds.

5. a kind of positioning device of resistivity tester standard film according to claim 1, it is characterised in that: the test Instrument objective table (1) and the locating plate (2) are locked by positioning pin (3)；The positioning pin (3) and objective table location hole (11) it Between, between the positioning pin (3) and locating plate limit hole (21) be all interference fit.

6. a kind of positioning device of resistivity tester standard film according to claim 1, it is characterised in that: the positioning It is detachable to paste connection between piece (2) and tester objective table (1).

7. a kind of positioning device of resistivity tester standard film according to claim 1, it is characterised in that: the positioning Piece (2) is round or rectangular.

8. a kind of positioning device of resistivity tester standard film according to claim 1, it is characterised in that: the positioning Piece (2) has a plurality of replacement locating plates, offers respectively on a plurality of replacement locating plates and standard film limiting slot (22) shape The identical but of different sizes refill-unit limiting slot of shape, and each not phase of the refill-unit limiting slot size of a plurality of replacement locating plates Together.