CN208584372U - Grinding device - Google Patents

Abstract

The utility model aims at inhibiting the dispersion of fog or debris in the grinding device. The utility model discloses a solution is a grinder, include: a table with a suction function; a rotational whetstone for grinding an edge of the substrate protruding from the front of the table; a cover covering the outer side of the grinding stone and having an opening embedded in the grinding edge portion of the substrate; a discharge port located in the suction cover; a moving means for moving the table or the cover forward and backward in the left-right direction; a base material supported on the cover side and disposed above and below the polishing edge of the substrate; a hollow accumulation part in the left-right direction, which is arranged in the base material; an upper washing nozzle and a lower washing nozzle, which are connected with the inflow end at two ends of the hollow accumulation part and make the outflow outlet face the grinding edge of the substrate; an upper supply path and a lower supply path for supplying a mixed fluid of washing water and air between the upper and lower reservoirs; and a nozzle supported on the cover side and jetting a mixed fluid of grinding water and air at the grinding portion.

Description

Grinding device

Technical field

The utility model is the device about the edge of the substrates such as grinding glass substrate, ceramic wafer.

Background technique

Edge (chamfering in edge face or edge two sides corner) attrition process of various substrates is using in tandem with suction Draw the tables for keeping function and rotation whetslate, on aforementioned tables after supply mounting substrate, on one side by above-mentioned tables or rotation whetstone One of stone moves left and right, on one side when moving by the edge of the substrate on rotation whetslate grinding tables.

By nozzle to means of abrasion spray cooling water when the grinding.

Certainly, cooling water (mist) is to be recycled in the lid (box) with suction function on the outside of covering rotation whetslate, and is removed Other than cooling water, also recycle the clast to disperse with grinding (referring for example to patent document 1).

Patent document 1: No. 4745746 bulletins of Japanese Patent No..

Also, being to be embedded in the edge of workpiece (substrate) toward box and by box from being open according to the lapping mode of patent document 1 The edge of work in interior rotation whetslate grinding box, by the nozzle in box by cooling water injection in grinding part, and it is cold spraying But clast is attracted in box by water or grinding simultaneously.

If according to aforesaid way, be arranged nozzle in range array shape of the supply pipe on the way until front end, and by Each nozzle spray cooling water, therefore the injection flow velocity of the cooling water sprayed by each nozzle can be inconsistent, makes respectively because this is inconsistent Nozzle can not spray uniform cooling water to grinding part.

Assuming that pumping meeting enlargement if improving the supply pressure to the coolant liquid of supply pipe and improving cost, and with pressure Power is promoted to necessary pressure or more, and coolant liquid range of dispersing can also become larger, therefore clast range of dispersing also becomes larger, and has substrate surface Dirty expansion the problem of.

In particular, the dispersion range of mist also becomes larger as pressure rises, and as dispersion range is larger, point of clast contained by mist Scattered range also becomes larger, and contained clast also expands the attachment of substrate surface, if washing and removing clast in rear step, can make It has been generated in the film forming face of substrate surface processing bad.

Utility model content

Therefore, above-mentioned various undesirable grinding devices are solved the purpose of the utility model is to provide a kind of.

In order to solve the above-mentioned technical problem, the utility model includes with flowering structure:

Tables with suction function, in the substrate for keeping supply mounting above；

Whetslate is rotated, grinding is by aforementioned tables' leading edge aforesaid substrate edge outstanding in front of the tables；

Lid covers on the outside of the rotation whetslate, and has to be embedded in grinding for above-mentioned holding substrate from above-mentioned tables side peripheral wall The opening that the mode of mill marginal portion is arranged；

Outlet is connected to setting with the bottom surface of the lid；

Mobile device, makes above-mentioned tables or is placed on left and right directions to move forward and backward；

Left and right directions be elongated two substrates, be supported in above-mentioned lid side, and be configured at aforesaid substrate milled border it is upper Downside；

Left and right directions be it is hollow it is multiple harvest portion, be set in the upper and lower substrate；

Upside Washing spray nozzle and downside Washing spray nozzle harvest portion, connection inflow end, both ends hollow, and make to flow out discharge opening Towards the milled border of aforesaid substrate；

Upside supply road and downside supply road are set as in the above-mentioned mixed flow for harvesting supply washing water and air among portion Body；And

Nozzle, is supported in above-mentioned lid side, and to the grinding part of above-mentioned rotation whetslate and aforesaid substrate injection grinding water with The fluid-mixing of air.

The utility model achieves following technical effect compared with the existing technology:

As above-mentioned, grinding device according to the present utility model can grinding the attracting holding substrate that supply is placed on tables Edging cause is open in insert cover, in this condition can move together tables and substrate and (move and be assembled with rotation whetslate Lid is to replace mobile tables).

The fluid-mixing of grinding water and water is sprayed in grinding part by nozzle simultaneously in the movement, grinding can make to grind simultaneously It cuts the fluid-mixing mist of water and air and is mixed into the clast of the mist also from toward outlet, therefore improving whole in box in attraction box Dispersing has clast and clast to be mixed into mist and bad caused by the substrate surface for being attached to open outer side that disperses with this, also Attachment washing removal operation after simplifying dirty or grinding etc..

On the other hand, under grinding situation, by above and below substrate upside Washing spray nozzle and downside Washing spray nozzle by washing water It is sprayed with the fluid-mixing of air by the opening of substrate surface towards lid, therefore washing water or mist (with the grinding person that is mixed into clast) Pole attracts well is recovered in attraction box.

Therefore substrate surface caused by fogless or attachment clast is dirty.Also it can simplify the dirty of removal milled processed substrate Dirty post-treatment procedures.

Left and right directions is arranged especially in the substrate for the left and right directions for being configured at substrate or more harvests portion, and in each collection The fluid-mixing of indentation washing water and air in the center in storage portion, therefore harvest in portion full of above-mentioned fluid-mixing, it is full of this Fluid-mixing be connected to the multiple positions for harvesting among portion and both ends, and equably washed force feed to upside towards grinding edge on one side It washs nozzle and downside Washing spray nozzle sprays on one side, therefore washing water can forcibly be flowed into the opening of lid.

Therefore mist or grinding the clast outflow in lid be can inhibit or disperse outer in lid and be attracted in box, solve grinding whereby Powder-refining with water dissipates and mist disperses.

Also, the washing water injection system of upper side nozzle and lower side nozzle uses the fluid-mixing of water and air, further in lid The grinding part of interior substrate edges and rotation whetslate is used the fluid-mixing of grinding water and air by nozzle, therefore can be unchangeably Spray the fluid-mixing of strength flow velocity.

Then, upper side nozzle and lower side nozzle also have the function as washing, dry nozzle.

Especially make the fluid-mixing of high-pressure wash water and air by upside Washing spray nozzle and the injection of downside Washing spray nozzle in base Plate plate face, and wash stream lid plate face and flow into, therefore can washing plate face simultaneously, by plate face mist or clast well by opening Mouth flows into lid.

Detailed description of the invention

In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment Needed in attached drawing be briefly described, it should be apparent that, the accompanying drawings in the following description is only the utility model Some embodiments for those of ordinary skill in the art without creative efforts, can also be according to this A little attached drawings obtain other attached drawings.

Fig. 1 is to indicate that the part of the utility model lacks side view.

Fig. 2 is to indicate that the part of ibid major part lacks amplification profile.

Fig. 3 is to indicate that the part of the ibid donor site of grinding water and air lacks amplification front view.

Fig. 4 is the vertical section amplification front view for indicating the mixing supply portion of washing water and air.

Fig. 5 is the vertical section amplification profile of means of abrasion.

Fig. 6 is the cross-sectional plan figure for indicating the inflow part of washing water and grinding water.

Fig. 7 is the cross-sectional plan figure for indicating the inflow part of washing water and air.

Symbol description: A tables；A substrate；B mobile device；1 box；2 apertures；3 motors；4 rotation whetslates；5 support member；6 Lid；7 openings；8 tracks；9 saddles；10 linear motors；11 substrates one；12 substrates two；13 harvest portion one；14 harvest portion two；15 collection Storage portion three；16 the 1st accesses；17 inflow entrances one；18 inflow entrances two；19 the 2nd accesses；20 inflow entrances three；21 inflow entrances four；22 the 3rd Access；23 inflow entrances five；24 inflow entrances six；25 accesses one；26 accesses two；27 accesses three；28 nozzles one；29 nozzles two；30 sprays Mouth three；31 outlets.

Specific embodiment

The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work Every other embodiment obtained, fall within the protection scope of the utility model.

Illustrate the embodiments of the present invention below according to Figure of description.

In the embodiments of the present invention, as shown in Fig. 1~7, A is the tables with suction function, and is kept in above Supply the substrate a of mounting.

The tables A has hollow box 1 as shown in Figure 1, 2, and attracts hose in the suction port connection being set to below the box 1 (all illustration omitted) and attract in box 1, by connection aperture 2 groups of the attracting holding function of being set to 1 roof of box, and by substrate A is held on box 1.

Also, the milled border (diagram right front) for the substrate a being held on tables A by by the edge tables A it is outstanding in a manner of Protrude from front.

Also, configuring the rotation whetslate 4 of motor driving, the rotation whetstone in a manner of the edge grinding base plate a in front of tables A 4 system of stone is supported with the covering of lid 6, the lid 6 by support member 5.

Certainly, in the opposite with tables A into peripheral wall of lid 6, in order to connect the grinding leading edge for the substrate a for being held in tables A The circumferential surface of touching rotation whetslate 4, and it is provided with the opening 7 of insertion substrate a leading edge potion.

Also, the bearing and motor 3 of above-mentioned rotation whetslate 4 are installed on lid 6.

Also, any one of tables A or lid 6 are moved back and forth by mobile device B in left and right directions.

Above-mentioned mobile device B situation illustrated in Fig. 1 is mobile tables A, however, not limited to this, also 6 side of removable hood.

Then, as mobile device B, illustrated case slidably engages in the track 8 of left and right directions to be set under box 1 The saddle 9 in face, and moved forward and backward by the linear motor 10 for being set to track 8 and the sliding surface of saddle 9, but not It is defined in this, can also constitute and move by other.

Also, substrate 1, substrate 2 12 that left and right directions is elongated are supported in 6 side of lid, and it is set to the grinding side of substrate a Above and below edge.

In substrate 1 on the upside of this left and right directions setting up and down be elongated hollow front side harvest portion 1 and after Side harvests portion 2 14, and is to harvest portion 3 15 on the downside of elongated in left and right directions is arranged in the substrate of downside 2 12.

The inflow entrance one of grinding water is provided in the 1st access 16 for harvesting the connection of one 13 middle upper part of portion by above-mentioned front side 17, the air inflow aperture 2 18 of 1 access of Ji You, 16 oblique upper connection is harvesting the connection of 2 14 middle upper part of portion by above-mentioned rear side The 2nd access 19 in be provided with washing water inflow entrance 3 20,2 access of Ji You, 19 oblique upper connection air inflow aperture four 21, the inflow entrance 5 23 for harvesting 22 lower end of the 3rd access being connected to below among portion 3 15 by above-mentioned downside and being provided with washing water, And the air inflow aperture 6 24 being connected to by 22 obliquely downward of the 3rd access.

Air is mixed into above-mentioned grinding water or in washing water is mixed into air the main reason for, is to improve grinding water or washing The fluid pressure of water, and greatly improve ejection power.

By it is above-mentioned respectively harvest portion 1, harvest portion 2 14, harvest portion 3 15 as shown as be formed as left and right directions elongated Ellipse, and flowed into full of the mixing grinding water and air, 2 access 19 of Ji You, the 3rd access 22 flowed by the 1st access 16 Mixing, washing water and air.

Make respectively to harvest portion 1 at this time, the both ends that harvest portion 2 14, harvest portion 3 15 become arcuation, and become both ends of the surface The taper of arcuation can so make the flowing for respectively harvesting portion 1, harvesting portion 2 14, harvesting in portion 3 15 more smooth (in order to rear State distribution).

Then it two connections is respectively set flows into ends at the both ends for respectively harvesting portion 1, harvesting portion 2 14, harvesting portion 3 15 Distribution circuit 1, access 2 26, access 3 27, but be not limited to diagram two, can also respectively harvest portion 1, collection Storage portion 2 14, the both ends for harvesting portion 3 15 and intermediate setting three, and also settable four or more.

Using above-mentioned distribution circuit 1, access 2 26,3 27, access other discharge ends as nozzle 1, nozzle two 29, nozzle 3 30, and grinding water and air injection will be mixed in the edge substrate a and rotation whetslate by the discharge opening of the nozzle 1 4 grinding portion makes to mix washing water and air by the side in substrate a upper side inlet opening 7 with the discharge opening by nozzle 2 29 Formula injection, sprays mixing, washing water with the mode in inlet opening 7 below air self-reference substrate a with the discharge opening by nozzle 3 30 Penetrate, and by nozzle 2 29, nozzle 3 30 jet cleaning water and air and wash stream substrate a plate face it is dirty, and prevent mist It is dispersed outside the lid 6 from opening 7 or is dispersed and flowed into lid 6 with the clast of grinding, furthermore also washable rotation whetslate 4.

Therefore it can depress and spray in the mixing for the fluid-mixing and air and washing water for not reducing air and grinding water, and Reach purpose.

Certainly, the grinding water or washing water that flow in lid 6 and the mist for being mixed into clast are by being connected to setting with 6 bottom surface of lid Attract outlet 31 to attract and recycles.

Also, the discharge opening end of each nozzle 1, nozzle 2 29, nozzle 3 30 is as shown in Fig. 1,2,5 towards jet port arc It processes to shape, the outflow that can so reduce fluid is resisted, and is not reducing fluid pressure injection.

It applies specific case in this specification to be expounded the principles of the present invention and embodiment, the above reality The explanation for applying example is merely used to help understand the method and its core concept of the utility model；Meanwhile for the general of this field Technical staff, based on the idea of the present invention, there will be changes in the specific implementation manner and application range.To sum up institute It states, the content of the present specification should not be construed as a limitation of the present invention.

Claims (1)

1. a kind of grinding device characterized by comprising

Tables with suction function are to maintain the substrate of supply mounting above；

Whetslate is rotated, grinding is by tables' leading edge substrate edges outstanding in front of the tables；

Lid covers on the outside of the rotation whetslate, and with the milled border part to be embedded in the substrate from the tables side peripheral wall Opening；

Outlet is connected to setting with the bottom surface of the lid；

Mobile device, make the tables or this be placed on left and right directions and move forward and backward；

Left and right directions is two substrates of elongated, is supported in the lid side, and be configured at the upper and lower sides of the milled border of the substrate；

Left and right directions be it is hollow it is multiple harvest portion, be set in two substrate；

Upside Washing spray nozzle and downside Washing spray nozzle harvest the connection of portion both ends in hollow this and flow into end, and make upside washing Milled border of the outflux of nozzle and the downside Washing spray nozzle towards the substrate；

Upside supply road and downside supply road are set as harvesting the mixed flow of intermediate the supply washing water and air in portion at those Body；And

Nozzle is supported in the lid side, and the mixing of grinding water and air is sprayed toward the grinding part of the rotation whetslate and the substrate Fluid.