CN208567544U - Corrugated cone cylinder water cooling equipment in one kind - Google Patents
Corrugated cone cylinder water cooling equipment in one kind Download PDFInfo
- Publication number
- CN208567544U CN208567544U CN201820992965.7U CN201820992965U CN208567544U CN 208567544 U CN208567544 U CN 208567544U CN 201820992965 U CN201820992965 U CN 201820992965U CN 208567544 U CN208567544 U CN 208567544U
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- CN
- China
- Prior art keywords
- cone cylinder
- cylinder water
- wall
- cooled jacket
- cooling equipment
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 28
- 238000001816 cooling Methods 0.000 title claims abstract description 23
- 230000001815 facial effect Effects 0.000 claims 7
- 230000000694 effects Effects 0.000 abstract description 6
- 230000009286 beneficial effect Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 5
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 5
- 230000001154 acute effect Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model provides corrugated cone cylinder water cooling equipment in one kind, including cone cylinder water-cooled jacket, and the taper of the taper and Czochralski furnace guide shell of the cone cylinder water-cooled jacket matches, and the cone cylinder water-cooled jacket can be nested in the guide shell of the Czochralski furnace；Groove is offered on the cone cylinder water-cooled jacket inner wall, the utility model has the beneficial effects that water-cooled jacket is nested into the guide shell of Czochralski furnace, save furnace inner space, improve cooling effect, simultaneously by the way that corrugated structure is arranged in inner wall, heat exchange efficiency is further improved, has many advantages, such as that structure is simple, cooling efficiency is high.
Description
Technical field
The utility model belongs to crystal pulling furnace corollary equipment field, sets more particularly, to cone cylinder water cooling corrugated in one kind
It is standby.
Background technique
In existing technology, it is converted to during monocrystalline silicon production for polysilicon and uses Czochralski furnace, Czochralski furnace is one
Kind melts the polycrystalline materials such as polysilicon in inert gas (based on nitrogen, helium) environment, with heater, uses Grown by CZ Method
The equipment of dislocation-free monocrystalline.The temperature of the monocrystalline silicon of molten condition is higher under high temperature environment, and carrying out cooling just can be carried out
Subsequent process.Generally use the cooling that the water-cooled jacket being arranged in Czochralski furnace carries out monocrystalline silicon, but current water-cooled jacket inner wall
For planar structure, heat exchange area is small relative to the internal surface area of interior ripple water-cooled jacket, and heat exchanger effectiveness is to be improved.
Summary of the invention
Problem to be solved in the utility model is to provide corrugated cone cylinder water-cooled jacket in one kind, is especially suitable for being set to monocrystalline
Inside Czochralski furnace, by inner wall ripple struction, increases heat exchange area, improve rate of heat exchange, improve cooling effect.
In order to solve the above technical problems, the technical solution adopted in the utility model is:
Corrugated cone cylinder water cooling equipment in one kind, it is characterised in that: including cone cylinder water-cooled jacket,
The taper of the taper and Czochralski furnace guide shell of the cone cylinder water-cooled jacket matches, and the cone cylinder water-cooled jacket can be nested in
In the guide shell of the Czochralski furnace；
Groove is offered on the cone cylinder water-cooled jacket inner wall.
By opening up groove on cone cylinder water-cooled jacket inner wall, ripple struction is formd on the inner wall of cone cylinder water-cooled jacket, is increased
Big heat exchange area, improves rate of heat exchange, and then promote cooling effect.
Diversified forms or their combination can be set into inner wall ripple, flexibly selects according to actual needs.
It is the inner wall ripple of triangle by using cross section profile, is capable of increasing heat exchange area.
It uses cross section profile for trapezoidal inner wall ripple, although heat exchange area is less than the inner wall ripple of triangle, avoids
Acute angle is generated, acute angle is avoided to cause to damage to monocrystalline silicon.
Use cross section profile for the inner wall ripple of rectangle, rigidity is high, facilitates and is processed.
Use cross section profile for the inner wall ripple of U-shaped, bearing capacity is higher under the conditions of same wall thickness, compensation ability compared with
Greatly, stress distribution is uniform, and fatigue life is higher, good combination property.
Use cross section profile for the inner wall ripple of Ω shape, section can be high pressure resistant, but rigidity is low.It is suitble in pressure height, displacement
It measures occasion small, that flexure is small to use, but manufacturing process is complicated.
Use cross section profile for the inner wall ripple of S-shaped, bearing capacity is higher, is not likely to produce stress concentration, but manufacture is compared
It is complicated.
It further include water pipe, the water pipe is connect with the cone cylinder water-cooled jacket, and the water pipe is arranged along the Czochralski furnace inner wall.
Water pipe not only plays water conduction, also acts as support positioning action, keeps installation of the cone cylinder water-cooled jacket in Czochralski furnace more firm
Gu.
The utility model has the advantages and positive effects of: due to the adoption of the above technical scheme, water-cooled jacket being nested into
In the guide shell of Czochralski furnace, furnace inner space is saved, improves cooling effect.Simultaneously by the way that corrugated structure is arranged in inner wall, into one
Step improves heat exchange efficiency.Have many advantages, such as that structure is simple, cooling efficiency is high.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of an embodiment of the present invention
Fig. 2 is the triangle inner wall ripple schematic diagram of an embodiment of the present invention
Fig. 3 is the trapezoidal inner wall ripple schematic diagram of an embodiment of the present invention
Fig. 4 is the rectangle inner wall ripple schematic diagram of an embodiment of the present invention
Fig. 5 is the U-shaped inner wall ripple schematic diagram of an embodiment of the present invention
Fig. 6 is the Ω shape inner wall ripple view of an embodiment of the present invention
Fig. 7 is the S-shaped inner wall ripple schematic diagram of an embodiment of the present invention
In figure:
1, water pipe 2, cone cylinder water-cooled jacket 3, corrugated internal wall
Specific embodiment
As Fig. 1, an embodiment of the present invention structural schematic diagram shown in, in an embodiment of the utility model, including
Cone cylinder water-cooled jacket 2,
The taper of cone cylinder water-cooled jacket 2 and the taper of Czochralski furnace guide shell match, and cone cylinder water-cooled jacket 2 can be nested in Czochralski furnace
Guide shell in；
Groove is offered on cone cylinder water-cooled jacket inner wall.
By opening up groove on 2 inner wall of cone cylinder water-cooled jacket, ripple struction 3 is formd on the inner wall of cone cylinder water-cooled jacket,
Heat exchange area is increased, improves rate of heat exchange, and then promote cooling effect.
It further include water pipe 1, water pipe 1 is connect with cone cylinder water-cooled jacket 2, and water pipe is arranged along 1 Czochralski furnace inner wall.Water pipe 1 not only rises
Water conduction effect, also acts as support positioning action, keeps installation of the cone cylinder water-cooled jacket 2 in Czochralski furnace more secured.
In the present embodiment, using the inner wall ripple of triangular-shaped profile, bucket inner wall indent triangle ripple is bored by calculating
The size and location of shape make 2 times that bore bucket inner wall surface area planar inner wall.As shown in Figure 2.
In the other embodiments of the utility model, diversified forms or their combination, root is can be set into inner wall ripple
It is flexibly selected according to actual demand.
As shown in figure 3, use cross section profile for trapezoidal inner wall ripple in an embodiment of the utility model, although
Heat exchange area is less than the inner wall ripple of triangle, but avoids generating acute angle, and acute angle is avoided to cause to damage to monocrystalline silicon.
As shown in figure 4, using cross section profile for the inner wall ripple of rectangle, rigidity in an embodiment of the utility model
Height facilitates and is processed.
As shown in figure 5, using cross section profile for the inner wall ripple of U-shaped, same in an embodiment of the utility model
Bearing capacity is higher under the conditions of wall thickness, and compensation ability is larger, and stress distribution is uniform, and fatigue life is higher, good combination property.
As shown in fig. 6, using cross section profile for the inner wall ripple of Ω shape, section in an embodiment of the utility model
Can be high pressure resistant, but rigidity is low.It is suitble to use in the occasion that pressure is high, displacement is small, flexure is small, but manufacturing process is complicated.
As shown in fig. 7, using cross section profile for the inner wall ripple of S-shaped, pressure-bearing energy in an embodiment of the utility model
Power is higher, is not likely to produce stress concentration, but manufacture more complicated.
It, may be with the demand of factually border service condition, inner wall ripple section wheel in the other embodiments of the utility model
It the advantages of wide combination for one or more inner wall corrugated forms as previously described, corrugated form each with synthesis, covers the shortage, but still
Belong within the scope of the technical solution of the utility model.
The embodiments of the present invention are described in detail above, the content is only the preferable reality of the utility model
Example is applied, should not be considered as limiting the scope of the present invention.Equalization made according to the scope of application of this utility model
Variation and improvement etc., should still belong within the patent covering scope of the utility model.
Claims (9)
1. corrugated cone cylinder water cooling equipment in one kind, it is characterised in that: including cone cylinder water-cooled jacket,
The taper of the taper and Czochralski furnace guide shell of the cone cylinder water-cooled jacket matches, and the cone cylinder water-cooled jacket can be nested in described
In the guide shell of Czochralski furnace；
Groove is offered on the cone cylinder water-cooled jacket inner wall.
2. corrugated cone cylinder water cooling equipment in one kind according to claim 1, it is characterised in that: the inner wall trench is cut
Facial contour is triangle.
3. corrugated cone cylinder water cooling equipment in one kind according to claim 1, it is characterised in that: the inner wall trench is cut
Facial contour is circular arc.
4. corrugated cone cylinder water cooling equipment in one kind according to claim 1, it is characterised in that: the inner wall trench is cut
Facial contour is trapezoidal.
5. corrugated cone cylinder water cooling equipment in one kind according to claim 1, it is characterised in that: the inner wall trench is cut
Facial contour is rectangle.
6. corrugated cone cylinder water cooling equipment in one kind according to claim 3, it is characterised in that: the inner wall trench is cut
Facial contour is U-shaped.
7. corrugated cone cylinder water cooling equipment in one kind according to claim 3, it is characterised in that: the inner wall trench is cut
Facial contour is Ω shape.
8. corrugated cone cylinder water cooling equipment in one kind according to claim 3, it is characterised in that: the inner wall trench is cut
Facial contour is S-shaped.
9. corrugated cone cylinder water cooling equipment in one kind as claimed in any of claims 1 to 8, which is characterized in that also
Including water pipe, the water pipe is connect with the cone cylinder water-cooled jacket, and the water pipe is arranged along the Czochralski furnace inner wall.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820992965.7U CN208567544U (en) | 2018-06-26 | 2018-06-26 | Corrugated cone cylinder water cooling equipment in one kind |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820992965.7U CN208567544U (en) | 2018-06-26 | 2018-06-26 | Corrugated cone cylinder water cooling equipment in one kind |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208567544U true CN208567544U (en) | 2019-03-01 |
Family
ID=65489091
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820992965.7U Expired - Fee Related CN208567544U (en) | 2018-06-26 | 2018-06-26 | Corrugated cone cylinder water cooling equipment in one kind |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208567544U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113755941A (en) * | 2020-06-05 | 2021-12-07 | 隆基绿能科技股份有限公司 | Heat exchange device and single crystal furnace |
-
2018
- 2018-06-26 CN CN201820992965.7U patent/CN208567544U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113755941A (en) * | 2020-06-05 | 2021-12-07 | 隆基绿能科技股份有限公司 | Heat exchange device and single crystal furnace |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190301 |