CN208520960U - A kind of semiconductor testing apparatus - Google Patents
A kind of semiconductor testing apparatus Download PDFInfo
- Publication number
- CN208520960U CN208520960U CN201820814898.XU CN201820814898U CN208520960U CN 208520960 U CN208520960 U CN 208520960U CN 201820814898 U CN201820814898 U CN 201820814898U CN 208520960 U CN208520960 U CN 208520960U
- Authority
- CN
- China
- Prior art keywords
- support plate
- fixture
- supporting table
- slide plate
- testing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The utility model discloses a kind of semiconductor testing apparatus, position is provided with fixture among the inner wall upper end of the detection storehouse, fixture lower end linking probe card, probe card lower end linking probe, sensor group is provided on the left of the fixture, monitoring device is set on the right side of the fixture, detection storehouse inner wall bottom is provided with hydraulic stem, hydraulic stem upper end connects delivery device, delivery device upper end connects supporting table, supporting table left and right ends are slidably connected sliding rail, detection storehouse outer wall is provided with operation bench, when staff completes to test, slide plate is by detecting inside the through-hole extending equipment of storehouse surface first, the anti-limited slip plate of limiting device deviates sliding slot, the support plate a cooperation motor moves up and down, the support column applies pressure to the limited post of wafer in limit hole, staff easily takes out wafer, this assay device structures is reasonable, behaviour Make simply, the pick-and-place of wafer is convenient, is very suitable for being used as semiconductor test.
Description
Technical field
The utility model relates to semiconductor testing apparatus, specifically a kind of semiconductor testing apparatus.
Background technique
A kind of semiconductor testing apparatus is failure for testing the semiconductor devices of manufacture and is transporting to before market
The equipment classified according to test result to semiconductor devices.
Currently, when carrying out semiconductor test, by the way that the probe in probe card is directly directly connect with the testing cushion on chip
Chip signal is drawn in touching, then peripheral test instrument and software control is cooperated to achieve the purpose that automatic measurement, semiconductor devices have
The pallet of customization is held, and still, customization tray surface is provided with opening and is used to limit semiconductor, and tester is in the process of taking
Middle possible damage semiconductor.Therefore, those skilled in the art provide a kind of semiconductor testing apparatus, to solve above-mentioned background skill
The problem of being proposed in art.
Utility model content
The purpose of this utility model is to provide a kind of semiconductor testing apparatus, mentioned above in the background art to solve
Problem.
To achieve the above object, the utility model provides the following technical solutions:
A kind of semiconductor testing apparatus, detection storehouse inner wall upper end centre position are provided with fixture, the connection of fixture lower end
Probe card, probe card lower end linking probe, the fixture left side are provided with sensor group, setting monitoring dress on the right side of the fixture
It sets, detection storehouse inner wall bottom is provided with hydraulic stem, and hydraulic stem upper end connects delivery device, delivery device upper end connection branch
Platform is supportted, supporting table left and right ends are slidably connected sliding rail, and detection storehouse outer wall is provided with operation bench；
The supporting table includes support plate, limit hole and support column, is arranged in parallel with support plate immediately below the support plate
The one end a, support plate a is provided with limited block, and the support plate a is slidably connected sliding rail by limited block, and sliding rail is fixedly connected with support
Plate, the surface the support plate a are fixedly connected with motor, motor axle portion connection wire rod, and the support plate is corresponding with screw rod position, size
It is inlaid with nut apparatus；
The delivery device includes that motor a, slide plate and slide plate a, the slide plate left and right ends are provided with motor a, motor a
Axle portion connects idler wheel, and the slide plate connects slide plate a by roller-coaster, and the slide plate a and scroll wheel positions are correspondingly arranged on sliding slot.
As a further solution of the present invention: the support plate surface is provided with limit hole, the support plate a and limit
Position hole site is correspondingly arranged on support column, and support column upper and lower ends diameter is identical as limit hole, and support column height is greater than limit
Position hole height.
The supporting table left and right ends are provided with sliding block, the support as a further solution of the present invention,
Platform is slidably connected sliding rail by sliding block.
When the hydraulic stem drops to extreme lower position as a further solution of the present invention, detection storehouse table
Face and supporting table and delivery device position are correspondingly arranged on through-hole, and the ruler that clear size of opening is common greater than supporting table and delivery device
It is very little.
The detection storehouse surface and probe location are correspondingly arranged on observation as a further solution of the present invention,
Window, and observation window material is tempered glass.
The slide plate a is equipped with position setting among the end surface of sliding slot as a further solution of the present invention,
There is limiting device, limiting device design is "T"-shaped, and slide plate and limiting device size and position are correspondingly arranged on sliding slot.
Compared with prior art, the utility model has the beneficial effects that
1, the utility model designs advantages of simple in structure, uses easy to operate, and practicability is very high, this inspection
Device is surveyed for detecting to semiconductor, the sensor group is internally provided with photoelectric sensor, infrared sensor and heat
Quick inductor, staff cooperate monitoring device to observe the state of probe by the observation window, prevent the spy of damage
It being detected for semiconductor, the hydraulic stem drives supporting table to move up and down, thus contact wafer with probe, staff
Semiconductor quality is judged by the information that operation bench is presented.
2, when staff completes to test, slide plate is by detecting inside the through-hole extending equipment of storehouse surface first, the limit
The position anti-limited slip plate of device deviates sliding slot, and the support plate a cooperation motor moves up and down, and the support column is to wafer in limit hole
Limited post applies pressure, and staff easily takes out wafer, this assay device structures is reasonable, easy to operate, the pick-and-place side of wafer
Just, it is very suitable for being used as semiconductor test.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of semiconductor testing apparatus.
Fig. 2 is a kind of structural schematic diagram of supporting table in semiconductor testing apparatus.
Fig. 3 is a kind of structural schematic diagram of delivery device in semiconductor testing apparatus.
Fig. 4 is the connection schematic diagram of supporting table and sliding rail in a kind of semiconductor testing apparatus.
In figure: 1- detect storehouse, 2- sensor group, 3- fixture, 4- probe card, 5- probe, 6- monitoring device, 7- observation window,
8- sliding rail, 9- wafer, 10- supporting table, 11- delivery device, 12- hydraulic stem, 13- operation bench, 101- support plate, 102- limit
Hole, 103- support column, 104- nut apparatus, 105- screw rod, 106- sliding rail, 107- limited block, 108- motor, 109- support plate
A, 201- motor a, 202- slide plate, 203- slide plate a, 204- sliding slot, 205- limiting device, 206- idler wheel, 301- sliding block.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
Please refer to Fig. 1~4, in the utility model embodiment, a kind of semiconductor testing apparatus, including detection storehouse 1, sensor
Group 2 and fixture 3,1 inner wall upper end of detection storehouse centre position are provided with fixture 3,3 lower end linking probe card 4 of fixture, probe card
4 lower end linking probes 5 are provided with sensor group 2 on the left of the fixture 3, monitoring device 6, the inspection are arranged on the right side of the fixture 3
It surveys 1 inner wall bottom of storehouse and is provided with hydraulic stem 12,12 upper end of hydraulic stem connects delivery device 11, the connection support of 11 upper end of delivery device
Platform 10,10 left and right ends of supporting table are slidably connected sliding rail 8, and 1 outer wall of detection storehouse is provided with operation bench；
The supporting table 10 includes support plate 101, limit hole 102 and support column 103, is put down immediately below the support plate 101
Row is provided with support plate a109, and the one end support plate a109 is provided with limited block 107, and the support plate a109 passes through limited block 107
Be slidably connected sliding rail 106, and sliding rail 106 is fixedly connected with support plate 101, and the surface the support plate a109 is fixedly connected with motor 108, electricity
108 axle portion connection wire rod 105 of machine, the support plate 101 and 105 position of screw rod, size is corresponding is inlaid with nut apparatus 104；
The delivery device 11 includes that motor a201, slide plate 202 and slide plate a203,202 left and right ends of slide plate are all provided with
It is equipped with motor a201, motor a201 axle portion connects idler wheel 206, and the slide plate 202 is slidably connected slide plate a203 by idler wheel 206,
The slide plate a203 and 206 position of idler wheel are correspondingly arranged on sliding slot.
101 surface of support plate is provided with limit hole 102, and the support plate a109 is corresponding with 102 position of limit hole to be set
It is equipped with support column 103, and 103 upper and lower ends diameter of support column is identical as limit hole 102, and 103 height of support column is greater than limit
102 height of hole.
The slide plate a203 is equipped with position among the end surface of sliding slot 204 and is provided with limiting device 205, limiting device
205 designs are "T"-shaped, and slide plate 202 and 205 size of limiting device and position are correspondingly arranged on sliding slot 204.
10 left and right ends of supporting table are provided with sliding block 301, and the supporting table 10 is slidably connected cunning by sliding block 301
Rail 8.
When the hydraulic stem 12 drops to extreme lower position, 1 surface of detection storehouse and supporting table 10 and delivery device 11
It sets and is correspondingly arranged on through-hole, and the size that clear size of opening is common greater than supporting table 10 and delivery device 11.
1 surface of detection storehouse and 5 position of probe are correspondingly arranged on observation window 7, and 7 material of observation window is tempered glass.
The working principle of the utility model is:
The utility model relates to a kind of semiconductor testing apparatus, this detection device is described for detecting to semiconductor
Sensor group 2 is internally provided with photoelectric sensor, infrared sensor and thermal sensing device, and staff passes through the observation window
7 cooperation monitoring devices 6 observe the state of probe 5, prevent the probe 5 of damage from detecting to semiconductor, described hydraulic
Bar 12 drives supporting table 10 to move up and down, so that wafer 9 be made to contact with probe 5, staff passes through the letter that operation bench 13 is presented
Breath judges semiconductor quality, and when staff completes to test, slide plate 202 is stretched by detecting 3 surface through-hole of storehouse first
Out inside equipment, the anti-limited slip plate 203 of the limiting device 205 deviates sliding slot 204, and the support plate a109 cooperates on motor 108
Lower movement, the support column 103 apply pressure to the limited post of wafer 9 in limit hole 102, and staff easily takes out wafer 9,
This assay device structures is reasonable, easy to operate, and the pick-and-place of wafer is convenient, is very suitable for being used as semiconductor test.
The utility model designs advantages of simple in structure, uses easy to operate, and practicability is very high, this detection
For device for detecting to semiconductor, the sensor group is internally provided with photoelectric sensor, infrared sensor and temperature-sensitive
Inductor, staff cooperate monitoring device to observe the state of probe by the observation window, prevent the probe of damage
Semiconductor is detected, the hydraulic stem drives supporting table to move up and down, so that wafer be made to contact with probe, staff is logical
The information for crossing operation bench presentation judges that semiconductor quality, when staff completes to test, slide plate passes through detection first
Inside the through-hole extending equipment of storehouse surface, the anti-limited slip plate of limiting device deviates sliding slot, and the support plate a cooperation motor is transported up and down
Dynamic, the support column applies pressure to the limited post of wafer in limit hole, and staff easily takes out wafer, this detection device knot
Structure is reasonable, easy to operate, and the pick-and-place of wafer is convenient, is very suitable for being used as semiconductor test.
It is obvious to a person skilled in the art that the present invention is not limited to the details of the above exemplary embodiments, and
And without departing substantially from the spirit or essential attributes of the utility model, it can realize that this is practical new in other specific forms
Type, any reference signs in the claims should not be construed as limiting the involved claims.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped
Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should
It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
The other embodiments being understood that.
Claims (6)
1. a kind of semiconductor testing apparatus, including detection storehouse (1), sensor group (2) and fixture (3), which is characterized in that the inspection
It surveys position among storehouse (1) inner wall upper end to be provided with fixture (3), fixture (3) lower end linking probe card (4), probe card (4) lower end connects
It connects probe (5), is provided with sensor group (2) on the left of the fixture (3), monitoring device (6) are set on the right side of the fixture (3), institute
It states detection storehouse (1) inner wall bottom to be provided with hydraulic stem (12), hydraulic stem (12) upper end connects delivery device (11), delivery device
(11) upper end connection supporting table (10), supporting table (10) left and right ends are slidably connected sliding rail (8), and detection storehouse (1) outer wall is set
It is equipped with operation bench；
The supporting table (10) includes support plate (101), limit hole (102) and support column (103), and the support plate (101) is just
Parallel beneath is provided with support plate a (109), and support plate a (109) one end is provided with limited block (107), the support plate a (109)
It is slidably connected sliding rail (106) by limited block (107), sliding rail (106) is fixedly connected support plate (101), the support plate a
(109) surface is fixedly connected motor (108), motor (108) axle portion connection wire rod (105), the support plate (101) and screw rod
(105) position, size correspondence are inlaid with nut apparatus (104)；
The delivery device (11) includes motor a (201), slide plate (202) and slide plate a (203), slide plate (202) left and right two
End is provided with motor a (201), and motor a (201) axle portion connects idler wheel (206), and the slide plate (202) is sliding by idler wheel (206)
Dynamic connection slide plate a (203), the slide plate a (203) and idler wheel (206) position are correspondingly arranged on sliding slot (204).
2. a kind of semiconductor testing apparatus according to claim 1, which is characterized in that support plate (101) surface is set
It is equipped with limit hole (102), the support plate a (109) and limit hole (102) position are correspondingly arranged on support column (103), and are supported
Column (103) upper and lower ends diameter is identical as limit hole (102), and support column (103) is highly greater than limit hole (102) height.
3. a kind of semiconductor testing apparatus according to claim 1, which is characterized in that the slide plate a (203) is equipped with sliding slot
(204) position is provided with limiting device (205) among end surface, and limiting device (205) design is "T"-shaped, and slide plate
(202) sliding slot is correspondingly arranged on limiting device (205) size and position.
4. a kind of semiconductor testing apparatus according to claim 1, which is characterized in that supporting table (10) left and right ends
It is provided with sliding block (301), the supporting table (10) is slidably connected sliding rail (8) by sliding block (301).
5. a kind of semiconductor testing apparatus according to claim 1, which is characterized in that the hydraulic stem (12) drops to most
When lower position, the detection storehouse (1) surface and supporting table (10) and delivery device (11) position are correspondingly arranged on through-hole, and through-hole
The size size common greater than supporting table (10) and delivery device (11).
6. a kind of semiconductor testing apparatus according to claim 1, which is characterized in that the detection storehouse (1) surface and spy
Needle (5) position is correspondingly arranged on observation window (7), and observation window (7) material is tempered glass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820814898.XU CN208520960U (en) | 2018-05-29 | 2018-05-29 | A kind of semiconductor testing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820814898.XU CN208520960U (en) | 2018-05-29 | 2018-05-29 | A kind of semiconductor testing apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208520960U true CN208520960U (en) | 2019-02-19 |
Family
ID=65340618
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820814898.XU Expired - Fee Related CN208520960U (en) | 2018-05-29 | 2018-05-29 | A kind of semiconductor testing apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208520960U (en) |
-
2018
- 2018-05-29 CN CN201820814898.XU patent/CN208520960U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190219 Termination date: 20200529 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |