CN208438591U - A kind of monocrystalline silicon rod cross-cutting machine workbench adjustment device - Google Patents
A kind of monocrystalline silicon rod cross-cutting machine workbench adjustment device Download PDFInfo
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- CN208438591U CN208438591U CN201820910143.XU CN201820910143U CN208438591U CN 208438591 U CN208438591 U CN 208438591U CN 201820910143 U CN201820910143 U CN 201820910143U CN 208438591 U CN208438591 U CN 208438591U
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- workbench
- single crystal
- silicon rod
- crystal silicon
- cutting machine
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- 229910021421 monocrystalline silicon Inorganic materials 0.000 title claims abstract description 36
- 238000005520 cutting process Methods 0.000 title claims abstract description 34
- 230000007246 mechanism Effects 0.000 claims abstract description 37
- 239000013078 crystal Substances 0.000 claims abstract description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 13
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 13
- 239000010703 silicon Substances 0.000 claims abstract description 13
- 238000006073 displacement reaction Methods 0.000 claims description 17
- 238000001514 detection method Methods 0.000 claims description 9
- 238000004891 communication Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 abstract description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 2
- 238000003825 pressing Methods 0.000 description 26
- 238000003466 welding Methods 0.000 description 6
- 208000019300 CLIPPERS Diseases 0.000 description 4
- 208000021930 chronic lymphocytic inflammation with pontine perivascular enhancement responsive to steroids Diseases 0.000 description 4
- 230000006872 improvement Effects 0.000 description 2
- 230000033001 locomotion Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 238000011897 real-time detection Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000004857 zone melting Methods 0.000 description 1
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- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a kind of monocrystalline silicon rod cross-cutting machine workbench to adjust device, belong to silicon single crystal rod processing technique field, comprising: worktable lifting adjustment mechanism, the lower section of the workbench front and/or rear is arranged in the worktable lifting adjustment mechanism, is used to drive the worktable lifting；And driving water translational shifting adjustment mechanism, the side of the workbench front and/or rear is arranged in the driving water translational shifting adjustment mechanism, and is connected with the side of the front and/or rear of the workbench, is used to drive the horizontal shift of the workbench.The utility model, which is particularly suitable for placement position inconsistent to front and back thickness and on the table, makes the axial cutting processing with the silicon single crystal rod of cut direction deflection of silicon rod.
Description
Technical Field
The utility model belongs to the technical field of single crystal silicon rod processing, especially, relate to a single crystal silicon rod cuts quick-witted workstation adjusting device.
Background
The process for producing single crystal silicon is generally to grow rod-shaped single crystal silicon from a melt by the Czochralski method or the suspension zone melting method, the single crystal silicon having a circular cross section. In order to meet the requirements of the appearance and the size of a silicon wafer in the production process, a silicon single crystal rod needs to be cut, the cutting of the silicon single crystal rod is an indispensable step in the early process of producing a semiconductor device, and currently, the cutting of the silicon single crystal is carried out by a special device for cutting the silicon single crystal rod, namely a silicon single crystal cutting machine.
The existing single crystal cutting machine generally comprises a base, a transmission shaft part, a cutter and a single crystal silicon rod clamp, wherein the base is provided with a working table surface for placing a single crystal silicon rod, and the clamp is arranged on the working table surface. Because the thickness of the single crystal rod is not uniform, the height and the angle of the currently used worktable can not be adjusted, so that the single crystal rod is not perpendicular to a saw belt in the cutting process, and the inclination of the end face exceeds the standard. Patent CN207190018U discloses a single crystal clipper workstation adjusting device, wherein the base on the welding have fixed block A, pivot A passes fixed block A, pivot A welding in lower panel one end, the lower panel other end welding have fixed block B, bolt B passes fixed block B, lower panel bottom welding have a nut, install bolt A on the nut, bolt A stands on the base, lower panel upper portion welding have pivot B, pivot B passes upper panel, the welding has the V type groove that is used for the silicon rod of splendid attire single crystal on the upper panel. The workbench adjusting device adjusts the horizontal height and the left and right angles through adjusting bolts. The drawbacks of this adjustment method are: the adjustment mode is manual adjustment, which not only wastes time and labor, but also judges whether the adjustment is in place completely by human eyes during adjustment, and the error is larger.
It will thus be seen that the prior art is susceptible to further improvements and enhancements.
Disclosure of Invention
The utility model provides a weak point for avoiding the existence of the prior art, and provides a workbench adjusting device of a single crystal silicon rod cutting machine, so as to adjust the horizontal position and the height position of the workbench of the cutting machine according to the size and the practical application scene of the single crystal silicon rod.
The utility model discloses the technical scheme who adopts does:
a workbench adjusting device of a single crystal silicon rod cutting machine comprises: the workbench lifting adjusting mechanism is arranged below the front part and/or the rear part of the workbench and is used for driving the workbench to lift; and the workbench horizontal displacement adjusting mechanism is arranged on one side of the front part and/or the rear part of the workbench, is connected with one side of the front part and/or the rear part of the workbench, and is used for driving the horizontal displacement of the workbench.
The workbench adjusting device also comprises a control unit, and the control unit is used for controlling the stroke of the workbench lifting adjusting mechanism for driving the workbench to lift and controlling the stroke of the workbench horizontal displacement adjusting mechanism for driving the workbench horizontal displacement.
The cutting machine further comprises a positioning detection unit, and the positioning detection unit is used for detecting an inclination angle between the axial direction of the silicon single crystal rod and the cutting direction of the saw blade of the cutting machine; the positioning detection unit is in communication connection with the control unit.
The adjusting unit further includes: the rotating shaft is arranged in the middle of the workbench, the axial direction of the rotating shaft is parallel to the width direction of the workbench, and the workbench can rotate around the rotating shaft when lifted; the rotating block is arranged below the rotating shaft, and the rotating shaft is rotationally connected with the rotating block; the supporting seat is used for supporting the rotating block, and when the workbench is horizontally moved, the workbench and the rotating block can rotate around the vertical direction.
Since the technical scheme is used, the utility model discloses the beneficial effect who gains does:
the utility model discloses can pass through the adjustment unit comes the level of automatic adjustment workstation and controls the angle to ensure that the axial homoenergetic of not unidimensional single crystal silicon rod is mutually perpendicular with the cutting direction of clipper saw bit, guaranteed the cutting quality of single crystal silicon rod cutting terminal surface. Moreover, the utility model provides an adjustment mode has realized automation mechanized operation, has saved the manpower, and adjustment efficiency also improves greatly.
Drawings
The accompanying drawings, which are described herein, serve to provide a further understanding of the invention and constitute a part of this specification, and the exemplary embodiments and descriptions thereof are provided for explaining the invention without unduly limiting it. In the drawings:
fig. 1 is a schematic front view of embodiment 1.
FIG. 2 is a schematic side view of example 1.
Fig. 3 is a schematic structural view of the pressure holding block and the pressure plate in embodiment 1.
Fig. 4 is a schematic front view of embodiment 2.
FIG. 5 is a schematic side view of example 2.
Wherein,
1. the device comprises a workbench 2, a rotating shaft 3, a rotating block 4, a supporting seat 5, a workbench lifting adjusting mechanism 6, a workbench horizontal displacement adjusting mechanism 7, a single crystal silicon rod 8, a clamping arm 9, a clamping arm driving mechanism 10, a pressing block 11, a pressing plate 12 and a pressing block lifting driving mechanism
Detailed Description
In order to more clearly explain the overall concept of the present invention, the following detailed description is given by way of example in conjunction with the accompanying drawings.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, however, the present invention may be practiced in other ways than those specifically described herein, and therefore the scope of the present invention is not limited by the specific embodiments disclosed below.
In addition, in the description of the present invention, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", and the like, indicate orientations and positional relationships based on those shown in the drawings, and are used only for convenience of description and simplification of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally formed; the connection can be mechanical connection, electrical connection or communication; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present application, unless expressly stated or limited otherwise, the first feature may be directly on or directly under the second feature or indirectly via intermediate members. In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
Example 1:
as shown in fig. 1 to 3, a single crystal silicon rod cutting machine comprises a worktable 1, wherein the worktable 1 is used for supporting the single crystal silicon rod 7. The guillotine further comprises a control unit and a positioning detection unit.
The positioning detection unit is used for detecting an inclination angle between the axial direction of the single crystal silicon rod 7 and the cutting direction of the guillotine saw blade, wherein the arrow direction in fig. 1 illustrates the cutting direction of the guillotine saw blade. Preferably, the positioning detection unit is a dual-axis tilt sensor, and the dual-axis tilt sensor is disposed on the table 1 at a position capable of contacting the single crystal silicon rod 7. The double-shaft tilt angle sensor is in communication connection with the control unit.
The cutting machine further comprises a workbench adjusting device, and the workbench adjusting device is used for adjusting the horizontal position and the height position of the workbench 1 so that the axial direction of the monocrystalline silicon rod 7 on the workbench 1 is perpendicular to the cutting direction of the saw blade of the cutting machine.
The workbench adjusting device comprises a workbench lifting adjusting mechanism 5, wherein the workbench lifting adjusting mechanism 5 is arranged below the front part or the rear part of the workbench 1 and used for driving the workbench 1 to lift.
The structural form of the worktable lifting adjusting mechanism 5 has a plurality of types, as long as the worktable 1 can be driven to lift, for example, the worktable can be a hydraulic cylinder or an air cylinder, in the embodiment, the hydraulic cylinder or the air cylinder is driven to be arranged below the front part or the rear part of the worktable and used for driving one side of the worktable to lift. In addition, in this embodiment, the table elevation adjusting mechanism 5 also partially supports the table 1, and a support block may be disposed at an end of a piston rod of the hydraulic cylinder or the air cylinder to increase a contact area with the bottom of the table 1.
The workbench adjusting device further comprises a rotating shaft 2, the rotating shaft 2 is arranged in the middle of the workbench 1, the axial direction of the rotating shaft 2 is parallel to the width direction of the workbench 1, and when the workbench 1 goes up and down, the workbench 1 can rotate around the rotating shaft 2. In this embodiment, the working platform 1 and the rotating shaft 2 cooperate to form a structure similar to a seesaw, the lifting of the working platform 1 is adjusted by the single-side working platform lifting adjusting mechanism 5, the front part of the working platform 1 descends when rising, and the rear part ascends when the front part descends.
The workbench adjusting device further comprises a workbench horizontal displacement adjusting mechanism 6, wherein the workbench horizontal displacement adjusting mechanism 6 is arranged on one side of the front part or the rear part of the workbench 1, is connected with one side of the front part or the rear part of the workbench 1, and is used for driving the workbench 1 to horizontally displace.
The structure of the horizontal displacement adjusting mechanism 6 of the workbench has various forms as long as the horizontal displacement adjusting mechanism can drive the workbench 1 to displace, for example, the horizontal displacement adjusting mechanism can be a hydraulic cylinder or an air cylinder, in this embodiment, the hydraulic cylinder or the air cylinder is arranged at one side of the front part or the rear part of the workbench 1 (the "one side" refers to the left side or the right side of the workbench), and a piston rod of the hydraulic cylinder or the air cylinder is connected with one side of the workbench to drive the horizontal displacement of the workbench.
The workbench adjusting device further comprises a rotating block 3, the rotating block 3 is arranged below the rotating shaft 2, and the rotating shaft 2 is rotatably connected with the rotating block 3; the supporting seat 4 is used for supporting the rotating block 3, and when the workbench 1 horizontally moves, the workbench 1 and the rotating block 3 can rotate around the vertical direction, so that the left and right angles of the workbench 1 can be adjusted.
The utility model discloses an on biax angular transducer real-time detection workstation 1 contained angle between the cutting direction of the axial of single crystal silicon rod 7 and clipper saw bit, when detecting contained angle between them for 90, the control unit control workstation lift adjustment mechanism 5 and workstation horizontal displacement adjustment mechanism 6 stop corresponding drive action to realize the adjustment of workstation 1 level and left right angle degree, through the position of adjusting workstation 1, it is right to realize the adjustment of the axis direction of single crystal silicon rod 7 in the space, make the axis direction of single crystal silicon rod 7 is mutually perpendicular with the cutting direction of clipper saw bit, guarantees the planarization of cutting end face.
The cutting machine further comprises a clamping unit, and the clamping unit is used for clamping and positioning the single crystal silicon rod 7. The clamping unit comprises two clamping arms 8, wherein the two clamping arms 8 are positioned on two sides of the workbench 1 and are matched with the workbench 1 to form an inverted trapezoidal groove for accommodating the monocrystalline silicon rod 7.
The clamping unit further comprises a clamping arm driving mechanism 9, and the clamping arm driving mechanism 9 is used for driving the two clamping arms 8 to move so as to clamp or loosen the single crystal silicon rod 7 in the trapezoidal groove. The structure of the gripping arm driving mechanism 9 is various, as long as it can drive the gripping arm 8 to move, for example, it can be a hydraulic cylinder or an air cylinder, the piston rod of the hydraulic cylinder or the air cylinder is connected with the gripping arm 8, and the control unit controls the telescopic stroke of the piston rod of the hydraulic cylinder or the air cylinder.
As shown in fig. 1 to 3, the cutting machine further includes a pressing unit located above the worktable 1, and the pressing unit is used for pressing and positioning the single crystal silicon rod 7.
The pressure unit includes: the pressing device comprises a pressing block 10, wherein a pressing plate 11 is arranged at the bottom of the pressing block 10, and the cross section of the pressing plate 11 is arc-shaped; and a pressing block lifting driving mechanism 12, wherein the pressing block lifting driving mechanism 12 is used for driving the pressing block 10 to perform lifting motion so as to press and hold the single crystal silicon rod 7 or separate from the top end of the single crystal silicon rod 7.
In this embodiment, there are a plurality of the pressing blocks 10, and the plurality of the pressing blocks 10 are arranged along the length direction of the working table 1, and correspondingly, the pressing unit is configured to have the same number of pressing block lifting driving mechanisms 12 as the pressing blocks 10.
In order to make the pressing plate 11 compatible with more sizes of single crystal silicon rods, the radius of curvature of the pressing plate 11 can be set to a larger size, for example, a radius size which is matched with the largest size of the silicon rods in the single crystal silicon rods which are often required to be cut.
The structure of the pressing block lifting driving mechanism 12 has various forms, as long as the pressing block 10 can be driven to do lifting movement. For example, the device can be a hydraulic cylinder or an air cylinder, a piston rod of the hydraulic cylinder or the air cylinder is connected with the pressure holding block 10, and the control unit controls the telescopic stroke of the piston rod of the hydraulic cylinder or the air cylinder. For another example, the pressing block 10 may be in a form that a motor is matched with a ball screw pair, the ball screw pair includes a ball screw and a screw nut matched with the ball screw, the screw nut is connected to the pressing block 10 through a connecting member, and the motor drives the ball screw to rotate and drives the pressing block 10 to ascend and descend through the screw nut and the connecting member.
Example 2:
the present embodiment is basically the same as embodiment 1 in structure and principle, except that:
as shown in fig. 4 and 5, in the present embodiment, there are two table elevation adjusting mechanisms 5 respectively disposed below the front and rear portions of the table 1, and there are two table horizontal displacement adjusting mechanisms 6 respectively disposed at one side of the front and rear portions of the table 1 (the "one side" refers to the left or right side of the table), thereby achieving more rapid adjustment.
The parts not mentioned in the utility model can be realized by adopting or using the prior art for reference.
The embodiments in the present specification are described in a progressive manner, and the same and similar parts among the embodiments are referred to each other, and each embodiment focuses on the differences from the other embodiments. In particular, for the system embodiment, since it is substantially similar to the method embodiment, the description is simple, and for the relevant points, reference may be made to the partial description of the method embodiment.
The above description is only an example of the present invention, and is not intended to limit the present invention. Various modifications and changes may occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the claims of the present invention.
Claims (4)
1. A workbench adjusting device of a single crystal silicon rod cutting machine is characterized by comprising:
the workbench lifting adjusting mechanism is arranged below the front part and/or the rear part of the workbench and is used for driving the workbench to lift; and
the workbench horizontal displacement adjusting mechanism is arranged on one side of the front part and/or the rear part of the workbench, is connected with one side of the front part and/or the rear part of the workbench, and is used for driving the horizontal displacement of the workbench.
2. The adjusting device of a worktable of a single crystal silicon rod truncation machine according to claim 1, wherein,
the workbench adjusting device also comprises a control unit, and the control unit is used for controlling the stroke of the workbench lifting adjusting mechanism for driving the workbench to lift and controlling the stroke of the workbench horizontal displacement adjusting mechanism for driving the workbench horizontal displacement.
3. The adjusting device of a worktable of a single crystal silicon rod truncation machine according to claim 2, wherein,
the cutting machine further comprises a positioning detection unit, and the positioning detection unit is used for detecting an inclination angle between the axial direction of the silicon single crystal rod and the cutting direction of the saw blade of the cutting machine; the positioning detection unit is in communication connection with the control unit.
4. The adjusting device of a worktable of a single crystal silicon rod truncation machine according to claim 1, wherein,
the adjusting device further comprises: the rotating shaft is arranged in the middle of the workbench, the axial direction of the rotating shaft is parallel to the width direction of the workbench, and the workbench can rotate around the rotating shaft when lifted; the rotating block is arranged below the rotating shaft, and the rotating shaft is rotationally connected with the rotating block; the supporting seat is used for supporting the rotating block, and when the workbench is horizontally moved, the workbench and the rotating block can rotate around the vertical direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820910143.XU CN208438591U (en) | 2018-06-12 | 2018-06-12 | A kind of monocrystalline silicon rod cross-cutting machine workbench adjustment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820910143.XU CN208438591U (en) | 2018-06-12 | 2018-06-12 | A kind of monocrystalline silicon rod cross-cutting machine workbench adjustment device |
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| Publication Number | Publication Date |
|---|---|
| CN208438591U true CN208438591U (en) | 2019-01-29 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820910143.XU Expired - Fee Related CN208438591U (en) | 2018-06-12 | 2018-06-12 | A kind of monocrystalline silicon rod cross-cutting machine workbench adjustment device |
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| CN (1) | CN208438591U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111186039A (en) * | 2020-01-15 | 2020-05-22 | 上海磐盟电子材料有限公司 | Automatic cutting system of crystal bar |
| CN116872365A (en) * | 2023-08-25 | 2023-10-13 | 宁夏中欣晶圆半导体科技有限公司 | Cutting method for efficiently cutting carbon plate |
-
2018
- 2018-06-12 CN CN201820910143.XU patent/CN208438591U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111186039A (en) * | 2020-01-15 | 2020-05-22 | 上海磐盟电子材料有限公司 | Automatic cutting system of crystal bar |
| CN111186039B (en) * | 2020-01-15 | 2021-08-20 | 上海磐盟电子材料有限公司 | Automatic cutting system of crystal bar |
| CN116872365A (en) * | 2023-08-25 | 2023-10-13 | 宁夏中欣晶圆半导体科技有限公司 | Cutting method for efficiently cutting carbon plate |
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Granted publication date: 20190129 |