CN208402193U - Plasma producing apparatus is motivated using microwave vertical injection - Google Patents
Plasma producing apparatus is motivated using microwave vertical injection Download PDFInfo
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- CN208402193U CN208402193U CN201821023698.9U CN201821023698U CN208402193U CN 208402193 U CN208402193 U CN 208402193U CN 201821023698 U CN201821023698 U CN 201821023698U CN 208402193 U CN208402193 U CN 208402193U
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Abstract
The utility model discloses a kind of using microwave vertical injection excitation plasma producing apparatus, including coil, plasma discharge cavity body, connecting flange, microwave window, gas access, vacuum pump group interface；The coil designs for hollow structure；It is designed for circular platform type at plasma discharge cavity body both ends；A gas access is offered on the side wall of the plasma discharge cavity body；Gas access is attached by connecting flange and microwave window；Two vacuum pump group interfaces are also provided on the side wall of the plasma discharge cavity body；The side wall of the plasma discharge cavity body is equipped with six groups of coils.The utility model utilizes the vacuum pump group interface being equipped with to vacuumize, it is ensured that the vacuum degree of plasma discharge cavity body meets operating condition；Working gas is passed through into plasma discharge cavity body by gas access, coil, which is powered, generates magnetic field, constrains the plasma that microwave feed-in excitation generates by adjusting electrical current size change magnetic field bit-type.
Description
Technical field
The utility model belongs to ion source applied technical field, is related to a kind of using microwave vertical injection excitation plasma
Generating device.
Background technique
Microwave injection excitation plasma device principle is mainly the cyclotron resonance of electronics, when feed-in microwave frequency and electronics
Cyclotron frequency in magnetic field can generate resonance, electrons gain energy when equal, to be the working gas ionization shape in cavity
At plasma.Microwave excited advantage is no cathode, and degree of ionization is high, and the plasma density of formation is high, performance
It is reliable and stable.The research of plasma device changes in ion implanting, ion etching, thin film technique, radioactive breeding, material surface
Industrial or agricultural, medicine and the scientific research fields such as property, ion beam depositing are all widely used.
Utility model content
Plasma producing apparatus is motivated using microwave vertical injection the purpose of this utility model is to provide a kind of.
The purpose of this utility model can be achieved through the following technical solutions:
Plasma producing apparatus, including coil, plasma discharge cavity body, connection method are motivated using microwave vertical injection
Orchid, microwave window, gas access, vacuum pump group interface；The coil designs for hollow structure；The plasma discharge cavity body two
It is designed for circular platform type at end；A gas access is offered on the side wall of the plasma discharge cavity body；Gas access passes through connection
Flange is attached with microwave window；Two vacuum pump group interfaces are also provided on the side wall of the plasma discharge cavity body；Institute
The side wall for stating plasma discharge cavity body is equipped with six groups of coils.
The gas access is provided with the middle position of plasma discharge cavity body, and two vacuum pump group interfaces are in vertical side
It is located at gas access two sides upwards.
Coil described in six groups is evenly arranged on the plasma discharge cavity body of gas access two sides, specifically: plasma is put
Two groups of coils, the plasma discharge between vacuum pump group interface and gas access are laid at the circular platform type position at electric cavity both ends
One group of coil is laid on cavity.
Coil described in six groups is constituted using copper product, and coil hollow structure is passed through deionized water and is cooled down.
The plasma discharge cavity body is a nearly cylindrical body stainless steel cavity, the region generated for plasma；Deng from
Daughter discharging chamber is made of stainless steel material.
The microwave window is made of alumina ceramic material.
The utility model has the beneficial effects that the utility model utilizes the vacuum pump group interface that is equipped with to vacuumize, it is ensured that wait from
The vacuum degree of daughter discharging chamber meets operating condition；Work gas is passed through into plasma discharge cavity body by gas access
Body, coil, which is powered, generates magnetic field, constrains what microwave feed-in excitation generated by adjusting electrical current size change magnetic field bit-type
Plasma；
The utility model, can be in the detection of axial neutral conductor progress plasma density, energy using radial vertical injection
The plasma parameter situation under different condition is reacted in real time, helps improve experiment parameter, can also be drawn in axially connection
System draws ion beam current；The design of cavity both ends circular platform type is also beneficial to reduce plasma in cavity diffusion to axial end
The collision in face protects the measurement installed on end face or ejector.
Detailed description of the invention
In order to facilitate the understanding of those skilled in the art, the utility model will be further described below with reference to the accompanying drawings.
Fig. 1 is the structural schematic diagram that the utility model motivates plasma producing apparatus using microwave vertical injection；
In figure: 1- coil；2- plasma discharge cavity body；3- connecting flange；4- microwave window；The gas access 5-；6- vacuum
Pump group interface.
Specific embodiment
The technical solution of the utility model is clearly and completely described below in conjunction with embodiment, it is clear that described
Embodiment be only the utility model a part of the embodiment, instead of all the embodiments.Based on the reality in the utility model
Example is applied, all other embodiment obtained by those of ordinary skill in the art without making creative efforts all belongs to
In the range of the utility model protection.
It is a kind of that plasma producing apparatus is motivated using microwave vertical injection, as shown in Figure 1, including coil 1, plasma
Discharging chamber 2, connecting flange 3, microwave window 4, gas access 5, vacuum pump group interface 6；
Coil 1 is equipped with six groups, which is constituted using copper product, and coil 1 is designed for hollow structure, be can satisfy
The requirement of cooling water path, cooling water use deionized water；The horizontal position of coil and alive size are adjustable, meet
The magnetic field bit-type of the plasma confinement needed；
(laterally disposed) plasma discharge cavity body 2 is a nearly cylindrical body stainless steel cavity, the area generated for plasma
Domain；Plasma discharge cavity body 2 is made of stainless steel material, and both ends are the design of circular platform type；Above-mentioned both ends circular platform type is set
Meter advantageously reduces collision of the plasma in cavity diffusion to axial end face；
Microwave window 4 is made of alumina ceramic material；Aluminium oxide ceramics dielectric constant is higher, plays the work of impedance matching
With；
Specifically, a gas access 5 is offered on the side wall of plasma discharge cavity body 2；Gas access 5 passes through connection method
Orchid 3 is attached with microwave window 4；
Two vacuum pump group interfaces 6 are also provided on the side wall of plasma discharge cavity body 2；
The side wall of plasma discharge cavity body 2 is equipped with six groups of coils 1；
Further, gas access 5 is provided with the middle position of plasma discharge cavity body 2, two vacuum pump group interfaces 6
It is located at 5 two sides of gas access (being subject to shown in Fig. 1) in the vertical direction；
Six groups of coils 1 are evenly arranged on the plasma discharge cavity body of 5 two sides of gas access, specifically: plasma discharge
Two groups of coils 1 are laid at the circular platform type position at 2 both ends of cavity, the plasma between vacuum pump group interface 6 and gas access 5 is put
One group of coil 1 is laid on electric cavity；
The device is by the way of microwave radial direction vertical injection, and the plasma device injected with general micro axial is not
Together, in axial mountable plasma density measurement device, plasma parameter information can be fed back, the adjustment for helping experiment changes
Into.
Vacuum pump group connects corresponding vacuum pump group interface 6 and vacuumizes when work, it is ensured that plasma discharge cavity body it is true
Reciprocal of duty cycle meets operating condition.The working gas of certain flow is passed through into plasma discharge cavity body 2 by gas access 5；Line
Circle 1, which is powered, generates magnetic field, by adjust electrical current size change magnetic field bit-type constrain that microwave feed-in excitation generates it is equal from
Daughter.
The plasma device that the device is different from axial microwave injection can be in axial direction using radial vertical injection
Property line carry out plasma density detection, the plasma parameter situation under different condition can be reacted in real time, help improve
Experiment parameter can also draw ion beam current in axially connection extraction system.The design of cavity both ends circular platform type is also beneficial to subtract
Collision of few plasma in cavity diffusion to axial end face, protects the measurement installed on end face or ejector.
The preferred embodiment in the utility model disclosed above is only intended to help to illustrate the utility model.Preferred embodiment is simultaneously
There is no the details that detailed descriptionthe is all, also not limiting the utility model is only the specific embodiment.Obviously, according to this theory
The content of bright book can make many modifications and variations.These embodiments are chosen and specifically described to this specification, is in order to preferably
The principles of the present invention and practical application are explained, so that skilled artisan be enable to better understand and utilize this
Utility model.The utility model is limited only by the claims and their full scope and equivalents.
Claims (6)
1. motivating plasma producing apparatus using microwave vertical injection, which is characterized in that put including coil (1), plasma
Electric cavity (2), connecting flange (3), microwave window (4), gas access (5), vacuum pump group interface (6)；
The coil (1) is designed for hollow structure；It is designed for circular platform type at plasma discharge cavity body (2) both ends；
A gas access (5) are offered on the side wall of the plasma discharge cavity body (2)；Gas access (5) passes through connection method
Blue (3) are attached with microwave window (4)；
Two vacuum pump group interfaces (6) are also provided on the side wall of the plasma discharge cavity body (2)；
The side wall of the plasma discharge cavity body (2) is equipped with six groups of coils (1).
2. according to claim 1 motivate plasma producing apparatus using microwave vertical injection, which is characterized in that described
Gas access (5) is provided with the middle position of plasma discharge cavity body (2), and two vacuum pump group interfaces (6) are in vertical direction
On be located at gas access (5) two sides.
3. according to claim 1 motivate plasma producing apparatus using microwave vertical injection, which is characterized in that six groups
The coil (1) is evenly arranged on the plasma discharge cavity body of gas access (5) two sides, specifically: plasma discharge cavity body
(2) two groups of coils (1), the plasma between vacuum pump group interface (6) and gas access (5) are laid at the circular platform type position at both ends
One group of coil (1) is laid on body discharging chamber.
4. according to claim 1 motivate plasma producing apparatus using microwave vertical injection, which is characterized in that described
Coil (1) is constituted using copper product, and coil (1) hollow structure is passed through deionized water and is cooled down.
5. according to claim 1 motivate plasma producing apparatus using microwave vertical injection, which is characterized in that described
Plasma discharge cavity body (2) is a nearly cylindrical body stainless steel cavity, the region generated for plasma；Plasma discharge cavity
Body (2) is made of stainless steel material.
6. according to claim 1 motivate plasma producing apparatus using microwave vertical injection, which is characterized in that described
Microwave window (4) is made of alumina ceramic material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821023698.9U CN208402193U (en) | 2018-06-29 | 2018-06-29 | Plasma producing apparatus is motivated using microwave vertical injection |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821023698.9U CN208402193U (en) | 2018-06-29 | 2018-06-29 | Plasma producing apparatus is motivated using microwave vertical injection |
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| Publication Number | Publication Date |
|---|---|
| CN208402193U true CN208402193U (en) | 2019-01-18 |
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| CN201821023698.9U Active CN208402193U (en) | 2018-06-29 | 2018-06-29 | Plasma producing apparatus is motivated using microwave vertical injection |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108566717A (en) * | 2018-06-29 | 2018-09-21 | 合肥中科离子医学技术装备有限公司 | Plasma producing apparatus is encouraged using microwave vertical injection |
| CN110062516A (en) * | 2019-04-15 | 2019-07-26 | 中国科学院合肥物质科学研究院 | A kind of device of microwave plasma high-temperature heat treatment filamentary material |
| CN108566717B (en) * | 2018-06-29 | 2024-07-02 | 合肥中科离子医学技术装备有限公司 | Plasma generator excited by microwave vertical injection |
-
2018
- 2018-06-29 CN CN201821023698.9U patent/CN208402193U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108566717A (en) * | 2018-06-29 | 2018-09-21 | 合肥中科离子医学技术装备有限公司 | Plasma producing apparatus is encouraged using microwave vertical injection |
| CN108566717B (en) * | 2018-06-29 | 2024-07-02 | 合肥中科离子医学技术装备有限公司 | Plasma generator excited by microwave vertical injection |
| CN110062516A (en) * | 2019-04-15 | 2019-07-26 | 中国科学院合肥物质科学研究院 | A kind of device of microwave plasma high-temperature heat treatment filamentary material |
| CN110062516B (en) * | 2019-04-15 | 2021-07-09 | 中国科学院合肥物质科学研究院 | Device for microwave plasma high-temperature heat treatment of filamentous materials |
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