CN208397560U - A kind of spring seat for precision instrument - Google Patents

A kind of spring seat for precision instrument Download PDF

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Publication number
CN208397560U
CN208397560U CN201821040137.XU CN201821040137U CN208397560U CN 208397560 U CN208397560 U CN 208397560U CN 201821040137 U CN201821040137 U CN 201821040137U CN 208397560 U CN208397560 U CN 208397560U
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China
Prior art keywords
spring base
spring
round tube
nested
utility
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CN201821040137.XU
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Chinese (zh)
Inventor
何成伟
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Harmony Integrated Circuit Equipment (shanghai) Co Ltd
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Harmony Integrated Circuit Equipment (shanghai) Co Ltd
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Priority to CN201821040137.XU priority Critical patent/CN208397560U/en
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Abstract

The utility model discloses a kind of spring seats for precision instrument, the utility model have it is structurally reasonable it is simple, production cost is low, easy for installation, it is multiple functional, by the spring base that the utility model is arranged, so that moving up and down in a certain range that the pedestal of the above-mentioned type remains vertically oriented, guarantee that the pedestal of the above-mentioned type keeps movement in the horizontal direction significantly to be limited;In addition, meeting pedestal load-bearing problem using the axial stiffness of spring base, so as to meet the demand of technical standard of such precision instrument, the deficiency in background technique is effectively solved.

Description

A kind of spring seat for precision instrument
Technical field
The utility model relates to precision instrument foundation base technical field, in particular to a kind of spring base for precision instrument Seat.
Background technique
Brace foundation and mounting platform of the pedestal as precision instrument, by being equipped with steel accessory and the fixed company of precision instrument It connects, stability and the operating accuracy that instrument is directly affected to the environment for meeting technical requirements, to the product matter after putting into production Amount, production safety all have a great impact, especially in the high row of the precision requirement to instrument such as semiconductor and photoelectricity In industry.Conventional base is steel structural form, mainly requirement of the load-bearing and equipment of consideration equipment to microseism;But part essence Close instrument and equipment itself in the running, moves up and down, in the horizontal direction as far as possible in a certain range of equipment in vertical direction It is limited in small displacement or is not displaced, so the pedestal of conventionally form is the technical requirements for not being able to satisfy such equipment.Cause This, develops and a kind of meet equipment load-bearing, meets equipment and move up and down in vertical direction a certain range, have to the greatest extent may be used in the horizontal direction The small displacement of energy or the pedestal not being displaced, are this field technical problems urgently to be resolved.
Utility model content
The purpose of this utility model is that solve the above-mentioned problems, and provides a kind of spring base for precision instrument Seat.
To solve the above-mentioned problems, the utility model provides a kind of technical solution: a kind of spring for precision instrument Pedestal, including spring base panel, spring base and spring base bottom plate;The specific structure of the spring base are as follows: including upper sealing plate, embed Cover round tube, spring ring, outer nested round tube and lower sealing plate;The centre bit for being nested with round tube and being fixedly connected on upper sealing plate right side It sets;The outer nested round tube is fixedly connected on the center of lower sealing plate left side;The round tube that is nested with is slidably connected The chamber interior of nested round tube outside;Spring ring cladding be connected to be nested with round tube on the outer surface of outer nested round tube; Specific connection relationship between the spring base panel, spring base and spring base bottom plate are as follows: the spring base is several, the bullet Spring abutment is connected between spring base panel and spring base bottom plate in a manner of rectangular array;The upper sealing plate of the spring base is fixed to be connected It connects on spring base panel, the lower sealing plate of the spring base is fixedly connected on spring base bottom plate.
Preferably, the spring base is 6.
Preferably, the spring ring is disk spring.
The utility model has the beneficial effects that the utility model have it is structurally reasonable it is simple, production cost is low, easy for installation, It is multiple functional, by the way that the spring base of the utility model is arranged so that the pedestal of the above-mentioned type remain vertically oriented it is certain It is moved up and down in range, guarantees that the pedestal of the above-mentioned type keeps movement in the horizontal direction significantly to be limited;Separately Outside, pedestal load-bearing problem is met using the axial stiffness of spring base, is wanted so as to meet the technical specification of such precision instrument It asks, effectively solves the deficiency in background technique.
Detailed description of the invention
The present invention is described in detail by the following detailed description and drawings for ease of explanation,.
Fig. 1 is the structural schematic diagram of the utility model.
Fig. 2 is the overlooking structure diagram of the utility model.
Fig. 3 is the schematic cross-sectional view of the A-A of the utility model.
Fig. 4 is the schematic cross-sectional view of the B-B of the utility model.
Fig. 5 is the spring seat structure schematic diagram of the utility model.
1- spring base panel;2- spring base;21- upper sealing plate;22- is nested with round tube;23- spring ring;The outer nested circle of 24- Pipe;Sealing plate under 25-;3- spring base bottom plate.
Specific embodiment
As shown in Figures 1 to 5, present embodiment uses a kind of following technical scheme: spring for precision instrument Pedestal, including spring base panel 1, spring base 2 and spring base bottom plate 3;The specific structure of the spring base 2 are as follows: including upper sealing plate 21, round tube 22, spring ring 23, outer nested round tube 24 and lower sealing plate 25 are nested with;The round tube 22 that is nested with is fixedly connected on On the center of 21 right side of sealing plate;The outer nested round tube 24 is fixedly connected on the center of lower 25 left side of sealing plate On;The chamber interior for being nested with round tube 22 and being slidably connected at outer nested round tube 24;In the cladding of spring ring 23 is connected to Nested round tube 22 on the outer surface of outer nested round tube 24;Between the spring base panel 1, spring base 2 and spring base bottom plate 3 Specific connection relationship are as follows: the spring base 2 be it is several, the spring base 2 is connected to spring base panel 1 in a manner of rectangular array Between spring base bottom plate 3;The upper sealing plate 21 of the spring base 2 is fixedly connected on spring base panel 1, the spring base 2 Lower sealing plate 25 is fixedly connected on spring base bottom plate 3.
Wherein, the spring base 2 is 6;The spring ring 23 is disk spring.
The use state of the utility model are as follows: the utility model have it is structurally reasonable it is simple, production cost is low, installation side Just, multiple functional, by the way that the spring base 2 of the utility model is arranged, so that the pedestal of the above-mentioned type remained vertically oriented It is moved up and down in a certain range, guarantees that the pedestal of the above-mentioned type keeps movement in the horizontal direction significantly to be limited System;In addition, meeting pedestal load-bearing problem, using the axial stiffness of spring base 2 so as to meet the technology of such precision instrument Code requirement effectively solves the deficiency in background technique.
The basic principles and main features of the present invention and the advantages of the present invention, current row has been shown and described above The technical staff of industry is described in above embodiments and description it should be appreciated that the present utility model is not limited to the above embodiments Only illustrate the principles of the present invention, on the premise of not departing from the spirit and scope of the utility model, the utility model is also It will have various changes and improvements, these various changes and improvements fall within the scope of the claimed invention, the utility model Claimed range is defined by the appending claims and its equivalent thereof.

Claims (3)

1. a kind of spring seat for precision instrument, it is characterised in that: including spring base panel (1), spring base (2) and spring Seat bottom plate (3);
The specific structure of the spring base (2) are as follows: including upper sealing plate (21), be nested with round tube (22), spring ring (23), outer nesting Round tube (24) and lower sealing plate (25);The center for being nested with round tube (22) and being fixedly connected on upper sealing plate (21) right side On;The outer nested round tube (24) is fixedly connected on the center of lower sealing plate (25) left side;It is described to be nested with round tube (22) it is slidably connected at the chamber interior of outer nested round tube (24);Spring ring (23) cladding, which is connected to, is nested with round tube (22) On the outer surface of outer nested round tube (24);
Specific connection relationship between the spring base panel (1), spring base (2) and spring base bottom plate (3) are as follows: the spring base (2) to be several, the spring base (2) be connected in a manner of rectangular array spring base panel (1) and spring base bottom plate (3) it Between;The upper sealing plate (21) of the spring base (2) is fixedly connected on spring base panel (1), the lower sealing plate of the spring base (2) (25) it is fixedly connected on spring base bottom plate (3).
2. a kind of spring seat for precision instrument according to claim 1, it is characterised in that: the spring base (2) It is 6.
3. a kind of spring seat for precision instrument according to claim 1, it is characterised in that: the spring ring (23) For disk spring.
CN201821040137.XU 2018-07-03 2018-07-03 A kind of spring seat for precision instrument Active CN208397560U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201821040137.XU CN208397560U (en) 2018-07-03 2018-07-03 A kind of spring seat for precision instrument

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201821040137.XU CN208397560U (en) 2018-07-03 2018-07-03 A kind of spring seat for precision instrument

Publications (1)

Publication Number Publication Date
CN208397560U true CN208397560U (en) 2019-01-18

Family

ID=65130647

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201821040137.XU Active CN208397560U (en) 2018-07-03 2018-07-03 A kind of spring seat for precision instrument

Country Status (1)

Country Link
CN (1) CN208397560U (en)

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