CN208391259U - A kind of recombination laser welds the device of transparent fragile material - Google Patents
A kind of recombination laser welds the device of transparent fragile material Download PDFInfo
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- CN208391259U CN208391259U CN201820959314.8U CN201820959314U CN208391259U CN 208391259 U CN208391259 U CN 208391259U CN 201820959314 U CN201820959314 U CN 201820959314U CN 208391259 U CN208391259 U CN 208391259U
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Abstract
The utility model belongs to technical field of laser processing, and specifically disclose the device that a kind of recombination laser welds transparent fragile material, module occurs including ultrafast laser Shu Fasheng module and continuous laser beam, ultrafast laser Shu Fasheng module is for realizing initial weld, including the ultrafast laser set gradually, the first beam-expanding collimation mirror, the first reflecting mirror and the ultrafast laser scanning element being located in same optical path；Module occurs for continuous laser beam for realizing final welding, including the continuous wave laser set gradually, the second beam-expanding collimation mirror, the second reflecting mirror and the continuous laser scanning element being located in same optical path.The utility model can realize the secured welding of two blocks of transparent fragile materials with larger contact gap, have many advantages, such as that firm welding is reliable, applied widely.
Description
Technical field
The utility model belongs to technical field of laser processing, welds transparent brittleness more particularly, to a kind of recombination laser
The device of material.
Background technique
Transparent fragile material such as glass, silicon, sapphire etc. is because of its stable chemical property and excellent physical property packet
Translucency, insulating properties, corrosion resistance and high rigidity etc. are included, indispensable work is all played in terms of daily life and research and production
With.In the transparent fragile material component that many applications can all use multiple assemblings and be sealed connected together, such as optics
The assembling of middle lens, it is desirable that multiple lens can also bear the specific optical power density passed through in aperture after linking together；Photoelectricity
Encapsulation in son to the corresponding semiconductor transducer of special spectrum, needs outside the insulation transparent to the signal light of respective wavelength
Shell, also require encapsulation after can by sensor in environment moisture or other corrosive substances stablize be isolated；MEMS
(MEMS) microsensor, movement device and the micro- energy manufactured using the semiconductor fabrication process such as etching, photoetching is largely used in
Component, it is desirable that integrated scale precision and potting are good, performance is stable and does not influence the collaborative work of each microdevice；In life
Object medicine aspect, either micro detector part are still resident formula function element and require implantation human body work, these devices are not
Package casing is required nothing more than with biocompatibility and nontoxicity, and the requirement to packaged stability and durability is more harsh.
With the development of high and new technology industry, transparent fragile material component is because of its excellent optical performance, corrosion resistant
Corrosion can will have been more and more widely used with mechanical property, have wide research and development space.It is transparent crisp at present
The conventional sealing method of property material mainly includes adhesive bonding, anode linkage, fusion weld etc., and conventional sealing method is respectively deposited
In different defects.Ultrafast laser can be generated using high peak power density and ultrashort laser pulse in transparent crispy interior
Non-linear absorption, and material is made to melt the microwelding to realize transparent brittleness medium in focal point, there is machining accuracy height, hot shadow
Ring that area is small, is not easily broken, outstanding advantages of bonding strength is higher, the alternative processing in space, but this method also show it is following
Problem: although (1) ultrafast laser can be completed instantaneously to weld due to its focal point high-energy density, due to usually using big numerical value
Aperture micro objective focuses, and focus space range is small, and light-beam position is constant, and it is solid to realize that region welding generallys use light beam
Fixed, precise 2-D workbench is welded with material move mode to be welded, and process velocity is slow, is limited and is added from hardware view
Work speed；(2) ultrafast laser welding usually requires that surface to be welded reaches optical contact, i.e. contact interplanar distance < 500nm, naked eyes
Observation exists without interference fringe, and larger gap will lead to plasma spilling and cause ablated surface or rupture, and there have at present to be special right
This experimental study also requires gap Maximum tolerance that could effectively weld within 3 μm, so method welding is due to that will throw surface
Light is cleaned to reach high clean smoothness, is not only difficult to practical application, nothing also helpless to large scale or compromise face
Method realizes engineering application, such as in patent CN106449439A, when using ultrafast laser packaged glass chip, not only wait seal
It connects glass surface to need to keep very high levelness, and when spacing is greater than 1 μm, can not directly be welded, it need to be in two panels
A sheet glass is added between glass, welded encapsulation, step are scanned to upper and lower two blocks of glass and middle layer sheet glass respectively
It is relatively complicated, low efficiency.
In addition, having also appeared a kind of method that multi-laser beam closes beam welding glass material, such as patent CN107892469A
Disclosed multi-laser beam closes the method and equipment of beam welding glass material, which utilizes ultrafast laser beam and continuous or long pulse
The combined beam light of laser beam realizes the welding of two pieces of same glass, can be to the biggish welded gaps for being unsatisfactory for optical contact condition
It is welded, and realizes vibration mirror scanning type laser welding, improve laser welding efficiency, realized engineering application, however pass through and grind
Study carefully the above-mentioned welding manner of discovery and still have following problems: ultrafast laser beam and continuous or Long Pulse LASER when (1) closing beam welding
The energy of beam can be superimposed in commissure, so that material transient temperature is excessively high, is generated excessive thermal stress and caused the strength of materials poor, because
This this kind of welding manner can not be suitable for the laser beam of higher-energy to the selection of laser beam energy requirement with higher；(2)
Ultrafast laser acts on simultaneously with continuous or Long Pulse LASER when closing beam welding, can be to material when ultrafast laser power density is excessively high
Ablation is caused, material welding effect is influenced, therefore closes the power that need to control ultrafast laser when beam welding, larger function can not be suitable for
The laser of rate.Although therefore it claims that achievable contact gap is greater than under the limitation that above-mentioned synergistic effect and ablation act on
The welding of 5 μm of two blocks of glass finds that it can only realize two kind of the same race materials of the maximal clearance at 12 μm or so after study actually
The welding of material.
Utility model content
Aiming at the above defects or improvement requirements of the prior art, it is transparent to provide a kind of recombination laser welding for the utility model
Module occurs for the device of fragile material to utilize ultrafast laser to realize by ultrafast laser Shu Fasheng module and continuous laser beam
It is preliminary to weld and realize final welding using continuous laser, and then realization has two blocks of transparent fragile materials of larger contact gap
Secured welding, have many advantages, such as that firm welding is reliable, it is applied widely.
To achieve the above object, the utility model proposes the device that a kind of recombination laser welds transparent fragile material,
Module occurs including ultrafast laser Shu Fasheng module and continuous laser beam, in which:
The ultrafast laser Shu Fasheng module includes the ultrafast laser set gradually being located in same optical path, the first expansion
Beam collimating mirror, the first reflecting mirror and ultrafast laser scanning element, by the laser beam of ultrafast laser transmitting through the first beam-expanding collimation
It reflexes in ultrafast laser scanning element through the first reflecting mirror after mirror beam-expanding collimation, is then focused through ultrafast laser scanning element again
Preliminary welding is carried out to the transparent fragile material contact position of to be welded two piece being located at below ultrafast laser scanning element to be formed just
Beginning weld seam；
It includes the continuous wave laser set gradually being located in same optical path, the second expansion that module, which occurs, for the continuous laser beam
Beam collimating mirror, the second reflecting mirror and continuous laser scanning element, by the laser beam of continuous wave laser transmitting through the second beam-expanding collimation
It reflexes in continuous laser scanning element through the second reflecting mirror after mirror beam-expanding collimation, is then focused through continuous laser scanning element again
It is carried out to the initial commissure for the transparent fragile material of two tentatively welded block being located at below continuous laser scanning element final
Welding.
As it is further preferred that the ultrafast laser scanning element sets gradually along optical path and is mounted on same
Third reflecting mirror, the first scanning galvanometer and the first flat field scanning lens on crossbeam.
As it is further preferred that the continuous laser scanning element sets gradually along optical path and is mounted on same
The 4th reflecting mirror, the second scanning galvanometer and the second flat field scanning lens on crossbeam.
As it is further preferred that the ultrafast laser scanning element is connected with first movement mechanism.
As it is further preferred that the continuous laser scanning element is connected with the second mobile mechanism.
As it is further preferred that two blocks of transparent fragile materials by two-dimensional working platform.
As it is further preferred that two blocks of transparent fragile materials are identical or different.
As it is further preferred that the contact gap of two blocks of transparent fragile materials is not less than 15 μm.
As it is further preferred that the contact gap of two blocks of transparent fragile materials is 20 μm~25 μm.
In general, mainly have the above technical solutions conceived by the present invention are compared with the prior art, with
Under technological merit:
1. the utility model combines the characteristics of two kinds of welding manners of ultrafast laser and continuous laser, successively to transparent brittleness
Material carries out two steps welding independent of each other, i.e., realizes preliminary welding using ultrafast laser and realized using continuous laser final
Welding, the secured welding of two blocks of transparent fragile materials is realized with this, has many advantages, such as that firm welding is reliable, strong applicability.
2. two kinds of laser of ultrafast laser and continuous laser are completely independent out by the recombination laser welding method of the utility model
Come, tentatively welding is realized by ultrafast laser, final welding is realized by continuous laser, can finally be repaired when welding super when preliminary welding
Fast laser damages the plasma ablation of material, therefore in preliminary welding without having to worry about the high-temperature plasma ablation of ultrafast laser
Effect can be used higher laser power and realize preliminary welding, be suitable for output power larger (such as output power is 40W)
Ultrafast laser, applicability is stronger, wider, and ultrafast laser and continuous laser are same in existing multi-laser beam conjunction beam welding method
Shi Zuoyong still can generate ablation injury to material, to reduce this injury, may be only available for when ultrafast laser power is higher
The ultrafast laser of power lower (such as 15W).
3. two kinds of laser of ultrafast laser and continuous laser are completely independent out by the recombination laser welding method of the utility model
Come, primary welding is independently realized using a kind of laser beam, take the energy that this welds single as a kind of energy of laser beam, nothing
Synergistic effect, therefore be suitable for the higher laser of power, and the weld strength after welding is high, shear strength reach 35Mpa with
On, and existing multi-laser beam closes ultrafast laser and continuous laser in beam welding method and acts on simultaneously, therefore the gross energy welded
For the sum of the energy of two kinds of laser beams, there are synergistic effects, so that material transient temperature is excessively high, and then generate excessive thermal stress
It causes weld strength to decline, the laser of higher-wattage can not be suitable for.
4. the recombination laser welding method of the utility model is suitable for the laser of higher power, the molten of material is made with this
Change amount increases, thus is suitable for the welding of the transparent fragile material of the same race or not of the same race of big contact gap, is particularly suitable for contacting
Gap is not less than the welding of two blocks of transparent fragile materials of 15 μm (preferably 20~25 μm), and applicable contact gap improves nearly
One times, and existing multi-laser beam closes beam welding method for fear of the synergistic effect of two kinds of laser beams and the ablation of ultrafast laser beam
Effect so that its laser that may be only available for lower-wattage, thus can only realize small contact gap (maximal clearance is on 12 μm of left sides
It is right) same glass material welding.
Gather 5. the recombination laser of the utility model is welded in scanning mode to control using scanning galvanometer cooperation scanning lens
Burnt laser beam is scanned on fixed material by predetermined pattern, and compared with movable workbench, scanning ray speed is fast, speed of welding
With high-efficient, it can be achieved that biggish contact gap welding, relaxes to material surface roughness purity requirements, save manpower object
Power reduces production cost.
6. the recombination laser welding of the utility model inherits the advantage of ultrafast laser welding, can be directly to transparent brittleness material
Material is welded, and is not necessarily to any filler or middle layer, is not only increased weldquality and sealing performance, and simplify technique
Process, position while welding precision is high and anticorrosive, stability is good.
Detailed description of the invention
Fig. 1 is that the structure for the device that a kind of recombination laser provided by the embodiment of the utility model welds transparent fragile material is shown
It is intended to.
Specific embodiment
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and implementation
Example, the present invention will be further described in detail.It should be appreciated that specific embodiment described herein is only used to explain
The utility model is not used to limit the utility model.In addition, institute in the various embodiments of the present invention described below
The technical characteristic being related to can be combined with each other as long as they do not conflict with each other.
Since the method that existing multi-laser beam closes beam welding glass material closes the principle that beam welds for fear of it, so that two beams
The heat of combined beam light is superimposed, and then accumulates thermal stress reduction weld strength, and since excessively high ultrafast laser power can be to material
Material causes ablation, and the power of ultrafast laser cannot be too big when influencing material welding effect, therefore closing beam welding, to ultrafast laser
Energy size requirements are harsh, can only use the ultrafast laser of smaller power so that its may be only available for gap 12 μm with
The welding of interior especially same glass.And in order to realize the welding of larger clearance (not less than 15 μm), especially larger clearance
Two kinds of different materials welding, the utility model passes through continuous research and discovery, provides a kind of completely new recombination laser
The device for welding transparent fragile material, be using to transparent fragile material have the independent substep of radioparent two kinds of laser beams into
Row welds twice, and one is ultrafast laser beam (picoseconds or femtosecond laser beam), and another kind is continuous laser beam, and using scanning vibration
Two kinds of laser beams are focused on the gap location of transparent fragile material contact by mirror, by controlling the scanning track of laser beam to transparent
Fragile material carries out two step welding.Its Fundamentals of Welding is: the first step, (specific using the high peak power density of ultrafast laser
It is 1012W/cm2) in the action time of extremely short (specially tens of picoseconds), so that transparent fragile material is locally being generated non-linear suction
It produces effects and answers, forming high-temperature plasma makes material locally micro- fusing, and the solidification after thermal diffusion is cooling of the material of fusing is realized preliminary
Microwelding, since two pieces of fragile material gaps to be welded are larger, larger gap will lead to plasma spilling cause two pieces it is crisp
Property material contact surface ablation or rupture, but ultrafast laser beam also changes the optical property in microwelding region simultaneously, is formed white
The translucent initial weld seam of color, the white translucent weld seam can be effectively improved to the absorptivity of transmittance laser beam (specifically from 2%
It improves to 60~70%)；Second step focuses on continuous laser on initial weld seam, and energy has been enhanced the initial of absorptivity
Weld seam absorbs, and since continuous laser peak density is low, and the laser energy that material absorbs can only reach Material Melt temperature, makes
Initial weld seam and the material of two pieces of fragile material contact surface ablations or rupture melt again, without generating high-temperature plasma
Ablation process to not only repair the part of ultrafast laser plasma ablation damage, and makes ablation or rupture through thermal diffusion
Material fusing near part, generates more molten materials, fills bigger gap, forms intensity and favorable sealing property
Weld seam.
As shown in Figure 1, a kind of recombination laser provided by the utility model welds the device of transparent fragile material comprising super
Module occurs for fast laser beam and module occurs for continuous laser beam, wherein ultrafast laser Shu Fasheng module is used for ultrafast laser beam
The transparent fragile material contact position of to be welded two pieces is focused on, ultrafast laser beam generates non-two pieces of transparent fragile material contact positions
Linear absorption effect makes the transparent fragile material local melting of laser beam foucing near zone, and the material after fusing is through thermal expansion cold scattering
But it is formed by curing the initial weld seam of white translucent afterwards, preliminary welding is realized with this；Module occurs for continuous laser beam for that will connect
Continue laser beam focus in the initial commissure of white translucent, continuous laser beam makes initial weld seam and two blocks of transparent fragile materials
In preliminary welding, ablated or broken portion melts again, to repair the part of ultrafast laser beam ablation damage, after fusing
Material is formed by curing final weld seam after thermal diffusion is cooling.The device of the utility model be suitable for two pieces it is identical or different transparent
Fragile material, the transparent fragile material are, for example, soda-lime glass, quartz glass, borosilicate glass etc., two blocks of transparent brittleness materials
Any one of above-mentioned specific material may be selected in material.It is transparent crisp that the device of the utility model is suitable for two pieces of gap greater than 15 μm
The welding of property material, is particularly suitable for the welding of two block transparent fragile material of the gap between 20 μm~25 μm.
As shown in Figure 1, ultrafast laser Shu Fasheng module includes the ultrafast laser set gradually in same optical path
1, the first beam-expanding collimation mirror 3, the first reflecting mirror 5 and ultrafast laser scanning element 8 when work, are emitted super by ultrafast laser 1
Fast laser beam reflexes in ultrafast laser scanning element 8 through the first reflecting mirror 5 again after 3 beam-expanding collimation of the first beam-expanding collimation mirror,
Then the transparent brittleness of to be welded two piece positioned at 8 lower section of ultrafast laser scanning element is focused to through ultrafast laser scanning element 8
Preliminary welding is carried out at material forms initial weld seam.
Specifically, ultrafast laser scanning element 8 includes the third reflecting mirror 6 set gradually along optical path, the first scanning galvanometer 7
With the first flat field scanning lens 10, the first scanning galvanometer is reflexed to through third reflecting mirror 6 by the laser beam that the first reflecting mirror 5 reflects
In 7, then is focused through the first flat field scanning lens 10 and form the first focusing laser beam 11.In addition, ultrafast laser scanning element 8 connects
There is first movement mechanism 9, realizes that the integral position of ultrafast laser scanning element structure is adjusted by first movement mechanism, two pieces thoroughly
Bright fragile material is supported by two-dimensional working platform 19 and movement.
When work, the first beam-expanding collimation mirror 3 is used to be expanded the first laser beam 2 that ultrafast laser 1 exports and standard
Directly, the first reflecting mirror 5 and third reflecting mirror 6 are used to the second laser beam 4 after beam-expanding collimation importing the first scanning galvanometer 7, then
It is focused through the first flat field scanning lens 10 and forms the first focusing laser beam 11, first movement mechanism 9 is used for (i.e. perpendicular in z-axis direction
Histogram to) mobile ultrafast laser scanning element 8, it is ensured that laser spot is in required position；Two-dimensional working platform 19 is for mobile weldering
Material 16 is connect (to be formed by stacking by two blocks of transparent fragile materials 12, about 13, gap between the two is 14), to realize recombination laser
Welding effect.
As shown in Figure 1, it includes the continuous wave laser set gradually in same optical path that module, which occurs, for continuous laser beam
21, the second beam-expanding collimation mirror 23, the second reflecting mirror 25 and continuous laser scanning element 28 when work, are sent out by continuous wave laser 21
The continuous laser beam penetrated reflexes to continuous laser scanning through the second reflecting mirror 25 again after 23 beam-expanding collimation of the second beam-expanding collimation mirror
In unit 28, tentatively welding positioned at 28 lower section of continuous laser scanning element then is focused to through continuous laser scanning element 28
The initial commissures of two blocks of transparent fragile materials finally welded.
Specifically, continuous laser scanning element 28 includes the 4th reflecting mirror 26, the second scanning vibration set gradually along optical path
Mirror 27 and the second flat field scanning lens 30, reflex to second through the 4th reflecting mirror 26 by the laser beam that the second reflecting mirror 25 reflects and sweep
It retouches in galvanometer 27, then is focused through the second flat field scanning lens 30 and form the second focusing laser beam 31.In addition, continuous laser scanning is single
Member 28 is connected with the second mobile mechanism 29, and the integral position tune of continuous laser scanning element structure is realized by the second mobile mechanism
It saves, is provided with CCD positioning device 32 on two-dimensional working platform 19, which is additionally provided with industrial personal computer 20, industrial personal computer 20 and two dimension
Workbench 19, first movement mechanism 9, the second mobile mechanism 29, ultrafast laser 1 are connected with continuous wave laser 21.
When work, the second beam-expanding collimation mirror 23 be used to expand by the third laser beam 22 that continuous wave laser 21 exports and
Collimation, the second reflecting mirror 25 and the 4th reflecting mirror 26 are used to the 4th laser beam 24 after beam-expanding collimation importing the second scanning galvanometer
27, then focused through the second flat field scanning lens 30 and form the second focusing laser beam 31, the second mobile mechanism 29 is used in z-axis direction
(i.e. vertical direction) moves continuous laser scanning element 28, it is ensured that laser spot is in required position；CCD positioning device 32 is for true
It protects the second focusing laser beam 31 and is directed at initial weld seam；Industrial personal computer 20 is for controlling ultrafast laser 1, continuous wave laser 21, ultrafast
The collaborative work of laser scan unit 8, continuous laser scanning element 28 and two-dimensional working platform 19.Wherein, the first flat field is swept
It retouches lens 10 and the second flat field scanning lens 30 is preferably f- θ flat field scanning lens.
The operating process for welding the device of transparent fragile material to the recombination laser of the utility model below is illustrated.
The welding material 16 that two blocks of transparent fragile materials 12,13 are stacked together naturally two-dimensional working is fixed on first to put down
On platform 19, and start two-dimensional working platform 19 and welding material 16 is moved to 8 lower section of ultrafast laser scanning element, adjusts first and move
The first focus point for focusing laser beam 11 (i.e. ultrafast laser beam) that motivation structure 9 exports ultrafast laser scanning element 8 is located at two
Gap 14 between the transparent fragile material 12,13 of block；Then industrial personal computer 20 starts the output first laser beam 2 of ultrafast laser 1, and benefit
Laser beam 11 is focused according to default scan pattern in welding material with the control of scanning galvanometer 7 first of ultrafast laser scanning element 8
Gap 14 is scanned welding by planned course between the transparent fragile material 12,13 of two blocks of 16, forms white half in gap 14
Transparent initial weld seam 15, improves the absorptivity to transmittance laser beam；It is then turned off ultrafast laser 1 and ultrafast laser is swept
Unit 8 is retouched, starts two-dimensional working platform 19, welding material 16 is moved to the lower section of continuous laser scanning element 28, passes through CCD
Continuous laser focused beam acts are directed at initial weld seam 15 by positioning device 32, and adjusting the second mobile mechanism 29 keeps continuous laser scanning single
The second of 28 output of member focuses (i.e. continuous laser beam) focus point of laser beam 31 and is located between two blocks of transparent fragile materials 12,13
On initial weld seam 15；Industrial personal computer 20 starts continuous wave laser 21 and exports third laser beam 22, and utilizes continuous laser scanning element
28 scanning galvanometer 27 control second focus laser beam 31 according to default scan pattern welding material 16 two pieces of transparent brittleness
Initial weld seam 15 is scanned between material 12,13, and initial weld seam 15 absorbs laser energy and reaches fusion temperature, makes ablated surface
Or the material of rupture melts again, repairs the part of ultrafast laser plasma ablation damage, and makes near focal point material through thermal diffusion
Material also reaches fusion temperature, generates more molten material, fills biggish gap, forms the weldering of intensity and favorable sealing property
Seam 18.
Building for certain composite light beam optical path can also be realized using other modes, as long as ultrafast laser and continuous laser energy
Successively material is welded by scanning galvanometer peace field scan lens focus, realizes that the device of focal adjustments is also not necessarily limited to
State structure cited in example.
The following are the embodiments of the present invention:
Embodiment 1
It the use of output wavelength is 1064nm, pulsewidth 10ps, Maximum Power Output 90W, pulse recurrence frequency 1MHz
The optical fiber continuous wave laser that Nd:YAG picosecond laser and output wavelength are 1064nm, peak power output is 100W, welding
Two pieces of sizes stacked naturally are 50 × 25mm, the common soda lime glass with a thickness of 1mm, two blocks of glass stack between gap be
15μm.The focus of picosecond laser and continuous laser clearance position between two pieces of natural laminated glass, first starts picosecond laser,
Output power is the laser beam of 25W, is scanned galvanometer and f- θ flat field scanning lens, is with 3000mm/s velocity scanning length
The rectangle that 20mm and width are 10mm seals initial weld seam；Welding material is moved below continuous laser scanning element later,
Start continuous wave laser, export 40W power optical beam, is 20mm and width along length through scanning galvanometer and f- θ flat field scanning lens
Initial weld seam is sealed for the rectangle of 10mm, welding is scanned with 10mm/s speed.Welding result shows: in two pieces stacked
White powder is completely melt in larger gap between glass, and waterproof seal is good, and shear strength is greater than 35Mpa, and glass surface is lossless
Scar mark.
Embodiment 2
It the use of output wavelength is 1064nm, pulsewidth 10ps, Maximum Power Output 90W, pulse recurrence frequency 1MHz
The optical fiber continuous wave laser that Nd:YAG picosecond laser and output wavelength are 1064nm, peak power output is 100W, welding two
The size that block stacks is 60 × 40mm, the xenogenesis glass with a thickness of 2mm, be at the middle and upper levels quartz glass, lower layer is soda-lime glass,
Two blocks of glass stack between gap be 20 μm.Using recombination laser fragile material welding method, picosecond laser and continuous laser
Focus between two pieces of natural laminated glass clearance position, first start picosecond laser, output power is that 35W picosecond pulse is sharp
Light beam is scanned galvanometer and f- θ flat field scanning lens, and with 3000mm/s velocity scanning length be 40mm and width is 30mm's
Rectangle seals initial weld seam, forms 40 × 30mm rectangle white translucent and initially welds seal-weld；Later by welding material
Below mobile continuous laser scanning element, starting continuous wave laser exports 60W power continuous light beam, flat through scanning galvanometer and f- θ
Field scan lens, the rectangle that along length be 40mm and width is 30mm are sealed initial weld seam, are scanned with 40mm/s speed
Welding.Welding result shows: white powder is completely melt that waterproof seal is good in larger gap between the two blocks of glass stacked, cuts
Shearing stress is greater than 40Mpa, and glass surface no damaging trace.
Embodiment 3
It the use of output wavelength is 1064nm, pulsewidth 10ps, output power maximum power are 90W, pulse recurrence frequency
The optical fiber continuous laser that the Nd:YAG picosecond laser and output wavelength of 1MHz is 1064nm, peak power output is 100W
Device, welding two pieces of sizes stacked is 50 × 50mm, the quartz glass with a thickness of 1.5mm, two blocks of glass stack between gap
It is 25 μm.Using recombination laser fragile material welding method, the focus of picosecond laser and continuous laser folds glass at two pieces naturally
Clearance position between glass first starts picosecond laser, and output power is 40W picosecond pulse laser beam, is scanned galvanometer and f- θ
Flat field scanning lens with 4000mm/s velocity scanning length is 40mm and width for the square of 40mm seals initial weld seam, shape
Seal-weld is initially welded at 40 × 40mm square white translucent；It later will be under the mobile continuous laser scanning system of welding material
Side, starting continuous wave laser export 80W power continuous light beam, through scanning galvanometer and f- θ flat field scanning lens, seal along square
Initial weld seam is scanned welding with 60mm/s speed.Welding result shows: between the two blocks of glass stacked in larger gap
White powder is completely melt that waterproof seal is good, and shear strength is greater than 45Mpa, and glass surface no damaging trace.
Embodiment 4
It the use of output wavelength is 1064nm, pulsewidth 10ps, Maximum Power Output 90W, pulse recurrence frequency 1MHz
The optical fiber continuous wave laser that Nd:YAG picosecond laser and output wavelength are 1064nm, peak power output is 100W, welding two
The size that block stacks is 55 × 55mm, the xenogenesis glass with a thickness of 1mm, be at the middle and upper levels borosilicate glass, lower layer is quartz
Glass, two blocks of glass stack between gap be 22 μm.Using recombination laser fragile material welding method, picosecond laser and continuous
The focus of laser clearance position between two pieces of natural laminated glass, first starts picosecond laser, output power is 35W picoseconds of arteries and veins
Laser beam is scanned galvanometer and f- θ flat field scanning lens, and with 3500mm/s velocity scanning length be 35mm and width is
The square of 35mm seals initial weld seam, and the square white translucent for forming 35 × 35mm initially welds seal-weld；Later will
Below the mobile continuous laser scanning element of welding material, starting continuous wave laser exports 70W power continuous light beam, through scanning galvanometer
With f- θ flat field scanning lens, along length be 35mm and width is 35mm square seals initial weld seam, with 65mm/s speed into
Row scanning welding.Welding result shows: white powder is completely melt in larger gap between the two blocks of glass stacked, waterproof seal
Good, shear strength is greater than 35Mpa, and glass surface no damaging trace.
As it will be easily appreciated by one skilled in the art that the above is only the preferred embodiment of the utility model only, not
To limit the utility model, any modification made within the spirit and principle of the present invention, equivalent replacement and change
Into etc., it should be included within the scope of protection of this utility model.
Claims (9)
1. the device that a kind of recombination laser welds transparent fragile material, which is characterized in that including ultrafast laser Shu Fasheng module and
Module occurs for continuous laser beam, in which:
The ultrafast laser Shu Fasheng module includes the ultrafast laser (1) set gradually being located in same optical path, the first expansion
Beam collimating mirror (3), the first reflecting mirror (5) and ultrafast laser scanning element (8) are passed through by the laser beam of ultrafast laser (1) transmitting
It is reflexed in ultrafast laser scanning element (8) through the first reflecting mirror (5) again after first beam-expanding collimation mirror (3) beam-expanding collimation, then
The transparent brittleness of to be welded two piece below ultrafast laser scanning element (8) is focused to through ultrafast laser scanning element (8)
Preliminary welding is carried out at material forms initial weld seam；
It includes the continuous wave laser (21) set gradually being located in same optical path, the second expansion that module, which occurs, for the continuous laser beam
Beam collimating mirror (23), the second reflecting mirror (25) and continuous laser scanning element (28), the laser emitted by continuous wave laser (21)
Beam reflexes to continuous laser scanning element (28) through the second reflecting mirror (25) again after second beam-expanding collimation mirror (23) beam-expanding collimation
In, then tentatively having welded below continuous laser scanning element (28) is focused to through continuous laser scanning element (28)
It is finally welded the initial commissure of two blocks of transparent fragile materials.
2. the device that recombination laser as described in claim 1 welds transparent fragile material, which is characterized in that the ultrafast laser
Scanning element (8) includes third reflecting mirror (6) that is setting gradually along optical path and being mounted on same crossbeam, the first scanning galvanometer
(7) and the first flat field scanning lens (10).
3. the device that recombination laser as described in claim 1 welds transparent fragile material, which is characterized in that the continuous laser
Scanning element (28) includes the 4th reflecting mirror (26) that is setting gradually along optical path and being mounted on same crossbeam, the second scanning vibration
Mirror (27) and the second flat field scanning lens (30).
4. the device that recombination laser as claimed in claim 2 welds transparent fragile material, which is characterized in that the ultrafast laser
Scanning element (8) is connected with first movement mechanism (9).
5. the device that recombination laser as claimed in claim 3 welds transparent fragile material, which is characterized in that the continuous laser
Scanning element (28) is connected with the second mobile mechanism (29).
6. the device that recombination laser as described in claim 1 welds transparent fragile material, which is characterized in that two pieces of transparent brittleness
Material is supported by two-dimensional working platform (19).
7. the device that recombination laser as described in claim 1 welds transparent fragile material, which is characterized in that two pieces of transparent brittleness
Material is identical or different.
8. the device that recombination laser as described in claim 1 welds transparent fragile material, which is characterized in that two pieces of transparent brittleness
The contact gap of material is not less than 15 μm.
9. the device that recombination laser as claimed in claim 8 welds transparent fragile material, which is characterized in that two pieces of transparent brittleness
The contact gap of material is 20 μm~25 μm.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110560896A (en) * | 2019-08-23 | 2019-12-13 | 大族激光科技产业集团股份有限公司 | laser welding device and welding method thereof |
| CN111822849A (en) * | 2019-04-22 | 2020-10-27 | 大族激光科技产业集团股份有限公司 | Laser processing system and processing method |
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2018
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111822849A (en) * | 2019-04-22 | 2020-10-27 | 大族激光科技产业集团股份有限公司 | Laser processing system and processing method |
| CN110560896A (en) * | 2019-08-23 | 2019-12-13 | 大族激光科技产业集团股份有限公司 | laser welding device and welding method thereof |
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