CN208375636U - A kind of two line excavation machine of silicon single crystal rod - Google Patents

Abstract

The utility model relates to a kind of two line excavation machines of silicon single crystal rod, belong to silicon single crystal rod technical field of processing equipment, including pedestal, the pedestal is equipped with loading assemblies, blanking component, cutting head mechanism, clamping device and feeding slide unit component, the loading assemblies and blanking component are connect by support component with pedestal, the feeding slide unit component is set to above pedestal by column frame, the clamping device is fixedly arranged on the lower section of feeding slide unit component, cutting line forms parallel lines around cutting head mechanism to cut silicon single crystal rod, compared to four traditional line excavation machines, the utility model carries out evolution using two cutting lines, both cutting head mechanism had been optimized, make to run more stable, it is suitable for the evolution demand of flaw-piece with crest line difference back gauge again, realize cutting line away from it is electrodeless adjustable, improve equipment cutting efficiency, full-automatic operation, with production The feature that energy is high, cut quality is stable, labor intensity is low, to realize that industrial automation has profound significance.

Description

A kind of two line excavation machine of silicon single crystal rod

Technical field

The utility model belongs to silicon single crystal rod technical field of processing equipment, relates in particular to a kind of two line of silicon single crystal rod and opens Square machine.

Background technique

The manufacturing process of silicon wafer used in production solar panel is divided into: crystal pulling, truncation, evolution, mill fall, slice etc. is several Step.Crystal pulling is the silicon single crystal rod for generating cylinder type by way of chemical deposition in crystal pulling furnace, and length maximum is up to 6 Rice；Truncation refers to that the silicon single crystal rod that crystal pulling is come out is cut into the segment that length does not wait (100~700mm)；Evolution refers to truncation The silicon single crystal rod of different length out is cut into cuboid-type, generates the clout (row of four block-shaped irregular (the arc-shaped ⌒ in section) It is known as flaw-piece in the industry)；Mill, which on the contrary refers to, carries out grinding and polishing four surfaces of the silicon single crystal rod of cuboid-type after evolution with grinding tool, and Four seamed edges carry out the process of rounding.Slice refers to that the silicon single crystal rod the cuboid-type after grinding is cut into 0.15mm or so thickness Silicon wafer is used for the production of last solar panel.Currently, " four lines " excavation machine is mostly used to realize silicon single crystal rod in industry Evolution, i.e., the cutting line at cutting head form " well " font, this kind of device structure complexity is at high cost, in addition, between cutting line Away from fixation, it is simply possible to use in the excision for cutting off flaw-piece and cannot achieve silicon rod crest line.

Utility model content

For various deficiencies of the prior art, to solve the above-mentioned problems, it is proposed that a kind of two line excavation machine of silicon single crystal rod.

To achieve the above object, the utility model provides the following technical solutions:

A kind of two line excavation machine of silicon single crystal rod, including pedestal, the pedestal are equipped with loading assemblies, blanking component, cutting Head mechanism, clamping device and feeding slide unit component, the loading assemblies and blanking component are connect by support component with pedestal, institute The direction of feed that support component is stated perpendicular to feeding slide unit component is arranged, and the loading assemblies and blanking component are located at support The both ends of component, and the direction of feed of loading assemblies and blanking component is perpendicular to the direction of feed of feeding slide unit component；

The feeding slide unit component is set to above pedestal by column frame, and the clamping device is fixedly arranged on feeding slide unit group The lower section of part, and clamping device and feeding slide unit component synchronization feeding, the cutting head mechanism are located at the side of support component, cut Secant forms parallel lines around cutting head mechanism to cut silicon single crystal rod.

Further, the loading assemblies include feeding fixed plate, the first clamping jaw and the second clamping jaw, first clamping jaw and Or second clamping jaw be flexibly connected with feeding fixed plate, the longitudinal section of first clamping jaw and the second clamping jaw is V-shaped, and the two V-type opening be oppositely arranged with formed accommodate silicon single crystal rod space, the upper surface of the feeding fixed plate and be located at the first clamping jaw, Feeding tray is equipped between second clamping jaw.

Further, the blanking component includes blanking fixed plate, blanking cylinder, the L-shaped lower material torr of supporting plate and longitudinal section Block, the cylinder body end of the blanking cylinder and the upper surface of blanking fixed plate are connected, and the lower surface of piston end and supporting plate is connected, institute State blanking tray and be set as 2, and the upper surface set on supporting plate that 2 blanking trays are opposite, the blanking fixed plate and supporting plate it Between be equipped with guide post.

Further, the support component includes backing plate, feeding electric cylinders mould group and blanking electric cylinders mould group, the feeding electric cylinders mould The guide rail slide block of group is equipped with loading assemblies support plate, and the guide rail slide block of the blanking electric cylinders mould group is equipped with and blanking fixed plate Connected blanking component support plate, the loading assemblies support plate are equipped with feeding Buffer Unit, the feeding Buffer Unit packet The first buffing pad, the second buffing pad and buffer spring are included, the bottom of first buffing pad and loading assemblies support plate are connected, Top is free end, and the bottom of second buffing pad is free end, and top is connected with feeding fixed plate, the buffer spring Both ends be separately connected the first buffing pad and the second buffing pad.

Further, the feeding slide unit component includes slide unit, slide unit driving motor and feed screw, the feed screw Both ends pass through lead screw support frame respectively and column frame is connected, and the periphery of the feed screw is arranged with the cunning being threadedly engaged with it Dynamic seat, the bottom of the sliding seat and slide unit are connected, and one side is connect with the output end of slide unit driving motor, and the slide unit passes through The sliding block being disposed below is slidably connected with column frame.

Further, the clamping device includes clamp head, dynamic collet and contained side skin component, the top of the clamp head and cunning Platform is connected, and the top of the dynamic collet is slidably connected with slide unit, and the clamp head, dynamic collet are floating clamp, the floating Collet includes Gripper body, the diaphragm being set on rear side of Gripper body and the ball being set between the Gripper body and diaphragm Head.

Further, the contained side skin component is set as 2, and 2 contained side skin components are connect with clamp head, dynamic collet respectively, The contained side skin component includes at least 2 contained side skin cylinders, and at least two contained side skin cylinder is located at clamp head or dynamic collet Periphery, at least one of described 2 contained sides skin component are connect with flaw-piece rotating element.

Further, the cutting head mechanism includes left cutting assembly, right cutting assembly and wire-winding unit, and group is cut in the left cut Part, right cutting assembly are symmetrical, and are equipped with the resigning gap that passes through for silicon single crystal rod between the two, the left cutting assembly and Right cutting assembly includes wire-mesh scaffold and the first cutting wheel and the second cutting wheel that are vertically distributed on wire-mesh scaffold, described First cutting wheel and the second cutting wheel are in the same plane, and the wire-mesh scaffold positioned at left cutting assembly and right cutting assembly is opposite Setting, cutting line is successively bypassed to be used for positioned at the first cutting wheel of left cutting assembly and right cutting assembly, the formation of the second cutting wheel Cut the parallel lines of silicon single crystal rod, the bottom of the wire-mesh scaffold and pedestal slidable connection.

Further, the wire-winding unit includes wire winding tube and ureeling barrel, and the wire winding tube and ureeling barrel are each along horizontal direction And it is parallel to wire-mesh scaffold setting, and to be located at cutting mechanism not ipsilateral for the two, is equipped with coiling at the wire winding tube and ureeling barrel Driving assembly and winding displacement driving assembly.

Further, the pedestal is equipped with edge fit skin component far from the side of support component, and the edge fit skin component includes connecing Flaw-piece conveyer and picking-up container, the edge fit skin conveyer include edge fit skin motor, belt, slope and picking-up container, the edge fit Skin motor drives belt operating, the parallel lines setting that the top face cutting line of the picking-up container is formed, bottom end and Slope Facies It connects, the rack of the slope and edge fit skin conveyer is connected.

The beneficial effects of the utility model are:

Compared to four traditional line excavation machines, the application carries out evolution using two cutting lines, had both optimized cutting head machine Structure, makes to run evolution demand that is more stable, and being suitable for flaw-piece with crest line difference back gauge, realize cutting line away from it is electrodeless adjustable, Equipment cutting efficiency is improved, full-automatic operation has the characteristics that production capacity is high, cut quality is stable, labor intensity is low, in addition, Floating clamp adaptively silicon single crystal rod end face gradient, realization clamping device can be bonded with the complete of silicon single crystal rod end face, improve Clamping stability, to realize that industrial automation has profound significance.

Detailed description of the invention

Fig. 1 is the overall structure diagram of the utility model；

Fig. 2 is loading assemblies structural schematic diagram；

Fig. 3 is blanking component structure diagram；

Fig. 4 is support component structural schematic diagram；

Fig. 5 is clamping device and feeding slide unit component combination schematic diagram；

Fig. 6 is floating clamp structural schematic diagram；

Fig. 7 is cutting head mechanism structure schematic diagram；

Fig. 8 is that cutting line moves towards schematic diagram.

In attached drawing: 1- pedestal, 2- loading assemblies, 3- blanking component, 4- support component, 5- cutting head mechanism, 6- clamping machine Structure, 7- feed slide unit component, 8- column frame, 9- edge fit skin component, 10- cutting line；

201- feeding fixed plate, the first clamping jaw of 202-, the second clamping jaw of 203-, 204- feeding tray, 205- thrust cylinder, 206- backup plate；

301- blanking fixed plate, 302- blanking cylinder, 303- supporting plate, 304- blanking tray, 305- guide post, on 306- Cylinder, 307- lower prop；

Under 401- backing plate, 402- feeding electric cylinders mould group, 403- blanking electric cylinders mould group, 404- loading assemblies support plate, 405- Expect component support plate, the first buffing pad of 406-, the second buffing pad of 407-, 408- buffer spring；

The left cutting assembly of 501-, the right cutting assembly of 502-, 503- wire-mesh scaffold, the first cutting wheel of 504-, 505- second are cut Cut wheel, 506- wire winding tube, 507- ureeling barrel, 508- tension support, 509- tensile drive element, 510 straining pulleys, 511- winding displacement Wheel, 512- First Transition wheel, 513- back gauge detection probe, 514- detect cylinder；

601- clamp head, 602- move collet, 603- contained side skin cylinder, 604- Gripper body, 605- diaphragm, 606- bulb, It is dynamic that 607- collet rotating electric machine, 608- move center of collet axis, 609- moves collet rotary shaft bearing sleeve, 610- moves collet bracket, 611- Collet lead screw, 612- move collet and feed motor；

701- slide unit, 702- slide unit driving motor, 703- feed screw, 704- lead screw support frame, 705- sliding block, 706- Sliding seat；

901- edge fit skin motor, 902- belt, the slope 903-.

Specific embodiment

In order to make those skilled in the art more fully understand the technical solution of the utility model, below with reference to the utility model Attached drawing carries out clear, complete description to the technical solution of the utility model, and based on the embodiment in the application, this field is general Logical technical staff other similar embodiments obtained without making creative work, all should belong to the application The range of protection.In addition, the direction word mentioned in following embodiment, such as "upper" "lower" " left side " " right side " etc. are only with reference to attached drawing Direction, therefore, the direction word used be for illustrative and not limiting the utility model create.

Embodiment one:

With reference to Fig. 1, a kind of two line excavation machine of silicon single crystal rod, including pedestal 1, the pedestal 1 are equipped with column frame 8, institute Pedestal 1 is stated equipped with loading assemblies 2, blanking component 3, cutting head mechanism 5, clamping device 6, feeding slide unit component 7 and edge fit Skin component 9.Specifically: silicon single crystal rod is delivered to target position through loading assemblies 2, feeding slide unit component 7 drive clamping device 6 into The silicon single crystal rod positioned at loading assemblies 2 is given and clamps, silicon single crystal rod is clamped to cutting head mechanism 5 and carried out once by clamping device 6 Evolution, then, clamping device 6 clamp silicon single crystal rod and are once reset to target position, are rotated by 90 °, and clamping device 6 is by silicon single crystal rod Clamping to cutting head mechanism 5 carries out secondary evolution, and the clamping silicon single crystal rod of clamping device 6 is secondary to be reset to target position, rotation 45 °, crest line excision is carried out, is rotated again, cut off another pair crest line, ultimately form monocrystalline silico briquette, clamping device 6 is by monocrystalline silico briquette It is placed in blanking component 3 and completes blanking, meanwhile, the flaw-piece that an evolution and secondary evolution are formed is exported through edge fit skin component 9.

Referring to figs. 1 to Fig. 3, the loading assemblies 2 and blanking component 3 are connect by support component 4 with pedestal 1, the branch Support component 4 is arranged perpendicular to the direction of feed of feeding slide unit component 7, specifically, the loading assemblies 2 and blanking component 3 are distinguished Positioned at the both ends of support component 4, support component 4 can drive loading assemblies 2 and blanking component 3 to feed respectively, and loading assemblies 2 Direction of feed with blanking component 3 is perpendicular to the direction of feed for feeding slide unit component 7.

With reference to Fig. 2, the loading assemblies 2 include feeding fixed plate 201, the first clamping jaw 202 and the second clamping jaw 203, and institute State the first clamping jaw 202 and or the second clamping jaw 203 be flexibly connected with feeding fixed plate 201, that is to say, that the first clamping jaw 202 and Two clamping jaws 203 can be moved together to change spacing.In the present embodiment, the bottom of the first clamping jaw 202 and feeding fixed plate 201 are solid Even, the bottom of the second clamping jaw 203 is flexibly connected by sliding rail and sliding block with feeding fixed plate 201, at second clamping jaw 203 It is connected with the thrust cylinder 205 for pushing the second clamping jaw 203 close to or far from the first clamping jaw 202.In order to improve silicon single crystal rod Clamping stability, the longitudinal section of first clamping jaw 202 and the second clamping jaw 203 is V-shaped, and the V-type opening of the two is opposite It is arranged to form the space for accommodating silicon single crystal rod.Meanwhile in order to be limited to the silicon single crystal rod being placed in space, the feeding The side of fixed plate 201 is equipped with the backup plate 206 with the space face setting for accommodating silicon single crystal rod, i.e. backup plate 206 and silicon single crystal rod An end face offset, to be limited to silicon single crystal rod.In addition, the upper surface of the feeding fixed plate 201 and be located at first Multiple feeding trays 204 are equipped between clamping jaw 202, the second clamping jaw 203, and 2 feeding trays 204 form tray group, the support The longitudinal section of block group is V-shaped, to adapt to the circumference arc of silicon single crystal rod, plays supporting role to silicon single crystal rod.

With reference to Fig. 3, the blanking component 3 includes that blanking fixed plate 301, blanking cylinder 302, supporting plate 303 and longitudinal section are in L The upper surface of the blanking tray 304 of type, the cylinder body end of the blanking cylinder 302 and blanking fixed plate 301 is connected, piston end with The lower surface of supporting plate 303 is connected, that is to say, that passes through the height of the flexible adjustable blanking component 3 of blanking cylinder 302.It is described Blanking tray 304 is set as 2, and the opposite upper surface set on supporting plate 303 of 2 blanking trays 304 is to form receiving monocrystalline silicon The groove of block.

The guide post 305 playing the guiding role is equipped between the blanking fixed plate 301 and supporting plate 303.Preferably, described Guide post 305 includes column body 306 and lower prop 307, and cavity, and the internal diameter of column body 306 are equipped with inside the column body 306 Greater than the outer diameter of lower prop 307, the bottom of the lower prop 307 and blanking fixed plate 301 are connected, and top is embedded in column body In 306 cavitys, the outer wall of the lower prop 307 is equipped with flange, and the inner wall of the column body 306 is equipped with groove, described convex Edge is embedded in groove, and flange and groove are arranged each along vertical direction, meanwhile, it is empty that the lower prop 307 is embedded in column body 306 The length of cavity segment is greater than the range of blanking cylinder 302, that is to say, that in height adjustment process, flange is embedded in always Inside grooves avoid column body 306 and lower prop 307 from being detached from.

With reference to Fig. 4, the support component 4 includes backing plate 401, feeding electric cylinders mould group 402 and blanking electric cylinders mould group 403, institute The guide rail slide block for stating feeding electric cylinders mould group 402 is equipped with the loading assemblies support plate 404 connecting with loading assemblies 2, on driving Expect that component 2 is fed, the guide rail slide block of the blanking electric cylinders mould group 403 is equipped with the blanking component being connected with blanking fixed plate 301 Support plate 405, to drive blanking component 3 to feed.Meanwhile feeding electric cylinders mould group 402 and blanking electric cylinders mould group 403 are oppositely arranged, And the two is located at the both ends of backing plate 401, that is to say, that loading assemblies 2, blanking component 3 initial position be respectively positioned on backing plate 401 end.The backing plate 401 is arranged along the direction of feed perpendicular to feeding slide unit component 7, the feeding electric cylinders mould group 402 and blanking electric cylinders mould group 403 pass through motor driven respectively.

When specific operation, firstly, silicon single crystal rod is placed in above tray group, start thrust cylinder 205, push the second clamping jaw 203 close to the first clamping jaw 202, to clamp silicon rod.Then, feeding electric cylinders mould group 402 drives loading assemblies 2 to be fed on pedestal 1 Target position, clamping device 6 is fed into target position and clamps silicon single crystal rod, at this point, the second clamping jaw 203 is far from the first clamping jaw 202, feeding electric cylinders mould group 402 drives loading assemblies 2 to reset, and silicon single crystal rod is clamped to cutting head mechanism and carried out by clamping device 6 Flaw-piece, crest line excision complete evolution and form monocrystalline silico briquette.Finally, blanking electric cylinders mould group 403 drives blanking component 3 to be fed into target Monocrystalline silico briquette is placed between 2 blanking trays 304 by position, clamping device 6, and clamping device 6 resets, meanwhile, blanking electric cylinders mould Group 403 drives blanking component 3 to reset and completes blanking operation.Meanwhile target position is fed into clamping device 6 and clamps monocrystalline silicon In rod motion, in order to avoid chucking power pushes loading assemblies 2 to generate displacement, the loading assemblies support plate 404 is equipped with feeding Buffer Unit, the feeding Buffer Unit include the first buffing pad 406, the second buffing pad 407 and buffer spring 408, and described the The bottom of one buffing pad 406 and loading assemblies support plate 404 are connected, and top is free end, the bottom of second buffing pad 407 Portion is free end, and top is connected with feeding fixed plate 201, and the both ends of the buffer spring 408 are separately connected the first buffing pad 406 and second buffing pad 407, to buffer chucking power.

Embodiment two:

With reference to Fig. 1, Fig. 5 and Fig. 6, the feeding slide unit component 7 is set to 1 top of pedestal, the clamping by column frame 8 Mechanism 6 is fixedly arranged on the lower section of feeding slide unit component 7, and clamping device 6 and feeding 7 synchro-feed of slide unit component.

Specifically, the feeding slide unit component 7 includes slide unit 701, slide unit driving motor 702 and feed screw 703, it is described The both ends of feed screw 703 pass through lead screw support frame 704 respectively and column frame 8 is connected, the periphery set of the feed screw 703 Equipped with the sliding seat 706 being threadedly engaged with it, the bottom of the sliding seat 706 and slide unit 701 are connected, and one side and slide unit drive The output end connection of dynamic motor 702, meanwhile, the slide unit 701 passes through the sliding block 705 being disposed below and is located at column frame 8 On sliding rail be slidably connected, that is to say, that starting slide unit driving motor 702, sliding seat 706, slide unit 701 can be driven along column Frame 8 is fed, while clamping device 6 being driven integrally to feed.

The clamping device 6 includes clamp head 601, dynamic collet 602 and contained side skin component, the top of the clamp head 601 It is connected with slide unit 701, the top of the dynamic collet 602 is slidably connected with slide unit 701, that is to say, that clamp head 601, dynamic collet 602 spacing is adjustable, to clamp silicon single crystal rod.Meanwhile in order to improve clamp head 601, dynamic collet 602 and silicon single crystal rod end face Compactness, the clamp head 601, dynamic collet 602 are floating clamp, and the floating clamp includes Gripper body 604, is set to The diaphragm 605 of 604 rear side of Gripper body and the bulb 606 being set between the Gripper body 604 and diaphragm 605, by Bulb 606, Gripper body 604, the adaptation function between diaphragm 605 realize the complete of floating clamp and silicon single crystal rod end face Fitting improves clamping stability.Meanwhile dynamic collet 602 is removed comprising further including collet rotating electric machine 607, diaphragm after floating clamp 605 side is fixedly connected with dynamic center of collet axis 608, and the output end of dynamic center of collet axis 608 and collet rotating electric machine 607 It is connected, that is to say, that collet rotating electric machine 607 can drive dynamic collet 602 to rotate.Dynamic collet 602 is by moving collet bracket 610 It is slidably connected with slide unit 701, the preferably dynamic collet feeding motor 612 that is slidably connected herein drives dynamic collet lead screw 611, moves folder Head bracket 610 is set on dynamic collet lead screw 611 and the two is threadedly engaged, the dynamic collet bracket 610 and dynamic center of collet axis Dynamic collet bearing is equipped between 608, that is to say, that dynamic collet feeding motor 612 can drive the whole feeding of dynamic collet 602, meanwhile, Dynamic collet 602 can be rotated relative to dynamic collet bracket 610.605 side of diaphragm in clamp head 601 is connected in clamp head Mandrel, clamp head 601 are connected by clamp head bracket and slide unit 701, depending on be equipped between center of collet axis and clamp head bracket Clamp head bearing, that is to say, that clamp head 601 can be rotated relative to clamp head bracket, that is to say, that dynamic collet 602 rotates through Cheng Zhongke drives 601 synchronous rotary of clamp head.

In order to clamp the flaw-piece of silicon single crystal rod, it is equipped with contained side skin component at the clamp head 601, dynamic collet 602, it is described Contained side skin component includes at least 2 contained side skin cylinders 603, and at least two contained side skin cylinder 603 is located at clamp head 601 or dynamic The periphery of collet 602.Wherein, the periphery of clamp head bracket is equipped with clamp head swivel bearing, the clamp head swivel bearing periphery It is arranged with clamp head rotary shaft bearing sleeve, the contained side skin cylinder 603 at clamp head 601 and clamp head rotary shaft bearing sleeve are connected, Meanwhile the periphery of dynamic collet bracket is equipped with dynamic collet swivel bearing, the dynamic collet swivel bearing periphery is arranged with dynamic collet rotation The periphery of shaft bearing sleeve 609, contained side skin cylinder 603 and dynamic collet rotary shaft bearing sleeve 609 at dynamic collet 602 is connected.Add It, at least one of described 2 contained sides skin component is connect with flaw-piece rotating element 614.In the present embodiment, 2 contained side skin components Place is equipped with flaw-piece rotating element 614, and 1 contained side skin gas is respectively set above and below clamp head 601, dynamic collet 602 Cylinder 603, the contained side skin cylinder 603 positioned at clamp head 601 have automatic fastening function, avoid in cutting process because of both ends air pressure not It unanimously causes the edge skin material of cutting to be subjected to displacement and causes chipping.The contained side skin cylinder 603 is rotated by connecting rod 613 and flaw-piece Element 614 connects, that is to say, that contained side skin cylinder 603 can be rotated relative to clamp head 601, dynamic collet 602.Determine in addition, being located at The initial position of 2 contained side skin cylinders 603 at collet 601, dynamic collet 602 is placed in the vertical direction for 2.

When work, clamp head 601, dynamic collet 602 clamp silicon single crystal rod and are fed at cutting head mechanism 5, later, contained side Skin cylinder 603 is rotated by 90 ° and piston is stretched out to clamp flaw-piece, carries out an evolution, the piston retraction of contained side skin cylinder 603, side Skin is fallen, and then, clamping device 6 clamps silicon single crystal rod and is once reset to target position, and dynamic collet 602 is rotated by 90 °, contained side skin gas The piston of cylinder 603 is stretched out to clamp another pair flaw-piece, clamping device 6 silicon single crystal rod is clamped to cutting head mechanism 5 carry out it is secondary Evolution, piston retraction, flaw-piece falls, and silicon single crystal rod is secondary is reset to target position for the clamping of clamping device 6, moves collet 602 and rotates 45 °, contained side skin cylinder 603 is reset to initial position, is reset to target position after carrying out crest line excision, and dynamic collet 602 revolves again Turn, cuts off another pair crest line, ultimately form monocrystalline silico briquette.

In some other embodiment, there is one to connect with flaw-piece rotating element 614 in 2 contained side skin components, another one It is not provided with flaw-piece rotating element 614, as being not provided with flaw-piece rotating element 614 at clamp head 601, at this point, being located at clamp head 601 2 contained side skin cylinders 603 be located in the same horizontal plane with clamp head 601, the flaw-piece rotating element 614 selects motor or gas Cylinder etc..

Embodiment three:

With reference to Fig. 1, Fig. 7 and Fig. 8, the cutting head mechanism 5 is located at the side of support component 4, and cutting line 10 is around cutting Head mechanism 5 forms the parallel lines for cutting silicon single crystal rod, that is to say, that cutting head mechanism 5 and support component 4 be located at into To the both ends of the process of slide unit component 7.The cutting head mechanism 5 includes left cutting assembly 501, right cutting assembly 502 and coiling Component, the left cutting assembly 501, right cutting assembly 502 are symmetrical, and are equipped with pass through for silicon single crystal rod between the two Resigning gap, clamp head 601, dynamic collet 602 clamp silicon single crystal rod and pass through resigning gap to realize evolution.

The left cutting assembly 501 and right cutting assembly 502 include wire-mesh scaffold 503 and are located on wire-mesh scaffold 503 The first cutting wheel 504 and the second cutting wheel 505 being vertically distributed, first cutting wheel 504 and the second cutting wheel 505 are located at same In one plane, first cutting wheel 504 is connect with cutting motor, i.e. the first cutting wheel 504 is used as driving wheel, the second cutting Wheel 505 is used as driven wheel.Wire-mesh scaffold positioned at left cutting assembly 501 and right cutting assembly 502 is oppositely arranged, cutting line 10 Successively formed around positioned at the first cutting wheel of left cutting assembly 501 and right cutting assembly 502, the second cutting wheel for cutting The parallel lines of silicon single crystal rod.In the present embodiment, the parallel lines are placed in the vertical direction, in some other embodiment, institute Stating parallel lines can be along horizontally arranged or be obliquely installed.

Meanwhile the bottom of the wire-mesh scaffold 503 and 1 slidable connection of pedestal, that is to say, that left cutting assembly 501, The spacing of right cutting assembly 502 is adjustable, i.e. cutting line is practical away from adjustable.The top horizontal of the wire-mesh scaffold 503 is set There is First Transition wheel 512, and the race of the race minimum point of the first cutting wheel 504 and First Transition wheel 512 is located at same level In face, the bottom of wire-mesh scaffold 503 is equipped with the second transition wheel that is parallel with First Transition wheel 512 and being located at resigning gap, and The race minimum point of second cutting wheel 505 and the race of the second transition wheel are located in the same horizontal plane.In order to guarantee cutting line 10 Rate of tension, 2 wire-mesh scaffolds 503 are equipped with perpendicular tension support 508, the tension far from the side in resigning gap Bracket 508 is equipped with tensile drive element 509, straining pulley 510, glass pulley 511, and tensile drive element 509 drives straining pulley 510 To achieve the effect that be tensioned cutting line 10, the glass pulley 511 is obliquely installed for rotation, described for realizing the commutation of cutting line 10 Tensile drive element 509 is motor or cylinder etc..

In addition, examining whether size is qualified after cutting and cuts to detect the practical back gauge size after silicon single crystal rod cutting It cuts whether spacing needs to adjust, back gauge detection components is equipped on wire-mesh scaffold 503, the back gauge detection components include back gauge inspection Probing needle 513 and detection cylinder 514, the back gauge detection probe 513 is connect with the piston end of detection cylinder 514, by detection gas Cylinder 514 pushes back gauge detection probe 513 to generate displacement to detect the practical back gauge size after silicon single crystal rod cutting and store to control System processed establishes cutting data library.

The wire-winding unit includes wire winding tube 506 and ureeling barrel 507, and the wire winding tube 506 and ureeling barrel 507 are each along water Put down to and be parallel to the setting of wire-mesh scaffold 503, and the two be located at cutting mechanism not ipsilateral, the wire winding tube 506 and ureeling barrel Coiling driving assembly and winding displacement driving assembly are equipped at 507, the coiling driving assembly is for driving wire winding tube 506 and unwrapping wire Cylinder 507 rotates, and realizes folding and unfolding cutting line 10, the winding displacement driving assembly is for driving wire winding tube 506 and ureeling barrel 507 to generate position It moves and realizes winding displacement.By taking single wire-mesh scaffold 503 as an example, cutting line 10 successively leads to glass pulley 511, straining pulley through ureeling barrel 507 510, First Transition wheel 512, the first cutting wheel 504, the second cutting wheel 505, finally, cutting line 10 is led to separately through the second transition wheel Second transition wheel of one wire-mesh scaffold, cutting line 10 another wire-mesh scaffold trend and above-mentioned trend on the contrary, final, cutting line 10 connect with wire winding tube 506.

Example IV:

With reference to Fig. 1, the pedestal 1 is equipped with edge fit skin component 9 far from the side of support component 4, and the edge fit skin component 9 wraps Edge fit skin conveyer and picking-up container are included, the edge fit skin conveyer includes edge fit skin motor 901, belt 902, slope 903 and connects Hopper, the edge fit skin motor 901 drive belt 902 to operate, and the top face cutting line 10 of the picking-up container forms parallel Line setting, is convenient for access flaw-piece and crest line, and the bottom end of picking-up container connects with slope 903, the slope 903 and edge fit skin conveyer Rack be connected.

The utility model is described in detail above, it is described above, only the preferred embodiment of the utility model and , when the utility model practical range cannot be limited, i.e., all according to the made equivalent changes and modifications of the application range, it should still belong to this In utility model covering scope.

Claims (10)

1. a kind of two line excavation machine of silicon single crystal rod, including pedestal (1), the pedestal (1) is equipped with loading assemblies (2), blanking group Part (3), cutting head mechanism (5), clamping device (6) and feeding slide unit component (7), which is characterized in that the loading assemblies (2) and Blanking component (3) is connect by support component (4) with pedestal (1), and the support component (4) is perpendicular to feeding slide unit component (7) Direction of feed setting, the loading assemblies (2) and blanking component (3) are located at the both ends of support component (4), and feeding group Direction of feed of the direction of feed of part (2) and blanking component (3) perpendicular to feeding slide unit component (7)；

The feeding slide unit component (7) by column frame (8) be set to pedestal (1) above, the clamping device (6) be fixedly arranged on into To the lower section of slide unit component (7), and clamping device (6) and feeding slide unit component (7) synchro-feed, the cutting head mechanism (5) Positioned at the side of support component (4), cutting line (10) forms parallel lines around cutting head mechanism (5) to cut silicon single crystal rod.

2. two line excavation machine of a kind of silicon single crystal rod according to claim 1, which is characterized in that loading assemblies (2) packet Include feeding fixed plate (201), the first clamping jaw (202) and the second clamping jaw (203), first clamping jaw (202) and or the second clamping jaw (203) it is flexibly connected with feeding fixed plate (201), the longitudinal section of first clamping jaw (202) and the second clamping jaw (203) is in V Type, and the V-type opening of the two is oppositely arranged to form the space for accommodating silicon single crystal rod, the upper table of the feeding fixed plate (201) Face and between the first clamping jaw (202), the second clamping jaw (203) be equipped with feeding tray (204).

3. two line excavation machine of a kind of silicon single crystal rod according to claim 2, which is characterized in that blanking component (3) packet Blanking fixed plate (301), blanking cylinder (302), the L-shaped blanking tray (304) of supporting plate (303) and longitudinal section are included, under described The upper surface of the cylinder body end and blanking fixed plate (301) of expecting cylinder (302) is connected, the lower surface of piston end and supporting plate (303) It being connected, the blanking tray (304) is set as 2, and the upper surface set on supporting plate (303) that 2 blanking trays (304) are opposite, Guide post (305) are equipped between the blanking fixed plate (301) and supporting plate (303).

4. two line excavation machine of a kind of silicon single crystal rod according to claim 3, which is characterized in that support component (4) packet Include backing plate (401), feeding electric cylinders mould group (402) and blanking electric cylinders mould group (403), the guide rail of the feeding electric cylinders mould group (402) Sliding block is equipped with loading assemblies support plate (404), and the guide rail slide block of the blanking electric cylinders mould group (403) is equipped with to be fixed with blanking The connected blanking component support plate (405) of plate (301), the loading assemblies support plate (404) are equipped with feeding Buffer Unit, institute Stating feeding Buffer Unit includes the first buffing pad (406), the second buffing pad (407) and buffer spring (408), first buffering The bottom and loading assemblies support plate (404) of seat (406) are connected, and top is free end, the bottom of second buffing pad (407) Portion is free end, and top is connected with feeding fixed plate (201), and it is slow that the both ends of the buffer spring (408) are separately connected first Red seat (406) and the second buffing pad (407).

5. two line excavation machine of a kind of silicon single crystal rod according to claim 1, which is characterized in that the feeding slide unit component It (7) include slide unit (701), slide unit driving motor (702) and feed screw (703), the both ends difference of the feed screw (703) It is connected by lead screw support frame (704) and column frame (8), the periphery of the feed screw (703) is arranged with matches with its screw thread The sliding seat (706) of conjunction, the bottom and slide unit (701) of the sliding seat (706) are connected, one side and slide unit driving motor (702) output end connection, the slide unit (701) passes through the sliding block (705) being disposed below and column frame (8) sliding connects It connects.

6. two line excavation machine of a kind of silicon single crystal rod according to claim 5, which is characterized in that clamping device (6) packet Clamp head (601), dynamic collet (602) and contained side skin component are included, the top and slide unit (701) of the clamp head (601) are connected, institute The top and slide unit (701) for stating collet (602) are slidably connected, and the clamp head (601), dynamic collet (602) are the folder that floats Head, the floating clamp include Gripper body (604), the diaphragm (605) being set on rear side of Gripper body and are set to described Bulb (606) between Gripper body (604) and diaphragm (605).

7. two line excavation machine of a kind of silicon single crystal rod according to claim 6, which is characterized in that the contained side skin component is set as 2, and 2 contained side skin components are connect with clamp head (601), dynamic collet (602) respectively, the contained side skin component includes at least 2 A contained side skin cylinder (603), at least two contained side skin cylinder (603) are located at the outer of clamp head (601) or dynamic collet (602) It encloses, at least one of described 2 contained sides skin component is connect with flaw-piece rotating element (614).

8. two line excavation machine of a kind of silicon single crystal rod according to claim 1, which is characterized in that the cutting head mechanism (5) Including left cutting assembly (501), right cutting assembly (502) and wire-winding unit, the left cutting assembly (501), right cutting assembly (502) symmetrical, and it is equipped with the resigning gap passed through for silicon single crystal rod, the left cutting assembly (501) and the right side between the two Cutting assembly (502) including wire-mesh scaffold (503) and is located at the first cutting wheel being vertically distributed on wire-mesh scaffold (503) (504) it is in the same plane with the second cutting wheel (505), first cutting wheel (504) and the second cutting wheel (505), position It is oppositely arranged in the wire-mesh scaffold of left cutting assembly (501) and right cutting assembly (502), cutting line (10) is successively left around being located at First cutting wheel of cutting assembly (501) and right cutting assembly (502), the second cutting wheel are formed for cutting the flat of silicon single crystal rod Line, the bottom of the wire-mesh scaffold (503) and pedestal (1) slidable connection.

9. two line excavation machine of a kind of silicon single crystal rod according to claim 8, which is characterized in that the wire-winding unit includes receiving Spool (506) and ureeling barrel (507), the wire winding tube (506) and ureeling barrel (507) each along horizontal direction and are parallel to gauze branch Frame (503) setting, and to be located at cutting mechanism not ipsilateral for the two, is equipped with coiling at the wire winding tube (506) and ureeling barrel (507) Driving assembly and winding displacement driving assembly.

10. -9 any two line excavation machine of a kind of silicon single crystal rod according to claim 1, which is characterized in that the pedestal (1) Side far from support component (4) is equipped with edge fit skin component (9), and the edge fit skin component (9) includes edge fit skin conveyer and connects Hopper, the edge fit skin conveyer include edge fit skin motor (901), belt (902), slope (903) and picking-up container, the edge fit Skin motor (901) drives belt (902) operating, and the parallel lines that the top face cutting line (10) of the picking-up container is formed are arranged, Its bottom end connects with slope (903), and the rack of the slope (903) and edge fit skin conveyer is connected.