CN208373660U - A kind of new type superthin diagnosing chip surface cleaning apparatus - Google Patents
A kind of new type superthin diagnosing chip surface cleaning apparatus Download PDFInfo
- Publication number
- CN208373660U CN208373660U CN201820543098.9U CN201820543098U CN208373660U CN 208373660 U CN208373660 U CN 208373660U CN 201820543098 U CN201820543098 U CN 201820543098U CN 208373660 U CN208373660 U CN 208373660U
- Authority
- CN
- China
- Prior art keywords
- fixedly installed
- mounting table
- new type
- cleaning apparatus
- surface cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 21
- 239000007788 liquid Substances 0.000 claims abstract description 29
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 13
- 238000004064 recycling Methods 0.000 claims abstract description 13
- 239000007921 spray Substances 0.000 claims abstract description 12
- 230000010412 perfusion Effects 0.000 claims abstract description 9
- 238000003780 insertion Methods 0.000 claims abstract description 5
- 230000037431 insertion Effects 0.000 claims abstract description 5
- 239000002537 cosmetic Substances 0.000 claims abstract description 4
- 239000000126 substance Substances 0.000 claims abstract description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 7
- 238000000746 purification Methods 0.000 claims description 4
- 230000001105 regulatory effect Effects 0.000 claims description 4
- 238000005406 washing Methods 0.000 claims 1
- 239000002699 waste material Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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- Investigating Or Analysing Biological Materials (AREA)
Abstract
The utility model discloses a kind of new type superthin diagnosing chip surface cleaning apparatus, including pedestal, rinse bath is opened up in pedestal, spray head is fixedly installed in the left and right sidewall of rinse bath, perfusion tube is fixedly installed in spray head, the external bottle for handling liquid toilet or cosmetic substance of perfusion tube, mounting table is fixedly installed in the bottom of rinse bath, the groove of chip placement is opened up at the top of mounting table, motor place position is opened up in pedestal, fixed setting driving motor and battery in motor place position, the two is electrically connected, driving motor is longitudinally disposed, and driving motor is output shaft insertion mounting table bottom, and it is fixedly connected with mounting table, the bottom both ends of rinse bath open up flow liquid channel, and the lower end in two flow liquid channels is overlapped, and fixed setting outlet tube, recycling bins are fixedly installed in the lower end of outlet tube.The utility model is set there are two opposite spray head, can sufficiently be cleaned up the residuals on chip, while driving motor is able to drive mounting table and is rotated, that is, chip is driven to be rotated, and can be improved cleaning efficiency.
Description
Technical field
The utility model relates to chips to clean setting technical field, and in particular to a kind of new type superthin diagnosing chip surface is clear
Cleaning device.
Background technique
For existing diagnosing chip in the fabrication process, cleaning can use a large amount of water, and the water direct emission after cleaning, nothing
Method recycles, and is at present manual operation mostly to clean, and artificial cleaning, which can be brought, thinks error, influences inspection result,
Therefore need to provide a kind of new type superthin diagnosing chip surface cleaning apparatus.
Utility model content
The purpose of this utility model is that it is in view of the drawbacks of the prior art and insufficient, a kind of new type superthin diagnosing chip is provided
Surface cleaning apparatus.
In order to achieve the above purposes, the technical solution adopted by the utility model is:, and a kind of new type superthin diagnosing chip surface is clear
Cleaning device, including pedestal open up rinse bath in the pedestal, and innovative point is: solid in the left and right sidewall of the rinse bath
Spray head is set surely, and perfusion tube is fixedly installed in the spray head, and the bottom fixation of the external bottle for handling liquid toilet or cosmetic substance of perfusion tube, the rinse bath is set
Placement location platform opens up the groove of chip placement at the top of the mounting table, opens up motor place position, the motor in the pedestal
Fixed setting driving motor and battery in place position, the two are electrically connected, and the driving motor is longitudinally disposed, and driving motor
It is output shaft insertion mounting table bottom, and is fixedly connected with mounting table, the bottom both ends of the rinse bath open up flow liquid channel,
And the lower end in two flow liquid channels is overlapped, and outlet tube is fixedly installed, recycling bins are fixedly installed in the lower end of the outlet tube.
Further, high surrounding is low among the bottom of the rinse bath.
Further, for the mounting table centered on groove, intermediate high both sides are low.
Further, regulating valve is fixedly installed on the outlet tube.
Further, filter screen and water purification film is successively fixedly installed in the recycling bins from top to bottom, the recycling bins
Bottom opens up liquid outlet.
Further, the flow liquid number of channels is at least 4, and is symmetrical arranged about mounting table.
Further, the driving motor is variable speed electric motors, particularly.
After adopting the above structure, the utility model has the beneficial effect that
The utility model structure is simple, easy to use, and the utility model is set there are two opposite spray head, can be sufficiently by chip
On residuals clean up, while driving motor is able to drive mounting table and is rotated, that is, chip is driven to be turned
It is dynamic, it can be improved cleaning efficiency, reduce detection error；The recycling bins of the utility model setting can carry out recycling benefit to waste liquid
With saving a large amount of water resource.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model.
1 pedestal, 2 rinse baths, 3 spray heads, 4 perfusion tubes, 5 mounting tables, 51 grooves, 6 motor place positions, 7 driving motors, 8 store
Battery, 9 flow liquid channels, 10 outlet tubes, 11 recycling bins, 12 regulating valves, 13 filter screens, 14 water purification films, 15 liquid outlets.
Specific embodiment
The utility model will be further described below with reference to the accompanying drawings.
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and specifically
Embodiment, the present invention will be further described in detail.It should be appreciated that the specific embodiments described herein are only used
To explain the utility model, it is not used to limit the utility model.
Referring to Fig. 1, a kind of new type superthin diagnosing chip surface cleaning apparatus, including pedestal 1 opens up rinse bath in pedestal 1
2, it is fixedly installed spray head 3 in the left and right sidewall of rinse bath 2, spray head 3 is fixedly installed perfusion tube 4, the external bottle for handling liquid toilet or cosmetic substance of perfusion tube 4,
Mounting table 5 is fixedly installed in the bottom of rinse bath 2, and the top of mounting table 5 opens up the groove 51 of chip placement, opens up electricity in pedestal 1
Machine place position 6, the interior fixed setting driving motor 7 of motor place position 6 and battery 8, the two are electrically connected, and driving motor 7 is longitudinal
Setting, and driving motor is output shaft insertion 5 bottom of mounting table, and is fixedly connected with mounting table 5, the bottom both ends of rinse bath 2
Flow liquid channel 9 is opened up, and the lower end in two flow liquid channels 9 is overlapped, and outlet tube 10 is fixedly installed, the lower end of outlet tube 10 is solid
Recycling bins 11 are set surely.
In the present embodiment, high surrounding is low among the bottom of rinse bath 2, here leaves flow liquid channel 9 convenient for waste liquid, improves back
It produces effects rate.
In the present embodiment, for mounting table 5 centered on groove 51, intermediate high both sides are low, can flow to rinse bath 2 convenient for waste liquid
Bottom, prevent waste liquid to be deposited on mounting table 5.
In the present embodiment, regulating valve 12 is fixedly installed on outlet tube 10, for controlling the flow velocity of waste liquid.
In the present embodiment, filter screen 13 and water purification film 14 is successively fixedly installed in recycling bins 11 from top to bottom, recycling bins
Bottom opens up liquid outlet 15, can carry out preliminary treatment to waste liquid, be recycled convenient for the later period.
In the present embodiment, 9 quantity of flow liquid channel is at least 4, and is symmetrical arranged 5 about mounting table.
In the present embodiment, driving motor 7 is variable speed electric motors, particularly.
Working principle of the utility model is:
By in the groove 51 of chip insertion mounting table 5, then spray head 3 is directed at chip and carries out hydrojet, while can open driving
Motor 7 can carry out comprehensive hydrojet to chip in this way, improve hydrojet efficiency so that mounting table 5 is rotated.
The above is merely intended for describing the technical solutions of the present application, but not for limiting the present application, those of ordinary skill in the art couple
The other modifications or equivalent replacement that the technical solution of the utility model is made, without departing from technical solutions of the utility model
Spirit and scope should all cover in the scope of the claims of the utility model.
Claims (7)
1. a kind of new type superthin diagnosing chip surface cleaning apparatus, including pedestal, rinse bath is opened up in the pedestal, feature exists
In: spray head is fixedly installed in the left and right sidewall of the rinse bath, perfusion tube is fixedly installed in the spray head, and the perfusion tube is external
Mounting table is fixedly installed in bottle for handling liquid toilet or cosmetic substance, the bottom of the rinse bath, and the groove of chip placement is opened up at the top of the mounting table, described
Motor place position, fixed setting driving motor and battery in the motor place position are opened up in pedestal, the two is electrically connected, institute
It is longitudinally disposed to state driving motor, and driving motor is output shaft insertion mounting table bottom, and is fixedly connected with mounting table, it is described clear
The bottom both ends of washing trough open up flow liquid channel, and the lower end in two flow liquid channels is overlapped, and outlet tube is fixedly installed, it is described go out
Recycling bins are fixedly installed in the lower end of liquid pipe.
2. a kind of new type superthin diagnosing chip surface cleaning apparatus according to claim 1, it is characterised in that: the cleaning
High surrounding is low among the bottom of slot.
3. a kind of new type superthin diagnosing chip surface cleaning apparatus according to claim 1, it is characterised in that: the placement
For platform centered on groove, intermediate high both sides are low.
4. a kind of new type superthin diagnosing chip surface cleaning apparatus according to claim 1, it is characterised in that: the liquid out
Regulating valve is fixedly installed on pipe.
5. a kind of new type superthin diagnosing chip surface cleaning apparatus according to claim 1, it is characterised in that: the recycling
Filter screen successively is fixedly installed from top to bottom in case and water purification film, the bottom of the recycling bins open up liquid outlet.
6. a kind of new type superthin diagnosing chip surface cleaning apparatus according to claim 1, it is characterised in that: the flow liquid
Number of channels is at least 4, and is symmetrical arranged about mounting table.
7. a kind of new type superthin diagnosing chip surface cleaning apparatus according to claim 1, it is characterised in that: the driving
Motor is variable speed electric motors, particularly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820543098.9U CN208373660U (en) | 2018-04-16 | 2018-04-16 | A kind of new type superthin diagnosing chip surface cleaning apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820543098.9U CN208373660U (en) | 2018-04-16 | 2018-04-16 | A kind of new type superthin diagnosing chip surface cleaning apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208373660U true CN208373660U (en) | 2019-01-15 |
Family
ID=64975740
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820543098.9U Expired - Fee Related CN208373660U (en) | 2018-04-16 | 2018-04-16 | A kind of new type superthin diagnosing chip surface cleaning apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208373660U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111081609A (en) * | 2019-12-26 | 2020-04-28 | 西安奕斯伟硅片技术有限公司 | Cleaning and etching system |
-
2018
- 2018-04-16 CN CN201820543098.9U patent/CN208373660U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111081609A (en) * | 2019-12-26 | 2020-04-28 | 西安奕斯伟硅片技术有限公司 | Cleaning and etching system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190115 |