CN208368534U - A kind of expansion film, test, integrated machine for sorting - Google Patents
A kind of expansion film, test, integrated machine for sorting Download PDFInfo
- Publication number
- CN208368534U CN208368534U CN201821016497.6U CN201821016497U CN208368534U CN 208368534 U CN208368534 U CN 208368534U CN 201821016497 U CN201821016497 U CN 201821016497U CN 208368534 U CN208368534 U CN 208368534U
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- test
- sorting
- integrated machine
- expansion film
- vacuum
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- 239000007771 core particle Substances 0.000 claims abstract description 34
- 230000007246 mechanism Effects 0.000 claims abstract description 27
- 238000000926 separation method Methods 0.000 claims abstract description 14
- 125000004122 cyclic group Chemical group 0.000 claims abstract description 3
- 239000012528 membrane Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 abstract description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910052742 iron Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000008602 contraction Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
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Abstract
The utility model belongs to field of semiconductor devices, a kind of its expansion film provided, test, integrated machine for sorting, expand film unit including at least one, one test cell, one separation unit, it is characterized by: the expansion film unit includes an annular microscope carrier, one liftable vacuum platform, one vacuum control mechanism, an and core particles load carrier, the vacuum platform is located at the center of cyclic annular microscope carrier, the vacuum control mechanism is connected to the vacuum platform, the chip bearing mechanism is located on the annular microscope carrier, the core particles load carrier includes the air-permeable elastic film of a carrying core particles, and fix the fixed ring of the air-permeable elastic film.
Description
Technical field
The utility model belongs to field of semiconductor devices more particularly to a kind of expansion film, test, integrated machine for sorting.
Background technique
In LED manufacturing process, chip will do it after drawing and splitting processing procedure expands film, test, sorting.Carry out every operation it
Before need to core particles carry out pour mask, i.e., the blue film more renewed, preferably to carry chip.
Multiple pour mask process has following defects that 1, because expanding film unit and blue membrane property in existing operation, exist expand film it is askew,
Expand the exceptions such as film is broken.2, because blue film has a characteristic of contraction, standing time is too long to shrink, and influence operation.3, blue film is disposable
Spent material is regular consumables, not recoverable, higher cost.4, the exceptions such as sorting is also easy to produce thimble residue glue, back lacks.
Summary of the invention
In order to solve the above technical problems, one kind one expand film, one test, an integrated machine for sorting, include at least one expand film unit,
Test cell, separation unit, it is characterised in that: the expansion film unit includes an annular microscope carrier, a liftable vacuum platform, and one
Vacuum control mechanism and a core particles load carrier, the vacuum platform are located at the center of cyclic annular microscope carrier, the vacuum control machine
Structure is connected to the vacuum platform, and the chip bearing mechanism is located on the annular microscope carrier, and the core particles load carrier includes
The air-permeable elastic film of one carrying core particles, and fix the fixed ring of the air-permeable elastic film.
Preferably, the test cell, separation unit are located at the two sides for expanding film unit.
Preferably, the expansion film unit, test cell, separation unit are sequentially arranged.
Preferably, the fixing component of fixed core particles load carrier is additionally provided on the annular microscope carrier.
Preferably, the vacuum platform further includes a driving mechanism, the lifting of the driving mechanism driving vacuum platform.
Preferably, the vacuum control mechanism further includes a pressure vacuum gauge and a warning device.
Preferably, the fixing component includes electromagnet and/or bolt.
Preferably, the expansion film unit structure is set on a sliding rail.
Preferably, the sliding rail is " cross " track or " linear " track.
Preferably, the Breathable films are TPU membrane.
A kind of expansion film provided by the utility model, test, integrated machine for sorting can be cancelled using blue film, be made using repeatable
Air-permeable elastic film carries core particles, reduces cost.It carries film source by a kind of TPU air-permeable elastic film combination iron hoop,
Risen using vacuum platform and jacks up TPU elastic membrane to the micro- expansion of film source progress, so that the test and sorting of core particles are carried out, reduction pour mask
Operation.
Detailed description of the invention
Fig. 1 is the expansion film, test, integrated machine for sorting main view of the utility model
Fig. 2 is the expansion film unit cross-sectional view of the utility model.
Fig. 3 is the perspective view of the annular microscope carrier of the utility model, vacuum platform, Breathable films and fixed ring.
Attached drawing mark: 100: expanding film unit；110: annular microscope carrier；120: vacuum platform；130: vacuum control mechanism；131:
Pressure vacuum gauge；132: warning device；140: driving mechanism；150: core particles load carrier；151: Breathable films；152: fixed
Ring；160: fixing component；161: bolt；162: electromagnet；170: sliding rail；200: test cell；300: separation unit.
Specific embodiment
The utility model is more specifically described by way of example referring to attached drawing in the following passage.According to following explanation and power
The advantages of sharp claim, the utility model and feature will become apparent from.It should be noted that attached drawing be all made of very simplified form and
Non-accurate ratio is used, only to convenient, lucidly aid illustration the utility model embodiment purpose.
Referring to attached drawing 1, the present embodiment provides a kind of expansion film, test, integrated machine for sorting, include at least one expand film unit 100,
One test cell 200, a separation unit 300, expanding film unit 100 includes an annular microscope carrier 110, a liftable vacuum platform
120, a vacuum control mechanism 130 and a core particles load carrier 150, vacuum platform 120 are located at the center of annular microscope carrier 110,
Vacuum control mechanism 130 is connected to the vacuum platform 120, and chip bearing mechanism 150 is located on the annular microscope carrier 110, and chip is held
Mounted mechanism 150 includes the air-permeable elastic film 151 of a carrying core particles 400, and fixes the fixed ring of the air-permeable elastic film 151
152。
The air-permeable elastic film 151 be TPU membrane, be a kind of high molecular polymer, with high gas permeability, superelevation it is wear-resisting
Property, highly resistance pulling force and screen resilience, ensure that vacuum adsorption force of the vacuum platform 120 by the Breathable films 151 to core particles 400,
Meanwhile the highly resistance pulling force and screen resilience of the air-permeable elastic film 151 ensure that it repeats practicability.
The fixing component 160 of fixed 400 load carrier of core particles, the kind of fixing component 160 are additionally provided on annular microscope carrier 110
The type of class and fixed ring 152 matches, and can be electromagnet 162 and/or bolt 161.The preferred fixed ring 152 of the present embodiment
For iron hoop, fixing component 160 is electromagnet 162 and bolt 161, and electromagnet 162 is uniformly arranged on the top of annular microscope carrier 110,
For adsorbing fixed ring 152, air-permeable elastic film 151, fixed ring 152 are then fixed on by annular microscope carrier 110 by bolt 161
On.
The diameter of liftable vacuum platform 120 is less than the diameter of Breathable films 151, in order to carry, expand film.Vacuum control
Mechanism processed further includes a pressure vacuum gauge 131 and a warning device 132, and pressure vacuum gauge 131 is for monitoring vacuum control in real time
The vacuum pressure of mechanism 130, when vacuum degree is lower than setting value, warning device 132 will be sounded an alarm, vacuum control mechanism 130
It is out of service with vacuum platform 120.
To be tested, being sorted convenient for expanding the core particles 400 after film, expand film unit 100 and be set on a sliding rail 170,
The sliding rail 170 is " linear " track or " cross " track, expands film unit 100, test cell 200, separation unit
300 can sequentially arrange according to the convenience of concrete operations or in angular distribution.
Core particles 400 after expanding film carry out separation operation after unit 200 is tested after tested, wherein test cell 200 is AOI
Test machine, separation unit 300 include sorting machine, and 400 grasping mechanism of core particles is sucking pen in sorting machine, while in order to protect gas permeability
The integrality of film 151, sucking pen can not use thimble to jack up core particles 400 when grabbing core particles 400, but pass through vacuum control
The vacuum degree of mechanism controls vacuum platform 120 reduces Breathable films 151 to the pull of vacuum of core particles 400, when the vacuum attraction
When power is less than attraction of the sucking pen to core particles 400, core particles 400 are then crawled.Of course for preventing remaining from being the core particles being sorted
400 position is moved, and the pull of vacuum that vacuum platform 120 generates cannot be zero.
A kind of expansion film provided by the utility model, test, integrated machine for sorting, are mainly used for LED photovoltaic industry, by sliver
Core particles 400 afterwards, which are realized, expands film, test, sorting integration, the use of pour mask operation and blue film is reduced, to save manpower, drop
Low cost improves working efficiency.
Its specific work process is, firstly, the upper surface and carrier upper surface of adjustment vacuum platform 120 are in same level
Air-permeable elastic film 151 is laid on vacuum platform 120 by face, is opened vacuum control mechanism 130, is taken out very to vacuum platform 120
It is empty；Secondly, fixed ring 152 is placed on air-permeable elastic film 151, and pass through fixing component for air-permeable elastic film 151, fixation
Ring 152 is fixed on annular microscope carrier 110；Then, the core particles 400 after sliver are transferred on air-permeable elastic film 151；It is driving
Vacuum platform 120 rises to predetermined altitude under the driving of mechanism 140, carries out expansion film to core particles；Then, annular microscope carrier 110 with it is true
Hollow panel 120 moves on sliding rail 170 simultaneously, successively carries out 400 test jobs of core particles and separation operation.Air-permeable elastic
After core particles 400 on film 151 all sort, vacuum control mechanism 130 is closed, while driving 120 upper surface of vacuum platform
In the annular microscope carrier 110 of decline, so as to 151 resilient of air-permeable elastic film.
The present embodiment is by taking a separation unit 300 of test cell 200, one of expansion film unit 100, one as an example, but this reality
Be not limited thereto with the all-in-one machine of novel offer, according to the needs of practical volume production, can reasonably set expand film unit 100,
The number of test cell 200 and separation unit 300, to improve working efficiency.
It should be understood that above-mentioned specific embodiment is the preferred embodiment of the utility model, the model of the utility model
It encloses and is not limited to the embodiment, all any changes done according to the utility model, all within the category protection scope of the utility model.
Claims (10)
1. a kind of expansion film, test, integrated machine for sorting include at least one and expand film unit, a test cell, a separation unit, special
Sign is: the expansion film unit includes an annular microscope carrier, a liftable vacuum platform, a vacuum control mechanism and a core particles
Load carrier, the vacuum platform are located at the center of cyclic annular microscope carrier, and the vacuum control mechanism is connected to the vacuum platform, institute
It states core particles load carrier to be located on the annular microscope carrier, the core particles load carrier includes the air-permeable elastic of a carrying core particles
Film, and fix the fixed ring of the air-permeable elastic film.
2. a kind of expansion film according to claim 1, test, integrated machine for sorting, it is characterised in that: the test cell divides
Menu member is located at the two sides for expanding film unit.
3. a kind of expansion film according to claim 1, test, integrated machine for sorting, it is characterised in that: the expansion film unit is surveyed
Examination unit, separation unit are sequentially arranged.
4. a kind of expansion film according to claim 1, test, integrated machine for sorting, it is characterised in that: on the annular microscope carrier also
It is provided with the fixing component of the fixed core particles load carrier.
5. a kind of expansion film according to claim 1, test, integrated machine for sorting, it is characterised in that: the vacuum platform also wraps
Include a driving mechanism, the lifting of the driving mechanism driving vacuum platform.
6. a kind of expansion film according to claim 1, test, integrated machine for sorting, it is characterised in that: the vacuum control mechanism
It further include a pressure vacuum gauge and a warning device.
7. a kind of expansion film according to claim 4, test, integrated machine for sorting, it is characterised in that: the fixing component includes
Electromagnet and/or bolt.
8. a kind of expansion film according to claim 1, test, integrated machine for sorting, it is characterised in that: the expansion film unit structure is set
It is placed on a sliding rail.
9. a kind of expansion film according to claim 8, test, integrated machine for sorting, it is characterised in that: the sliding rail is
" cross " track or " linear " track.
10. a kind of expansion film according to claim 1, test, integrated machine for sorting, it is characterised in that: the Breathable films are
TPU membrane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821016497.6U CN208368534U (en) | 2018-06-29 | 2018-06-29 | A kind of expansion film, test, integrated machine for sorting |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821016497.6U CN208368534U (en) | 2018-06-29 | 2018-06-29 | A kind of expansion film, test, integrated machine for sorting |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208368534U true CN208368534U (en) | 2019-01-11 |
Family
ID=64927517
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821016497.6U Active CN208368534U (en) | 2018-06-29 | 2018-06-29 | A kind of expansion film, test, integrated machine for sorting |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208368534U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112687767A (en) * | 2020-12-01 | 2021-04-20 | 华灿光电(苏州）有限公司 | Chip film expanding method |
| CN113211664A (en) * | 2021-04-28 | 2021-08-06 | 华虹半导体(无锡)有限公司 | TAIKO ring taking device and method |
-
2018
- 2018-06-29 CN CN201821016497.6U patent/CN208368534U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112687767A (en) * | 2020-12-01 | 2021-04-20 | 华灿光电(苏州）有限公司 | Chip film expanding method |
| CN112687767B (en) * | 2020-12-01 | 2021-11-05 | 华灿光电(苏州）有限公司 | Chip film expanding method |
| CN112687767B9 (en) * | 2020-12-01 | 2021-12-03 | 华灿光电(苏州）有限公司 | Chip film expanding method |
| CN113211664A (en) * | 2021-04-28 | 2021-08-06 | 华虹半导体(无锡)有限公司 | TAIKO ring taking device and method |
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