CN208362448U - A kind of stiffened deep space grey PVD film - Google Patents
A kind of stiffened deep space grey PVD film Download PDFInfo
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- CN208362448U CN208362448U CN201821076969.7U CN201821076969U CN208362448U CN 208362448 U CN208362448 U CN 208362448U CN 201821076969 U CN201821076969 U CN 201821076969U CN 208362448 U CN208362448 U CN 208362448U
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Abstract
The utility model belongs to technical field of vacuum plating, and in particular to one kind is based on stiffened deep space grey PVD film made of physical vapour deposition (PVD) (PVD) technology.The stiffened deep space grey PVD film is deposited on substrate surface, and the stiffened deep space grey PVD film successively includes: bottom by substrate surface from the bottom up, and the bottom is chromium metal coating or titanium coating；First Transition layer, the First Transition layer are the carbonitride coating of one of chromium or titanium；Second transition zone, second transition zone are the carbonitride coating of one of chromium or titanium and silicon；Color layers, the color layers are the carbonitride coating of one of chromium or titanium and silicon.The film thickness of the stiffened deep space grey PVD film meets the market demand, and the more current Dark grey film of nano hardness, which improves, reaches 600nHV, has the characteristics that hardness height, rub resistance, corrosion-resistant, color is uniform and stable.
Description
Technical field
The utility model belongs to technical field of vacuum plating, and in particular to a kind of stiffened deep space grey PVD film.
Background technique
The color of deep space ash is popular earliest in 3C industry, completes usually using the process of surface treatment of electrophoresis.By market
Examine discovery, with electrophoresis process prepare deep space ash film there are the easy to change, layer that loses color, can only be the deficiencies of being carried out on aluminium
Place.
It is prepared currently, deep space ash color also has using vacuum coating mode, although portion of techniques has overcome technique pole
It is unstable, repeatability is very poor, color change is larger, the problem of can not producing in batches, but prepared deep space grey film is also deposited
The problems such as glossiness is undesirable, nano hardness is not high, wear-resisting property is undesirable.
Utility model content
Based on the shortcomings and deficiencies of the above-mentioned prior art, the purpose of this utility model is to provide a kind of stiffened deep space grey
The structure of PVD film, the stiffened deep space grey PVD film have ideal glossiness, nano hardness height, wear-resisting property ideal, comprehensive
Close superior performance, it is at low cost, prepare the advantages that yield is high.
The purpose of this utility model is achieved through the following technical solutions:
A kind of stiffened deep space grey PVD film, the stiffened deep space grey PVD film is deposited on substrate surface, described to add
Deep space grey PVD film successively includes: from the bottom up by substrate surface firmly
Bottom, the bottom are chromium metal coating or titanium coating；
First Transition layer, the First Transition layer are the carbonitride coating of one of chromium or titanium；
Second transition zone, second transition zone are the carbonitride coating of one of chromium or titanium and silicon；
Color layers, the color layers are the carbonitride coating of one of chromium or titanium and silicon.
Further, the substrate is stainless steel substrate, glass baseplate, ceramic base material or plastic rubber substrate.
Further, the stiffened deep space grey PVD film with a thickness of 1~5 micron.
Further, the bottom with a thickness of 0.1~0.5 micron；
Further, the First Transition layer with a thickness of 0.4~2.0 micron；
Further, second transition zone with a thickness of 0.4~2.0 micron；
Further, the color layers with a thickness of 0.1~1.5 micron.
The utility model has the following beneficial effects: the film thickness of the stiffened deep space grey PVD film meets the market demand, nanometer
The more current Dark grey film of hardness, which improves, reaches 600nHV, and with hardness height, rub resistance, corrosion-resistant, color is uniform and stable, comprehensive
The excellent feature of performance.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of stiffened deep space grey PVD film described in embodiment 1.
In figure: 1- substrate, 2- bottom, 3- First Transition layer, the second transition zone of 4-, 5- color layers.
Specific embodiment
The present invention will be further described in detail with reference to the embodiments and the accompanying drawings, but the implementation of the utility model
Mode is without being limited thereto.
Embodiment 1
As shown in Figure 1, a kind of stiffened deep space grey PVD film, the stiffened deep space grey PVD film is deposited on substrate 1
Surface, the stiffened deep space grey PVD film successively include: from the bottom up by 1 surface of substrate
Bottom 2, the bottom are chromium metal (Cr) coating or titanium (Ti) coating；The bottom 2 is for improving coating
With the adhesive force of substrate 1.
First Transition layer 3, the First Transition layer 3 are carbon chromium nitride (CrCN) coating or titanium carbonitride (TiCN) coating；
The First Transition layer 3 is used to improve the wear-resisting property and surface gloss of coating.
Second transition zone 4, second transition zone 4 are that carbon nitrogen silicochromium (CrSiCN) coating or carbon nitrogen silicon titanium (TiSiCN) plate
Layer；Second transition zone 4 is used to improve the nano hardness of film, while ensuring film layer densification, and glossiness is good, wear-resisting property.
Color layers 5, the color layers 5 are carbon nitrogen silicochromium (CrSiCN) coating or carbon nitrogen silicon titanium (TiSiCN) coating；It is described
Color layers 5 are for providing uniform and stable repeatable color, and process parameters range is big, while not influencing nano hardness, wearability
Energy and surface gloss.
Specifically, the substrate 1 is stainless steel substrate, glass baseplate, ceramic base material or plastic rubber substrate.
Specifically, be at the same meet hardness, corrosion resistance and it is lightening the needs of, the stiffened deep space grey PVD
Film with a thickness of 1~5 micron, the bottom 2 with a thickness of 0.1~0.5 micron.
To improve the whole performances such as corrosion-resistant, wear-resisting of film, First Transition layer 3 and the second transition zone 4 are it is ensured that coating
Densification, defect are few, properly increase the thickness of First Transition layer 3 and the second transition zone 4, overall performance, but excessive thickness can be improved
The thickness that degree will lead to the stiffened deep space grey PVD film is not able to satisfy the lightening effect of product, therefore preferred, and described the
One transition zone 3 with a thickness of 0.4~2.0 micron, second transition zone 4 with a thickness of 0.4~2.0 micron.
Specifically, in order to keep the Dark grey of color layers 5 more stable and uniform, and ensure nano hardness, wear-resisting property and
Surface gloss, it is preferred that the color layers 5 with a thickness of 0.1~1.5 micron.
The preparation method step of the stiffened deep space grey PVD film are as follows:
Step 1: plated film before first workpiece substrate 1 is cleaned by ultrasonic, wash 1 surface of substrate greasy dirt, it is cured and
The impurity such as grain object；
Step 2: putting the workpiece in vacuum cavity, vacuum cavity is vacuumized, then by heating tube to vacuum chamber
Body and workpiece are heated；
Step 3: carrying out Ion Cleaning to workpiece in vacuum cavity；
Step 4: carrying out magnetron sputtering using metallic target deposits bottom 2, metal targets are chromium target or titanium target；
Step 5: carrying out reactive magnetron sputtering First Transition layer 3, metallic target using metallic target and nitrogen, acetylene gas
For chromium target or titanium target, the First Transition layer 3 is carbon chromium nitride (CrCN) coating or titanium carbonitride (TiCN) coating；
Step 6: carrying out the second transition zone of reactive magnetron sputtering 4 using metallic target, silicon target and nitrogen, acetylene gas；Gold
Belonging to target is chromium target or titanium target, and second transition zone 4 is carbon nitrogen silicochromium (CrSiCN) coating or carbon nitrogen silicon titanium (TiSiCN) coating；
Step 7: carrying out reactive magnetron sputtering color layers 5 using metallic target, silicon target and nitrogen, acetylene gas；Metallic target
For chromium target or titanium target, the color layers 5 are carbon nitrogen silicochromium (CrSiCN) coating or carbon nitrogen silicon titanium (TiSiCN) coating；
Step 8: coming out of the stove after last cooling.
The nano hardness of gained stiffened deep space grey PVD film is 1200~1600nHV, and the test of denim abrasion-resistant is logical
It crosses, testing drum passes through, and corrosion resistance test passes through, and other routine tests pass through, the smooth exquisiteness in surface, and appearance is good.
Embodiment 2
A kind of stiffened deep space grey PVD film is deposited on stainless steel substrate surface, the stiffened deep space grey PVD film
Successively include: from the bottom up by stainless steel substrate surface
Bottom, the bottom is chromium metal (Cr) coating, with a thickness of 0.2 micron；
First Transition layer, the First Transition layer is carbon chromium nitride (CrCN) coating, with a thickness of 0.5 micron；
Second transition zone, second transition zone are that carbon chromium nitride (CrCN) coating is transitioned into carbon nitrogen silicochromium (CrSiCN) plating
Layer, with a thickness of 0.6 micron；
Color layers, the color layers are carbon nitrogen silicochromium (CrSiCN) coating, with a thickness of 0.3 micron.
The stiffened deep space grey PVD film the preparation method comprises the following steps:
S1: after stainless steel substrate is cleaned by ultrasonic, into furnace；
S2: it vacuumizes and heats in vacuum cavity；
S3: and then Ion Cleaning is carried out to stainless steel substrate；
S4: magnetron sputtering is carried out using chromium target and deposits chromium metal (Cr) coating；
S5: reactive magnetron sputtering First Transition layer carbon chromium nitride (CrCN) is carried out using chromium target and nitrogen, acetylene gas
Coating, nitrogen, acetylene gas flow program are promoted；
S6: the second transition zone of reactive magnetron sputtering carbon nitrogen silicochromium is carried out using chromium target, silicon target and nitrogen, acetylene gas
(CrSiCN) coating, nitrogen, acetylene gas flow program rise, and the decline of chromium target current program, silicon target current sequence are promoted；
S7: reactive magnetron sputtering color layers carbon nitrogen silicochromium is carried out using chromium target, silicon target and nitrogen, acetylene gas
(CrSiCN) coating, the decline of nitrogen flow program, acetylene gas flow program rise, and chromium target, silicon target electric current are constant.
S8: it comes out of the stove after cooling.
Test result: 1.6 microns of film thickness of gained stiffened deep space grey PVD film, color L=49.21, a=-0.12, b
=-1.21, nano hardness: 1460nHV, the test of denim abrasion-resistant pass through, and testing drum passes through, and corrosion resistance test passes through,
Other routine tests pass through, the smooth exquisiteness in surface, and appearance is good.
The above, the only preferred embodiment of the utility model not make in any form the utility model
Limitation；The those of ordinary skill of all industry can be shown in by specification attached drawing and described above and swimmingly to implement this practical
It is novel；But all those skilled in the art are not departing within the scope of technical solutions of the utility model, using the above institute
The technology contents of announcement and the equivalent variations of a little variation, modification and evolution made, are the equivalence enforcement of the utility model
Example；Meanwhile the changes of all substantial technological any equivalent variationss to the above embodiments according to the utility model, modification with
Develop etc., within the protection scope for still falling within the technical solution of the utility model.
Claims (7)
1. a kind of stiffened deep space grey PVD film, it is characterised in that: the stiffened deep space grey PVD film is deposited on substrate table
Face, the stiffened deep space grey PVD film successively include: from the bottom up by substrate surface
Bottom, the bottom are chromium metal coating or titanium coating；
First Transition layer, the First Transition layer are the carbonitride coating of one of chromium or titanium；
Second transition zone, second transition zone are the carbonitride coating of one of chromium or titanium and silicon；
Color layers, the color layers are the carbonitride coating of one of chromium or titanium and silicon.
2. stiffened deep space grey PVD film according to claim 1, it is characterised in that: the substrate be stainless steel substrate,
Glass baseplate, ceramic base material or plastic rubber substrate.
3. stiffened deep space grey PVD film according to claim 1, it is characterised in that: the stiffened deep space grey PVD is thin
Film with a thickness of 1~5 micron.
4. stiffened deep space grey PVD film according to claim 1, it is characterised in that: the bottom with a thickness of 0.1~
0.5 micron.
5. stiffened deep space grey PVD film according to claim 1, it is characterised in that: the thickness of the First Transition layer
It is 0.4~2.0 micron.
6. stiffened deep space grey PVD film according to claim 1, it is characterised in that: the thickness of second transition zone
It is 0.4~2.0 micron.
7. stiffened deep space grey PVD film according to claim 1, it is characterised in that: the color layers with a thickness of 0.1
~1.5 microns.
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| CN201821076969.7U CN208362448U (en) | 2018-07-09 | 2018-07-09 | A kind of stiffened deep space grey PVD film |
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| CN201821076969.7U CN208362448U (en) | 2018-07-09 | 2018-07-09 | A kind of stiffened deep space grey PVD film |
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| CN111057996A (en) * | 2020-01-03 | 2020-04-24 | 创隆实业(深圳)有限公司 | All-solid-state insulation wave-transparent PVD (physical vapor deposition) film layer and preparation method and application thereof |
| CN112144063A (en) * | 2020-10-29 | 2020-12-29 | 南昌科勒有限公司 | Coating device with black multilayer film and preparation method thereof |
| CN112281125A (en) * | 2020-09-29 | 2021-01-29 | 维达力实业(深圳)有限公司 | Composite metal film and preparation method and application thereof |
| CN112394439A (en) * | 2019-08-14 | 2021-02-23 | 苹果公司 | Electronic device coatings for reflecting spectrally visible light |
| CN112877652A (en) * | 2021-01-15 | 2021-06-01 | 惠州市常兴荣科技有限公司 | Brown PVD (physical vapor deposition) film layer and preparation method thereof |
| CN113136557A (en) * | 2021-04-24 | 2021-07-20 | 东莞市立恒镀膜科技有限公司 | Corrosion-resistant and wear-resistant PVD (physical vapor deposition) film and preparation method thereof |
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| CN112394439A (en) * | 2019-08-14 | 2021-02-23 | 苹果公司 | Electronic device coatings for reflecting spectrally visible light |
| CN112394439B (en) * | 2019-08-14 | 2022-11-08 | 苹果公司 | Electronic device coatings for reflecting spectrally visible light |
| US11739425B2 (en) | 2019-08-14 | 2023-08-29 | Apple Inc. | Electronic device coatings for reflecting mid-spectrum visible light |
| CN111057996A (en) * | 2020-01-03 | 2020-04-24 | 创隆实业(深圳)有限公司 | All-solid-state insulation wave-transparent PVD (physical vapor deposition) film layer and preparation method and application thereof |
| CN112281125A (en) * | 2020-09-29 | 2021-01-29 | 维达力实业(深圳)有限公司 | Composite metal film and preparation method and application thereof |
| CN112281125B (en) * | 2020-09-29 | 2022-07-12 | 维达力实业(深圳)有限公司 | Composite metal film and preparation method and application thereof |
| CN112144063A (en) * | 2020-10-29 | 2020-12-29 | 南昌科勒有限公司 | Coating device with black multilayer film and preparation method thereof |
| CN112144063B (en) * | 2020-10-29 | 2023-02-28 | 南昌科勒有限公司 | Coating device with black multilayer film and preparation method thereof |
| CN114657503A (en) * | 2020-12-22 | 2022-06-24 | 比亚迪股份有限公司 | Coating material, preparation method thereof and electronic product shell |
| CN114657503B (en) * | 2020-12-22 | 2023-10-17 | 比亚迪股份有限公司 | Coating material, preparation method thereof and electronic product shell |
| CN112877652A (en) * | 2021-01-15 | 2021-06-01 | 惠州市常兴荣科技有限公司 | Brown PVD (physical vapor deposition) film layer and preparation method thereof |
| CN113136557A (en) * | 2021-04-24 | 2021-07-20 | 东莞市立恒镀膜科技有限公司 | Corrosion-resistant and wear-resistant PVD (physical vapor deposition) film and preparation method thereof |
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