CN208207070U - A kind of automatic probe test apparatus and system - Google Patents
A kind of automatic probe test apparatus and system Download PDFInfo
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- CN208207070U CN208207070U CN201820721187.8U CN201820721187U CN208207070U CN 208207070 U CN208207070 U CN 208207070U CN 201820721187 U CN201820721187 U CN 201820721187U CN 208207070 U CN208207070 U CN 208207070U
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Abstract
The utility model discloses a kind of automatic probe test devices, it include: side plate, bottom plate, probe bracket and mobile mechanism, the bottom end of the side plate is connected with one end of the bottom plate, and the bottom plate is for placing device under test, the probe bracket and one end of the mobile mechanism are fixedly linked, and the other end of the mobile mechanism is slidably connected along the axial direction of the side plate；It is provided with four needle of multiple groups probe on the probe bracket, includes at least a four needles probe on each group of four needle probe, and four needle probe can transversely and longitudinal movement on the probe bracket.In addition, the utility model additionally provides a kind of automatic probe test dress system based on the device.Using the utility model embodiment, the testing efficiency of device under test is improved, and reduces in test process and carries out artificial manual mobile device under test, reduces the damage probability of device.
Description
Technical field
The utility model relates to probe the field of test technology more particularly to a kind of automatic probe test apparatus and systems.
Background technique
Test instrument probe is the multipurpose composite measurement equipment with four-point probe measurment principle, is suitable for laboratory or production
Line uses.
Existing test instrument probe in the market is single-cantilever four-point probe, is separated using probe with telemetry circuit
Mode, only one probe are suitable for single-spot testing, and therefore, the point of test is less, and are needing to carry out multiple spot to test device
When test, measured device need to be manually moved.
As it can be seen that automatic probing test device to test efficiency in the prior art is lower, and shifting artificial during the test
Dynamic device under test be easy to cause the damage of device
Utility model content
The utility model embodiment is designed to provide a kind of automatic probe test apparatus and system, it is intended to improve to be measured
The testing efficiency of device, and reduce in test process and carry out artificial manual mobile device under test, the damage for reducing device is several
Rate.Specific technical solution is as follows:
In order to achieve the above objectives, the utility model embodiment provides a kind of automatic probe test device, comprising: side plate,
Bottom plate, probe bracket and mobile mechanism, the bottom end of the side plate are connected with one end of the bottom plate, and the bottom plate is used for
Device under test is placed, the probe bracket and one end of the mobile mechanism are fixedly linked, the other end edge of the mobile mechanism
The axial direction of the side plate be slidably connected；Four needle of multiple groups probe, each group of four needles probe are provided on the probe bracket
It is upper to include at least a four needles probe, and four needle probe can transversely and longitudinal movement on the probe bracket.
In preferred embodiments of the present invention, the mobile mechanism includes: stepper motor, ball screw, guide rod, cunning
Movable plate, connecting plate, test signal circuit board, the test signal circuit board and the stepper motor communicate to connect, and the step
It is connect into motor with the ball screw, the ball screw is connect with the sliding panel；And the two sides of the sliding panel are arranged
It on the guide rod, is slided up and down under the action of the ball screw along the guide rod, the side of the connecting plate and institute
It states sliding panel to be fixedly connected, the other side of the connecting plate is fixedly connected with the probe bracket.
In preferred embodiments of the present invention, the probe bracket is provided at least one probe X-axis position and adjusts
Mechanism and at least one probe Y-axis regulating mechanism, at least one sliding bar；
Each group of four needles probe is separately fixed on a sliding bar along Y-axis, and sliding bar is arranged along the y axis, and each group
Four needles probe is slidably connected with an X-axis position adjusting mechanism respectively, and each four needle probe is adjusted with a probe Y-axis
Mechanism slips connection.
In preferred embodiments of the present invention, further includes probe pressure regulator, pops one's head in and connect with each four needle,
And at least one probe pressure regulator is connect with the test signal circuit board, which is fed back to
It tests on signal circuit board.
In preferred embodiments of the present invention, the probe bracket is provided with the first extension and the second extension,
One end of the sliding bar is slidably connected with first extension, and the other end of the sliding bar and second extension are sliding
Dynamic connection, the sliding bar are provided with no more than each group four needles probe corresponding number fluting, four be placed in the fluting
Needle probe is carried out along the fluting direction.
In preferred embodiments of the present invention, the number of each group of four needles probe is 3, the quantity of the sliding bar
It is 3, and quantity of slotting is 2, and sets in the corresponding shell of the side plate and be provided with display and key.
In addition, the invention also discloses a kind of automatic probe test systems, comprising: automatic probe test device, on
Position machine, sample to be tested, amplifier module, analog-digital converter, microcontroller, stepper motor, key module, display, wherein described
Energy supply control module include: power filter pressure stabilizing submodule, precision constant current source submodule, electric current gear selecting commutation control submodule according to
Secondary connection, and the electric current gear selecting commutation control submodule and the microcontroller, the host computer and the microcontroller phase
Even；The energy supply control module is connected with the sample to be tested, and the sample to be tested is placed on the automatic probe test device,
And sample test signal is obtained by the multiple groups probe on the automatic probe test device, the test signal is sent to institute
After stating the amplification of amplifier module, amplified signal is sent to the analog-digital converter, and the analog-digital converter by amplifier module
It is connected with the microcontroller, the signal after analog-to-digital conversion is sent to the microcontroller, the stepper motor and institute
It states microcontroller to be connected, receives the control signal that the microcontroller is sent, the probe pressure on the automatic probe test device
Draught control mechanism sends limit signal to the microcontroller, the microcontroller and the automatic probe test device is arranged in
The key module on shell is connected with the display.
Using a kind of automatic probe test device provided by the embodiment of the utility model, by being provided on probe bracket
Four needle of multiple groups probe can measure multiple tested points by device under test simultaneously, and be popped one's head in by each four needle in probe bracket
On can not have to during the test mobile device under test, it is only necessary on mobile probe bracket transversely with the setting of longitudinal movement
The i.e. changeable test position of four needles probe, and then realize the test of difference.Therefore, the testing efficiency of device under test is improved,
And reduce in test process and carry out artificial manual mobile device under test, reduce the damage probability of device.
Detailed description of the invention
Fig. 1 is the first structural schematic diagram of automatic probe test device provided by the utility model；
Fig. 2 is second of structural schematic diagram of automatic probe test device provided by the utility model；
Fig. 3 is the third structural schematic diagram of automatic probe test device provided by the utility model；
Fig. 4 is the 4th kind of structural schematic diagram of automatic probe test device provided by the utility model.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
It is the structural schematic diagram of the automatic probe test device of the utility model, comprising: side plate referring to shown in Fig. 1 and Fig. 4
1, bottom plate 2, probe bracket 3 and mobile mechanism 4, the bottom end of the side plate 1 are connected with the side of the bottom plate 2, the bottom
Plate 2 is for placing device under test, and the probe bracket 3 and one end of the mobile mechanism are fixedly linked, the mobile mechanism 4
The other end is slidably connected along the axial direction of the side plate 1；Four needle of multiple groups probe is provided on the probe bracket 3, it is each
Include at least four needle probe 5 on group four needles probe, and four needle probe 5 on the probe bracket 4 can transversely and
Longitudinal movement.
It should be noted that four probe method is then a kind of standard method being widely used, two spies are replaced with four probes
It is measured for the resistivity or conductivity of sample, influence of the contact resistance of probe to measurement result can be eliminated, had and set
Standby simple, easy to operate, accuracy is high, the advantages that the geometric dimension of sample without being strict with.This tester uses four probes
Method measures diffusion layer sheet resistance to judge whether diffusion layer quality meets design requirement.
The measuring principle and method of four-point probe measurment sheet resistance:
The most commonly used is four probes of linear type, i.e., the needle point of four probes is located along the same line, and spacing is equal, and 4
Root metal probe alinement, probe 1 to probe 4 is arranged successively, and is pressed on measured material with certain pressure, probe 1,
By electric current I between at 4 liang of probe, then potential difference V is generated between probe 2, probe 3.The resistivity of material is (Ω cm):
Wherein, C is probe coefficient, is determined by probe geometric position.
By being provided with four needle of multiple groups probe on probe bracket, multiple tested points can be measured by device under test simultaneously,
And movement can not be had to during the test transversely with the setting of longitudinal movement on probe bracket by each four needle probe
Device under test, it is only necessary to the i.e. changeable test position of four needles probe on mobile probe bracket, and then realize the test of difference.
Therefore, the testing efficiency of device under test is improved, and reduces in test process and carries out artificial manual mobile device under test, is reduced
The damage probability of device.
In a kind of implementation of the utility model, as shown in figure 3, the mobile mechanism 4 includes: stepper motor 41, rolling
Ballscrew 42, guide rod 43, sliding panel 44, connecting plate 45, the stepper motor 41 are connect with the ball screw 42, the ball
Screw rod 42 is connect with the sliding panel 44；And the two sides of the sliding panel 44 are set on the guide rod 43, in the ball wire
It being slided up and down under the action of bar 42 along the guide rod 43, the side of the connecting plate 45 is fixedly connected with the sliding panel 44,
The other side of the connecting plate 45 is fixedly connected with the probe bracket 3.
It should be noted that the signal of the rotation tested person signal circuit board of stepper motor 41 controls, when stepper motor 41
When rotation, the effect of the power of up and down direction is converted by ball screw 42, so that the effect up and down of sliding panel 44 is driven,
This part is the action principle of ball screw, and this will not be repeated here for the utility model.In order to further be transported to sliding panel 44
Dynamic stability is promoted, and is set cylindric for its both ends, is set on guide rod 43, as guide rod is moved up and down, and
The middle part of sliding panel 44 is fixedly connected with one end of connecting plate 45, and the other end of connecting plate 45 is connected on probe bracket, thus
Sliding panel is driven by stepper motor, and then the probe bracket for driving connecting plate to be connected moves up and down.
As shown in figure 3, being provided at least one probe X-axis position adjusting mechanism 31 and at least one on the probe bracket 3
A probe Y-axis regulating mechanism 32, at least one sliding bar 33；Each group of four needles probe is separately fixed at a sliding bar along Y-axis
On 33, sliding bar is arranged along the y axis, and each group of four needles probe is slidably connected with an X-axis position adjusting mechanism 31 respectively, and
Each four needle probe is slidably connected with a probe Y-axis regulating mechanism 32.It is thereby achieved that each four needle probe is in X
Therefore the movement of axis and Y direction as long as adjusting the position of four needles probe, and does not have to adjustment device under test.
In another implementation, the utility model further includes probe pressure regulator, pops one's head in and connects with each four needle,
And at least one probe pressure regulator is connect with test signal circuit board, which is fed back to test
On signal circuit board.The pressure of four needles probe device under test is acquired by probe pressure regulator and is sent to test
Signal circuit board sends signal to stepper motor by test signal circuit board and carries out output adjusting, to control probe bracket
Position, namely each four needle probe and the forced contact of device under test are had adjusted, to prevent device under test stress excessive
It damages.It should be noted that test signal circuit board is the main circuit comprising controls such as single-chip microcontroller, FPGA, realizes and receive
The signal of probe pressure regulator, and electric signal determines the stress of current device under test based on the received, to adjust in time
The rotation of whole stepper motor, and then change the active force up and down for having adjusted ball screw by the rotation of motor.It is practical using this
It is novel, timely active force suffered by device under test can be adjusted, avoid in the prior art directly carrying out active force
It pushes, will cause the impaired situation of device under test and occur.And pass through the main circuit of the controls such as single-chip microcontroller, FPGA and probe pressure tune
The pressure for saving device obtains, and by the movement of the main circuit stepper motor of the controls such as single-chip microcontroller, FPGA is the prior art, this
Utility model is not done specifically repeat herein.Although the communication by the main circuit and stepper motor of the controls such as single-chip microcontroller, FPGA is
The prior art, but do not arrive the art, it is seen then that the utility model still has creativeness.
In the utility model, the probe bracket 3 is provided with the first extension 34 and the second extension 34, X-axis position of popping one's head in
It sets regulating mechanism 31 to be arranged on the first extension 34 and the second extension 34, one end of the sliding bar and described first extends
Portion is slidably connected, and the other end of the sliding bar is slidably connected with second extension, and the sliding bar, which is provided with, to be not more than
Each group of four needles probe corresponding number fluting, the four needles probe being placed in the fluting are carried out along the fluting direction.This
In utility model, four needle of part probe can be fixed setting, partially to be movably arranged.
In one implementation of the utility model, the number of each group of four needles probe is 3, the quantity of the sliding bar
It is 3, and quantity of slotting is 2, and sets in the corresponding shell of the side plate and be provided with display and key.
Device under test described in the utility model can be liquid crystal display device or other semiconductor film membrane module,
As long as needing the detection for carrying out resistivity using four needles probe that can be tested using the utility model embodiment.
In addition, the invention also discloses a kind of automatic probe test systems, comprising: automatic probe test device, on
Position machine, sample to be tested, amplifier module, analog-digital converter, microcontroller, stepper motor, key module, display, wherein described
Energy supply control module include: power filter pressure stabilizing submodule, precision constant current source submodule, electric current gear selecting commutation control submodule according to
Secondary connection, and the electric current gear selecting commutation control submodule and the microcontroller, the host computer and the microcontroller phase
Even；The energy supply control module is connected with the sample to be tested, and the sample to be tested is placed on the automatic probe test device,
And sample test signal is obtained by the multiple groups probe on the automatic probe test device, the test signal is sent to institute
After stating the amplification of amplifier module, amplified signal is sent to the analog-digital converter, and the analog-digital converter by amplifier module
It is connected with the microcontroller, the signal after analog-to-digital conversion is sent to the microcontroller, the stepper motor and institute
It states microcontroller to be connected, receives the control signal that the microcontroller is sent, the probe pressure on the automatic probe test device
Draught control mechanism sends limit signal to the microcontroller, the microcontroller and the automatic probe test device is arranged in
The key module on shell is connected with the display.
It should be noted that the energy supply control module includes: power filter pressure stabilizing submodule, precision constant current source submodule
Block, electric current gear selecting commutation control submodule, which is existing power module and electric current commutation control, for realizing to entire
The power supply of circuit system and device under test supply test electric current, this will not be repeated here for the utility model embodiment.
Host computer realizes that host computer receives the test of sample to be tested from microcontroller for being communicated with microcontroller
Data.Specifically, sample to be tested is placed on automatic probe test device, the instruction for starting test can be assigned by key module
To microcontroller, microcontroller sends driving signal to stepper motor, drives the rotation of the stepper motor, stepper motor will drive
Power acts on the ball screw of automatic probe test device, so that ball screw converts the rotation of stepper motor to up and down
Power in contact process, pass through spy so that the probe on automatic probe test device be driven to be contacted with sample to be tested
Stress on sample to be tested is transferred to microcontroller in time by head pressure regulator, by microcontroller according to the stress of sample to be tested
Situation adjusts the rotation of stepper motor, so as to adjust the stress condition that is contacted with sample to be tested of ball screw driving probe, when to
After sample stability under loading, the data of sample to be tested are obtained, display can be communicated with microcontroller, receive microcontroller
Display data, such as the test data of sample for sending over etc..Then, it is obtained by the probe of automatic probe test device
The test data of current sample to be tested, and will be sent to after enhanced processing that test data passes through amplifier module analog-digital converter into
Row is converted into digital signal, receives convenient for microcontroller.
The above is only the preferred embodiment of the utility model only, is not intended to limit the protection model of the utility model
It encloses.Any modification, equivalent substitution, improvement and etc. made within the spirit and principle of the present invention, are all contained in this reality
With in novel protection scope.
Claims (7)
1. a kind of automatic probe test device characterized by comprising side plate, bottom plate, probe bracket and mobile mechanism, it is described
The bottom end of side plate is connected with the side of the bottom plate, and the bottom plate is for placing device under test, the probe bracket and institute
The one end for stating mobile mechanism is fixedly linked, and the other end of the mobile mechanism is slidably connected along the axial direction of the side plate；
It is provided with four needle of multiple groups probe on the probe bracket, a four needles probe is included at least on each group of four needles probe, and
Four needle probe can transversely and longitudinal movement on the probe bracket.
2. automatic probe test device according to claim 1, which is characterized in that the mobile mechanism includes: stepping electricity
Machine, ball screw, guide rod, sliding panel, connecting plate, test signal circuit board, the test signal circuit board and stepping electricity
Machine communication connection, and the stepper motor is connect with the ball screw, the ball screw is connect with the sliding panel；And institute
The two sides for stating sliding panel are set on the guide rod, are slided up and down under the action of the ball screw along the guide rod, institute
The side for stating connecting plate is fixedly connected with the sliding panel, and the other side of the connecting plate is fixedly connected with the probe bracket.
3. automatic probe test device according to claim 1 or 2, which is characterized in that the probe bracket be provided with to
A few probe X-axis position adjusting mechanism and at least one probe Y-axis regulating mechanism, at least one sliding bar；
Each group of four needles probe is separately fixed on a sliding bar along Y-axis, and sliding bar is arranged along the y axis, each group of four needles
Probe be slidably connected respectively with an X-axis position adjusting mechanism, and each four needle probe with a probe Y-axis regulating mechanism
It is slidably connected.
4. automatic probe test device according to claim 2, which is characterized in that it further include probe pressure regulator, with
The probe connection of each four needle, and at least one probe pressure regulator is connect with the test signal circuit board, by the probe
Pressure regulator signal is fed back on test signal circuit board.
5. automatic probe test device according to claim 3, which is characterized in that the probe bracket is provided with first and prolongs
Extending portion and the second extension, one end of the sliding bar are slidably connected with first extension, the other end of the sliding bar
It being slidably connected with second extension, the sliding bar is provided with no more than each group four needles probe corresponding number fluting,
The four needles probe being placed in the fluting is carried out along the fluting direction.
6. automatic probe test device according to claim 5, which is characterized in that the number of each group of four needles probe is 3
A, the quantity of the sliding bar is 3, and quantity of slotting is 2, and sets in the corresponding shell of the side plate and be provided with display
Device and key.
7. a kind of automatic probe test system characterized by comprising automatic probe test device, host computer, sample to be tested,
Amplifier module, analog-digital converter, microcontroller, stepper motor, key module, display, wherein the energy supply control module packet
Include: power filter pressure stabilizing submodule, precision constant current source submodule, electric current gear selecting commutation control submodule are sequentially connected, and described
Electric current gear selecting commutation control submodule and the microcontroller, the host computer are connected with the microcontroller；
The energy supply control module is connected with the sample to be tested, and the sample to be tested is placed in the automatic probe test device
On, and sample test signal is obtained by the multiple groups probe on the automatic probe test device, the test signal is sent
To amplifier module amplification, amplified signal is sent to the analog-digital converter by amplifier module, and the modulus turns
Parallel operation is connected with the microcontroller, and the signal after analog-to-digital conversion is sent to the microcontroller, the stepper motor
It is connected with the microcontroller, receives the control signal that the microcontroller is sent, the spy on the automatic probe test device
Head pressure regulator sends limit signal and fills to the microcontroller, the microcontroller and setting in the automatic probe test
The key module on the shell set is connected with the display.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820721187.8U CN208207070U (en) | 2018-05-15 | 2018-05-15 | A kind of automatic probe test apparatus and system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820721187.8U CN208207070U (en) | 2018-05-15 | 2018-05-15 | A kind of automatic probe test apparatus and system |
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| CN208207070U true CN208207070U (en) | 2018-12-07 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108646093A (en) * | 2018-05-15 | 2018-10-12 | 中国科学院合肥物质科学研究院 | A kind of automatic probe test apparatus and system |
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- 2018-05-15 CN CN201820721187.8U patent/CN208207070U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108646093A (en) * | 2018-05-15 | 2018-10-12 | 中国科学院合肥物质科学研究院 | A kind of automatic probe test apparatus and system |
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