CN208140060U - A kind of semiconductor height detection apparatus - Google Patents
A kind of semiconductor height detection apparatus Download PDFInfo
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- CN208140060U CN208140060U CN201820386666.9U CN201820386666U CN208140060U CN 208140060 U CN208140060 U CN 208140060U CN 201820386666 U CN201820386666 U CN 201820386666U CN 208140060 U CN208140060 U CN 208140060U
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- detection
- slide unit
- height
- bubble level
- pedestal
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Abstract
The utility model discloses a kind of semiconductor height detection apparatus, height testing instrument including pedestal and setting on the base, the adjacent height testing instrument is provided with detection slide unit, the detection slide unit is located at the side of detection probe, and the detection slide unit is slidably arranged on pedestal, for the detection slide unit along the direction slide displacement towards or away from tester, the detection slide unit is concavely provided with annular cavity, and rotation is provided with detection turntable in annular cavity.The utility model provides a kind of semiconductor height detection apparatus, can accurately measure the size of part.
Description
Technical field
The utility model belongs to semiconductor detection field, in particular to a kind of semiconductor height detection apparatus.
Background technique
Semiconductor device is more and more applied in various industries and field, and consequent is the essence to semiconductor device
The high request of degree, high standard, in precision component, the precision of semiconductor affects its service performance；Existing semiconductor device
Detection height-gauge multi-purpose greatly measures, predominantly detection height, depth, flatness etc., but during detection,
Since structure is complicated or bad detection positioning for part, the detection for needing that a datum level is selected to carry out multiple relative sizes,
The position of frequent adjustment and transformation semiconductor device makes the positioning of its datum level there are accumulated error, causes to measure misalignment.
Summary of the invention
Goal of the invention：In order to overcome the deficiencies in the prior art, the utility model provides a kind of semiconductor height inspection
Measurement equipment can accurately measure the size of part.
Technical solution：To achieve the above object, the technical solution of the utility model is as follows：
A kind of semiconductor height detection apparatus, the height testing instrument including pedestal and setting on the base, adjacent institute
It states height testing instrument and is provided with detection slide unit, the detection slide unit is located at the side of detection probe, and the detection slide unit slides
It is set on the base, the detection slide unit is recessed along the direction slide displacement towards or away from tester, the detection slide unit
There is annular cavity, rotation is provided with detection turntable in annular cavity.
Further, the upper surface of the detection turntable is recessed with annular recess, the open side setting of the annular recess
There is the backing plate of transparent material, light bar is provided in the annular recess, the light bar annular is wound around in annular recess.
Further, several stop holes, week of several stop holes along detection turntable are offered on the detection turntable
It is arranged to circumference array, the annular sidewall setting of the stop hole perforation annular recess；The detection slide unit is far from height detection
Perforation offers pin hole, the annular cavity and exterior space of the pin hole communication with detection slide unit, the pin on the side side wall of instrument
Latch is inserted in hole, the latch is correspondingly arranged with stop hole.
Further, it is provided with first bubble level meter and the second air-bubble level on the detection slide unit, described first
The laterally adjacent side that detection turntable is arranged in of air-bubble level, the longitudinally adjacent setting of the second air-bubble level are filled in detection
The side of disk, the first bubble level meter and the second air-bubble level are mutually perpendicular to.
Further, the bottom surface of the pedestal is provided with transversely and horizontally regulating mechanism and vertical equity regulating mechanism, described
Transversely and horizontally regulating mechanism is correspondingly arranged with first bubble level meter, the vertical equity regulating mechanism and the second air-bubble level
It is correspondingly arranged；
The transversely and horizontally regulating mechanism or vertical equity regulating mechanism include adjusting bolt, and the bottom of the pedestal opens up
There are four the counter sink of rectangular array, the adjusting bolt rotation is located in counter sink, and the top for adjusting bolt is connected to inspection
The bottom surface for surveying slide unit adjusts the levelness of detection slide unit by adjusting bolt.
Beneficial effect：The utility model is by detection slide unit and detects being used in conjunction with each other for turntable, makes part with same
Datum level carries out dimensional measurement, reduces resetting workpiece and repeats accumulated error caused by choosing positioning reference plane, is promoted and surveyed
Accuracy is measured, while reducing the movement and rotation of workpiece, reduces the unexpected of workpiece and scratches.
Detailed description of the invention
Attached drawing 1 is the overall structure diagram of the utility model；
Attached drawing 2 is the overall structure perspective view of the explosion of the utility model；
Attached drawing 3 is the bottom surface structure schematic diagram of the utility model pedestal.
Specific embodiment
The utility model is further described with reference to the accompanying drawing.
As shown in Fig. 1, a kind of semiconductor height detection apparatus, including pedestal 1 and the height being arranged on the pedestal 1
Detector 2, the height testing instrument 2 is Switzerland 7ESA two dimensional height detector, mainly to workpiece sensing height, depth, plane
Degree or diameter of bore etc., the adjacent height testing instrument 2 are provided with detection slide unit 3, and the detection slide unit 3 is located at detection probe
Side, and the detection slide unit 3 is slidably arranged on pedestal 1 by dovetail groove, and the detection slide unit 3 is along towards or away from inspection
The direction slide displacement of survey person puts down part convenient for tester by detecting past polyslip of the slide unit 3 towards tester direction
Face degree, height etc. are detected, by pushing detection slide unit 3 to slide, avoiding sliding workpiece to the scuffing of workpiece surface or drawing
Flower, on the other hand, the detection slide unit 3 are concavely provided with annular cavity, and rotation is provided with detection turntable 4 in annular cavity, pass through
The measurement that turntable 4 carries out circumferential plane degree and difference in height to the part of circumference class is detected, guarantees accuracy of measurement, detects slide unit 3
For the absolute zero layer calibrated in advance, by detection slide unit and being used in conjunction with each other for turntable is detected, makes part with same base
Quasi- face carries out dimensional measurement, reduces resetting workpiece and repeats accumulated error caused by choosing positioning reference plane, promotes measurement
Accuracy.It is additionally provided with Pneumatic suction cup 11 in the bottom surface of pedestal 1, can facilitate and integral device is moved.
As shown in Fig. 2, the upper surface of the detection turntable 4 is recessed with annular recess 15, and the annular recess 15 is opened
Mouth side is provided with the backing plate 9 of transparent material, is provided with light bar 8 in the annular recess 15,8 annular of light bar is wound around ring-type
In groove 15.The light bar 8 is LED light strip, energy conservation and brightness height, by making the wheel of part to illuminating around detection part
It is wide apparent as it can be seen that be convenient for the observation of tester, rechargeable storage battery is provided in annular groove, the battery and light bar
It is electrically connected, guarantees the power supply of light bar.
The upper surface of the detection slide unit is higher by pedestal 1, and several stop holes 16 are offered on the detection turntable 4, several
Circumferential circumference array setting of the stop hole 16 along detection turntable 4, the annular side of the perforation of stop hole 16 annular recess 15
Wall setting；The detection slide unit 3 offers pin hole, the pin hole communication with detection far from perforation on the side side wall of height testing instrument
The annular cavity and exterior space of slide unit 3 are inserted with latch 7 in the pin hole, and the latch 7 is corresponding with stop hole 16
Setting.It is plugged in stop hole and is limited by latch 7, making to detect when turntable turns an angle can limit, and keep steady
It is fixed, facilitate the detection of workpiece.
First bubble level meter 5 and the second air-bubble level 6, the first bubble water are provided on the detection slide unit 3
The laterally adjacent side that detection turntable is arranged in of level 5, longitudinally adjacent be arranged in of second air-bubble level 6 detect sabot
Side, the first bubble level meter 5 and the second air-bubble level 6 are mutually perpendicular to.Pass through first bubble level meter 5 and second
The levelness of 6 pairs of detection slide units 3 of air-bubble level is observed, and can timely find whether detection platform is horizontal.
As shown in Fig. 3, the bottom surface of the pedestal 1 is provided with transversely and horizontally regulating mechanism and vertical equity regulating mechanism,
The transversely and horizontally regulating mechanism is correspondingly arranged with first bubble level meter 5, the vertical equity regulating mechanism and the second bubble
Level meter 6 is correspondingly arranged；Detection slide unit is carried out laterally respectively by transversely and horizontally regulating mechanism and vertical equity regulating mechanism
And longitudinal horizontal adjustment, guarantee the level of detection slide unit, the transversely and horizontally regulating mechanism or vertical equity regulating mechanism packet
It includes and adjusts bolt 14, the bottom of the pedestal 1 opens up the counter sink 13 there are four rectangular array, and the rotation of adjusting bolt 14 is located at
In counter sink 13, the top for adjusting bolt 14 is connected to the bottom surface of detection slide unit 3, is slided by adjusting the adjusting detection of bolt 14
The levelness of platform 3, overall structure is simple, easy to adjust.
The above is only the preferred embodiment of the utility model, it should be pointed out that：For the common skill of the art
For art personnel, without departing from the principle of this utility model, several improvements and modifications can also be made, these improve and
Retouching also should be regarded as the protection scope of the utility model.
Claims (5)
1. a kind of semiconductor height detection apparatus, it is characterised in that：Including pedestal (1) and the height being arranged on the pedestal (1)
It spends detector (2), the adjacent height testing instrument (2) is provided with detection slide unit (3), and the detection slide unit (3) is located at detection and visits
The side of head, and the detection slide unit (3) is slidably arranged on pedestal (1), and detection slide unit (3) edge is towards or away from detection
The direction slide displacement of person, the detection slide unit (3) are concavely provided with annular cavity, and rotation is provided with detection turntable in annular cavity
(4)。
2. a kind of semiconductor height detection apparatus according to claim 1, it is characterised in that：Detection turntable (4)
Upper surface is recessed with annular recess (15), and the open side of the annular recess (15) is provided with the backing plate (9) of transparent material, described
It is provided with light bar (8) in annular recess (15), light bar (8) annular is wound around in annular recess (15).
3. a kind of semiconductor height detection apparatus according to claim 2, it is characterised in that：On the detection turntable (4)
It offers several stop holes (16), several stop holes (16) are arranged along the circumferential circumference array of detection turntable (4), described to stop
The annular sidewall setting of dynamic hole (16) perforation annular recess (15)；The side side of detection slide unit (3) far from height testing instrument
Perforation offers pin hole on wall, the annular cavity and exterior space of the pin hole communication with detection slide unit (3), plugs in the pin hole
Have latch (7), the latch (7) is correspondingly arranged with stop hole (16).
4. a kind of semiconductor height detection apparatus according to claim 1, it is characterised in that：On the detection slide unit (3)
It is provided with first bubble level meter (5) and the second air-bubble level (6), the laterally adjacent setting of the first bubble level meter (5)
In the side of detection turntable, the longitudinally adjacent side that detection sabot is set of second air-bubble level (6), first gas
Soaked level (5) and the second air-bubble level (6) are mutually perpendicular to.
5. a kind of semiconductor height detection apparatus according to claim 4, it is characterised in that：The bottom surface of the pedestal (1)
It is provided with transversely and horizontally regulating mechanism and vertical equity regulating mechanism, the transversely and horizontally regulating mechanism and first bubble level meter
(5) it is correspondingly arranged, the vertical equity regulating mechanism is correspondingly arranged with the second air-bubble level (6)；It is described transversely and horizontally to adjust
Mechanism or vertical equity regulating mechanism include adjusting bolt (14), and the bottom of the pedestal (1) opens up that there are four rectangular arrays
Counter sink (13), adjusting bolt (14) rotation are located in counter sink (13), and the top for adjusting bolt (14) is connected to inspection
The bottom surface for surveying slide unit (3) adjusts the levelness of detection slide unit (3) by adjusting bolt (14).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820386666.9U CN208140060U (en) | 2018-03-21 | 2018-03-21 | A kind of semiconductor height detection apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820386666.9U CN208140060U (en) | 2018-03-21 | 2018-03-21 | A kind of semiconductor height detection apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208140060U true CN208140060U (en) | 2018-11-23 |
Family
ID=64289463
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820386666.9U Active CN208140060U (en) | 2018-03-21 | 2018-03-21 | A kind of semiconductor height detection apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208140060U (en) |
-
2018
- 2018-03-21 CN CN201820386666.9U patent/CN208140060U/en active Active
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