CN208136316U - Without the mobile crucible for loading vapor deposition material - Google Patents
Without the mobile crucible for loading vapor deposition material Download PDFInfo
- Publication number
- CN208136316U CN208136316U CN201820410585.8U CN201820410585U CN208136316U CN 208136316 U CN208136316 U CN 208136316U CN 201820410585 U CN201820410585 U CN 201820410585U CN 208136316 U CN208136316 U CN 208136316U
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- Prior art keywords
- filling
- vapor deposition
- notch
- deposition material
- baffle
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- 239000000463 material Substances 0.000 title claims abstract description 62
- 238000007740 vapor deposition Methods 0.000 title claims abstract description 51
- 230000007246 mechanism Effects 0.000 claims abstract description 15
- 238000007599 discharging Methods 0.000 claims description 6
- 238000009826 distribution Methods 0.000 description 6
- 230000008020 evaporation Effects 0.000 description 5
- 238000001704 evaporation Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000001771 vacuum deposition Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
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- Physical Vapour Deposition (AREA)
Abstract
The utility model discloses the crucibles without mobile filling vapor deposition material, including crucible body and be fixed on crucible body bottom wall for be deposited material load it is each to filling mechanism, it is in respectively to be obliquely installed with horizontal plane to its filling face of filling mechanism, inclination angle range is 15 °~45 °.The lesser filling hole of size is arranged in the utility model on the cover board, cooperate again it is each may be implemented that vapor deposition material crucible body bottom wall equably can be seated in without mobile filling vapor deposition material when loading to filling mechanism, and the case where capable of expecting its thickness and coefficient of friction according to different vapor depositions reasonably select the inclined directions of filling notches and blow tank with not only meet the vapor deposition material of filling can automatic blanking meet again vapor deposition material in automatic blanking will not leakage that is too fast and leading to vapor deposition material, drift and lose.
Description
Technical field
The utility model relates to the crucibles without mobile filling vapor deposition material.
Background technique
OLED, i.e. Organic Light Emitting Diode (Organic Light-Emitting Diode), also known as organic electric laser
It shows (Organic Electroluminesence Display, OLED).Because having the characteristics such as frivolous, power saving,
Digital product it is aobvious do not shield be widely applied, and have biggish market potential, OLED is answered in the world at present
With all focusing on the aobvious not device of plate, because OLED is the technology that uniquely can above mention in the same breath with TFT-LCD in application, OLED is
In current all display technologies, can uniquely make the display technology of the soft screen of large scale, high brightness, high-resolution, can be made and
The same thickness of paper；Wherein, in the production process of OLED, technique for vacuum coating be in OLED production process one it is critically important
Technique, vacuum coating refer in vacuum cavity evaporation source heating evaporation or with accelerate ion bombardment sputtering, deposit to base
Piece surface forms single-layer or multi-layer film.Because it be related to OLED quality height and service life length most important factor it
One, so the various equipment being applied on technique for vacuum coating must satisfy the required precision of technique for vacuum coating.And it is being deposited
Middle vapor deposition crucible is an equipment for applying more, but current vapor deposition crucible, when evaporation material loads, operator is
Material is uniformly seated in crucible body, needs to add while mobile, the leakage of vapor deposition material is easily caused at this time, drifts
And loss, and the material of OLED vapor deposition is sufficiently expensive, and then leads to the raising of cost；Existing OLED evaporation material be it is powdered,
It is unable to control that distribution of the material in Crucible body is uniform when filling, be easy to cause the film thickness difference of evaporation film-forming.
Utility model content
The purpose of this utility model is that overcoming defect existing in the prior art, provide without mobile filling vapor deposition material
Crucible, may be implemented that vapor deposition material crucible body bottom wall, and energy equably can be seated in without mobile filling vapor deposition material
Enough the case where expecting its thickness and coefficient of friction according to different vapor depositions, reasonably select the inclined direction of filling notch and blow tank with both full
Load enough vapor deposition material can automatic blanking, again meet vapor deposition material in automatic blanking will not it is too fast and cause vapor deposition material leakage,
It drifts and loses.
To achieve the above object, the technical solution of the utility model is crucible of the design without mobile filling vapor deposition material, packet
It includes crucible body and is fixed on crucible body bottom wall and expect each to filling mechanism of filling for being deposited, respectively to filling
In being obliquely installed with horizontal plane, inclination angle range is 15 °~45 ° in mechanism its filling face.Since each setting to filling mechanism can be with
So that filling material can be fallen into crucible body relatively uniformly, and the setting at its inclination angle is not so that have to mobile dress when loading
It fills out.
Further technical solution is that crucible body is in rectangle channel-shaped, is equipped with above crucible body and crucible body one
Molding cover board, cover board are equipped with venthole and a filling hole；Described includes respectively one and crucible body bottom to filling mechanism
The filling notch that wall is obliquely installed, the trough floor and horizontal plane inclination angle range of filling notch are 15 °~45 °, are placed equidistant in trough floor
Several baffles, the height of baffle are lower than the height of filling notch slot side plate, several discharge holes are arranged on slot side plate, discharge hole
Height is lower than the height of baffle, and inclined blow tank is arranged in slot side plate side, and the upper notch of blow tank is located at discharge hole and slot
Mouth is greater than discharge hole, lower notch is connected with crucible body bottom wall, and blow tank is used for the discharging of filling notch branch direction so that filling
When vapor deposition material be distributed in crucible main body it is uniform.The setting of trough floor being obliquely installed with baffle is so that filling is expected ceaselessly
It is accumulated at baffle first during filling, filling material accumulates in next baffle to charging at lower baffle more than after baffle
Between this higher baffle, and since discharge hole is arranged in slot side plate, when filling material accumulates at baffle, when filling material continues
Then a part filling material slides downwards from blow tank when increasing to the upper surface arrival discharge hole of filling material, realizes different directions
Charging achievees the purpose that charging is uniformly distributed.
Further technical solution is that the trough floor of filling notch and horizontal plane inclination angle are 30 °；Baffle is set perpendicular to trough floor
It sets, then spacing is bigger closer to lower baffle for the spacing satisfaction of discharge hole, and the vapor deposition of blow tank expects its discharging direction and filling
The vapor deposition of slot expects that its feedstock direction is vertical.The setting of the spacing of discharge hole is allowed for since trough floor is obliquely installed, dress
Filler is more closer to lower baffle, so needing less setting discharge hole at this time, filling material is avoided also " turning over " not cross baffle just
Substantially it all goes out from discharge hole, also for better ensuring that distribution of the vapor deposition material in crucible body is uniform.
Further technical solution is that discharge port is arranged on baffle, and discharge port is arranged close to baffle upper end；The filling notch
The vapor deposition that its inclined direction meets filling notch expects the length of its feedstock direction and crucible body to consistent, and filling hole is located on filling notch
At end.The setting of baffle top discharge mouth can decide whether setting and discharge port according to the thickness and coefficient of friction of vapor deposition material
Size and how many, also for better ensuring that distribution of the vapor deposition material in crucible body is uniform, so that filling material is at baffle
It accumulates to when baffle top and first to be flowed out from a part filling expects next baffle from discharge port.Filling hole is located on filling notch
At end, vapor deposition material directly is loaded from this filling hole when loading in this way, is not required to mobile filling, and on the cover board due to filling hole,
Can to avoid vapor deposition material leakage, drift and lose.
The advantages of the utility model and beneficial effect are：One lesser filling hole of size is set on the cover board, then is matched
It may be implemented to expect that vapor deposition material crucible sheet equably can be seated in without mobile filling vapor deposition when closing each filling to filling mechanism
Body bottom wall, and the inclination side of the case where expecting its thickness and coefficient of friction reasonable selection filling notch and blow tank different can be deposited
To with not only meet the vapor deposition material energy automatic blanking of filling but also meet vapor deposition material in automatic blanking will not it is too fast and cause vapor deposition expect
Leakage, drift and lose；Since each setting to filling mechanism can make filling material that can fall into crucible relatively uniformly
In ontology, and the setting at its inclination angle is not so that have to mobile filling when loading；The setting of trough floor being obliquely installed with baffle makes
Material must be loaded to accumulate at baffle first during ceaselessly loading, filling material is more than to feed at lower baffle after baffle
It accumulates between next baffle and this higher baffle, and since discharge hole is arranged in slot side plate, accumulates in baffle in filling material
When place, when the upper surface that filling material continues to increase to filling material reaches discharge hole then a part filling material from blow tank to downslide
It falls, realizes the charging of different directions, achieve the purpose that charging is uniformly distributed.The setting of the spacing of discharge hole is allowed for due to trough floor
It is obliquely installed, therefore it is more closer to lower baffle to load material, so needing less setting discharge hole at this time, avoids filling material also
" turning over " does not cross baffle and just all goes out substantially from discharge hole, and the distribution expected in crucible body is deposited also for better ensuring that
It is uniform.The setting of baffle top discharge mouth can decide whether setting and discharge port according to the thickness and coefficient of friction of vapor deposition material
Size and how many, also for better ensuring that distribution of the vapor deposition material in crucible body is uniform, so that filling material is at baffle
It accumulates to when baffle top and first to be flowed out from a part filling expects next baffle from discharge port.
Detailed description of the invention
Fig. 1 is schematic diagram of the utility model without the crucible of mobile filling vapor deposition material；
Fig. 2 is the schematic diagram after Fig. 1 removal cover board；
Fig. 3 is the schematic diagram of filling notch in Fig. 2.
In figure：1, crucible body；2, cover board；3, venthole；4, filling hole；5, trough floor；6, baffle；7, slot side plate；8,
Discharge hole；9, blow tank；10, discharge port.
Specific embodiment
With reference to the accompanying drawings and examples, specific embodiment of the present utility model is further described.Implement below
Example is only used for clearly illustrating the technical solution of the utility model, and cannot be used as a limitation the protection model of limitation the utility model
It encloses.
As shown in Figure 1 to Figure 3 (for convenient for diagram, Fig. 2 illustrates only part blow tank), the utility model is without movement
Filling vapor deposition material crucible, including crucible body 1 and be fixed on 1 bottom wall of crucible body for be deposited material load
It is in respectively to be obliquely installed with horizontal plane to its filling face of filling mechanism respectively to filling mechanism, inclination angle range is 15 °~45 °.Crucible sheet
Body 1 is in rectangle channel-shaped, is equipped with above crucible body 1 and is equipped with venthole 3 with the integrally formed cover board 2 of crucible body 1, cover board 2
An and filling hole 4；Described includes respectively the filling notch being obliquely installed with 1 bottom wall of crucible body, filling notch to filling mechanism
Trough floor 5 and horizontal plane inclination angle range be 15 °~45 °, be placed equidistant with several baffles 6, the height of baffle 6 in trough floor 5
Lower than the height of filling notch slot side plate 7, several discharge holes 8 are set, the height of discharge hole 8 is lower than the height of baffle 6 on slot side plate 7
Inclined blow tank 9 is arranged in degree, 7 side of slot side plate, and the upper notch of blow tank 9 is located at discharge hole 8 and notch is greater than discharge hole
8, lower notch is connected with 1 bottom wall of crucible body, and discharging of the blow tank 9 for filling notch branch direction exists so that material is deposited when loading
Distribution is uniform in crucible main body.The trough floor 5 of filling notch and horizontal plane inclination angle are 30 °；Baffle 6 is arranged perpendicular to trough floor 5,
Then spacing is bigger closer to lower baffle 6 for the spacing satisfaction of discharge hole 8, and the vapor deposition of blow tank 9 expects its discharging direction and filling
The vapor deposition of slot expects that its feedstock direction is vertical.Discharge port 10 is set on baffle 6, and discharge port 10 is arranged close to 6 upper end of baffle；The dress
It fills out slot its inclined direction and meets the vapor deposition of filling notch and expect the length of its feedstock direction and crucible body 1 to consistent, filling hole 4, which is located at, to be filled
It fills out at slot upper end.
The above is only the preferred embodiment of the utility model, it is noted that for the common skill of the art
For art personnel, without deviating from the technical principle of the utility model, several improvements and modifications can also be made, these change
It also should be regarded as the protection scope of the utility model into retouching.
Claims (4)
1. the crucible without mobile filling vapor deposition material, which is characterized in that including crucible body and be fixed at crucible body
The each to filling mechanism of filling is expected for being deposited on bottom wall, is in respectively to be obliquely installed with horizontal plane to its filling face of filling mechanism,
Inclination angle range is 15 °~45 °.
2. the crucible according to claim 1 without mobile filling vapor deposition material, which is characterized in that the crucible body is in square
Shape channel-shaped, crucible body top, which is equipped with, is equipped with venthole and a filling hole with the integrally formed cover board of crucible body, cover board；
Described includes respectively the filling notch being obliquely installed with crucible body bottom wall, the trough floor and horizontal plane of filling notch to filling mechanism
Inclination angle range is 15 °~45 °, several baffles are placed equidistant in trough floor, and the height of baffle is lower than the height of filling notch slot side plate
It spends, several discharge holes is set on slot side plate, the height of discharge hole is lower than the height of baffle, and the setting of slot side plate side is inclined out
Hopper, the upper notch of blow tank is located at discharge hole and notch is greater than discharge hole, lower notch is connected with crucible body bottom wall, discharges
Slot for filling notch branch direction discharging so that filling when vapor deposition material be distributed in crucible main body it is uniform.
3. the crucible according to claim 2 without mobile filling vapor deposition material, which is characterized in that the slot bottom of the filling notch
Plate and horizontal plane inclination angle are 30 °；Baffle is arranged perpendicular to trough floor, the spacing of discharge hole meet closer to lower baffle then between
Away from bigger, the vapor deposition of blow tank expects that its discharging direction expects that its feedstock direction is vertical with the vapor deposition of filling notch.
4. the crucible according to claim 3 without mobile filling vapor deposition material, which is characterized in that be provided on the baffle
Material mouth, discharge port are arranged close to baffle upper end；The vapor deposition that its inclined direction of the filling notch meets filling notch expects its feedstock direction
With the length of crucible body to consistent, filling hole is located at filling notch upper end.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820410585.8U CN208136316U (en) | 2018-03-26 | 2018-03-26 | Without the mobile crucible for loading vapor deposition material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820410585.8U CN208136316U (en) | 2018-03-26 | 2018-03-26 | Without the mobile crucible for loading vapor deposition material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208136316U true CN208136316U (en) | 2018-11-23 |
Family
ID=64290295
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820410585.8U Active CN208136316U (en) | 2018-03-26 | 2018-03-26 | Without the mobile crucible for loading vapor deposition material |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208136316U (en) |
-
2018
- 2018-03-26 CN CN201820410585.8U patent/CN208136316U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 214400 Changshan Road, Jiangyin High-tech Park, Wuxi City, Jiangsu Province Patentee after: JIANGYIN GKVAC MACHINERY Co.,Ltd. Address before: 214400 Changshan Road, Jiangyin High-tech Park, Wuxi City, Jiangsu Province Patentee before: JIANGYIN GUANGKE VACUUM MACHINERY Co.,Ltd. |
|
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 225400 He Han 1 and 6 Groups, Hanzhuang Village, Huangqiao Town, Taixing City, Taizhou City, Jiangsu Province Patentee after: Jiangsu Guangke Precision Equipment Co.,Ltd. Address before: 214400 Changshan Road, Jiangyin High-tech Park, Wuxi City, Jiangsu Province Patentee before: JIANGYIN GKVAC MACHINERY Co.,Ltd. |