CN208136074U - A kind of quartz ampoule flange welding device - Google Patents
A kind of quartz ampoule flange welding device Download PDFInfo
- Publication number
- CN208136074U CN208136074U CN201721827166.6U CN201721827166U CN208136074U CN 208136074 U CN208136074 U CN 208136074U CN 201721827166 U CN201721827166 U CN 201721827166U CN 208136074 U CN208136074 U CN 208136074U
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- Prior art keywords
- quartz
- platform
- base station
- column
- flange
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- Expired - Fee Related
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 103
- 239000010453 quartz Substances 0.000 title claims abstract description 100
- 238000003466 welding Methods 0.000 title claims abstract description 56
- 239000003708 ampul Substances 0.000 title claims abstract description 23
- 238000010438 heat treatment Methods 0.000 claims abstract description 28
- 230000007246 mechanism Effects 0.000 claims abstract description 24
- 230000003028 elevating effect Effects 0.000 claims abstract description 22
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 14
- 229910002804 graphite Inorganic materials 0.000 claims description 14
- 239000010439 graphite Substances 0.000 claims description 14
- 239000011159 matrix material Substances 0.000 claims description 12
- 230000003287 optical effect Effects 0.000 claims description 11
- 239000007770 graphite material Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 6
- 230000002045 lasting effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000033001 locomotion Effects 0.000 description 2
- 238000004321 preservation Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
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- Butt Welding And Welding Of Specific Article (AREA)
Abstract
The utility model discloses a kind of quartz ampoule flange welding devices,Including lathe bed carrying platform,The column and work base station being placed on lathe bed carrying platform,Base station lower part work equipped with hot body,Column is equipped with the revolving platform moved up and down along column,Revolving platform elevating mechanism and welding gun assist heating mechanism,Welding gun assists heating mechanism to be equipped with welding gun,The utility model is using work base station as the locating platform of quartz flange and quartz inner pipe,Quartz outer tube is clamped using liftable revolving platform,Positioning and revolution,Continuous heating is carried out to quartz flange and quartz inner pipe by heating mechanism, automatic flame heating is carried out to quartz outer tube by welding gun moving up and down,Quartz ampoule and quartz flange maintain the technique requirement of certain temperature when ensure that quartz products welding assembly,Improve the processing quality of quartz products,Save human cost.
Description
Technical field
The utility model relates to arrive the manufacture field of quartz glass products more particularly to a kind of accurate positioning, heating
Even, the higher quartz ampoule flange welding device of efficiency.
Background technique
With the high speed development of IC industry, semiconductor equipment manufacturing is increasingly mature therewith, and quartz glass products belong to
Important composition product in semiconductor equipment, demand are also growing day by day.Because quartz glass has high rigidity, high-purity, thermal expansion
Coefficient it is low and electrical isolation etc. series of characteristics, therefore its processing technology require it is very harsh, especially the welding procedure overwhelming majority be pass
The manual operation of system, machining accuracy and efficiency are generally relatively low, and more demanding to the level of skill of operating personnel.Semiconductor equipment
In quartz products that structure is complicated is changeable, the flange welding of heavy caliber large scale Quartz stove tube and two recombinations it is vertical be even more to give operation people
The work steps such as the positioning operation of member bring extreme difficulties, and often this procedure just needs more people to operate, positioning operation low efficiency,
Low precision, time-consuming, to cause high production cost and unstable quality.
Utility model content
The utility model mainly solves existing heavy caliber quartz tubing welding processing, and there are the complicated difficult, positioning of positioning operation
Precision is low, elapsed time is long, the high technical problem of processing cost；It is higher to provide a kind of accurate positioning, homogeneous heating, efficiency
Quartz ampoule flange welding device.
In order to solve above-mentioned technical problem, the utility model is mainly adopted the following technical solutions：
A kind of quartz ampoule flange welding device of the utility model, for heavy caliber quartz inner pipe, quartz outer tube and quartz
The erection welding of flange, described device include lathe bed carrying platform, the column being placed on lathe bed carrying platform and work base station, institute
Work base station is stated set on lathe bed carrying platform front, the table top for the base station that works is equipped with positioning groove, and work base station lower part is equipped with
Hot body, the column are set to lathe bed carrying platform rear portion, and column is equipped with the revolving platform moved up and down along column, revolution
Platform lifting mechanism and welding gun assist heating mechanism, and the revolving platform is located at the top of work base station and same with the base station that works
Axis, the welding gun auxiliary heating mechanism are equipped with welding gun, and the quartz flange and quartz inner pipe are installed in work base station respectively
In positioning groove, the quartz outer tube is connected on revolving platform, and quartz outer tube lower end contradicts quartz flange, and device utilizes work
Make locating platform of the base station as quartz flange and quartz inner pipe, quartz outer tube is pressed from both sides using liftable revolving platform
It holds, position and turns round, by the heating mechanism under work base station to carrying out lasting heating inside quartz flange and quartz inner pipe
And welding gun moving up and down to quartz outer tube carry out automatic flame heating, when ensure that quartz products welding assembly quartz ampoule and
Quartz flange maintains the technique requirement of certain temperature, improves the processing quality of quartz products, saves human cost.
Preferably, the column is in Π shape structure, including left column, right column and crossbeam, the left column and the right side are vertical
The front of column is equipped with sliding rail, and the revolving platform is socketed on sliding rail and slides up and down along sliding rail, the revolving platform lifting
Mechanism includes platform lifting motor, driving chain and sprocket wheel, the platform lifting motor be placed on the lathe bed carrying platform and
Driving chain is driven, the sprocket wheel is placed in cross rail top and carrying driving chain, driving chain hang and pull revolving platform, puts down
Platform lifting motor drives driving chain and makees according to quartzy length of tube to be processed at a distance from work base station platform with moving platform
Automatic lifting movement, improves the accuracy and consistency of assembly.
Preferably, the revolving platform elevating mechanism further includes platform lifting hand-operated wheel, upper limit switch and lower limit
Switch, the platform lifting hand-operated wheel, upper limit switch and lower position switch are all set on the lateral surface of left column, upper limit
Switch is located at the top of left column lateral surface and position revolving platform moves up limit position, and lower position switch is located at left column outside
The lower part in face and position revolving platform move down extreme position, upper and lower limit switch can guarantee the range of revolving platform, mention
The safety of high lifting process, and platform lifting hand-operated wheel can then carry out the lifting or fine tuning of revolving platform manually.
Preferably, the revolving platform is equipped with revolution matrix and revolution driving motor, the revolution driving motor is driven
Dynamic revolution matrix rotation, revolution matrix are equipped with the double-deck three-jaw clamp for clamping the quartz outer tube and clamp hand-operated wheel,
Quartz ampoule is clamped and turned round using the double-deck three-jaw clamp, so that quartz ampoule can steadily continue to turn round, is conducive to quartz
The comprehensive heating and thermal insulation of tube wall.
Preferably, the clamp front end face of the bilayer three-jaw clamp is equipped with high purity graphite clamp clip, the clamp clip
Inside be in globoidal structure, the globoidal structure matches with the tube wall radian of the quartz outer tube, and the graphite of arcuate structure presss from both sides
Tight piece reduces pollution of the foreign matter to quartz ampoule for cooperating quartzy pipe outside diameter.
Preferably, the work base station is hollow structure, work base station table top is graphite material, the positioning groove
Graphite flake is covered on contact surface, the hot body includes heater blower, and heater blower is located at the hollow of work base station
Below structure and hot-air mouth upward, replaceable graphite table top is determined according to the size of quartz ampoule to be processed, cooperates locating groove
Slot accurately controls the position precision of quartz ampoule and quartz flange, can be filled with hot wind by the heater blower below work base station
The inside of the quartz inner pipe and quartz outer tube that are vertically placed on work base station provides lasting heating for quartz ampoule erection welding
Heat preservation.
Preferably, being additionally provided with lifting hand-operated wheel on the work base station, facilitate the graphite table top of adjustment work base station high
Degree adapts to the assembly of different height quartz products.
Preferably, welding gun auxiliary heating mechanism includes the upper fixed seat of setting symmetrical above and below and lower fixed seat, sets
In elevating screw and optical axis guide rail, the sliding platform that is embedded on elevating screw and optical axis guide rail and driving lifting between the two
The screw drive motor of screw rod, fixed seat and lower fixed seat are set to the lateral surface of the right column, and the sliding is flat
Platform is sheathed on elevating screw and optical axis guide rail and moves up and down along elevating screw, and sliding platform is equipped with the adjustable branch of multi-angle
Bar, the welding gun are set to the front end of strut, and welding gun is installed in along the sliding platform that screw rod moves up and down, and using strut into
The adjusting of row multi-angle can be moved up and down automatically and carry out lasting comprehensive flame heating and heat preservation to quartz outer tube, had
It is processed conducive to the erection welding of quartz products.
The utility model has the beneficial effects that：Device is flat using work base station as the positioning of quartz flange and quartz inner pipe
Platform clamps quartz outer tube, positioned and is turned round using liftable revolving platform, passes through the heating mechanism under work base station
Quartz outer tube get angry certainly to lasting heating and welding gun moving up and down is carried out inside quartz flange and quartz inner pipe
Flame heating, ensure that the continuous heating and thermal requirements when quartz products welding assembly, improves the processing quality of quartz products.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of the utility model.
Fig. 2 is the revolving platform structural schematic diagram in Fig. 1.
Fig. 3 is the welding gun auxiliary heating mechanism schematic diagram in Fig. 1.
1. lathe bed carrying platform in figure, 2. columns, 21. left columns, 22. right columns, 23. crossbeams, 24. sliding rails, 3. work
Base station, 31. positioning grooves, 32. base stations go up and down hand-operated wheel, 4. hot bodies, 5. revolving platforms, 51. revolution matrixes, 52. revolutions
Driving motor, the 53. double-deck three-jaw clamp, 54. clamp hand-operated wheel, 55. clamp clips, 6. revolving platform elevating mechanisms, 61. platform liters
Motor drops, and 62. platforms go up and down hand-operated wheel, 63. upper limit switches, 64. lower position switch, 7. welding guns auxiliary heating mechanism, 71. welderings
Rifle, 72. upper fixed seats, 73. lower fixed seats, 74. elevating screws, 75. optical axis guide rails, 76. sliding platforms, 77. lead screws driving electricity
Machine, 78. struts.
Specific embodiment
Below with reference to the embodiments and with reference to the accompanying drawing the technical solutions of the present invention will be further described.
Embodiment：A kind of quartz ampoule flange welding device of the present embodiment, for heavy caliber quartz inner pipe, quartz outer tube with
The erection welding of quartz flange, as shown in Figure 1, device includes lathe bed carrying platform 1, the column being placed on lathe bed carrying platform 2
With work base station 3, work base station is located at lathe bed carrying platform front, and work base station is hollow structure, and designing on the base station that works has
Hand-operated wheel 32 is gone up and down, work base station table top is graphite material and design has positioning groove 31, and positioning groove is also covered on surface
Graphite flake, quartz flange and quartz inner pipe can be installed in respectively in above-mentioned positioning groove, positioned at the hollow structure of work base station
Lower section is provided with heater blower 4, and hot-air mouth is upward；Above-mentioned column is located at the rear portion of lathe bed carrying platform, installs on column
Having along revolving platform 5, revolving platform elevating mechanism 6 and welding gun auxiliary heating mechanism 7, the column that column moves up and down is in Π shape knot
The front of structure, including left column 21, right column 22 and crossbeam 23, left column and right column is mounted on sliding rail 24, revolving platform
It is socketed on sliding rail and is slided up and down along sliding rail, revolving platform elevating mechanism includes platform lifting motor 61, driving chain, sprocket wheel
Hand-operated wheel 62, upper limit switch 63, lower position switch 64 are gone up and down with platform, platform lifting motor is mounted on lathe bed carrying platform
On, platform lifting motor drives driving chain, and sprocket wheel is fixedly arranged in cross rail top and carrying driving chain, driving chain hang and lead
Revolving platform is drawn to move along column, platform lifting hand-operated wheel, upper limit switch and lower position switch are all set in the outer of left column
On side, upper limit switch, which is located at the top of left column lateral surface and positions revolving platform, moves up limit position, lower position switch
Positioned at left column lateral surface lower part and position revolving platform and move down extreme position；As shown in Fig. 2, revolving platform includes revolution
Matrix 51 and revolution driving motor 52, revolution driving motor driven turn round matrix rotation, turn round the centre of gyration and the work of matrix
The central coaxial of base station, design has the double-deck three-jaw clamp 53 and clamping hand-operated wheel for clamping quartz outer tube on revolution matrix
54, the clamp front end face design of the double-deck three-jaw clamp has high purity graphite clamp clip 55, and the inside of clamp clip is in globoidal structure, arc
Face structure matches with the tube wall radian of quartz outer tube, and by clamping hand-operated wheel, the graphite clamp clips of the double-deck three-jaw clamp can be with
It is bonded and clamps quartz outer tube；As shown in figure 3, welding gun auxiliary heating mechanism includes the upper fixed seat 72 of setting symmetrical above and below under
Fixing seat 73, the cunning for being placed in elevating screw 74 between the two and optical axis guide rail 75, being embedded on elevating screw and optical axis guide rail
Moving platform 76 and the screw drive motor 77 for driving elevating screw, upper fixed seat and lower fixed seat are each attached to the outside of right column
Face, sliding platform are sleeved on elevating screw and optical axis guide rail and can move up and down along elevating screw, and screw drive motor drives
Lead screw rotates and sliding platform is driven to move up and down along optical axis guide rail, and the adjustable strut of multi-angle is equipped on sliding platform
78, strut front end is equipped with welding gun 71.
In use, heavy caliber quartz outer tube is placed on the graphite table top of work base station first, keep quartz outer tube vertical
In graphite table top, then revolving platform is declined to and makes to turn round the upper end that matrix is inserted in quartz outer tube, rotation clamps hand-operated wheel, makes
The double-deck three-jaw clamp synchronous clamping quartz outer tube, then assigned work position will be moved on revolving platform.
Secondly, quartz flange and quartz inner pipe to be welded are placed in the graphite table top positioning groove of work base station,
Heater blower is opened to preheat quartz inner pipe and quartz flange.
The strut angles and positions for adjusting welding gun auxiliary heating mechanism make welding gun muzzle be directed at quartz outer tube tube wall, starting
Revolution driving motor rotates revolution matrix and quartz outer tube is driven to make rotary motion, starts lead screw driving motor, keeps sliding flat
Platform automatic lifting simultaneously drives welding gun to move back and forth, and welding gun igniting carries out flame heating.
Finally, after a period of time to be heated, revolving platform decline stops quartz outer tube lower end when dropping to welding region
Only, revolution driving motor, lead screw driving motor, heater blower and welding gun are closed, welding gun is removed, rotation base station lifting is hand
Wheel, work base station slowly rise, and contact the quartz flange on graphite table top with quartz outer tube lower end, operator can open
Begin to carry out manual welding operation.
In the description of the present invention, technical term "upper", "lower", "front", "rear", "left", "right", " vertical ", " cross ",
"inner", "outside" etc. indicate direction or positional relationship is direction based on the figure or positional relationship, are merely for convenience of describing
With understand the technical solution of the utility model, described above not to limit the utility model, the utility model is also not only
It is limited to above explained citing, the change that those skilled in the art are made in the essential scope of the utility model
Change, retrofit, increase or replace, is regarded as the protection scope of the utility model.
Claims (8)
1. a kind of quartz ampoule flange welding device, for the erection welding of heavy caliber quartz inner pipe, quartz outer tube and quartz flange,
It is characterized in that：Described device includes lathe bed carrying platform (1), the column (2) being placed on lathe bed carrying platform and work base station
(3), the work base station is set to lathe bed carrying platform front, and the table top for the base station that works is equipped with positioning groove (31), and work base
Platform lower part is equipped with hot body (4), and the column is set to lathe bed carrying platform rear portion, and column is equipped with and moves up and down along column
Revolving platform (5), revolving platform elevating mechanism (6) and welding gun auxiliary heating mechanism (7), the revolving platform are located at work base station
Top and coaxial with work base station, welding gun auxiliary heating mechanism is equipped with welding gun (71), the quartz flange and quartz
Inner tube is installed in respectively in the positioning groove of work base station, and the quartz outer tube is connected on revolving platform, quartz outer tube lower end
Portion contradicts quartz flange.
2. a kind of quartz ampoule flange welding device according to claim 1, it is characterised in that：The column (2) is in Π shape
The front of structure, including left column (21), right column (22) and crossbeam (23), the left column and right column is equipped with sliding rail
(24), the revolving platform (5) is socketed on sliding rail and slides up and down along sliding rail, and the revolving platform elevating mechanism (6) includes
Platform lifting motor (61), driving chain and sprocket wheel, the platform lifting motor is placed on the lathe bed carrying platform (1) and band
Dynamic driving chain, the sprocket wheel are placed on crossbeam and carry driving chain, and driving chain hangs and pulls revolving platform.
3. a kind of quartz ampoule flange welding device according to claim 2, it is characterised in that：The revolving platform elevator
Structure (6) further includes platform lifting hand-operated wheel (62), upper limit switch (63) and lower position switch (64), and the platform lifting is hand
Wheel, upper limit switch and lower position switch are all set on the lateral surface of left column (21), and upper limit switch is located at outside left column
The top of side and position revolving platform (5) move up limit position, lower position switch are located at the lower part of left column lateral surface and calmly
Position revolving platform moves down extreme position.
4. a kind of quartz ampoule flange welding device according to claim 1 or 2 or 3, it is characterised in that：The revolving platform
(5) revolution matrix (51) and revolution driving motor (52), the revolution driving motor driven revolution matrix rotation, revolution are equipped with
Matrix is equipped with the double-deck three-jaw clamp (53) for clamping the quartz outer tube and clamps hand-operated wheel (54).
5. a kind of quartz ampoule flange welding device according to claim 4, it is characterised in that：The bilayer three-jaw clamp
(53) clamp front end face is equipped with high purity graphite clamp clip (55), and the inside of the clamp clip is in globoidal structure, the cambered surface
Structure matches with the tube wall radian of the quartz outer tube.
6. a kind of quartz ampoule flange welding device according to claim 1, it is characterised in that：The work base station (3) is
Hollow structure, work base station table top are graphite material, are covered with graphite flake, the heat on the contact surface of the positioning groove (31)
Blower structure (4) includes heater blower, and heater blower is located at the hollow structure lower section of work base station and hot-air mouth upward.
7. a kind of quartz ampoule flange welding device according to claim 6, it is characterised in that：On the work base station (3)
It is additionally provided with base station lifting hand-operated wheel (32).
8. a kind of quartz ampoule flange welding device according to claim 2, it is characterised in that：The welding gun assists heater
Structure (7) includes the upper fixed seat (72) of setting symmetrical above and below and lower fixed seat (73), is placed in elevating screw (74) between the two
It is driven with optical axis guide rail (75), the sliding platform (76) being embedded on elevating screw and optical axis guide rail and the screw rod for driving elevating screw
Dynamic motor (77), fixed seat and lower fixed seat are set to the lateral surface of the right column (22), the sliding platform set
It is moved up and down on elevating screw and optical axis guide rail and along elevating screw, sliding platform is equipped with the adjustable strut of multi-angle
(78), the welding gun (71) is set to the front end of strut.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721827166.6U CN208136074U (en) | 2017-12-22 | 2017-12-22 | A kind of quartz ampoule flange welding device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721827166.6U CN208136074U (en) | 2017-12-22 | 2017-12-22 | A kind of quartz ampoule flange welding device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208136074U true CN208136074U (en) | 2018-11-23 |
Family
ID=64284508
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721827166.6U Expired - Fee Related CN208136074U (en) | 2017-12-22 | 2017-12-22 | A kind of quartz ampoule flange welding device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208136074U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112374733A (en) * | 2020-11-10 | 2021-02-19 | 桂林电子科技大学 | Visual high-temperature quartz heat pipe packaging device and method |
| CN116621438A (en) * | 2023-04-24 | 2023-08-22 | 浙江泓芯半导体有限公司 | Quartz fusion welding auxiliary equipment |
| CN116921940A (en) * | 2023-09-13 | 2023-10-24 | 武汉华滋东江汽车零部件有限公司 | Automatic welding equipment and method for automobile sheet metal parts |
-
2017
- 2017-12-22 CN CN201721827166.6U patent/CN208136074U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112374733A (en) * | 2020-11-10 | 2021-02-19 | 桂林电子科技大学 | Visual high-temperature quartz heat pipe packaging device and method |
| CN116621438A (en) * | 2023-04-24 | 2023-08-22 | 浙江泓芯半导体有限公司 | Quartz fusion welding auxiliary equipment |
| CN116621438B (en) * | 2023-04-24 | 2024-06-04 | 浙江泓芯半导体有限公司 | Quartz fusion welding auxiliary equipment |
| CN116921940A (en) * | 2023-09-13 | 2023-10-24 | 武汉华滋东江汽车零部件有限公司 | Automatic welding equipment and method for automobile sheet metal parts |
| CN116921940B (en) * | 2023-09-13 | 2023-12-01 | 武汉华滋东江汽车零部件有限公司 | Automatic welding equipment and method for automobile sheet metal parts |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20191213 Address after: No.19, Hongda Road, Chengdong new district, Dongtai City, Yancheng City, Jiangsu Province Patentee after: Jiangsu Fule De Quartz Technology Co.,Ltd. Address before: 310053 No. 668, No. 777, bin Kang Road, Hangzhou, Zhejiang, Binjiang District Patentee before: HANGZHOU DAHE THERMO-MAGNETICS Co.,Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20181123 |