CN208071807U - A kind of gaseous phase deposition stove for boron nitride production of articles - Google Patents
A kind of gaseous phase deposition stove for boron nitride production of articles Download PDFInfo
- Publication number
- CN208071807U CN208071807U CN201820173507.0U CN201820173507U CN208071807U CN 208071807 U CN208071807 U CN 208071807U CN 201820173507 U CN201820173507 U CN 201820173507U CN 208071807 U CN208071807 U CN 208071807U
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- China
- Prior art keywords
- furnace body
- bell
- cavity layer
- gaseous phase
- boron nitride
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Abstract
A kind of gaseous phase deposition stove for boron nitride production of articles, including tubular main furnace body, main furnace body upper and lower is respectively arranged with bell and furnace bottom, and bell is provided with exhaust outlet, furnace bottom is provided with air inlet, and air inlet side is provided with the heating electrode assembly for heating main furnace body inner cavity；Main furnace body, bell, furnace bottom wall body in be respectively arranged with and can be both provided with water inlet on main furnace body, bell, furnace bottom is provided with water outlet with the first cavity layer, the second cavity layer, third cavity layer that water filling is radiated；Bell center is provided through vertical blender, and blender includes mandrel, and set axis is provided with outside mandrel, and the tubular cavity that can be radiated with water filling is provided between mandrel and set axis, and set axis lower end is provided with end plate, sealing structure is provided between blender and bell.Cavity layer is arranged in furnace wall and carrys out water filling heat dissipation for the utility model, has good heat insulation, increases the scope of application of stove using detachable auxiliary furnace body, and highly practical, production efficiency is high.
Description
Technical field
The utility model is related to a kind of gaseous phase deposition stoves, and in particular to a kind of vapor deposition for boron nitride production of articles
Stove.
Background technology
Currently, needing to use the gaseous phase deposition stove, the principle of gaseous phase deposition stove are exactly in the technique of production boron nitride product
So that mold is rotated in furnace interior using a kind of rotational structure, is vapor-deposited under heating conditions.Due to furnace body
Interior temperature is higher so that furnace wall temperature rise, security risk can be caused, therefore, needed in the use of gaseous phase deposition stove it is heat-insulated,
However existing most of gaseous phase deposition stoves are only encased inside thermal insulation layer in inside, heat insulation is simultaneously bad, and furnace body size is solid
It is fixed, it encounters a little bigger mold and is just not suitable for, therefore, it is necessary to design a kind of gaseous phase deposition stove for boron nitride production of articles
To solve the above problems.
Invention content
To overcome above-mentioned deficiency in the prior art, the utility model aim to be to provide a kind of for the life of boron nitride product
The gaseous phase deposition stove of production.
In order to achieve the above objects and other related objects, technical solution provided by the utility model is：One kind is for nitrogenizing
The gaseous phase deposition stove of boron production of articles, including tubular main furnace body, the main furnace body upper and lower be respectively arranged with bell and
Furnace bottom, the main furnace body and the detachable setting of the furnace bottom, the bell are provided with exhaust outlet, and the furnace bottom is provided with air inlet
Mouthful, the air inlet side is provided with the heating electrode assembly for heating the main furnace body inner cavity；The main furnace body, bell,
Be respectively arranged in the wall body of furnace bottom can with the first cavity layer, the second cavity layer, third cavity layer that water filling is radiated, described first
Cavity layer, the second cavity layer, the connection of third cavity layer are arranged, and water inlet, the furnace bottom are both provided on the main furnace body, bell
It is provided with water outlet；The bell center is provided through vertical blender, and the blender includes mandrel, outside the mandrel
It is provided with set axis, is provided with the tubular cavity that can be radiated with water filling between the mandrel and the set axis, the set axis lower end is set
It is equipped with end plate, sealing structure is provided between the blender and the bell.
Preferably technical solution is：Auxiliary furnace body, the auxiliary furnace body difference are provided between the main furnace body and the furnace bottom
With the main furnace body, the detachable setting of furnace bottom.
Preferably technical solution is：The 4th cavity layer that can be radiated with water filling, institute are provided in the wall body of the auxiliary furnace body
It states the 4th cavity layer and is connected to setting with first cavity layer, third cavity layer.
Preferably technical solution is：Escape pipe is provided on the bell, the escape pipe and a pressure-detecting device connect
It connects.
Preferably technical solution is：It is both provided with observation window on the bell and the main furnace body.
Preferably technical solution is：The sealing structure is magnet fluid sealing.
Preferably technical solution is：The material of the end plate is red copper.
Since above-mentioned technical proposal is used, the utility model this have the advantage that compared with prior art：
Cavity layer is arranged in furnace wall and carrys out water filling heat dissipation for the utility model, has good heat insulation, using detachable
The auxiliary furnace body of formula increases the scope of application of stove, highly practical, and production efficiency is high.
Description of the drawings
Fig. 1 is the utility model overall schematic.
Fig. 2 is the portions A enlarged drawing.
In the figures above, main furnace body 1, bell 2, furnace bottom 3, exhaust outlet 4, air inlet 5, heating electrode assembly 6, the first cavity
Layer 7, the second cavity layer 8, third cavity layer 9, water inlet 10, water outlet 11, blender 12, mandrel 13 cover axis 14, tubular cavity
15, end plate 16, sealing structure 17, auxiliary furnace body 18, the 4th cavity layer 19, escape pipe 20, pressure-detecting device 21, observation window 22.
Specific implementation mode
Illustrate that the embodiment of the utility model, those skilled in the art can be by these by particular specific embodiment below
Content disclosed by specification understands other advantages and effect of the utility model easily.
Please refer to Fig.1 ~ Fig. 2.It should be clear that structure, ratio, size etc. depicted in this specification institute accompanying drawings, only to
Coordinate the revealed content of specification, so that those skilled in the art understands and reads, is not limited to the utility model
Enforceable qualifications, therefore do not have technical essential meaning, the modification of any structure, the change of proportionate relationship or size
Adjustment, in the case where not influencing the effect of the utility model can be generated and the purpose that can reach, should all still fall in the utility model
Revealed technology contents obtain in the range of capable of covering.Meanwhile in this specification it is cited as "upper", "lower", " left side ",
The term on " right side ", " centre " and " one " etc. is merely convenient to being illustrated for narration, rather than enforceable to limit the utility model
Range, relativeness are altered or modified, enforceable when being also considered as the utility model in the case where changing technology contents without essence
Scope.
As shown in Fig. 1 ~ Fig. 2, a kind of gaseous phase deposition stove for boron nitride production of articles, including tubular main stove
Body 1,1 upper and lower of main furnace body are respectively arranged with bell 2 and furnace bottom 3, main furnace body 1 and 3 detachable setting of furnace bottom, and bell 2 is arranged
There are exhaust outlet 4, furnace bottom 3 to be provided with air inlet 5,5 side of air inlet is provided with the heating electrode group for heating 1 inner cavity of main furnace body
Part 6；Main furnace body 1, bell 2, furnace bottom 3 wall body in be respectively arranged with the first cavity layer 7, the second cavity layer that can be radiated with water filling
8, third cavity layer 9, the first cavity layer 7, the second cavity layer 8, the connection of third cavity layer 9 are arranged, are all provided on main furnace body 1, bell 2
It is equipped with water inlet 10, furnace bottom 3 is provided with water outlet 11；2 center of bell is provided through vertical blender 12, and blender 12 wraps
Mandrel 13 is included, set axis 14 is provided with outside mandrel 13, the tubular cavity that can be radiated with water filling is provided between mandrel 13 and set axis 14
15,14 lower end of set axis is provided with end plate 16, and sealing structure 17 is provided between blender 12 and bell 2.
Preferred embodiment is：As shown in Figure 1, auxiliary furnace body 18 is provided between main furnace body 1 and furnace bottom 3, auxiliary furnace body 18
Respectively with main furnace body 1,3 detachable setting of furnace bottom；The 4th cavity that can be radiated with water filling is provided in the wall body of auxiliary furnace body 18
Layer 19, the 4th cavity layer 19 is connected to setting with the first cavity layer 7, third cavity layer 9.The same auxiliary furnace body 18 with heat sinking function
By the mounting means of detachable, the inner cavity of the present apparatus can be made to increase to adapt to the mold of bigger, expand use scope.
Preferred embodiment is：As shown in Figure 1, escape pipe 20 is provided on bell 2, escape pipe 20 and a pressure detecting
Device 21 connects.Convenient for monitoring furnace pressure, ensure safety in production.
Preferred embodiment is：As shown in Figure 1, being both provided with observation window 22 on bell 2 and main furnace body 1.Convenient for observation
Production status in stove, such as there is something special to take timely measure, and ensures that production is smoothed out.
Preferred embodiment is：Sealing structure 17 is magnet fluid sealing.Magnetic fluid can enter the entire gap in magnetic field, close
It is good to seal effect.
Preferred embodiment is：The material of end plate 16 is red copper.Red copper has preferable thermal conductivity and corrosion resistance, makes
12 heat-sinking capability of blender it is good, service life is long.
Cavity layer is arranged in furnace wall and carrys out water filling heat dissipation for the utility model, has good heat insulation, using detachable
The auxiliary furnace body of formula increases the scope of application of stove, highly practical, and production efficiency is high.
The above embodiments are only illustrative of the principle and efficacy of the utility model, new not for this practicality is limited
Type.Any person skilled in the art can all carry out above-described embodiment under the spirit and scope without prejudice to the utility model
Modifications and changes.Therefore, such as those of ordinary skill in the art without departing from the revealed essence of the utility model
All equivalent modifications completed under refreshing and technological thought or change, should be covered by the claim of the utility model.
Claims (7)
1. a kind of gaseous phase deposition stove for boron nitride production of articles, including tubular main furnace body, the main furnace body are upper and lower
Side is respectively arranged with bell and furnace bottom, it is characterised in that：The main furnace body and the detachable setting of the furnace bottom, the bell are set
It is equipped with exhaust outlet, the furnace bottom is provided with air inlet, and the air inlet side is provided with for heating the main furnace body inner cavity
Heat electrode assembly；The main furnace body, bell, furnace bottom wall body in be respectively arranged with can with the first cavity layer that water filling is radiated,
Second cavity layer, third cavity layer, first cavity layer, the second cavity layer, the connection setting of third cavity layer, the main stove
Water inlet is both provided on body, bell, the furnace bottom is provided with water outlet；The bell center is provided through vertical stirring
Device, the blender include mandrel, are provided with set axis outside the mandrel, are provided with and can note between the mandrel and the set axis
The tubular cavity of water-cooled, the set axis lower end are provided with end plate, and sealing knot is provided between the blender and the bell
Structure.
2. a kind of gaseous phase deposition stove for boron nitride production of articles according to claim 1, it is characterised in that：The master
Be provided with auxiliary furnace body between furnace body and the furnace bottom, the auxiliary furnace body respectively with the main furnace body, the detachable setting of furnace bottom.
3. a kind of gaseous phase deposition stove for boron nitride production of articles according to claim 2, it is characterised in that：It is described auxiliary
It is provided with the 4th cavity layer that can be radiated with water filling in the wall body of furnace body, the 4th cavity layer and first cavity layer, the
The connection setting of three cavity layers.
4. a kind of gaseous phase deposition stove for boron nitride production of articles according to claim 1, it is characterised in that：The stove
It covers and is provided with escape pipe, the escape pipe is connect with a pressure-detecting device.
5. a kind of gaseous phase deposition stove for boron nitride production of articles according to claim 1, it is characterised in that：The stove
It is both provided with observation window on lid and the main furnace body.
6. a kind of gaseous phase deposition stove for boron nitride production of articles according to claim 1, it is characterised in that：It is described close
Seal structure is magnet fluid sealing.
7. a kind of gaseous phase deposition stove for boron nitride production of articles according to claim 1, it is characterised in that：The end
The material of plate is red copper.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820173507.0U CN208071807U (en) | 2018-01-31 | 2018-01-31 | A kind of gaseous phase deposition stove for boron nitride production of articles |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820173507.0U CN208071807U (en) | 2018-01-31 | 2018-01-31 | A kind of gaseous phase deposition stove for boron nitride production of articles |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208071807U true CN208071807U (en) | 2018-11-09 |
Family
ID=64036833
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820173507.0U Expired - Fee Related CN208071807U (en) | 2018-01-31 | 2018-01-31 | A kind of gaseous phase deposition stove for boron nitride production of articles |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208071807U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113124683A (en) * | 2020-01-15 | 2021-07-16 | 株洲弗拉德科技有限公司 | Vacuum vapor deposition furnace with feeder |
-
2018
- 2018-01-31 CN CN201820173507.0U patent/CN208071807U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113124683A (en) * | 2020-01-15 | 2021-07-16 | 株洲弗拉德科技有限公司 | Vacuum vapor deposition furnace with feeder |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20181109 Termination date: 20220131 |
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| CF01 | Termination of patent right due to non-payment of annual fee |