CN208060555U - A kind of wireless control declines small-sized atomic force microscopy imaging device - Google Patents
A kind of wireless control declines small-sized atomic force microscopy imaging device Download PDFInfo
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- CN208060555U CN208060555U CN201820618691.5U CN201820618691U CN208060555U CN 208060555 U CN208060555 U CN 208060555U CN 201820618691 U CN201820618691 U CN 201820618691U CN 208060555 U CN208060555 U CN 208060555U
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Abstract
It declines small-sized atomic force microscopy imaging device the utility model discloses a kind of wireless control.Including microminiature atomic force micro-imaging probe, microminiature circuit, embedded system and laptop computer.Microminiature circuit is made of pre-amplifying module, scanning and feedback control circuit, mobile power；Embedded system is made of D/A module, A/D module, Raspberry Pi microcomputer, the utility model has the advantages that：Atomic force microscopy imaging probe and apparatus system entirety microminaturization, it powers without electric main, without dedicated DC low voltage power supply and DC high-voltage power supply, under mobile power power supply, pass through WIFI wireless data transmission modes, the atomic force microscopy imaging of micro-nano sample can be realized, the microscopical limitation of conventional atomic force is overcome, to realize that the atomic force microscopy imaging of sample provides new technology and application approach in the special dimensions such as investigation in the wild, isolation environment, vacuum condition, atmosphere environment.
Description
Technical field
The utility model category nanometer technique and atomic force microscopy technical field of imaging are more specifically related to a kind of wireless
Control the small-sized atomic force microscopy imaging device that declines.
Background technology
Nanometer technique and micro-nano micro-imaging technique are the research frontiers of recent domestic hot topic, and atom
The ultrahigh resolutions instrument such as force microscope (AFM) and scanning tunneling microscope (STM) is indispensable in nanometer technique field
Important tool, wherein especially more universal with the application of AFM because it is not limited by sample electric conductivity, thus physics,
The fields such as chemistry, biology, medicine, microelectronics, micromechanics and nanometer technique obtain extensive use.
Since AFM is born, the domestic and international research in relation to AFM technologies has obtained significant progress, performance also gradual perfection,
Applications of the conventional AFM in nanometer technique field is also more and more extensive.But existing conventional AFM system is in some aspects
There are apparent limitations, for example, it is desired to electric main power supply and special DC low-voltage and high voltage power supply, control system is more
It is complicated and huge, the AD&DA control cards of PCI slot or USB interface are needed, need to pass through cable between PC machine or all-in-one machine
Line and grid line connection, are investigated, the special neck such as isolation environment, vacuum condition, atmosphere environment in the wild to limit AFM
The application in domain.
In conclusion existing routine AFM method and device systems need special there is needing electric main to power
Low-voltage dc power supply and high-voltage DC power supply, need cable and grid line between computer and control circuit and AFM probes
Connection, entire AFM apparatus systems are complex and huge, can not accomplish portable, and original can not be also realized in a manner of wireless control
The limitations such as the scan control of sub- force microscope and micro-imaging, it is therefore desirable to continue to develop new AFM technologies.
The utility model proposes a kind of wireless control decline small-sized atomic force microscopy imaging method and device, using will be embedding
The method that embedded system, WIFI wireless control modules, microminiature control circuit and mobile power power supply are combined；Whole device by
Microminiature atomic force micro-imaging probe, microminiature circuit, embedded system and laptop computer composition；Atomic force microscopy imaging is visited
Head and apparatus system integrally realize microminaturization, power without electric main, without dedicated DC low voltage power supply and directly
High voltage power supply is flowed, is connected without cable and grid line between laptop computer and embedded system and control circuit, in mobile electricity
Under the power supply of source, pass through WIFI wireless data transmission modes, you can the atomic force microscopy imaging for realizing micro-nano sample overcomes
The microscopical limitation of conventional atomic force is the special necks such as investigation in the wild, isolation environment, vacuum condition, atmosphere environment
Realize that the atomic force microscopy imaging of sample provides new technology and application approach in domain.
Invention content
The purpose of the utility model is to overcome the deficiencies in the prior art, and it is aobvious to provide a kind of wireless control formula microminiature atomic force
Micro- imaging device.For while keeping nanoscale scanning accuracy, 1~100 to be realized to the sample of different sizes, different weight
The single image scanning of μ m, the image mosaic of 0.1~1mm ranges, effectively realize the micro-nano of various sizes and weight
The micro-nano scanning imagery of the high-precision of sample, a wide range of, more scan mode.The present apparatus without electric main, be not necessarily to network
Under the conditions of line connection etc., scan control for realizing atomic force microscope in a manner of wireless control and it is micro-nano it is micro- at
Picture.
The technical solution of the utility model is as follows：
A kind of wireless control decline small-sized atomic force microscopy imaging device include microminiature atomic force micro-imaging probe, it is micro-
Miniature circuit, embedded system and laptop computer；Microminiature circuit is by pre-amplifying module, scanning and feedback control circuit, shifting
Dynamic power supply composition；Embedded system is made of D/A module, A/D module, Raspberry Pi microcomputer, and Raspberry Pi microcomputer passes through
WIFI wireless communication modules realize wireless data communication with laptop computer；Pre-amplifying module with scanning with feedback control circuit,
D/A module, A/D module are connected with the position sensitive detector that microminiature atomic force micro-imaging is popped one's head in；Scanning with feedback control circuit with
The X-axis piezoelectric ceramics of microminiature atomic force micro-imaging probe, Y-axis piezoelectric ceramics, the connection of Z axis piezoelectric ceramics.
Raspberry Pi microcomputer is connect with D/A module, A/D module, and mobile power is controlled with pre-amplifying module, scanning and feedback
Circuit processed, Raspberry Pi microcomputer connect power supply with the laser that microminiature atomic force micro-imaging is popped one's head in.
Preferably, the described microminiature atomic force micro-imaging probe include microprobe, microprobe seat, sample, sample stage,
X-axis piezoelectric ceramics, Y-axis piezoelectric ceramics, Z axis piezoelectric ceramics, scanner seat, planker, guide rail, compression spring, final motion screw, laser,
Speculum, position sensitive detector, crossbeam, main piece and pedestal；
Microprobe be mounted on microprobe seat on, microprobe seat, laser be mounted on crossbeam on, speculum, position sensitive detector,
Crossbeam is mounted on main piece, and main piece is mounted on pedestal；
Sample is placed on sample stage, and sample stage is connected with X-axis piezoelectric ceramics, Y-axis piezoelectric ceramics, Z axis piezoelectric ceramics；X
Axis piezoelectric ceramics, Y-axis piezoelectric ceramics, Z axis piezoelectric ceramics are bonded on scanner seat, and scanner seat is mounted on planker, planker peace
On guide rail；Guide rail is arranged along Z-direction；Planker one end is provided with compression spring, and the other end is close to final motion screw；Final motion screw is logical
It crosses and is threadedly secured on pedestal.
Preferably, the mobile power includes two mini mobile powers and boosting piece；Mini mobile power is defeated
Go out voltage in 5V；The voltage of mini mobile power is boosted into 22V by boosting piece；And by a mini shifting after boosting
The negative output terminal of dynamic power supply is connected with the positive output end of another mini mobile power as ground terminal, thus constitute ±
The bipolar power supply of 22V.
Preferably, the X-axis piezoelectric ceramics, Y-axis piezoelectric ceramics, Z axis piezoelectric ceramics diameter be 1~2mm, length
It is 5~10mm.Further, the diameter and equal length of the X-axis piezoelectric ceramics and Y-axis piezoelectric ceramics.
The utility model has the advantages that：Atomic force microscopy imaging probe and apparatus system entirety microminaturization, without exchange
Mains-supplied, without dedicated DC low voltage power supply and DC high-voltage power supply, laptop computer and embedded system and control electricity
It connects with grid line without cable between road, under mobile power power supply, by WIFI wireless data transmission modes, realizes
The atomic force microscopy of micro-nano sample is imaged, and overcomes the microscopical limitation of conventional atomic force, for investigation, shading ring in the wild
Realize that the atomic force microscopy imaging of sample provides new application in the special dimensions such as border, vacuum condition, atmosphere environment
Diameter.
Description of the drawings
Fig. 1 is that a kind of wireless control declines small-sized atomic force microscopy imaging device schematic diagram；
Fig. 2 is the microminiature atomic force micro-imaging sonde configuration schematic diagram of the utility model；
In figure：Microminiature atomic force micro-imaging probe (1), microminiature circuit (2), embedded system (3), laptop computer
(4), microprobe (5), microprobe seat (6), sample (7), sample stage (8), X-axis piezoelectric ceramics (9), Y-axis piezoelectric ceramics (10), Z
Axis piezoelectric ceramics (11), scanner seat (12), planker (13), guide rail (14), compression spring (15), final motion screw (16), laser
(17), speculum (18), position sensitive detector (19), crossbeam (20), main piece (21) and pedestal (22), pre-amplifying module (23),
Scanning with feedback control circuit (24), mobile power (25), D/A module (26), A/D module (27), Raspberry Pi microcomputer (28),
WIFI wireless communication modules (29).
Specific implementation mode
As shown in Figure 1, a kind of wireless control declines, small-sized atomic force microscopy imaging device includes that microminiature atomic force is micro-
Imaging probe (1), microminiature circuit (2), embedded system (3) and laptop computer (4)；Microminiature circuit (2) is by preposition amplification
Module (23), scanning and feedback control circuit (24), mobile power (25) form；Embedded system (3) is by D/A module (26), AD
Module (27), Raspberry Pi microcomputer (28) composition, Raspberry Pi microcomputer (28) by WIFI wireless communication modules (29) with
Laptop computer (4) realizes wireless data communication；Pre-amplifying module (23) and scanning and feedback control circuit (24), D/A module
(26), the position sensitive detector (19) of A/D module (27) and microminiature atomic force micro-imaging probe (1) connection；Scanning is controlled with feedback
The X-axis piezoelectric ceramics (9), Y-axis piezoelectric ceramics (10), Z axis pressure of circuit (24) processed and microminiature atomic force micro-imaging probe (1)
Electroceramics (11) connects.
Raspberry Pi microcomputer (28) is connect with D/A module (26), A/D module (27), mobile power (25) and preposition amplification
Module (23), scanning and feedback control circuit (24), Raspberry Pi microcomputer (28) and microminiature atomic force micro-imaging are popped one's head in
(1) laser (17) connection power supply.
Preferably, microminiature atomic force micro-imaging probe (1) includes microprobe (5), microprobe seat (6), sample
Product (7), sample stage (8), X-axis piezoelectric ceramics (9), Y-axis piezoelectric ceramics (10), Z axis piezoelectric ceramics (11), scanner seat (12),
Planker (13), guide rail (14), compression spring (15), final motion screw (16), laser (17), speculum (18), position sensitive detector (19),
Crossbeam (20), main piece (21) and pedestal (22)；
Microprobe (5) is mounted on microprobe seat (6), and microprobe seat (6), laser (17) are mounted on crossbeam (20),
Speculum (18), position sensitive detector (19), crossbeam (20) are mounted on main piece (21), and main piece (21) are mounted on pedestal 22) on；
Sample (7) is placed on sample stage (8), sample stage (8) and X-axis piezoelectric ceramics (9), Y-axis piezoelectric ceramics (10), Z
Axis piezoelectric ceramics (11) connects；X-axis piezoelectric ceramics (9), Y-axis piezoelectric ceramics (10), Z axis piezoelectric ceramics (11) are bonded in scanner
On seat (12), scanner seat (12) is mounted on planker (13), and planker (13) is mounted on guide rail (14)；Guide rail (14) is along Z axis side
To setting；Planker (13) one end is provided with compression spring (15), and the other end is close to final motion screw (16)；Final motion screw (16) passes through screw thread
It is fixed on pedestal (22).
Preferably, the mobile power (25) includes two mini mobile powers and boosting piece；Mini mobile electricity
Source output voltage is in 5V；The voltage of mini mobile power is boosted into 22V by boosting piece；And it is one after boosting is mini
The negative output terminal of type mobile power is connected with the positive output end of another mini mobile power as ground terminal, thus constitutes
The bipolar power supply of ± 22V.
Preferably, the X-axis piezoelectric ceramics (9), Y-axis piezoelectric ceramics (10), Z axis piezoelectric ceramics (11) diameter be
1~2mm, length are 5~10mm.Further, the diameter of the X-axis piezoelectric ceramics (9) and Y-axis piezoelectric ceramics (10)
And equal length.
It declines small-sized atomic force microscopy imaging method the invention also discloses a kind of wireless control, its step are as follows：
Sample to be tested is positioned over sample stage (8)；The laser beam sent out from laser (17), after speculum (18) reflection
The back side of microprobe (5) is focused on, then after the latter is reflected, projected on position sensitive detector (19)；Scanner seat (12) is installed
On planker (13), the translational motion of Z-direction can be realized under the adjusting of final motion screw (16), to realize sample-microprobe
Between approach；When sample, microprobe are approached to when entering atomic force active state, microprobe (5) is produced because of atom force effect
Raw deflection, amount of deflection is corresponding with atomic force size, namely corresponding with the fluctuating of the micro-nano pattern of sample surfaces；This deflection
It measures after the effect of the lever amplification of laser beam, is converted into amount of movement of the hot spot on position sensitive detector (19) photosurface, works as sample
When carrying out XY scannings, position sensitive detector constantly detect the amount of movement of hot spot, be achieved in sample surface morphology it is three-dimensional it is micro- at
Picture；The scan-control voltage signal sent out by Raspberry Pi is exported, scanned and feedback control circuit by microminiature DA interfaces
(24) after voltage follower and pre-amplifying module (23), then positive amplification (V is carried out respectivelyX+) and reverse phase amplification (VX-) after,
It is applied on the positive and negative anodes of X-axis piezoelectric ceramics or Y-axis piezoelectric ceramics, realizes the scanning of corresponding direction；It is exported from position sensitive detector
Photo-signal, after pre-amplifying module (23) is converted into voltage signal, all the way pass through A/D module (27) input Raspberry Pi
Microcomputer (28), another way are input to the feedback control module of scanning and feedback control circuit (24), obtain feedback control electricity
Signal is pressed, then carries out positive amplification (V respectivelyZ+) and reverse phase amplification (VZ-) after, it is applied on the positive and negative anodes of Z axis piezoelectric ceramics, band
Dynamic sample carries out Z-direction movement, to realize the Z-direction feedback control of microprobe-sample interval；Scanning and feedback control circuit (24)
The maximum positive of output respectively reaches+21V and -21V with reverse voltage, i.e., the maximum controlling voltage difference on piezoelectric ceramics reaches 42V,
Hereby it is possible to realize scanning and the feedback control of micron dimension.
Preferably, there is the Raspberry Pi WIFI transmitting modules and IP allocation units, the Raspberry Pi to pass through WIFI
Transmitting module emits WIFI signal, gives the laptop computer (4) for being connected to WIFI signal to distribute with Raspberry Pi by IP allocation units
For the IP of gateway.
The wireless control of the utility model declines small-sized atomic force microscopy imaging method, using microminiature atomic force is micro-
The side that imaging probe, embedded system, WIFI wireless control modules, microminiature control circuit and mobile power power supply are combined
Method realizes the scan control and micro-imaging of atomic force microscope in a manner of wireless control.Introduce three 1~2mm of diameter, length
The microminiature piezoelectric ceramics of 5~10mm is spent, orthogonal bonding constitutes microminiature scanning monitor；What is sent out from microminiature laser swashs
Light beam focuses on the back side of microprobe (micro-cantilever) after speculum reflects, then after the latter is reflected, projects position sensitive detector
On；Microminiature scanning monitor is mounted on upper slide rest, can realize the translational motion of Z-direction under the adjusting of screw, to
Approaching between realization sample-microprobe；When the two approach to enter atomic force active state when, microprobe (micro-cantilever) because
Atom force effect and generate deflection, amount of deflection is corresponding with atomic force size, namely rises and falls with the micro-nano patterns of sample surfaces
It is corresponding；This amount of deflection is converted into shifting of the hot spot on position sensitive detector photosurface after the effect of the lever amplification of laser beam
Momentum, when sample carries out XY scannings under the control of microminiature scanning monitor, position sensitive detector constantly detects the movement of hot spot
Amount, is achieved in the three-dimensional microscopy of sample surface morphology.The atomic force microscopy imaging probe built in the utility model, knot
Structure is succinct, and overall dimension is only 8cm × 6cm × 5cm, and compared to conventional atomic force microscope probe, (general size is at tens of lis
Rice even bigger), accomplish portable and microminaturization.
To realize the scanning imagery of microminiature atomic force micro-imaging probe, introduce by pre-amplifying module, scanning with it is anti-
Present control circuit, the microminiature circuit that mobile power forms.Using two mini mobile power power supplies, each power supply only needs 1
18650 batteries are saved, the voltage of two power supplys is boosted to 22V by output voltage in 5V or so, by two boosting pieces, and will boosting
A negative output terminal afterwards is connected with another positive output end, as ground terminal, the thus bipolar power supply of composition ± 22V,
It powers to microminiature circuit, electric main is not necessarily to, without low pressure and high-voltage DC power supply, for the field detection environment side of providing
Just, there is fabulous portability.
Introduce the embedded system being made of Raspberry Pi microcomputer, microminiature A/D module, microminiature D/A module etc., control
The scanning of microminiature circuit and feedback.The scan-control voltage signal (by taking the voltage signal of X-direction as an example) sent out by Raspberry Pi,
It is exported by microminiature DA interfaces, after voltage follower and voltage amplifier circuit, then carries out positive amplification (V respectivelyX+) and it is anti-
Mutually amplification (VX-) after, it is applied on the positive and negative anodes of X-axis piezoelectric ceramics, realizes the scanning of X-direction；The scan control circuit of Y-direction
It is similar with X-direction.On the other hand, the photo-signal exported from position sensitive detector is converted into voltage letter through pre-amplifying module
After number, Raspberry Pi is inputted by microminiature A D interface all the way, another way is input to feedback control module, obtains feedback control voltage
Signal, then positive amplification (V is carried out respectivelyZ+) and reverse phase amplification (VZ-) after, it is applied on the positive and negative anodes of Z axis piezoelectric ceramics, drives
Sample carries out Z-direction movement, to realize the Z-direction feedback control of microprobe-sample interval.The maximum of scanning and feedback circuit output
Positive can respectively reach+21V and -21V with reverse voltage, i.e., the maximum controlling voltage difference on piezoelectric ceramics is complete accordingly up to 42V
It all can enough realize scanning and the feedback control of micron dimension.
At the same time, using WIFI wireless communication modules, the wireless data between embedded system and laptop computer is realized
Communication.Laptop computer receives WIFI signal by wireless network card, and Raspberry Pi is sent out by integrated transmitting module (Botong BCM43438)
WIFI signal is penetrated, is achieved in without the radio interconnected of LAN.Can under the wireless control of portable laptop computer,
Popped one's head in this control path by embedded system-microminiature circuit-microminiature AFM, realize the scanning of micro-nano sample with
Atomic force microscopy is imaged, and is overcome and is needed cable and net between conventional AFM system Computer and control circuit and AFM probes
The limitation of winding thread connection.
The utility model use by microminiature atomic force micro-imaging probe, embedded system, WIFI wireless control modules,
Microminiature control circuit and mobile power are powered the method being combined, and atomic force microscopy imaging probe, control circuit, embedding is realized
The microminaturization of the parts such as embedded system and portability；At the same time, using WIFI wireless control modules, embedded system is realized
Wireless data communication between laptop computer.The wireless control of the utility model decline small-sized atomic force microscopy imaging method and
Device, probe and apparatus system entirety microminaturization, power without electric main, are not necessarily to dedicated DC low voltage power supply and direct current
High voltage power supply is connected without cable with grid line, under mobile power power supply, passes through the wireless data transmission sides WIFI
Formula, you can the atomic force microscopy imaging for realizing micro-nano sample overcomes the microscopical limitation of conventional atomic force, in the wild
Realize that the atomic force microscopy imaging of sample provides in the special dimensions such as investigation, isolation environment, vacuum condition, atmosphere environment
New approach.
Claims (5)
- The small-sized atomic force microscopy imaging device 1. a kind of wireless control declines, it is characterised in that including microminiature atomic force it is micro- at As probe (1), microminiature circuit (2), embedded system (3) and laptop computer (4)；Microminiature circuit (2) is made of pre-amplifying module (23), scanning with feedback control circuit (24), mobile power (25)；Embedded system (3) is made of D/A module (26), A/D module (27), Raspberry Pi microcomputer (28), Raspberry Pi micro electric Brain (28) realizes wireless data communication by WIFI wireless communication modules (29) and laptop computer (4)；Pre-amplifying module (23) is former with feedback control circuit (24), D/A module (26), A/D module (27) and microminiature with scanning Position sensitive detector (19) connection of sub- power micro-imaging probe (1)；Scanning and the X-axis piezoelectric ceramics (9) of feedback control circuit (24) and microminiature atomic force micro-imaging probe (1), Y-axis pressure Electroceramics (10), Z axis piezoelectric ceramics (11) connection,Raspberry Pi microcomputer (28) is connect with D/A module (26), A/D module (27),Mobile power (25) and pre-amplifying module (23), scanning and feedback control circuit (24), Raspberry Pi microcomputer (28) Power supply is connected with the laser (17) of microminiature atomic force micro-imaging probe (1).
- The small-sized atomic force microscopy imaging device 2. a kind of wireless control according to claim 1 declines, it is characterised in that institute The microminiature atomic force micro-imaging probe (1) stated includes microprobe (5), microprobe seat (6), sample (7), sample stage (8), X Axis piezoelectric ceramics (9), Y-axis piezoelectric ceramics (10), Z axis piezoelectric ceramics (11), scanner seat (12), planker (13), guide rail (14), Compression spring (15), final motion screw (16), laser (17), speculum (18), position sensitive detector (19), crossbeam (20), main piece (21) With pedestal (22)；Microprobe (5) is mounted on microprobe seat (6), and microprobe seat (6), laser (17) are mounted on crossbeam (20), reflection Mirror (18), position sensitive detector (19), crossbeam (20) are mounted on main piece (21), and main piece (21) are mounted on pedestal (22)；Sample (7) is placed on sample stage (8), sample stage (8) and X-axis piezoelectric ceramics (9), Y-axis piezoelectric ceramics (10), Z axis pressure Electroceramics (11) connects；X-axis piezoelectric ceramics (9), Y-axis piezoelectric ceramics (10), Z axis piezoelectric ceramics (11) are bonded in scanner seat (12) on, scanner seat (12) is mounted on planker (13), and planker (13) is mounted on guide rail (14)；Guide rail (14) is along Z-direction Setting；Planker (13) one end is provided with compression spring (15), and the other end is close to final motion screw (16)；Final motion screw (16) is solid by screw thread It is scheduled on pedestal (22).
- The small-sized atomic force microscopy imaging device 3. a kind of wireless control according to claim 1 declines, it is characterised in that institute The mobile power (25) stated includes two mini mobile powers and boosting piece；Mini mobile power output voltage is in 5V；By The voltage of mini mobile power is boosted to 22V by boosting piece；And it is bearing for a mini mobile power after boosting is defeated Outlet is connected with the positive output end of another mini mobile power as ground terminal, and thus the bipolarity of composition ± 22V is electric Source.
- The small-sized atomic force microscopy imaging device 4. a kind of wireless control according to claim 1 declines, it is characterised in that institute The X-axis piezoelectric ceramics (9) stated, Y-axis piezoelectric ceramics (10), Z axis piezoelectric ceramics (11) diameter be 1~2mm, length be 5 ~10mm.
- The small-sized atomic force microscopy imaging device 5. a kind of wireless control according to claim 4 declines, it is characterised in that institute The diameter and equal length of the X-axis piezoelectric ceramics (9) and Y-axis piezoelectric ceramics (10) stated.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201820618691.5U CN208060555U (en) | 2018-04-27 | 2018-04-27 | A kind of wireless control declines small-sized atomic force microscopy imaging device |
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| CN201820618691.5U CN208060555U (en) | 2018-04-27 | 2018-04-27 | A kind of wireless control declines small-sized atomic force microscopy imaging device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108693384A (en) * | 2018-04-27 | 2018-10-23 | 浙江大学 | A kind of wireless control declines small-sized atomic force microscopy imaging method and device |
| CN113466495A (en) * | 2021-08-19 | 2021-10-01 | 中国科学院兰州化学物理研究所 | Ultralow-temperature high-vacuum atomic force microscope system |
-
2018
- 2018-04-27 CN CN201820618691.5U patent/CN208060555U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108693384A (en) * | 2018-04-27 | 2018-10-23 | 浙江大学 | A kind of wireless control declines small-sized atomic force microscopy imaging method and device |
| CN113466495A (en) * | 2021-08-19 | 2021-10-01 | 中国科学院兰州化学物理研究所 | Ultralow-temperature high-vacuum atomic force microscope system |
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