CN208035040U - A kind of silicon wafer clamping device and silicon wafer shear - Google Patents
A kind of silicon wafer clamping device and silicon wafer shear Download PDFInfo
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- CN208035040U CN208035040U CN201820229767.5U CN201820229767U CN208035040U CN 208035040 U CN208035040 U CN 208035040U CN 201820229767 U CN201820229767 U CN 201820229767U CN 208035040 U CN208035040 U CN 208035040U
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- silicon wafer
- voussoir
- clamping device
- idler wheel
- workbench
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Abstract
The utility model is related to a kind of silicon wafer clamping device and silicon wafer shears, including Working gantry, rolling wheel support frame, idler wheel mechanism and limit voussoir；The rolling wheel support frame includes workbench and the clamping plate for being fixed on workbench both sides, the clamping plate includes riser and the inclined plate for being fixed on riser top, the idler wheel mechanism includes multigroup roller bearing and the idler wheel for being connected to roller bearing one end, the idler wheel can be rotated around roller bearing, the other end of the roller bearing is fixed on inclined plate, idler wheel mechanism is two groups, it is located on the clamping plate of workbench both sides, the periphery of all idler wheels is in sustained height and forms V-type inclined-plane in the idler wheel mechanism, and the limit voussoir is set on riser.V-type inclined-plane is engaged silicon crystal by the present apparatus, and carries out further wedging by limit voussoir, is changed the shape of limit voussoir and is made it that can either can also be clamped to polysilicon block to silicon single crystal rod, convenient for mounting and clamping efficient, silicon wafer clamping device versatility is high.
Description
Technical field
The utility model is related to hard and brittle material cutting technology fields more particularly to a kind of silicon wafer clamping device and silicon wafer to block
Machine.
Background technology
Use for silicon wafer in photovoltaic industry is very extensive.In order to meet the mass parameter of silicon crystal bar with it is lower together with work
Shape, the size of sequence and to silicon rod carry out preparatory processing, it is indispensable in photovoltaic solar cell piece process early period
Step.From cutting technique, either long line diamond wire or ring wire saw cutting machine, for seed crystal, cylindric monocrystalline
Silicon rod, cube polysilicon block block that technological parameter requirement is all similar, therefore the cutting mechanism of equipment does not need to carry out
It is specifically designed, but the clamping of cylindric silicon single crystal rod, cube polysilicon block, then there is different operating to want clamping tooling
It asks.
In existing production technology, because the versatility of clamping tooling is poor, silicon single crystal rod or polysilicon block are cut
Disconnected work, is executed respectively using dedicated silicon wafer shear, and working efficiency and utilization rate of equipment and installations are low, and use cost is high,
The green index advocated now is not met.
Utility model content
For this reason, it may be necessary to provide a kind of silicon wafer clamping device and silicon wafer shear, answered to solve existing silicon wafer processing unit (plant)
With having a single function, utilization rate of equipment and installations is low, produces and uses problem with high costs.
To achieve the above object, inventor provide a kind of silicon wafer clamping device, the clamping device include Working gantry,
Rolling wheel support frame, idler wheel mechanism and limit voussoir；
The rolling wheel support frame includes workbench and the clamping plate for being fixed on workbench both sides, and the workbench is solid
Due on Working gantry, the clamping plate includes riser and the inclined plate for being fixed on riser top, and the idler wheel mechanism includes multigroup
Roller bearing and the idler wheel for being connected to roller bearing one end, the idler wheel can be rotated around roller bearing, and the other end of the roller bearing is fixed on inclined plate
On, the idler wheel mechanism is two groups, is located on the clamping plate of workbench both sides, and all idler wheels is outer in the idler wheel mechanism
Disc is in sustained height and forms V-type inclined-plane, and the limit voussoir is used between silicon wafer to be blocked and rolling wheel support frame
Limit clamps silicon wafer to be blocked.
As a kind of preferred structure of the utility model, the rolling wheel support frame is two-part structure, two sections of roller supportings
There are prepsetting gap between frame, the prepsetting gap, which is located at saw blade cutting machine, block on the path of work walking.
As a kind of preferred structure of the utility model, the limit voussoir is triangular prism voussoir, the triangular prism voussoir
To be multiple, multiple triangular prism voussoirs are uniformly distributed on the clamping plate for being resisted against workbench both sides.
As a kind of preferred structure of the utility model, the limit voussoir is quadrangular voussoir, the quadrangular voussoir
Section be right-angled trapezium, the quadrangular voussoir be it is multiple, multiple quadrangular voussoirs are uniformly set at workbench one
Side.
As a kind of preferred structure of the utility model, plastic pad is both provided on the workbench of the rolling wheel support frame
Piece, described be fixed on the clamping plate of workbench both sides on at least riser of side are provided with plastic cement gasket.
As a kind of preferred structure of the utility model, the plastic cement gasket being arranged on workbench is with setting on riser
Plastic spacer be mutually perpendicular to.
As a kind of preferred structure of the utility model, the axis perpendicular with the inclined-plane of inclined plate is provided on the inclined plate
The one end in hole, the roller bearing is fixed on by axis hole on inclined plate.
As a kind of preferred structure of the utility model, the idler wheel mechanism further includes roller bearing, the idler wheel and axis
Blind hole is offered on the opposite face in hole, described roller bearing one end is fixed on via roller bearing in blind hole.
As a kind of preferred structure of the utility model, the limit voussoir and idler wheel are plastic cement material.
Inventor also discloses a kind of silicon wafer shear, and the silicon wafer shear is provided with silicon wafer clamping device, the silicon
Brilliant clamping device is above-mentioned silicon wafer clamping device.
It is different from the prior art, above-mentioned technical proposal has the following advantages that：The utility model silicon wafer clamping device is by idler wheel
The periphery of all idler wheels is arranged on sustained height in mechanism, to form the V-type inclined-plane of engaging silicon crystal, passes through periphery
Point of contact silicon crystal bar supported position, then further wedging is carried out by limit voussoir, changing the shape of limit voussoir makes it can
Enough also to be clamped to polysilicon block to silicon single crystal rod, convenient for mounting and clamping efficient, silicon wafer clamping device versatility is high, equipment utilization
Rate is high.
Description of the drawings
Fig. 1 is the main structure diagram of the present embodiment silicon wafer gripping apparatus grips silicon single crystal rod；
Fig. 2 is the overlooking structure diagram of the present embodiment silicon wafer gripping apparatus grips silicon single crystal rod；
Fig. 3 is the main structure diagram of the present embodiment silicon wafer gripping apparatus grips polysilicon block；
Fig. 4 is the overlooking structure diagram of the present embodiment silicon wafer gripping apparatus grips polysilicon block；
Fig. 5 is that the front view structure of the present embodiment silicon wafer shear is illustrated.
Reference sign：
1, Working gantry；
2, rolling wheel support frame；21, workbench；221, riser；222, inclined plate；
3, idler wheel mechanism；31, roller bearing；32, idler wheel；
4, voussoir is limited；
5, prepsetting gap；
6, plastic cement gasket；
7, silicon single crystal rod；
8, polysilicon block；
9, saw blade cutting machine；
10, elevating mechanism.
Specific implementation mode
For the technology contents of technical solution, construction feature, the objects and the effects are described in detail, below in conjunction with specific reality
It applies example and attached drawing is coordinated to be explained in detail.
It please refers to Fig.1 to Fig. 5, the utility model provides a kind of silicon wafer clamping device, and the clamping device includes work
Rack 1, rolling wheel support frame 2, idler wheel mechanism 3 and limit voussoir 4；
The rolling wheel support frame 2 includes workbench 21 and the clamping plate for being fixed on 21 both sides of workbench, the work
Platform 21 is fixed on Working gantry 1, and the clamping plate includes riser 221 and the inclined plate 222 for being fixed on 221 top of riser, institute
It includes multigroup roller bearing 31 and the idler wheel 32 for being connected to 31 one end of roller bearing to state idler wheel mechanism 3, and the idler wheel 32 can be 31 turns around roller bearing
Dynamic, the other end of the roller bearing 31 is fixed on inclined plate 222, and the idler wheel mechanism 3 is two groups, is located at 21 liang of workbench
On the clamping plate of side, the periphery of all idler wheels 32 is in sustained height and forms V-type inclined-plane, the limit in the idler wheel mechanism 3
Position voussoir 4 clamps silicon wafer to be blocked, the limit voussoir one between silicon wafer to be blocked and rolling wheel support frame 2, for limiting
Side and clamping plate against, side and silicon wafer to be blocked against.
In the present embodiment, the Working gantry 1 is the supporting rack of entire silicon wafer clamping device, for carrying fixed idler whell
Supporting rack 2, idler wheel mechanism 3 and limit voussoir 4.The rolling wheel support frame 2 is mainly used for the support fixed mechanism of silicon crystal bar, institute
State carrying platform of the workbench 21 as silicon crystal bar downside.On the one hand the clamping plate is used as idler wheel mechanism 3 in the present apparatus
Installation carry plate face, it is preferred that the clamping plate includes riser 221 and inclined plate 222, and roller machine is provided on the inclined plate 222
Structure 3 so that the periphery of all idler wheels 32 is in sustained height and forms a V-type inclined-plane, the V-type in the idler wheel mechanism 3
Inclined-plane then acts on 7 clamping face of silicon single crystal rod, and single silicon rod is absorbed in V-type inclined-plane under the action of its own gravity, specifically by monocrystalline
Several point of contacts support positioning formed between 32 periphery of silicon rod 7 and idler wheel；The riser 221 of the clamping plate is then as clamping polycrystalline
8 side of silico briquette further, is also set up against plane to the progress of 8 side of polysilicon block against limit on the riser 221
There is limit voussoir 4, the limit voussoir 4 is between silicon wafer to be blocked and rolling wheel support frame 2, to provide further Wedge Pressure
Power so that silicon crystal bar clamping to be blocked more fastens.Compatible limit voussoir is selected according to the shape of silicon crystal bar to be processed
4, so that it is simply realized very much the switching of silicon single crystal rod 7 and 8 clamping of polysilicon block, prevents from jail being clamped in silicon crystal bar completely
Gu so that the silicon crystal bar blocked has defect, often because subtle displacement occurs " wavy surface, face injustice " and " chipping "
Problem.The utility model is more convenient using the mobile feeding for the V-type inclined-plane silicon crystal bar that 32 periphery of idler wheel is formed, silicon crystal bar
It blocks simpler.
The periphery of all idler wheels in idler wheel mechanism is arranged on sustained height by the utility model silicon wafer clamping device,
To form the V-type inclined-plane of engaging silicon crystal, silicon crystal bar is supported by the point of contact of periphery and is positioned, then by limit voussoir into traveling
One step wedging, changing the shape of limit voussoir makes it that can either can also be clamped to polysilicon block to silicon single crystal rod, convenient for mounting and clamping
Efficient, silicon wafer clamping device versatility is high, and utilization rate of equipment and installations is high.
Such as Fig. 2 and Fig. 4, as a kind of preferred embodiment of the utility model, the rolling wheel support frame 2 is two-part knot
Structure, there are prepsetting gap 5 between two sections of rolling wheel support frames 2, the prepsetting gap 5, which is located at saw blade cutting machine 9, to carry out blocking work
On the path of walking.Rolling wheel support frame 2 is arranged to above structure, in actual operation, more convenient 9 structure pair of saw blade cutting machine
It is completely cut off and improve cut-off efficiency, if whether 32 holder of idler wheel is that one-part form structure is so just bad holds silicon crystal bar to be blocked
It is completely cut off, and in truncated process also need ensure cannot cut on the workbench 21 of rolling wheel support frame 2, accuracy compared with
Hardly possible is held.
It please refers to Fig.1 and Fig. 2, as a kind of preferred structure of the utility model, the limit voussoir is triangular prism voussoir,
The triangular prism voussoir is multiple, and multiple triangular prism voussoirs are uniformly distributed on the clamping plate for being resisted against workbench both sides.Monocrystalline silicon
Stick 7 is mostly cylindric, and the wedging of triangular prism voussoir will not change the V-arrangement inclined-plane that rolling wheel support frame 2 is formed with idler wheel mechanism 3,
The one side of the triangular prism voussoir also component part as V-arrangement inclined-plane, to be fixed to silicon single crystal rod 7 providing wedging oppressive force.
Silicon single crystal rod 7 is after the placement of the upper opening on V-arrangement inclined-plane, and the periphery and V-arrangement inclined-plane of silicon single crystal rod 7 are tangent, to limit list
The degree of freedom of crystalline silicon rod 7 completes the positioning of silicon single crystal rod 7.Preferably, the inclined-plane of the triangular prism voussoir is towards silicon single crystal rod
7, optimal, the triangular prism voussoir is straight triangular prism, and silicon single crystal rod and idler wheel branch are wedged in the inclined-plane of the triangular prism voussoir
Between support 42, the locking of silicon single crystal rod is completed.Wherein the length of idler wheel 32 is substantially exactly the length of the supporting surface of silicon crystal bar,
As long as ensureing enough 32 length of idler wheel, so that it may with clamping from 6 inches to 18 inch etc. plurality of specifications silicon single crystal rod 7.Scroll saw
9 structure of cutting machine is wedged after the completion of carrying out tool setting position determination to silicon single crystal rod 7 between silicon single crystal rod 7 and rolling wheel support frame 2
Several triangular prism voussoirs further fix silicon single crystal rod 7, the frictional force and triangular prism voussoir generated in the dead weight of silicon single crystal rod 7
It completes to clamp work under the action of wedging force, clamping is stable and firm.
Fig. 3 and Fig. 4 are please referred to, as a kind of preferred structure of the present invention, the limit voussoir 4 is quadrangular voussoir, institute
The section for stating quadrangular voussoir is right-angled trapezium, and the quadrangular voussoir is multiple, and multiple quadrangular voussoirs are uniformly distributed setting
In 21 side of workbench.In this embodiment quadrangular voussoir, and quadrangular are added between the clamping plate of 2 both sides of rolling wheel support frame
The section of voussoir is right-angled trapezium, and the inclined-plane of the quadrangular voussoir is adapted with clamping plate inclined-plane, by the inclined-plane of quadrangular voussoir
It wedges between polysilicon block and the clamping plate of roller support, the right-angle surface adjacent with quadrangular voussoir inclined-plane is supported with polysilicon block
It leans on, and the right-angle surface is vertical with workbench.In the present embodiment quadrangular wedge is added between the clamping plate of 2 both sides of rolling wheel support frame
Block so that one of V-arrangement inclined-plane of silicon crystal bar folder face is clamped, complanation is completed by inclined-plane, cooperation other side clamping plate erects
Plate 221 and then the polysilicon block 8 that constant cross-section is rectangle, realize silicon single crystal rod 7 and the clamping of polysilicon block 8 switches, and
Section is right-angled trapezium quadrangular voussoir simple shape, and production cost is low, easy to implement.Saw blade cutting machine 9 is to polysilicon block 8
After the completion of carrying out tool setting position determination, several quadrangular voussoirs are wedged between polysilicon block 8 and rolling wheel support frame 2, in wedge
It completes to clamp work under the action of 8 its own gravity of clamp force and polysilicon block.
It please refers to Fig.1 to Fig.4, as a kind of preferred structure of the utility model, the workbench of the rolling wheel support frame 2
It is both provided with plastic cement gasket 6 on 21, is set on the riser 221 for being fixed at least side on the clamping plate of 21 both sides of workbench
It is equipped with plastic cement gasket 6.The effect of the plastic cement gasket 6 is to prevent roller support from causing the quality caused by silicon wafer material
It influences, because silicon wafer and ferrous material are in direct contact, ferrous material, which very likely carries, contains magnetic conductive substance, leads to silicon chip magnetic
The complication of field edge effect to influence the quality of battery, but also can prevent silicon wafer material surface from being scratched.It is described perpendicular
The plastic cement gasket 6 being arranged on plate 221 when silicon crystal bar mainly in clamping to playing protective action, because columned monocrystalline is clamped
When silicon rod 7, barred body will not be in contact with riser 221, and when fixing polysilicon block 8, side can by L-shaped voussoir against protection,
Therefore plastic cement gasket 6 is provided on the riser 221 that can there was only side on the clamping plate of 21 both sides of workbench.Preferably, setting exists
Plastic cement gasket 6 on workbench 21 is mutually perpendicular to the plastic spacer being arranged on riser 221.
As in a kind of preferred embodiment of the utility model, the inclined-plane phase with inclined plate 222 is provided on the inclined plate 222
One end of vertical axis hole, the roller bearing 31 is fixed on by axis hole on inclined plate 222.The fixation of above-mentioned roller bearing 31 and inclined plate 222
Mode is simple, is readily disassembled, and certain roller bearing 31 can be also directly welded on inclined plate 222.
As a kind of preferred structure of the utility model, the idler wheel mechanism 3 further includes roller bearing, the idler wheel 32 with
Blind hole is offered on the opposite face of axis hole, 31 one end of the roller bearing is fixed on via roller bearing in blind hole.Using blind hole structure,
It can make screen bearing of the idler wheel 32 as umbrella, avoid and cooling cold cut water is carried out to 9 structure of saw blade cutting machine wash away to bearing
Infringement, need not move through special designing, while will not increase use cost, degree of protection has but obtained significant increase.
In preferred embodiment, the limit voussoir 4 and idler wheel 32 are plastic cement material.It is disposed as plastic cement with upper-part
Material, can also save the operation for installing crystal pad additional between silicon crystal bar and each clamping device, and operation is more simple.
Referring to Fig. 5, the invention also discloses a kind of silicon wafer shear, the silicon wafer shear is provided with silicon wafer folder
Device is held, the silicon wafer clamping device is above-mentioned silicon wafer clamping device.The silicon wafer shear further includes saw blade cutting machine
9, the saw blade cutting machine 9 is located at the top of silicon wafer clamping device, saw blade cutting machine 9 via elevating mechanism 10 lifting or decline
Saw blade cutting machine 9 is driven to block silicon wafer to be processed.The elevating mechanism 10 can be linear motor, cylinder etc..It is preferred that
, it is ring wire saw cutting machine in saw blade cutting machine 9 of the present invention, ring wire saw cutting machine is existing mature equipment, in this practicality
It is not being repeated specifically in novel.
It should be noted that although the various embodiments described above have been described herein, it is not intended to limit
The scope of patent protection of the utility model.Therefore, the innovative idea based on the utility model carries out embodiment described herein
Change and modification or equivalent structure or equivalent flow shift made based on the specification and figures of the utility model, directly
Or above technical scheme is used in other related technical areas indirectly, it is included in the patent protection model of the utility model
Within enclosing.
Claims (10)
1. a kind of silicon wafer clamping device, which is characterized in that the clamping device includes Working gantry, rolling wheel support frame, roller machine
Structure and limit voussoir；
The rolling wheel support frame includes workbench and the clamping plate for being fixed on workbench both sides, and the workbench is fixed on
On Working gantry, the clamping plate includes riser and the inclined plate for being fixed on riser top, and the idler wheel mechanism includes multigroup roller bearing
And it is connected to the idler wheel of roller bearing one end, the idler wheel can be rotated around roller bearing, and the other end of the roller bearing is fixed on inclined plate, institute
It is two groups to state idler wheel mechanism, is located on the clamping plate of workbench both sides, the periphery of all idler wheels in the idler wheel mechanism
It is in sustained height and forms V-type inclined-plane, the limit voussoir is between silicon wafer to be blocked and rolling wheel support frame, for limiting
Clamp silicon wafer to be blocked.
2. silicon wafer clamping device according to claim 1, which is characterized in that the rolling wheel support frame is two-part structure,
There are prepsetting gap between two sections of rolling wheel support frames, the prepsetting gap is located at the road that saw blade cutting machine block work walking
On diameter.
3. silicon wafer clamping device according to claim 2, which is characterized in that the limit voussoir is triangular prism voussoir, institute
It is multiple to state triangular prism voussoir, and multiple triangular prism voussoirs are uniformly distributed on the clamping plate for being resisted against workbench both sides.
4. silicon wafer clamping device according to claim 2, which is characterized in that the limit voussoir is quadrangular voussoir, institute
The section for stating quadrangular voussoir is right-angled trapezium, and the quadrangular voussoir is multiple, and multiple quadrangular voussoirs are uniformly distributed setting
In workbench side.
5. silicon wafer clamping device according to claim 1, which is characterized in that on the workbench of the rolling wheel support frame
It is provided with plastic cement gasket, described be fixed on the clamping plate of workbench both sides on at least riser of side is provided with plastic pad
Piece.
6. silicon wafer clamping device according to claim 5, which is characterized in that the plastic cement gasket that is arranged on workbench with
The plastic spacer being arranged on riser is mutually perpendicular to.
7. silicon wafer clamping device according to claim 1, which is characterized in that be provided with the inclined-plane with inclined plate on the inclined plate
One end of perpendicular axis hole, the roller bearing is fixed on by axis hole on inclined plate.
8. silicon wafer clamping device according to claim 7, which is characterized in that the idler wheel mechanism further includes roller bearing,
Blind hole is offered on the idler wheel face opposite with axis hole, described roller bearing one end is fixed on via roller bearing in blind hole.
9. silicon wafer clamping device according to claim 1, which is characterized in that the limit voussoir and idler wheel are plastic cement material
Matter.
10. a kind of silicon wafer shear, the silicon wafer shear is provided with silicon wafer clamping device, which is characterized in that the silicon wafer folder
It is silicon wafer clamping device described in any one of claim 1-9 to hold device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820229767.5U CN208035040U (en) | 2018-02-09 | 2018-02-09 | A kind of silicon wafer clamping device and silicon wafer shear |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820229767.5U CN208035040U (en) | 2018-02-09 | 2018-02-09 | A kind of silicon wafer clamping device and silicon wafer shear |
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| Publication Number | Publication Date |
|---|---|
| CN208035040U true CN208035040U (en) | 2018-11-02 |
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ID=63952672
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| CN201820229767.5U Active CN208035040U (en) | 2018-02-09 | 2018-02-09 | A kind of silicon wafer clamping device and silicon wafer shear |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110775341A (en) * | 2019-11-29 | 2020-02-11 | 湖南省怀化市鸿华电子科技有限公司 | Plate feeding and discharging positioning device for plate laminating production line |
-
2018
- 2018-02-09 CN CN201820229767.5U patent/CN208035040U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110775341A (en) * | 2019-11-29 | 2020-02-11 | 湖南省怀化市鸿华电子科技有限公司 | Plate feeding and discharging positioning device for plate laminating production line |
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