CN208034278U - A kind of burnishing device of freeform optics surface - Google Patents
A kind of burnishing device of freeform optics surface Download PDFInfo
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- CN208034278U CN208034278U CN201820385486.9U CN201820385486U CN208034278U CN 208034278 U CN208034278 U CN 208034278U CN 201820385486 U CN201820385486 U CN 201820385486U CN 208034278 U CN208034278 U CN 208034278U
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- vibropolish
- head
- burnishing device
- control system
- polish pressure
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- 239000012530 fluid Substances 0.000 claims description 5
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- 230000008901 benefit Effects 0.000 abstract description 4
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- 238000002474 experimental method Methods 0.000 description 4
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- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
A kind of burnishing device of freeform optics surface belongs to optics manufacturing field, which includes vibropolish head, control system, PC machine, five-shaft numerical control platform, polish pressure control mechanism.Control system, PC machine are located at movable working platform upper and lower, and the driver in control system is connect with vibropolish head, and digital control system and five-shaft numerical control Platform communication, controller are connect with polish pressure control mechanism；PC machine is connect with control system, is reached control system after being set to burnishing parameters, is controlled entire burnishing device；Micro-displacement Driving device in polish pressure control mechanism is connect with rubbing head.The utility model is using vibration auxiliary polishing mode, for continuous surface such as axial symmetry and off-axis aspheric surface, it can be realized simultaneously accurately controlling in real time to rubbing head mode of vibration, polishing locus and polish pressure, submicron order surface figure accuracy and Subnano-class surface roughness can be reached, burnishing device has many advantages, such as the system integration, small, conveniently moving.
Description
Technical field
The utility model belongs to optics manufacturing field, is related to a kind of burnishing device of freeform optics surface.
Background technology
Freeform optics surface is that a kind of special free form surface can be to greatest extent due to its completely new optical design theory
Ground improves Performance of Optical System, such as aberration correction, improvement image quality, expansion visual field, while can optimize optical system, such as mitigates
Weight, reduce volume, reduce cost etc., be optical system of new generation core key device (Fang FZ, Zhang XD,
Weckenmann A,Zhang GX,Evans C.Manufacturing and measurement of freeform
optics.CIRP Annals 2013；62:823-846.).
It is directly to process for a kind of method of the manufacture of freeform optics surface, a kind of method is replicated by mold.
The method replicated by mold can obtain higher efficiency and product stability, to effectively meet practical need
It wants.Being molded mould therefor and needing to meet has the performances such as excellent calorific intensity, thermostabilization and heat fatigue at high temperature, generally by having
There is high intensity, high rigidity, high brittle hard alloy is made, such as tungsten carbide (WC), silicon carbide (SiC) or chemical nickel phosphorus plating
Alloy (NiP) etc..
Since freeform optics surface needs have the micron even machining accuracy and nanometer of submicron order even Subnano-class
Surface roughness, in order to obtain the surface of high quality, be usually used ultra-precision machine tool mold is cut or is ground plus
Work.Although both methods can effectively improve mold shape precision and processing efficiency, but can be made due to cutting or being ground
At surface and sub-surface damage, make the surface after processing there are periodic cut, these damages and cut can be with being molded
Journey be copied to optical element surface so as to cause reduce optical property (such as damage reduces the surface quality of optical element,
Periodic cut can cause optical element that diffraction effect occurs in use).With in practical application to microminiature light
The continuous improvement of element optical performance requirements is learned, current processing method is gradually difficult to meet this actual demand.
In this case, an additional polishing process becomes essential.In polishing process, due to material by with
Elasticity or plastic manner removal, surface and sub-surface damage caused by cutting or grinding and periodical cut will be by
It eliminates, obtains having the mold of excellent surface quality (low surface roughness and almost without sub-surface damage).In addition, by effective
Material removing rate is controlled, the form accuracy of die surface can also be further enhanced.However, with the size of optical device
More become smaller, especially concave surface face shape, polishing process becomes to be increasingly difficult to carry out, so that the throwing of micro-optics free form surface
Light becomes material processing field one of project urgently to be resolved hurrily.Currently, although magnetic rheological polishing method has been used for free form surface
Polishing, but it is still relatively difficult for the surface of microsize and complex topography.A kind of (Magnetorheological Polishing of mold freedom curved surface
Method, Application Number (patent)：CN201010573053.4).Therefore, those skilled in the art is dedicated to developing a kind of new light
Learn the polishing method of free form surface.
Utility model content
In view of the foregoing defects the prior art has, the utility model provides a kind of vibration throwing of micro-optics free form surface
Electro-optical device, to produce the quality optical surfaces with submicron order surface figure accuracy and Subnano-class surface roughness.
In order to achieve the above object, the technical solution adopted in the utility model is：
A kind of vibropolish device of micro-optics free form surface, which includes vibropolish head 1, small
Freeform optics surface 3, control system 5, PC machine 6, five-shaft numerical control platform 7, polish pressure control mechanism 8.
The control system 5 is located at 4 top of movable working platform, including driver, digital control system, controller；Driving
Device is connect with vibropolish head 1, for applying vibration signal to vibropolish head；Digital control system is connect with five-shaft numerical control platform 7
It is communicated, for driving five-shaft numerical control platform 7；Controller is connect with polish pressure control mechanism 8, is pressed for realizing to polishing
The closed-loop control of power control mechanism.
The PC machine 6 is located at 4 top of movable working platform, is connect with control system 5, PC machine 6 carries out burnishing parameters
It is sent to control system 5 after setting, passes through the entire burnishing device of 5 drive control of control system.
The vibropolish head 1 is by the piezoceramic material that can generate high-frequency vibration or super Magnetostrictive material system
At.Vibropolish head 1 can be unsymmetric structure, can more effectively be suitble to the polishing with Microstructure Optics mold, and shake
Dynamic rubbing head 1 can generate two-dimentional (2D) oscillation trajectory, the surface roughness of mold effectively be reduced, using the supply of free abrasive grain
Mode can be finally reached Subnano-class surface roughness.
The five-shaft numerical control platform 7 disclosure satisfy that the needs of arbitrary free form surface polishing, be located on movable working platform 4
Side, including X-axis, Y-axis, Z axis, B axle and C axis.Wherein, each axis moving range of X, Y, Z is respectively to be not less than 20mm, 20mm, 10mm,
Resolution ratio is 0.1 μm.B axle angle rotating range is ± 90 ゜, and resolution ratio is 0.001 ゜；The range of speeds of C axis is per minute
20-200 turns.
Micro-displacement Driving device in the polish pressure control mechanism 8 is connect with rubbing head 1, and rubbing head 1 is vertically set
It sets, and is contacted with micro-optics free form surface 3, Micro-displacement Driving device passes through the micron order to 1 position of vertical direction rubbing head
Change to realize the minor adjustment to polish pressure.Polish pressure control mechanism 8 by its internal Micro-displacement Driving device with
Effective combination of force snesor and closed loop feedback control realization accurately control polish pressure.
The vibropolish device can also add polishing fluid 2, the vibropolish of cooperation vibropolish head 1.
The method that vibropolish is carried out to freeform optics surface using above-mentioned vibropolish device, the vibropolish method needle
Microminiature freeform optics surface to caliber size at several millimeters to tens millimeters, the microminiature freeform optics surface have continuous
The big face shape of surface-axial symmetry and off-axis aspheric surface, especially concave surface and inclination angle is processed, and may be implemented in a small range
Rapidoprint is efficiently removed and obtains super-smooth surface.Specifically include following steps：
The first step calculates the residence time of rubbing head polishing locus and rubbing head surface form error repairing according to free-curved-surface shape.
Second step polishes starting point in conjunction with burnishing device configuration settings, selects rubbing head mode of vibration and setting polishing pressure
Power.
Third walks, and is polished experiment, wherein polishing mode is divided into following three kinds, three kinds of modes are by polish pressure
Accurately controlling for material removal amount is realized with accurately controlling for residence time, and three kinds of modes are specially：
(1) (tilting) is swung to micro-optics free form surface 3 using the B axle of five-shaft numerical control platform 7 and C axis, is made
Vibropolish head 1 is located at the normal vector direction of micro-optics free form surface 3.Polish pressure F is kept constant in polishing process.
(2) the profile contacts micro-optics free form surface 3 for utilizing vibropolish head 1 judges vibropolish head 1 and freely song
The contact position in face 3, polish pressure are adjusted according to the slope variation of contact point.The contour accuracy of vibropolish head 1 is wanted
Ask high.Advantage is the influence that can reduce rubbing head abrasion to material removing rate.
(3) effectively combination (1) and (2) is realized to the polishing to the big face shape in concave surface and inclination angle.
4th step completes polishing experiments, measures free-curved-surface shape and roughness；Terminate.
The beneficial effects of the utility model are：
Desktop type vibropolish device provided by the utility model tool has the system integration, small there are five degree of freedom,
The advantages that conveniently moving.The vibration that the utility model uses assists polishing mode, for caliber size at several millimeters to tens millis
The microminiature freeform optics surface (for continuous surface-axial symmetry and off-axis aspheric surface) of rice, can be realized simultaneously to rubbing head
Accurately controlling in real time for mode of vibration, polishing locus and polish pressure, can reach submicron order surface precision and sub-nanometer
Grade surface roughness, so as to the small aspherics mold for effectively meeting bore 1-10mm, allowable angle of inclination is 70 degree
Polishing demand.
Description of the drawings
Fig. 1 is that free form surface polishes schematic diagram；F indicates polish pressure；
Fig. 2 is that workpiece swings polishing mode figure；A is the tangent vector of contact point；
Fig. 3 is that rubbing head moves polishing mode figure；
Fig. 4 is vibropolish schematic device；
Fig. 5 is the system control principle drawing of vibropolish device；
In figure：1 vibropolish head；2 polishing fluids；3 micro-optics free form surfaces；4 movable working platforms；5 control systems；
6PC machines；7 five-shaft numerical control platforms；8 polish pressure control mechanisms.
Specific implementation mode
The utility model is described further below in conjunction with attached drawing.
A kind of vibropolish device of micro-optics free form surface, which includes vibropolish head 1, small
Freeform optics surface 3, control system 5, PC machine 6, five-shaft numerical control platform 7, polish pressure control mechanism 8.
Control system 5 is located at 4 top of movable working platform, including driver, digital control system, controller；Driver with shake
Dynamic rubbing head 1 connects, and digital control system connect with five-shaft numerical control platform 7 and communicated, and controller connects with polish pressure control mechanism 8
It connects.PC machine 6 is located at 4 top of movable working platform, is connect with control system 5, PC machine 6 is sent to after being set to burnishing parameters
Control system 5, and then the entire burnishing device of drive control.Vibropolish head 1 is unsymmetric structure, and vibropolish head 1 can
Two-dimentional (2D) oscillation trajectory is generated, Subnano-class surface roughness is reached using the supply mode of free abrasive grain.Five-shaft numerical control is flat
Platform 7 disclosure satisfy that the needs of arbitrary free form surface polishing, be located at 4 top of movable working platform, including X-axis, Y-axis, Z axis, B axle and
C axis.Wherein, each axis moving range of X, Y, Z is respectively to be not less than 20mm, 20mm and 10mm, and resolution ratio is 0.1 μm.B axle angle
Rotating range is ± 90 ゜, and resolution ratio is 0.001 ゜；The range of speeds of C axis turns in 20-200 per minute.Polish pressure control mechanism
Micro-displacement Driving device in 8 is connect with rubbing head 1, and rubbing head 1 is vertically arranged, and is contacted with micro-optics free form surface 3, micro-
Displacement drive device changes to realize the minor adjustment to polish pressure by the micron order to 1 position of vertical direction rubbing head.
The method for carrying out vibropolish to freeform optics surface using above-mentioned vibropolish device, this includes the following steps：
The first step calculates the residence time of rubbing head polishing locus and rubbing head surface form error repairing according to free-curved-surface shape.
Second step polishes starting point in conjunction with burnishing device configuration settings, selects rubbing head mode of vibration and setting polishing pressure
Power.
Third walks, and is polished experiment, wherein the mode of polishing is divided into following two, two ways is by polish pressure
Accurately controlling for material removal amount is realized with accurately controlling for residence time, and three kinds of modes are specially：
(1) (tilting) is swung to micro-optics free form surface 3 using the B axle of five-shaft numerical control platform 7 and C axis, is made
Vibropolish head 1 is located at the normal vector direction of micro-optics free form surface 3.Polish pressure F is kept constant in polishing process.
(2) the profile contacts micro-optics free form surface 3 for utilizing vibropolish head 1 judges vibropolish head 1 and freely song
The contact position in face 3, polish pressure are adjusted according to the slope variation of contact point.The contour accuracy of vibropolish head 1 is wanted
Ask high.Advantage is the influence that can reduce rubbing head abrasion to material removing rate.
(3) comprehensive method (1) and (2) are realized to the polishing to the big face shape in concave surface and inclination angle.4th step completes polishing
Experiment measures free-curved-surface shape and roughness；Terminate.
The embodiment of the utility model above described embodiment only expresses, but can not therefore be interpreted as to this reality
With the limitation of the range of new patent, it is noted that for those skilled in the art, do not departing from the utility model structure
Under the premise of think of, various modifications and improvements can be made, these belong to the scope of protection of the utility model.
Claims (8)
1. a kind of burnishing device of freeform optics surface, which is characterized in that the burnishing device include vibropolish head (1),
Micro-optics free form surface (3), movable working platform (4), control system (5), PC machine (6), five-shaft numerical control platform (7), polishing
Pressure control mechanism (8)；
The control system (5) is located above movable working platform (4), including driver, digital control system, controller；Driving
Device is connect with vibropolish head (1), for applying vibration signal to vibropolish head；Digital control system and five-shaft numerical control platform (7)
Connection is communicated, for driving five-shaft numerical control platform (7)；Controller is connect with polish pressure control mechanism (8), for realizing
Closed-loop control to polish pressure control mechanism (8)；
The PC machine (6) is located above movable working platform (4), is connect with control system (5), PC machine (6) is to burnishing parameters
Send control system (5), and then the entire burnishing device of drive control after being set to；
The five-shaft numerical control platform (7) disclosure satisfy that the needs of arbitrary free form surface polishing, be located on movable working platform (4)
Side, including X-axis, Y-axis, Z axis, B axle and C axis；
Micro-displacement Driving device in the polish pressure control mechanism (8) is connect with vibropolish head (1), vibropolish head
(1) it is vertically arranged, and is contacted with micro-optics free form surface (3), Micro-displacement Driving device passes through to vertical direction vibropolish
The micron order of head (1) position changes to realize the minor adjustment to polish pressure；Polish pressure control mechanism (8) is by inside it
Micro-displacement Driving device and force snesor combination and closed loop feedback control realization polish pressure is accurately controlled.
2. a kind of burnishing device of freeform optics surface according to claim 1, which is characterized in that the five-shaft numerical control
In platform (7), each axis moving range of X, Y, Z is respectively to be not less than 20mm, 20mm, 10mm, and resolution ratio is 0.1 μm；B axle angle
Rotating range is ± 90 ゜, resolution ratio is 0.001 ゜；The range of speeds of C axis turns in 20-200 per minute.
3. a kind of burnishing device of freeform optics surface according to claim 1 or 2, which is characterized in that the vibration
Rubbing head (1) is unsymmetric structure, and vibropolish head (1) can generate two-dimension vibration track, and the surface for effectively reducing mold is thick
Rugosity reaches Subnano-class surface roughness using the supply mode of free abrasive grain.
4. a kind of burnishing device of freeform optics surface according to claim 1 or 2, which is characterized in that the vibration
Rubbing head (1) is made of the piezoceramic material or super Magnetostrictive material that can generate high-frequency vibration.
5. a kind of burnishing device of freeform optics surface according to claim 3, which is characterized in that the vibropolish
Head (1) is made of the piezoceramic material or super Magnetostrictive material that can generate high-frequency vibration.
6. a kind of burnishing device of freeform optics surface according to claims 1 or 2 or 5, which is characterized in that the throwing
Electro-optical device can also add polishing fluid (2), the vibropolish of cooperation vibropolish head (1).
7. a kind of burnishing device of freeform optics surface according to claim 3, which is characterized in that the burnishing device
Polishing fluid (2), the vibropolish of cooperation vibropolish head (1) can also be added.
8. a kind of burnishing device of freeform optics surface according to claim 4, which is characterized in that the burnishing device
Polishing fluid (2), the vibropolish of cooperation vibropolish head (1) can also be added.
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| CN201820385486.9U CN208034278U (en) | 2018-03-21 | 2018-03-21 | A kind of burnishing device of freeform optics surface |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201820385486.9U CN208034278U (en) | 2018-03-21 | 2018-03-21 | A kind of burnishing device of freeform optics surface |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108311960A (en) * | 2018-03-21 | 2018-07-24 | 大连理工大学 | A kind of burnishing device and method of freeform optics surface |
| CN111830607A (en) * | 2019-04-16 | 2020-10-27 | 北京理工大学 | Method for manufacturing microlens array of superhard material |
-
2018
- 2018-03-21 CN CN201820385486.9U patent/CN208034278U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108311960A (en) * | 2018-03-21 | 2018-07-24 | 大连理工大学 | A kind of burnishing device and method of freeform optics surface |
| CN111830607A (en) * | 2019-04-16 | 2020-10-27 | 北京理工大学 | Method for manufacturing microlens array of superhard material |
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