CN207983132U - Sapphire high pressure waterjet device - Google Patents

Sapphire high pressure waterjet device Download PDF

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Publication number
CN207983132U
CN207983132U CN201721737461.2U CN201721737461U CN207983132U CN 207983132 U CN207983132 U CN 207983132U CN 201721737461 U CN201721737461 U CN 201721737461U CN 207983132 U CN207983132 U CN 207983132U
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water
abrasive
acid solution
jet
sapphire
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段斌斌
程佳宝
丁钰明
王子学
朱泾伟
苏艳芳
周利斌
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Tdg Yinxia New Material Co Ltd
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Tdg Yinxia New Material Co Ltd
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Abstract

A kind of sapphire high pressure waterjet device, its cabinet inside bottom surface is tilted to the waste collection end of babinet, the end bottom is equipped with waste collection mouth, it is connected with circulated filter system below waste collection mouth, the abrasive waterjet nozzle and its walking mechanism of rotatable workpiece grip mechanism and transverse injection are equipped in cabinet, it is equipped with pumped vacuum systems in enclosure top, it is additionally provided with the acid solution spray system with abrasive waterjet nozzle level, the chemical process that high speed impact sapphire is cooperateed with after making acid solution be bombarded by super-pressure abrasive water-jet.Sapphire crystal ingot is increasing now, joint-cutting is set to have to increasingly deeper, in order to solve the problems, such as that abrasive water-jet energy attenuation, the utility model vacuumize the environment residing for the spout of abrasive water-jet and sapphire workpiece, to greatly reduce vapour lock, it is effectively improved depth of cut.

Description

Sapphire high pressure waterjet device
Technical field:
The utility model is related to processing technique field, more particularly to a kind of sapphire high pressure waterjet device.
Background technology:
The artificial synthesized sapphire industrially used is α-Al2O3, in addition to the glittering and translucent vision with natural sapphire Aesthetic feeling, there are many more excellent physical and chemical performances for it, such as:High rigidity (being only second to diamond), high-melting-point (2054 DEG C), insulation Property good (resistivity be more than 1011 Ω cm) under room temperature, chemical stability it is good (under room temperature not with strong acid and alkali reaction, under high temperature Slow reaction) etc., these excellent performances are cheap plus artificial synthesized sapphire cost so that it is more and more applied To every field, including:LED substrate materials, Mobile phone screen, watch minute surface, bulletproof glass, camera gun etc..
Since sapphire is extremely hard, damage resistant is suitable for semiconductor and LED technology, but glass, ceramics and indigo plant are precious Stone has a what is common is that it is difficult to processing.They are frangible and are all adamantine materials, challenge the tradition such as milling, brill, mill The limit of manufacturing process, tool wear is fast when processing these materials, and it is good enough to need several processing links that can just obtain Processing quality.
At low cost, efficient electric discharge (electric spark) processing technology is successfully used for metal product processing, but due to blue precious The property of stone insulation, it is this that high rigidity, the processing technology of high abrasion resisting material can not be applied on sapphire.In addition, due to indigo plant The chemical stability and high temperature resistant of jewel, the approach of chemical process under room temperature is also blocked, even if at high temperature, processing efficiency It is very low.
What is developed in recent years is applied to laser cutting in sapphire cutting, significant effect, but also some are difficult to overcome Problem, such as:For reflective, translucent material, laser is difficult to effective ablation, the uneven crack etc. for leading to material of heat.
Utility model content:
In consideration of it, it is necessary to design a kind of efficient and good cutting effect sapphire high pressure waterjet device.
A kind of sapphire high pressure waterjet device, including:Cabinet, workpiece grip mechanism, water knife walking mechanism, vacuum pump, meter Calculation machine control system, abrasive water jet streaming system, acid solution spray system, circulated filter system;
Cabinet includes babinet and head cover, and box inside bottom surface is tilted to the waste collection end of babinet, the waste collection end Box inside bottom is equipped with waste collection mouth, and circulated filter system is connected with below waste collection mouth, and workpiece is equipped in the middle part of babinet Clamping device, the top of four wall of babinet are equipped with the step having a down dip inwardly, and head cover corresponding position is equipped with corresponding step, in case Object table rank and head cover step are equipped with sealing rubber pad, and after cabinet inside vacuumizes, external pressure can force head cover and babinet What is contacted is closer, to be conducive to seal;Pipeline is connected on head cover, the pipeline other end is connected with vacuum pump;
Workpiece grip mechanism includes:Claw, pallet, shaft, motor, retarder;Claw is fixed on tray edge for solid Determine sapphire workpiece, pallet carries sapphire workpiece for holding in the palm, and shaft upper end is fixed with tray center, and shaft lower end is from the bottom of box It stretches out and is connected to the motor by retarder, the box inside bottom surface near shaft is swelled to rotor shaft direction to avoid solid particle It deposits in shaft surrounding;
Water knife walking mechanism includes:Cross slide way, longitudinal rail, telescopic feed mechanism;Cross slide way is horizontally fixed on useless On liquid collecting terminal inner wall, longitudinal rail is vertically arranged, and sliding part and the cross slide way of longitudinal rail are slidably connected, telescopic feed machine The sliding part of structure is slidably connected with longitudinal rail, and abrasive jet and acid solution nozzle are fixed on the pars contractilis of telescopic feed mechanism, Abrasive jet and acid solution nozzle are horizontally disposed, and the pars contractilis of telescopic feed mechanism can be stretched out to close to the direction of sapphire workpiece; It is based on considered below that guide rail, which is arranged on end wall,:Sapphire crystal ingot is frequently necessary to segment, and sapphire wafer is frequently necessary to cut Piece, the utility model is specifically used to complete above-mentioned two work, regardless of being sapphire crystal ingot or sapphire wafer, diameter Increasing, hardness is again very high, and unidirectional cutting declines with the extension of distance, the increasing of joint-cutting depth depth, jet energy Subtract seriously, therefore needs to use circumgyration incision, in addition, in a general sense, using the side of fixed abrasive nozzle, rotational workpieces Formula is the most convenient, stablizes;And sapphire crystal ingot is increasing, it is to hold up from below to fix its best mode, in this way, by guide rail Not only meet above-mentioned needs on side wall with abrasive jet setting, and simplified structure, reduces equipment volume, it is true convenient for taking out It is empty;
In addition, the abrasive water-jet of the overwhelming majority can be stopped and rebounded by sapphire workpiece, therefore abrasive jet setting is existed Be conducive to waste collection on the wall of waste collection end side;
Computer control system is additionally operable to for controlling the action of water knife walking mechanism, pallet rotation, computer control system Control keying and the abrasive water jet streaming system jet pressure of the keying and acid solution spray system of abrasive water jet streaming system;
Abrasive water jet streaming system cuts sapphire workpiece for spraying super-pressure abrasive water-jet;Abrasive water-jet System includes:Water system, high-pressure water pumping plant, high pressure water circuit, water spout, abrasive material storage tank, accurate feeder, abrasive jet; Water system provides water for high-pressure water pumping plant, and high-pressure water pumping plant is connected by high pressure water circuit with water spout, and water spout is inserted into Into abrasive jet, water spout and abrasive jet chamber unicom and the emission direction weight of water spout emission direction and abrasive jet It closes, abrasive material storage tank lower part is connected with accurate feeder, and accurate feeder discharge port is surpassed by pipeline and abrasive jet chamber unicom High-pressure water prmp room, accurate feeder and computer control system are electrically connected;
Acid solution spray system is used to apply acid solution in incision, high-speed punching after making acid solution be bombarded by super-pressure abrasive water-jet Hit the chemical process that sapphire is cooperateed with;Acid solution spray system includes:Acid solution storage tank, diaphragm pump, acid solution nozzle;Acid solution is stored up Tank, diaphragm pump, acid solution nozzle are sequentially connected by pipeline;
Circulated filter system includes:Filter pump, electrodialysis plant;Filtrate is sent into electrodialysis plant by filter pump, by filter residue It is sent into abrasive material storage tank, is in air-tight state when due to clean in case and work in case, therefore the filter residue overwhelming majority is to be cut on sapphire Al under mill2O3Little particle, by Al2O3Little particle is sent into the realization of abrasive material storage tank as abrasive material and is cut using sapphire itself waste material Purpose, save abrasive material and processing effect be good (common abrasive material be garnet, hardness 7), treated for electrodialysis plant Clear water flows into water system, and gelled acid liquid stream enters acid solution storage tank and (also contains a small amount of AlCl in concentration acid solution3, do not influence to use);
The outlet pressure of water spout is more than 330MPa.
Preferably, the outlet pressure of water spout is 380~420MPa.
Preferably, the interior hydrochloric acid for being 10~20% of acid solution storage tank.
Due to sapphire property exceptional stability, therefore it can trust and be impacted using superhigh pressure water jet, simultaneously as hydraulic pressure is remote More than threshold values, pure water and abrasive material can cause the unstability of sapphire surface, keep the indigo plant that do not reacted with strong acid under normal temperature and pressure precious Stone surface becomes to be easy to react with acid, to carry out chemical secondary process.
For high-speed object, vapour lock is very big, and as speed is continuously increased, the resistance that vapour lock will become maximum And rapidly increase, the utility model uses high pressure waterjet sapphire, and used pressure is very big, makes the abrasive water jet ejected Stream is even more than 2 times of velocities of sound, and jet stream processing suffers from a common disadvantage, i.e.,:As spout and workpiece distance increases, cuts The increasing of depth is stitched, energy attenuation is serious.And sapphire crystal ingot is increasing now, so that joint-cutting is had to increasingly deeper, in order to Solve the problems, such as abrasive water-jet energy attenuation, the utility model is by the ring residing for the spout of abrasive water-jet and sapphire workpiece Border vacuumizes, and to greatly reduce vapour lock, is effectively improved depth of cut.
Description of the drawings:
Attached drawing 1 is the structural schematic diagram of the sapphire high pressure waterjet device of a width better embodiment.
Attached drawing 2 is the schematic diagram of the abrasive water jet streaming system and circulated filter system of a width better embodiment.
In figure:Vacuum pump 4, circulated filter system 6, babinet 11, head cover 12, waste collection end 111, waste collection mouth 112, Step 113, pipeline 13, claw 21, pallet 22, shaft 23, motor 24, retarder 25, sapphire workpiece 9, cross slide way 31, Longitudinal rail 32, telescopic feed mechanism 33, sliding part 321, sliding part 331, water system 51, high-pressure water pumping plant 52, high pressure Water route 53, water spout 54, abrasive material storage tank 55, accurate feeder 56, abrasive jet 57, acid solution storage tank 71, filter pump 61, electrodialysis Device 62.
Specific implementation mode:
As shown in attached drawing 1,2, a kind of sapphire high pressure waterjet device, including:Cabinet, workpiece grip mechanism, the walking of water knife Mechanism, vacuum pump 4, computer control system, abrasive water jet streaming system, acid solution spray system, circulated filter system 6;
Cabinet includes babinet 11 and head cover 12, and 11 inside bottom surface of babinet is tilted to the waste collection end 111 of babinet, the end bottom Portion is equipped with waste collection mouth 112, and 112 lower section of waste collection mouth is connected with circulated filter system 6, and workpiece clamp is equipped at 11 middle part of babinet Mechanism is held, the top of 11 4 wall of babinet is equipped with the step 113 having a down dip inwardly, and 12 corresponding position of head cover is equipped with corresponding Rank is equipped with sealing rubber pad, after being vacuumized inside cabinet 11, external pressure on 11 step 113 of babinet and 12 step of head cover Head cover 12 can be forced to be contacted with babinet 11 closer, to be conducive to seal;Pipeline 13 is connected on head cover 12, pipeline 13 is another One end is connected with vacuum pump 4;
Workpiece grip mechanism includes:Claw 21, pallet 22, shaft 23, motor 24, retarder 25;Claw 21 is fixed on support 22 edge of disk carries sapphire workpiece 9 for fixing sapphire workpiece 9, pallet 22 for holding in the palm, 23 upper end of shaft and 22 center of pallet Fixed, 23 lower end of shaft is stretched out from 11 bottom of babinet and is connected with motor 24 by retarder 25, in the babinet near shaft 23 Side bottom surface swells to rotor shaft direction and deposits in 23 surrounding of shaft to avoid solid particle, results in blockage;
Water knife walking mechanism includes:Cross slide way 31, longitudinal rail 32, telescopic feed mechanism 33;Cross slide way 31 is horizontal It is fixed on 111 inner wall of waste collection end, longitudinal rail 32 is vertically arranged, the sliding part 321 and cross slide way of longitudinal rail 32 31 are slidably connected, and sliding part 331 and the longitudinal rail 32 of telescopic feed mechanism 33 are slidably connected, and telescopic feed mechanism 33 stretches Abrasive jet 57 and acid solution nozzle are fixed in portion, abrasive jet 57 and acid solution nozzle are horizontally disposed, telescopic feed mechanism 33 Pars contractilis can be stretched out to close to the direction of sapphire workpiece 9;It is based on considered below that guide rail, which is arranged on end wall,:Sapphire is brilliant Ingot is frequently necessary to segment, and sapphire wafer is frequently necessary to be sliced, and the utility model is specifically used to complete above-mentioned two work, without By being sapphire crystal ingot or sapphire wafer, diameter is increasing, and hardness is again very high, and unidirectional cutting is with distance Extend, the increasing of joint-cutting depth depth, jet energy decaying is serious, therefore needs to use circumgyration incision, in addition, in a general sense For, it is the most convenient by the way of fixed abrasive nozzle, rotational workpieces, stable;And sapphire crystal ingot is increasing, fixes it Best mode is to hold up from below, not only meets above-mentioned needs on side wall in this way, being arranged guide rail and abrasive jet, and Structure has been simplified, equipment volume is reduced, convenient for vacuumizing;
In addition, the abrasive water-jet of the overwhelming majority can be stopped and rebounded by sapphire workpiece 9, therefore abrasive jet 57 is arranged Be conducive to waste collection on 111 side wall of waste collection end;
Computer control system is also used for controlling the action of water knife walking mechanism, the rotation of pallet 22, computer control system In keying and the abrasive water jet streaming system jet pressure of the keying and acid solution spray system of control abrasive water jet streaming system;
Abrasive water jet streaming system cuts sapphire workpiece 9 for spraying super-pressure abrasive water-jet;Abrasive water jet Streaming system includes:Water system 51, high-pressure water pumping plant 52, high pressure water circuit 53, water spout 54, abrasive material storage tank 55, accurate feeding Machine 56, abrasive jet 57;Water system 51 is that high-pressure water pumping plant 52 provides water, and high-pressure water pumping plant 52 passes through high pressure water circuit 53 It is connected with water spout 54, water spout 54 is inserted into abrasive jet 57, water spout 54 and 57 chamber unicom of abrasive jet and water spray 54 emission direction of mouth is overlapped with the emission direction of abrasive jet 57, and 55 lower part of abrasive material storage tank is connected with accurate feeder 56, accurate 56 discharge port of feeder passes through pipeline and 57 chamber unicom of abrasive jet, high-pressure water pumping plant 52, accurate feeder 56 and calculating Machine control system is electrically connected;
Acid solution spray system is used to apply acid solution in incision, high-speed punching after making acid solution be bombarded by super-pressure abrasive water-jet Hit the chemical process that sapphire is cooperateed with;Acid solution spray system includes:Acid solution storage tank 71, diaphragm pump, acid solution nozzle;Acid solution is stored up Tank 71, diaphragm pump, acid solution nozzle are sequentially connected by pipeline;
Circulated filter system 6 includes:Filter pump 61, electrodialysis plant 62;Filtrate is sent into electrodialysis plant by filter pump 61 62, filter residue is sent into abrasive material storage tank 55, is in air-tight state in case when due to clean in case and work, therefore the filter residue overwhelming majority is Al under being cut on sapphire2O3Little particle, by Al2O3Little particle is sent into 55 realization of abrasive material storage tank as abrasive material and utilizes sapphire The purpose that itself waste material is cut, saves abrasive material and processing effect is good (common abrasive material is garnet, hardness 7), electrodialysis Treated the clear water of device 62 flows into water system 51, and gelled acid liquid stream enters acid solution storage tank 71 and (also contains in concentration acid solution a small amount of AlCl3, do not influence to use);
The outlet pressure of water spout 54 is more than 330MPa.
In the present embodiment, the outlet pressure of water spout 54 is 380~420MPa.
In the present embodiment, the interior hydrochloric acid for being 10~20% of acid solution storage tank 71.

Claims (2)

1. a kind of sapphire high pressure waterjet device, which is characterized in that including:Cabinet, workpiece grip mechanism, water knife walking mechanism, Vacuum pump, computer control system, abrasive water jet streaming system, acid solution spray system, circulated filter system;
Cabinet includes babinet and head cover, and box inside bottom surface is tilted to the waste collection end of babinet, the babinet at the waste collection end Inside bottom is equipped with waste collection mouth, and circulated filter system is connected with below waste collection mouth, and piece-holder is equipped in the middle part of babinet Mechanism, the top of four wall of babinet are equipped with the step having a down dip inwardly, and head cover corresponding position is equipped with corresponding step, in babinet platform Rank and head cover step are equipped with sealing rubber pad, are connected to pipeline on head cover, the pipeline other end is connected with vacuum pump;
Workpiece grip mechanism includes:Claw, pallet, shaft, motor, retarder;Claw is fixed on tray edge for fixed indigo plant Gem workpiece, pallet carry sapphire workpiece for holding in the palm, and shaft upper end is fixed with tray center, and shaft lower end is stretched out from the bottom of box And be connected to the motor by retarder, the box inside bottom surface near shaft is swelled to rotor shaft direction to be turned to avoid solid particle Axis surrounding is deposited;
Water knife walking mechanism includes:Cross slide way, longitudinal rail, telescopic feed mechanism;Cross slide way is horizontally fixed on waste liquid receipts Collect on the inner wall of end, longitudinal rail is vertically arranged, and sliding part and the cross slide way of longitudinal rail are slidably connected, telescopic feed mechanism Sliding part is slidably connected with longitudinal rail, and abrasive jet and acid solution nozzle, abrasive material are fixed on the pars contractilis of telescopic feed mechanism Nozzle and acid solution nozzle are horizontally disposed, and the pars contractilis of telescopic feed mechanism can be stretched out to close to the direction of sapphire workpiece;
Computer control system is additionally operable to control for controlling the action of water knife walking mechanism, pallet rotation, computer control system The keying of abrasive water jet streaming system and the keying of acid solution spray system and abrasive water jet streaming system jet pressure;
Abrasive water jet streaming system cuts sapphire workpiece for spraying super-pressure abrasive water-jet;Abrasive water jet streaming system Including:Water system, high-pressure water pumping plant, high pressure water circuit, water spout, abrasive material storage tank, accurate feeder, abrasive jet;It supplies water System provides water for high-pressure water pumping plant, and high-pressure water pumping plant is connected by high pressure water circuit with water spout, and water spout is inserted into mill Expect in nozzle, water spout and abrasive jet chamber unicom and water spout emission direction is overlapped with the emission direction of abrasive jet, mill Material storage tank lower part is connected with accurate feeder, and accurate feeder discharge port passes through pipeline and abrasive jet chamber unicom, super-pressure Pump works, accurate feeder and computer control system are electrically connected;
Acid solution spray system is used to apply acid solution in incision, and high speed impact is blue after so that acid solution is bombarded by super-pressure abrasive water-jet The chemical process that jewel is cooperateed with;Acid solution spray system includes:Acid solution storage tank, diaphragm pump, acid solution nozzle;Acid solution storage tank, every Membrane pump, acid solution nozzle are sequentially connected by pipeline;
Circulated filter system includes:Filter pump, electrodialysis plant;Filtrate is sent into electrodialysis plant by filter pump, and filter residue is sent into Abrasive material storage tank, electrodialysis plant treated clear water flow into water system, and gelled acid liquid stream enters acid solution storage tank;
The outlet pressure of water spout is more than 330MPa.
2. sapphire high pressure waterjet device as described in claim 1, which is characterized in that the outlet pressure of water spout be 380~ 420MPa。
CN201721737461.2U 2017-12-14 2017-12-14 Sapphire high pressure waterjet device Active CN207983132U (en)

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Application Number Priority Date Filing Date Title
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107900914A (en) * 2017-12-14 2018-04-13 天通银厦新材料有限公司 Sapphire high pressure waterjet device
CN110270934A (en) * 2019-06-24 2019-09-24 崔云兰 The process of surface treatment system and technique of Automobile Plastic Parts

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107900914A (en) * 2017-12-14 2018-04-13 天通银厦新材料有限公司 Sapphire high pressure waterjet device
CN110270934A (en) * 2019-06-24 2019-09-24 崔云兰 The process of surface treatment system and technique of Automobile Plastic Parts
CN110270934B (en) * 2019-06-24 2021-08-10 瑞安市强良塑料制品有限公司 Surface treatment process system and process for automobile plastic parts

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