CN207908855U - It is a kind of that the nano-imprinting apparatus uniformly imprinted is realized by idler wheel - Google Patents
It is a kind of that the nano-imprinting apparatus uniformly imprinted is realized by idler wheel Download PDFInfo
- Publication number
- CN207908855U CN207908855U CN201820403759.8U CN201820403759U CN207908855U CN 207908855 U CN207908855 U CN 207908855U CN 201820403759 U CN201820403759 U CN 201820403759U CN 207908855 U CN207908855 U CN 207908855U
- Authority
- CN
- China
- Prior art keywords
- idler wheel
- support unit
- soft template
- driving device
- nano
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
Abstract
The nano-imprinting apparatus uniformly imprinted is realized by idler wheel the utility model discloses a kind of, including workbench, for driving workbench to do the mobile platform moved left and right, the pallet of the workbench being fixedly arranged above for placing substrate further includes that bottom is equipped with the soft template of nanostructure, is used to support support unit of the soft template above substrate；Stitching unit includes idler wheel assembly and idler wheel assembly is driven to do the roller driving device moved up and down, further includes control unit, described control unit is electrically connected with support unit driving device, mobile platform, roller driving device respectively；Realize soft template and the coining tree lace being applied on substrate, sequentially contact printing, force of impression distribution is more uniform, and on the coining glue that formwork structure can be made to be fully transferred on substrate with smaller force of impression, the bubble being absorbed in moulding process can be discharged in time.
Description
Technical field
The utility model is related to nano impression field more particularly to a kind of nano impressions uniformly imprinted by idler wheel realization
Equipment.
Background technology
Existing nano-imprinting apparatus, such as Patent No. ZL2017100466467, a kind of entitled fine registration formula nanometer
The patent of invention of Embosser applied, including coining shell and coining platform, utilize watching for coining mesa base
It takes lifting gear and imprints the cooperation between the pressure sensor on shell, realize between coining shell and coining platform
Opposite leveling works, and by imprinting shell and imprinting the parallel extrusion of platform, formwork structure is transferred to the coining glue of substrate
On.During above-mentioned coining shell and coining platform parallel squeeze, that is, imprint shell template and coining platform substrate large area
During contact printing, it is easy to squeeze into bubble, and bubble is not easy to be excluded；And it imprints shell and coining platform needs to protect
The parallel of height is held, assembly difficulty is big.
Utility model content
In order to solve the above the technical problems existing in the prior art, the utility model proposes following technical solutions：
It is a kind of that the nano-imprinting apparatus that uniformly imprints is realized by idler wheel including workbench, left for driving workbench to make
The mobile platform moved right, the pallet of the workbench being fixedly arranged above for placing substrate further include that bottom is equipped with nanometer
The soft template of structure is used to support support unit of the soft template above substrate, and the support unit includes being respectively provided at pallet
The left and right sides and set left support unit and right support unit on the table and for driving left and right support unit to do up and down
Mobile support unit driving device, the left support unit are used to carry one end of soft template, and the right support unit is used for
The other end of fixed soft template；The right side of the right support unit is equipped with stitching unit, and the stitching unit includes idler wheel assembly
With drive idler wheel assembly to do the roller driving device moved up and down, further include control unit, described control unit respectively with support
Cell driving device, mobile platform, roller driving device are electrically connected.
Further, the support unit driving device is servo-drive bar；The left support unit includes at least two
The first support bar that is correspondingly arranged, the semifixed fixture for carrying soft template for being fixed on two first support bar upper ends；Institute
State right support unit include two be correspondingly arranged second support bar, be fixed on two second support bar upper ends for fixing soft mode
The stationary fixture of plate.
Further, the idler wheel assembly includes idler wheel, the supporting rack for installing idler wheel, the roller driving device with
Supporting rack coordinates for driving supporting rack and idler wheel to move up and down.
Further, the idler wheel outer surface is equipped with elastomeric layer.
Further, heating device is installed in the pallet.
Further, the right side of the stitching unit is equipped with sealing cover body, and the soft template for being placed on pallet covers
And airtight cavity is formed, the inflator pump being equipped on cover body for the pressurising into airtight cavity is sealed, the sealing cover body also connects
Be connected to drive sealing cover body and do the seal closure body drive moved up and down, described control unit also respectively with inflator pump and sealing
Cover body driving device is electrically connected.
Further, further include that exhaust pipe and the keying control valve on exhaust pipe, the exhaust pipe are mounted on
It is connected on the sealing cover body and with the airtight cavity, the keying control valve is electrically connected with control unit.
In order to solve technical problem mentioned above, the utility model realizes following technique effect：
When 1, working, by the cooperation of mobile platform, support unit, idler wheel, realizes soft template and be applied on substrate
Tree lace, sequentially contact printing are imprinted, force of impression distribution is more uniform, and the smaller force of impression of use can be such that formwork structure turns completely
It prints on the coining glue on substrate, the bubble being absorbed in moulding process can be discharged in time；
2, each mechanism module is independently operable, simple process, and composition mechanical structure is simple, assembly difficulty is low, final
Transfer graphic precision is high and ratio of defects is low；
3, heating device is installed on pallet according to the selection of coining glue and curing mode, or above sealing cover body
Ultraviolet lamp, using flexible are installed；
4, by combining the airtight cavity of enclosed hood body formation, being filled with positive pressure, to the soft template and coining imprinted by idler wheel
Glue applies uniform pressure again, and soft template and substrate during uv-exposure cures or is heating and curing is made to remain
Fitting completely, ensure that the accurate transfer of soft template nanostructure；
5 while avoiding the force of impression that needs are vertical with stamping surface when being pressed with precision machinery, stamping surface need with
It is stamped the problem of face keeping parallelism difficulty.
Description of the drawings
Some specific realities of the utility model are described in detail by way of example rather than limitation with reference to the accompanying drawings hereinafter
Apply example.Identical reference numeral denotes same or similar component or part in attached drawing, it should be appreciated by those skilled in the art that
The drawings are not necessarily drawn to scale.In attached drawing：
Fig. 1 is the utility model overall structure diagram；
Fig. 2 is the utility model the first moulding process status diagram；
Fig. 3 is the utility model the second moulding process status diagram；
Fig. 4 is the utility model third moulding process status diagram.
Specific implementation mode
As shown in Figure 1, a kind of realizing the nano-imprinting apparatus that uniformly imprints by idler wheel, including workbench 1, for driving
Workbench does the mobile platform 2 moved left and right, and the pallet 3 of the workbench being fixedly arranged above for placing substrate 11 also wraps
Bottom is included to be equipped with the soft template 4 of nanostructure, be used to support support unit of the soft template above substrate, the support unit packet
It includes and is respectively provided at left and right sides of pallet and sets left support unit 5 on the table and right support unit 6 and for driving a left side
Right support unit does the support unit driving device 7 moved up and down, and the left support unit is described for carrying soft template one end
Right support unit is used to fix the other end of soft template；The right side of the right support unit is equipped with stitching unit, and the rolling is single
Member includes idler wheel assembly 8 and idler wheel assembly is driven to do the roller driving device 9 moved up and down, further includes control unit（In figure not
It shows）, described control unit is electrically connected with support unit driving device, mobile platform, roller driving device respectively；For controlling
Support unit driving device processed drive the moving up and down of left and right support unit, control mobile platform drive workbench to move horizontally,
Control roller driving device drives idler wheel assembly to move up and down.
Preferably, the support unit driving device is servo-drive bar；The left support unit includes at least two right
The first support bar that should be arranged（Only display is located at a first support bar in front in figure）, be fixed in two first support bars
Be used for and the soft template at end do clearance fit to carry the semifixed fixture 5b of soft template one end；The right support unit includes two
Root is correspondingly arranged second support bar 6a（Only display is located at a second support bar in front in figure））, be fixed on two second
The stationary fixture 6b of strut upper end；The semifixed fixture includes upper clamp plate 5b1 and lower clamp plate 5b2, and the upper and the lower plywood cooperatively forms
For across the gap of soft template, these are only semifixed fixture for example, being not limited only to above structure and mode；It is described
Stationary fixture is that can arbitrarily fix device or fixture of the soft template on right support unit, such as vacuum absorption device, machine
Tool clamping fixture, the technology of this aspect are the common knowledge known to the those of ordinary skill of the technical field, herein no longer
It repeats.
Preferably, the idler wheel assembly includes 8 b of idler wheel, 8 a of supporting rack for installing idler wheel, the idler wheel driving
Device 9 coordinates with supporting rack for driving supporting rack and idler wheel to move up and down；The roller driving device uses servo-electric
Cylinder.
When work, as shown in Figure 1, soft template one end is equipped on semifixed fixture, the other end is fixed on stationary fixture
On, soft template left end portion is vacantly stretched out, and the substrate that uniform spin coating liquid is imprinted to glue 12 is positioned in the groove 3a of pallet, is held in the palm
The depth of disk groove and the thickness of substrate match, as shown in Fig. 2, control unit control support unit driving device adjusts soft mode
The supporting rod of plate both sides acts, and second support bar is landed first so that and soft template side lower surface is bonded with tray surface, and second
During supporting rod declines, first support bar follows landing, and in the process, the height of first support bar is higher than second support bar
Height；Control system controls mobile platform work, drives below movable workbench to idler wheel, and control system controls idler wheel driving
System works so that idler wheel whereabouts is contacted with soft template, controls the horizontal movement velocity of mobile platform by control system at this time
With the decrease speed of first support bar, as shown in Figure 3 so that soft template from right to left successively on substrate coining be glued touch,
Realize coining glue on soft template and substrate uniformly, sequentially contact printing so that the nanostructure in soft template is all transferred to
On coining glue on substrate.
Preferably, idler wheel outer surface is equipped with elastomeric layer 8c, has buffered in the prior art when soft template and substrate are to pressure
It prints during glue squeezes, because of soft template and base plan is not parallel, is partly tied caused by soft template or substrate surface out-of-flatness
The problem of structure transfer omission or deformation；Elastomeric layer by being equipped with certain elasticity on idler wheel realizes soft template on substrate
Coining tree lace, sequentially contact printing coining mode, keep the force of impression distribution that idler wheel is applied in soft template more uniform,
Enable on the coining glue that formwork structure is fully transferred on substrate, improves coining precision.
Further, the right side of the stitching unit is equipped with sealing cover body 13, the soft template cover for being placed on pallet
Firmly and airtight cavity is formed, seals the inflator pump 14 being equipped on cover body for the pressurising into airtight cavity, the sealing cover body
Be also associated with drive sealing cover body and do the seal closure body drive 15 moved up and down, described control unit also respectively with inflator pump
It is electrically connected with seal closure body drive.Servo electric jar may be used in the seal closure body drive.
Further include exhaust pipe 16 and the keying control valve 17 on exhaust pipe, the exhaust pipe is mounted on described
It seals on cover body and is connected with the airtight cavity, the keying control valve is electrically connected with control unit.
As shown in figure 4, when idler wheel conforms to soft template on the coining glue on substrate, control unit control sealing cover body
Driving device drives sealing cover body to decline, closed faceshield side wall is made to be closed to form airtight cavity with the soft template above pallet, close
The outer edge size for closing cover body is less than or equal to pallet outer edge size；By the inflator pump that is connect with closed cover body to above-mentioned close
Closed chamber body is filled with gas, and the opening/shutting valve of closed cover body exhaust pipe is coordinated to realize that the dynamic of gas atmosphere in airtight cavity is flat
Weighing apparatus applies uniform pressure again to the coining glue in the soft template and substrate of idler wheel coining, ensure that coining glue is persistently filled out
The state being charged in entire soft template micro nano structure, and also assure above pallet not with outside the soft template of coining glue laminating
Edge is fitted closely with pallet always, no matter making in the state that uv-exposure cures or is heating and curing, soft template plane is always
In same level；
The top of one embodiment of the utility model, the sealing cover body is equipped with transparent region（It is not shown in figure）,
Top is equipped with ultraviolet radiator 18, and it is uv-exposure solidified imprinting glue that soft template, which uses transparent material, above-described coining glue,
After gas atmosphere keeps dynamic equilibrium in above-mentioned airtight cavity, control unit controls ultraviolet radiator and opens, in ultraviolet exposure
During photocuring, by the pressure in confined space, the soft template and substrate of idler wheel coining are applied uniformly again
Pressure ensure that coining glue is persistently filled into the state in entire template micro nano structure, and solve uv-exposure solidification
During the soft template outer edge that is not bonded with substrate tilted because heated, make bed perimeter Structure transfer not exclusively or solidification not
Complete problem.
Another embodiment of the utility model is equipped with heating device 19 on the pallet, using the coining that is heating and curing
Glue is similarly filled with gas to above-mentioned airtight cavity, and after gas atmosphere keeps dynamic equilibrium, control unit control heating device adds
Heat is to assigned temperature, during being heating and curing, by the pressure in confined space, to the soft template and substrate of idler wheel coining
Apply uniform pressure again, ensure that coining glue is persistently filled into the state in entire template micro nano structure, while
It solves the soft template outer edge not being bonded with substrate during being heating and curing to tilt because heated, makes bed perimeter Structure transfer
The incomplete or incomplete problem of solidification.
Claims (7)
1. a kind of realizing the nano-imprinting apparatus uniformly imprinted by idler wheel, it is characterised in that：It starts building including workbench, for band
The mobile platform moved left and right is done as platform, the pallet of the workbench being fixedly arranged above for placing substrate, further includes bottom
Soft template equipped with nanostructure is used to support support unit of the soft template above substrate；The support unit includes difference
It is located at left and right sides of pallet and sets left support unit and right support unit on the table and supported for driving left and right single
Member does the support unit driving device moved up and down, and the left support unit is used to carry one end of soft template, the right support
Unit is used to fix the other end of soft template；The right side of the right support unit is equipped with stitching unit；The stitching unit includes
Idler wheel assembly and drive idler wheel assembly do the roller driving device moved up and down, further include control unit, described control unit point
It is not electrically connected with support unit driving device, mobile platform, roller driving device.
2. nano-imprinting apparatus as described in claim 1, it is characterised in that：The support unit driving device is servo-drive
Bar；The left support unit includes at least two first support bars being correspondingly arranged, is fixed on two first support bar upper ends
Semifixed fixture for carrying soft template；The right support unit is correspondingly arranged second support bar, is fixed on two including two
The stationary fixture for fixing soft template of root second support bar upper end.
3. nano-imprinting apparatus as described in claim 1, it is characterised in that：The idler wheel assembly includes idler wheel, for installing
The supporting rack of idler wheel, the roller driving device coordinate with supporting rack for driving supporting rack and idler wheel to move up and down.
4. nano-imprinting apparatus as claimed in claim 3, it is characterised in that：The idler wheel outer surface is equipped with elastomeric layer.
5. nano-imprinting apparatus as described in claim 1, it is characterised in that：Heating device is installed in the pallet.
6. nano-imprinting apparatus as described in claim 1, it is characterised in that：The right side of the stitching unit is equipped with seal closure
Body, the soft template for being placed on pallet cover and are formed airtight cavity, seal and are equipped on cover body for airtight cavity
The inflator pump of middle pressurising, the sealing cover body are also associated with drive sealing cover body and do the seal closure body drive moved up and down,
Described control unit is also electrically connected with inflator pump and seal closure body drive respectively.
7. nano-imprinting apparatus as claimed in claim 6, it is characterised in that：Further include exhaust pipe and be mounted on exhaust pipe
On keying control valve, the exhaust pipe is mounted on the sealing cover body and connected with the airtight cavity, and the keying is controlled
Valve processed is electrically connected with control unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820403759.8U CN207908855U (en) | 2018-03-23 | 2018-03-23 | It is a kind of that the nano-imprinting apparatus uniformly imprinted is realized by idler wheel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820403759.8U CN207908855U (en) | 2018-03-23 | 2018-03-23 | It is a kind of that the nano-imprinting apparatus uniformly imprinted is realized by idler wheel |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207908855U true CN207908855U (en) | 2018-09-25 |
Family
ID=63558346
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820403759.8U Active CN207908855U (en) | 2018-03-23 | 2018-03-23 | It is a kind of that the nano-imprinting apparatus uniformly imprinted is realized by idler wheel |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207908855U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111679554A (en) * | 2020-06-03 | 2020-09-18 | 璞璘科技(杭州)有限公司 | Double-cavity type uniform-pressure nano-imprinting mechanism, nano-imprinting equipment and method |
| CN113075860A (en) * | 2021-04-01 | 2021-07-06 | 青岛天仁微纳科技有限责任公司 | Desktop type nano-imprinting equipment and imprinting method thereof |
| CN113075861A (en) * | 2021-04-01 | 2021-07-06 | 青岛天仁微纳科技有限责任公司 | Novel nano-imprinting equipment and imprinting method thereof |
-
2018
- 2018-03-23 CN CN201820403759.8U patent/CN207908855U/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111679554A (en) * | 2020-06-03 | 2020-09-18 | 璞璘科技(杭州)有限公司 | Double-cavity type uniform-pressure nano-imprinting mechanism, nano-imprinting equipment and method |
| CN111679554B (en) * | 2020-06-03 | 2021-04-27 | 璞璘科技(杭州)有限公司 | Double-cavity type uniform-pressure nano-imprinting mechanism, nano-imprinting equipment and method |
| CN113075860A (en) * | 2021-04-01 | 2021-07-06 | 青岛天仁微纳科技有限责任公司 | Desktop type nano-imprinting equipment and imprinting method thereof |
| CN113075861A (en) * | 2021-04-01 | 2021-07-06 | 青岛天仁微纳科技有限责任公司 | Novel nano-imprinting equipment and imprinting method thereof |
| CN113075860B (en) * | 2021-04-01 | 2023-07-25 | 青岛天仁微纳科技有限责任公司 | Desktop type nano imprinting equipment and imprinting method thereof |
| CN113075861B (en) * | 2021-04-01 | 2023-09-19 | 青岛天仁微纳科技有限责任公司 | Novel nano imprinting equipment and imprinting method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN207908855U (en) | It is a kind of that the nano-imprinting apparatus uniformly imprinted is realized by idler wheel | |
| CN208766456U (en) | The nano-imprinting device of large area imprinting is carried out using oversize mantle template | |
| CN106918987A (en) | Composite nano-imprint lithography machine and working method | |
| CN214151370U (en) | Nano-imprinting equipment capable of automatically carrying out double-sided imprinting | |
| CN214311286U (en) | Negative pressure formula nanometer impression equipment | |
| CN102436141A (en) | Nano hot stamping device | |
| KR100787237B1 (en) | Microcontact printing device of roll-print type using pdms stamp | |
| CN106483759A (en) | Nano-imprinting apparatus | |
| CN209606769U (en) | Nano-imprinting device | |
| KR100841172B1 (en) | Nanoimprinting apparatus for imprinting pattern using composite process in vacuum chamber | |
| CN208914598U (en) | The uniform hot stamping device of guide type large-area nano | |
| CN203624059U (en) | Heat sealing mechanism of packing machine | |
| CN113075859A (en) | Negative pressure type nano-imprinting equipment and imprinting method thereof | |
| CN208682376U (en) | Full automatic high efficiency seal-affixing machine | |
| JP4238339B2 (en) | Automatic stamping device | |
| CN208255622U (en) | It is a kind of to carry out the imprinting apparatus that micro nano structure uniformly imprints using soft template | |
| FR2447788A1 (en) | Press for bonding veneers onto moulded parts - has flexible bag filled with compressed air applying even pressure between heated platens | |
| CN208013664U (en) | A kind of imprinting apparatus of two dimension ancillary vibration | |
| JP4308134B2 (en) | Object printing method and apparatus | |
| JPS5821730Y2 (en) | Vacuum offset printing equipment | |
| CN213860319U (en) | Stamp coating device capable of being recycled | |
| CN213750651U (en) | Impression equipment | |
| CN108957949A (en) | A kind of nano-imprinting method | |
| CN101592865B (en) | Printing plate producing method applying liquid photosensitive resin bag, and apparatus thereof | |
| CN108762001A (en) | Device for batch manufacturing of large-area micro-nano structure and working method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |