CN207881638U - A kind of non-contact displacement transducer based on capacitive grating - Google Patents
A kind of non-contact displacement transducer based on capacitive grating Download PDFInfo
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- CN207881638U CN207881638U CN201820256718.0U CN201820256718U CN207881638U CN 207881638 U CN207881638 U CN 207881638U CN 201820256718 U CN201820256718 U CN 201820256718U CN 207881638 U CN207881638 U CN 207881638U
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- grid unit
- displacement
- displacement sensor
- quiet
- capacitive
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Abstract
The utility model discloses a kind of non-contact displacement transducers based on capacitive grating,Using the fixed plate of traditional capacitive displacement transducer as quiet grid unit,Using movable plate electrode as moving grid unit,It is integrated in reading head with high accuracy displacement sensor,It is equivalent to reading head in structure and forms capacitive displacement transducer with quiet grid unit,Controller obtains capacitive grating displacement measurement data and high precision displacement measurement data simultaneously,The displacement data that high accuracy displacement sensor is inserted using the data of capacitive grating as benchmark improves measurement accuracy,Therefore the utility model can both accomplish the high-speed, high precision performance of high accuracy displacement sensor,It can also accomplish the absolute value output number and quick response function of capacitive displacement transducer,Realize switching absolute value and not absolute terms output,And the utility model is with capacitance variations,It is measured based on displacement or magnetic strength,To in measuring environment dust and strong light it is insensitive,With very high reliability.
Description
Technical field
The utility model is related to high accuracy displacement sensor field, especially a kind of contactless displacement based on capacitive grating passes
Sensor.
Background technology
High-precision high-speed grating scale is mainly used in linear motor, on numerically-controlled machine tool, the market one of current grating scale equipment
It is directly controlled by foreign brands, such as German Heidenhain, Britain's Reinshaw etc., some prices are up to ten thousand yuan of every meter of sets, even if selection
The not high magnetic railings ruler of precision also wants every meter of thousands of members set, and very big difficulty is caused to equipment purchase and maintenance, and domestic height
Precision high-speed grating ruler and magnetic railings ruler technology are not mature enough, can not provide the higher displacement sensor of cheap and precision and set
It is standby；The data and not absolute terms that grating scale and magnetic railings ruler are acquired simultaneously, need to carry out numerical value conversion to result, be brought to measurement
Trouble；This patent is high for current grating scale and the magnetic railings ruler market price, equipment dependability is low, measurement result not absolute terms
Problem designs a kind of new displacement sensor.
Utility model content
To solve the above problems, the spy of both the utility model combination capacitive displacement transducer and high precision displacement sensing
Point inserts the displacement data of laser displacement sensor or magnetic induction sensor using the data of capacitive grating as benchmark, realizes that high speed is high
Precision measure and the data obtained can switch absolute value and not absolute terms output.
Technical solution used by the invention for solving the technical problem is：
A kind of non-contact displacement transducer based on capacitive grating, including quiet grid unit and the reading for obtaining displacement data
Head, the reading head include moving grid unit, high accuracy displacement sensor and for reading the moving grid unit and high precision displacement
The controller of the measured value of sensor, the moving grid unit and high accuracy displacement sensor are electrically connected with the controller respectively,
The moving grid unit and the quiet grid unit are non-contacting to be oppositely arranged composition capacitive displacement transducer, and the high precision displacement passes
The operation window of sensor is non-contacting towards the quiet grid unit；The reading head is moved along the quiet grid cell surface, described
Moving grid unit and high accuracy displacement sensor measure displacement information and are sent to controller respectively, are exported by controller.
Further, the quiet grid unit includes repellel and screening electrode, and the repellel is arranged in grating structure, is set to
The quiet grid cell surface and opposite with the moving grid unit and the operation window of high accuracy displacement sensor, the screening electrode connects
Ground.
Further, the quiet grid unit is printed circuit board, and the repellel is printed in circuit board surface.
Further, the high accuracy displacement sensor is laser displacement sensor, and the quiet grid unit further includes being convenient for institute
The frosted insulating trip that laser displacement sensor differentiates displacement is stated, the frosted insulating trip is covered in the reflection pole surface.
Further, to the replacement of said program, the high accuracy displacement sensor is magnetic grid displacement sensor, the quiet grid
Unit further includes the magnetic palisade film that displacement is differentiated convenient for the magnetic grid displacement sensor, and the magnetism palisade film is covered in
The reflection pole surface.
Further, the moving grid unit includes the emitter for loading pumping signal, and the emitter is arranged in grating structure,
It is set to the surface of the moving grid unit and opposite with the quiet grid unit.
Further, the moving grid unit is printed circuit board, and the emitter is printed in circuit board surface.
Further, the moving grid unit further includes the receiving pole for receiving inductive signal on the quiet grid unit, described
Receiving pole is electrically connected with the controller.
The utility model has the beneficial effects that：The utility model is using the fixed plate of traditional capacitive displacement transducer as quiet grid
Unit is integrated in laser displacement sensor or magnetic grid displacement sensor in reading head using movable plate electrode as moving grid unit,
It is equivalent to reading head in structure and forms capacitive displacement transducer with quiet grid unit, then controller can obtain capacitive grating displacement simultaneously
Measurement data and laser/magnetic grid displacement measurement data, the displacement of laser/magnetic induction sensor is inserted using the data of capacitive grating as benchmark
Data improve measurement accuracy, therefore the utility model can both accomplish the high-speed, high precision performance of laser/magnetic grid displacement sensor,
The absolute value output number and quick response function that can also accomplish capacitive displacement transducer, realize switching absolute value and not absolute terms
Output, and the present invention is measured based on capacitance variations, displacement or magnetic strength, in measuring environment dust and strong light it is unwise
Sense has very high reliability.
Description of the drawings
The utility model is described in further detail with reference to the accompanying drawings and examples.
Fig. 1 is the structural schematic diagram of the utility model first embodiment；
Fig. 2 is the dimensional structure diagram of moving grid unit and quiet grid unit in the utility model first embodiment.
Specific implementation mode
Referring to Figures 1 and 2, a kind of non-contact displacement transducer based on capacitive grating, including quiet grid unit 1 and for obtaining
The reading head 2 of displacement data, the reading head 2 is including moving grid unit 3, laser displacement sensor 4 and for reading the moving grid
The controller 5 of the measured value of unit 3 and laser displacement sensor 4, the moving grid unit 3 and laser displacement sensor 4 respectively with
The controller 5 is electrically connected；
Quiet 1 printed circuit board of grid unit, including repellel 11, screening electrode 13 and be convenient for the laser displacement sensor
4 differentiate the frosted insulating trip 12 of displacements, and the repellel 11 is arranged in grating structure, be set to quiet 1 surface of grid unit and
Opposite with the operation window 41 of the moving grid unit 3 and laser displacement sensor 4, the screening electrode 13 is grounded, the repellel
11 are printed in circuit board surface, and the frosted insulating trip 12 is covered in 11 surface of the repellel.
The moving grid unit 3 is printed circuit board, including the load emitter 31 of pumping signal and described quiet for receiving
The receiving pole 32 of inductive signal, the emitter 31 are arranged in grating structure on grid unit 1, are set to the moving grid unit 3
Surface and opposite with the quiet grid unit 1, the emitter 31 is printed in circuit board surface, the receiving pole 32 and the control
Device 5 is electrically connected.
The moving grid unit 3 is linear type with the quiet grid unit 1, and the two is non-contacting to be oppositely arranged composition capacitive grating position
The operation window 41 of displacement sensor, the laser displacement sensor 4 is non-contacting towards the quiet grid unit 1；The reading head 2
Along quiet 1 surface translation of grid unit, the moving grid unit 3 and laser displacement sensor 4 measure displacement information and send respectively
It to controller 5, is exported by controller 5, is shown and read by display module；
Using double competing GC7626C capacitive gratings multifunctional measuring chips as capacitive displacement transducer in the present embodiment, and adopt
Use Avago S9818 high laser engines chip (the improvement money of A9800) as laser displacement sensor, the data of GC7626C are defeated
Go out input terminal of the output pin access of pin and S9818 as the microcontroller of controller 5, the external LCD of output end of microcontroller
Display screen, while the controlling switch of GC7626C accesses microcontroller, so that microcontroller is had and realizes that such as absolute value/relative value switches, clear
The control functions such as zero/resetting, power-down mode；Above-mentioned GC7626C and S9818 chips are integrated in reading head 2 described in the present embodiment,
In quiet 1 apparent motion of grid unit, GC7626C and S9818 chips move reading head 2 simultaneously, and distance between the two is constant, because
This microcontroller is inserted using the data of capacitive grating as benchmark after the displacement data for obtaining GC7626C capacitive grating multifunctional measuring chips
The displacement data of laser displacement sensor improves measurement accuracy, avoids traditional capacitive displacement transducer and cannot be satisfied in movement control
It, can after inserting laser data in GC7626C capacitive grating multifunctional measurings 10 μm of resolution ratio of chip in terms of system the problem of high-speed demand
To reach 1 μm of resolution ratio, simultaneously because being provided simultaneously with capacitance variation between the measurement sound grid of capacitive displacement transducer
The characteristics of sensing the variation of the roughness of object with laser displacement sensor and generating displacement signal, measuring environment is to dust and by force
Light is insensitive, has very high reliability.
As between second embodiment, with first embodiment, difference lies in the high accuracy displacement sensor 4 is magnetic grid position
Displacement sensor, the quiet grid unit 1 are circular ring shape, and palisade arranges the repellel 11 in a ring, and the moving grid unit 3 is similarly
Circular ring shape, palisade arranges the emitter 31 in a ring, and the palisade film 15 that is magnetic is arranged and is covered on the repellel 11, institute
It states quiet grid unit 1 and the center of circle of the moving grid unit 3 is on the same line and parallel to each other, the magnetic of the magnetic grid displacement sensor
Head is towards the quiet grid unit 1；The course of work be reading head 2 around quiet 1 surface pivots of grid unit, the controller 5 obtains simultaneously
The data sended over by receiving pole 32 and magnetic grid displacement sensor, the output displacement result by way of interpolation；Utilize magnetic grid
Displacement sensor, difference lies in although the precision of magnetic grid displacement sensor is passed less than laser displacement with laser displacement sensor
Sensor, but magnetic grid displacement sensor is relatively low to environmental requirement, meets more operative scenarios.
It is worth noting that, the capacitive grating part in the present invention, structure in addition in first embodiment linear structure,
Cake type/circular ring type structure in two embodiments, can also be columnar structured etc., and above-described embodiment only carries out partial picture
For example, actual use can change capacitive grating structure according to measuring environment and measurement demand.
The above, the only preferred embodiment of the utility model, the utility model are not limited to above-mentioned implementation
Mode should all belong to the scope of protection of the utility model as long as it reaches the technique effect of the utility model with identical means.
Claims (8)
1. a kind of non-contact displacement transducer based on capacitive grating, it is characterised in that：Including quiet grid unit (1) and for obtaining position
The reading head (2) of data is moved, the reading head (2) includes moving grid unit (3), high accuracy displacement sensor (4) and for reading
The controller (5) of the measured value of the moving grid unit (3) and high accuracy displacement sensor (4), the moving grid unit (3) and high-precision
Degree displacement sensor (4) is electrically connected with the controller (5) respectively, the moving grid unit (3) with the quiet grid unit (1) is non-connects
Tactile is oppositely arranged composition capacitive displacement transducer, and the operation window (41) of the high accuracy displacement sensor (4) is non-contacting
Towards the quiet grid unit (1)；The reading head (2) is moved along quiet grid unit (1) surface, the moving grid unit (3) and
High accuracy displacement sensor (4) measures displacement information and is sent to controller (5) respectively, is exported by controller (5).
2. a kind of non-contact displacement transducer based on capacitive grating according to claim 1, it is characterised in that：The quiet grid
Unit (1) includes repellel (11) and screening electrode (13), and the repellel (11) is arranged in grating structure, is set to the quiet grid
Unit (1) surface and with the operation window (41) of the moving grid unit (3) and high accuracy displacement sensor (4) relatively, the screen
Cover pole (13) ground connection.
3. a kind of non-contact displacement transducer based on capacitive grating according to claim 2, it is characterised in that：The quiet grid
Unit (1) is printed circuit board, and the repellel (11) is printed in circuit board surface.
4. a kind of non-contact displacement transducer based on capacitive grating according to claim 3, it is characterised in that：It is described high-precision
It is laser displacement sensor to spend displacement sensor (4), and the quiet grid unit (1) further includes convenient for the laser displacement sensor point
Distinguish that the frosted insulating trip (12) of displacement, the frosted insulating trip (12) are covered in the repellel (11) surface.
5. a kind of non-contact displacement transducer based on capacitive grating according to claim 3, it is characterised in that：It is described high-precision
It is magnetic grid displacement sensor to spend displacement sensor (4), and the quiet grid unit (1) further includes convenient for the magnetic grid displacement sensor point
Distinguish that the magnetic palisade film (15) of displacement, the magnetism palisade film (15) are covered in the repellel (11) surface.
6. a kind of non-contact displacement transducer based on capacitive grating according to claim 1, it is characterised in that：The moving grid
Unit (3) includes the emitter (31) for loading pumping signal, and the emitter (31) is arranged in grating structure, is set to described dynamic
The surface of grid unit (3) and opposite with the quiet grid unit (1).
7. a kind of non-contact displacement transducer based on capacitive grating according to claim 6, it is characterised in that：The moving grid
Unit (3) is printed circuit board, and the emitter (31) is printed in circuit board surface.
8. a kind of non-contact displacement transducer based on capacitive grating according to claim 1, it is characterised in that：The moving grid
Unit (3) further includes the receiving pole (32) for receiving inductive signal on the quiet grid unit (1), the receiving pole (32) and institute
State controller (5) electrical connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820256718.0U CN207881638U (en) | 2018-02-13 | 2018-02-13 | A kind of non-contact displacement transducer based on capacitive grating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820256718.0U CN207881638U (en) | 2018-02-13 | 2018-02-13 | A kind of non-contact displacement transducer based on capacitive grating |
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| Publication Number | Publication Date |
|---|---|
| CN207881638U true CN207881638U (en) | 2018-09-18 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201820256718.0U Expired - Fee Related CN207881638U (en) | 2018-02-13 | 2018-02-13 | A kind of non-contact displacement transducer based on capacitive grating |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108362206A (en) * | 2018-02-13 | 2018-08-03 | 江门市银象科技有限公司 | A kind of non-contact displacement transducer based on capacitive grating |
-
2018
- 2018-02-13 CN CN201820256718.0U patent/CN207881638U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108362206A (en) * | 2018-02-13 | 2018-08-03 | 江门市银象科技有限公司 | A kind of non-contact displacement transducer based on capacitive grating |
| CN108362206B (en) * | 2018-02-13 | 2024-04-09 | 哈工科讯(沈阳)工业技术研究院有限公司 | Non-contact displacement sensor based on capacitive grating |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180918 Termination date: 20210213 |